JPH0325157Y2 - - Google Patents
Info
- Publication number
- JPH0325157Y2 JPH0325157Y2 JP14780584U JP14780584U JPH0325157Y2 JP H0325157 Y2 JPH0325157 Y2 JP H0325157Y2 JP 14780584 U JP14780584 U JP 14780584U JP 14780584 U JP14780584 U JP 14780584U JP H0325157 Y2 JPH0325157 Y2 JP H0325157Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- movable shaft
- chamber
- seal
- gas chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 claims description 52
- 239000001307 helium Substances 0.000 claims description 11
- 229910052734 helium Inorganic materials 0.000 claims description 11
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 8
- 238000007789 sealing Methods 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 2
- 238000012360 testing method Methods 0.000 description 11
- 239000003566 sealing material Substances 0.000 description 7
- 230000009977 dual effect Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004154 testing of material Methods 0.000 description 1
Landscapes
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14780584U JPH0325157Y2 (enExample) | 1984-09-29 | 1984-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14780584U JPH0325157Y2 (enExample) | 1984-09-29 | 1984-09-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6163141U JPS6163141U (enExample) | 1986-04-28 |
| JPH0325157Y2 true JPH0325157Y2 (enExample) | 1991-05-31 |
Family
ID=30706032
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14780584U Expired JPH0325157Y2 (enExample) | 1984-09-29 | 1984-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0325157Y2 (enExample) |
-
1984
- 1984-09-29 JP JP14780584U patent/JPH0325157Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6163141U (enExample) | 1986-04-28 |
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