JPH0325481Y2 - - Google Patents
Info
- Publication number
- JPH0325481Y2 JPH0325481Y2 JP19505186U JP19505186U JPH0325481Y2 JP H0325481 Y2 JPH0325481 Y2 JP H0325481Y2 JP 19505186 U JP19505186 U JP 19505186U JP 19505186 U JP19505186 U JP 19505186U JP H0325481 Y2 JPH0325481 Y2 JP H0325481Y2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- port
- cylinder
- passage
- bypass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012530 fluid Substances 0.000 claims description 5
- 239000000428 dust Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000007257 malfunction Effects 0.000 description 2
- 210000002445 nipple Anatomy 0.000 description 2
- 240000002129 Malva sylvestris Species 0.000 description 1
- 235000006770 Malva sylvestris Nutrition 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 235000013351 cheese Nutrition 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
Landscapes
- Fluid-Driven Valves (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19505186U JPH0325481Y2 (et) | 1986-12-17 | 1986-12-17 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19505186U JPH0325481Y2 (et) | 1986-12-17 | 1986-12-17 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6399083U JPS6399083U (et) | 1988-06-27 |
JPH0325481Y2 true JPH0325481Y2 (et) | 1991-06-03 |
Family
ID=31152582
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19505186U Expired JPH0325481Y2 (et) | 1986-12-17 | 1986-12-17 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0325481Y2 (et) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020041565A (ja) * | 2018-09-07 | 2020-03-19 | 株式会社フジキン | アクチュエータ、バルブ、流体供給システム、および半導体製造装置 |
-
1986
- 1986-12-17 JP JP19505186U patent/JPH0325481Y2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020041565A (ja) * | 2018-09-07 | 2020-03-19 | 株式会社フジキン | アクチュエータ、バルブ、流体供給システム、および半導体製造装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS6399083U (et) | 1988-06-27 |
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