JPH0325120Y2 - - Google Patents
Info
- Publication number
- JPH0325120Y2 JPH0325120Y2 JP1983191003U JP19100383U JPH0325120Y2 JP H0325120 Y2 JPH0325120 Y2 JP H0325120Y2 JP 1983191003 U JP1983191003 U JP 1983191003U JP 19100383 U JP19100383 U JP 19100383U JP H0325120 Y2 JPH0325120 Y2 JP H0325120Y2
- Authority
- JP
- Japan
- Prior art keywords
- cold air
- diffusion furnace
- duct
- cooling
- scavenger
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000009792 diffusion process Methods 0.000 claims description 30
- 238000001816 cooling Methods 0.000 claims description 27
- 239000002516 radical scavenger Substances 0.000 claims description 24
- 239000004065 semiconductor Substances 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 claims description 5
- 239000007789 gas Substances 0.000 description 16
- 239000000203 mixture Substances 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000000498 cooling water Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Chimneys And Flues (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19100383U JPS6099532U (ja) | 1983-12-09 | 1983-12-09 | 拡散炉 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19100383U JPS6099532U (ja) | 1983-12-09 | 1983-12-09 | 拡散炉 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6099532U JPS6099532U (ja) | 1985-07-06 |
JPH0325120Y2 true JPH0325120Y2 (zh) | 1991-05-31 |
Family
ID=30411413
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19100383U Granted JPS6099532U (ja) | 1983-12-09 | 1983-12-09 | 拡散炉 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6099532U (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104110969A (zh) * | 2014-07-11 | 2014-10-22 | 深圳市华星光电技术有限公司 | 一种气体冷却设备及高温操作系统 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5170546A (ja) * | 1974-12-13 | 1976-06-18 | Shigezo Mori | Zoshitsureikyakuki |
JPS549059A (en) * | 1977-05-20 | 1979-01-23 | Sulzer Ag | Combustion deviceeespecially* refuse furnace |
-
1983
- 1983-12-09 JP JP19100383U patent/JPS6099532U/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5170546A (ja) * | 1974-12-13 | 1976-06-18 | Shigezo Mori | Zoshitsureikyakuki |
JPS549059A (en) * | 1977-05-20 | 1979-01-23 | Sulzer Ag | Combustion deviceeespecially* refuse furnace |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104110969A (zh) * | 2014-07-11 | 2014-10-22 | 深圳市华星光电技术有限公司 | 一种气体冷却设备及高温操作系统 |
CN104110969B (zh) * | 2014-07-11 | 2016-03-30 | 深圳市华星光电技术有限公司 | 一种气体冷却设备及高温操作系统 |
Also Published As
Publication number | Publication date |
---|---|
JPS6099532U (ja) | 1985-07-06 |
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