JPH0325481Y2 - - Google Patents

Info

Publication number
JPH0325481Y2
JPH0325481Y2 JP19505186U JP19505186U JPH0325481Y2 JP H0325481 Y2 JPH0325481 Y2 JP H0325481Y2 JP 19505186 U JP19505186 U JP 19505186U JP 19505186 U JP19505186 U JP 19505186U JP H0325481 Y2 JPH0325481 Y2 JP H0325481Y2
Authority
JP
Japan
Prior art keywords
valve
port
cylinder
passage
bypass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP19505186U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6399083U (el
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19505186U priority Critical patent/JPH0325481Y2/ja
Publication of JPS6399083U publication Critical patent/JPS6399083U/ja
Application granted granted Critical
Publication of JPH0325481Y2 publication Critical patent/JPH0325481Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Fluid-Driven Valves (AREA)
JP19505186U 1986-12-17 1986-12-17 Expired JPH0325481Y2 (el)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19505186U JPH0325481Y2 (el) 1986-12-17 1986-12-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19505186U JPH0325481Y2 (el) 1986-12-17 1986-12-17

Publications (2)

Publication Number Publication Date
JPS6399083U JPS6399083U (el) 1988-06-27
JPH0325481Y2 true JPH0325481Y2 (el) 1991-06-03

Family

ID=31152582

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19505186U Expired JPH0325481Y2 (el) 1986-12-17 1986-12-17

Country Status (1)

Country Link
JP (1) JPH0325481Y2 (el)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020041565A (ja) * 2018-09-07 2020-03-19 株式会社フジキン アクチュエータ、バルブ、流体供給システム、および半導体製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020041565A (ja) * 2018-09-07 2020-03-19 株式会社フジキン アクチュエータ、バルブ、流体供給システム、および半導体製造装置

Also Published As

Publication number Publication date
JPS6399083U (el) 1988-06-27

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