JPH03249157A - Method for vacuum heat treatment of active metal - Google Patents

Method for vacuum heat treatment of active metal

Info

Publication number
JPH03249157A
JPH03249157A JP4444690A JP4444690A JPH03249157A JP H03249157 A JPH03249157 A JP H03249157A JP 4444690 A JP4444690 A JP 4444690A JP 4444690 A JP4444690 A JP 4444690A JP H03249157 A JPH03249157 A JP H03249157A
Authority
JP
Japan
Prior art keywords
heat
active metal
heat treatment
heat insulating
treated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4444690A
Other languages
Japanese (ja)
Inventor
Yoshinobu Yoshikawa
佳伸 吉川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP4444690A priority Critical patent/JPH03249157A/en
Publication of JPH03249157A publication Critical patent/JPH03249157A/en
Pending legal-status Critical Current

Links

Landscapes

  • Tunnel Furnaces (AREA)
  • Furnace Details (AREA)

Abstract

PURPOSE:To prevent the sticking of scales on the surface of an active metal by providing heat insulating boards between the active metal and a heater and delaying the temp. rising in the active metal compared to that in a furnace wall face. CONSTITUTION:The inside of a vacuum chamber 7 is provided with a heat insulating material 1, a heater 2, a heat insulating board 5a and a thermometer 8. One side of a truck 3 conveying an active metal as an object to be heat- treated is provided with a heat insulating board 5b, which is integrated with the heat insulating board 5a to protect the object 6 to be heat-treated. At the time of vacuum heat treatment, by the presence of the heat insulating boards 5a and 5b, the point of time at which outgas is generated from a furnace wall is accelerated compared to the point of time at which the temp. of the object 6 to be heat-treated rises. Because the generated outgas is immediately exhausted from a vacuum pump 4, there occurs no formation of a film on the surface of the object 6 to be heat-treated caused by its reaction with the outgas.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は活性金属の真空熱処理方法に関し、特にジルコ
ニウム、チタン等の活性金属製製品の真空熱処理に有利
に適用される同方法に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for vacuum heat treatment of active metals, and more particularly to the same method that is advantageously applied to vacuum heat treatment of products made of active metals such as zirconium and titanium.

〔従来の技術〕[Conventional technology]

従来のバッチ式真空熱処理炉を、本発明方法を説明する
ための図である第1図、第2図を借りて説明する。第1
図はその断面図、第2!!lは第1図のA−A矢視断面
図である。図において、1は断熱材、2はヒータ、3は
台車、4は真空ポンプ、6は被熱処理物(例えばZr、
Ti)、7は真空チャンバ、8は温度計である。但し、
従来のバッチ式真空熱処理装置には防熱板5(5a。
A conventional batch type vacuum heat treatment furnace will be explained with reference to FIGS. 1 and 2, which are diagrams for explaining the method of the present invention. 1st
The figure is a cross-sectional view, part 2! ! 1 is a sectional view taken along the line A-A in FIG. 1; In the figure, 1 is a heat insulating material, 2 is a heater, 3 is a trolley, 4 is a vacuum pump, and 6 is a material to be heat treated (for example, Zr,
7 is a vacuum chamber, and 8 is a thermometer. however,
A conventional batch type vacuum heat treatment apparatus includes a heat shield plate 5 (5a).

5b)は存在していない。5b) does not exist.

このような構造の真空熱処理炉ではジルコニウムやチタ
ンのような活性金属製品においては真空熱処理と言えど
も製品表面に強固な酸化スケールなどの皮膜がついてし
まい除去することが困難である。
In a vacuum heat treatment furnace having such a structure, active metal products such as zirconium and titanium are coated with a strong film of oxide scale on the surface of the product, which is difficult to remove even though the product is subjected to vacuum heat treatment.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

ジルコニウムやチタンなどの活性金属は200℃以上に
加熱されると周辺に微量でも酸素あるいは窒素ガスが存
在するとこれらを吸収しきわめて強固なスケールを表面
上に付着してしまい問題となる。
When active metals such as zirconium and titanium are heated to 200° C. or higher, if even a trace amount of oxygen or nitrogen gas is present in the vicinity, they will absorb these gases and form extremely strong scales on their surfaces, creating a problem.

一方、通常の真空熱処理では真空中で熱処理するためほ
とんど酸素や窒素ガスは存在しないが、製品が加熱され
る過程で炉壁がある一定の温度になると微量のアウトガ
ス(酸素、窒素等)を発生する。このとき製品も200
℃以上にあがっているためこのアウトガスを吸収しスケ
ールがついてしまう。
On the other hand, in normal vacuum heat treatment, there is almost no oxygen or nitrogen gas because the heat treatment is carried out in a vacuum, but when the furnace wall reaches a certain temperature during the process of heating the product, a small amount of outgas (oxygen, nitrogen, etc.) is generated. do. At this time, the product also has 200
Since the temperature is above ℃, this outgas is absorbed and scale is formed.

本発明は上記技術水準に鑑み、活性金属を真空熱処理す
るに当って、炉壁よりのアウトガスによって活性金属表
面にスケールが付着しない方法を提供しようとするもの
である。
In view of the above-mentioned state of the art, the present invention aims to provide a method in which scale does not adhere to the surface of the active metal due to outgas from the furnace wall when performing vacuum heat treatment on the active metal.

本発明は上記技術的課題を解決するために鋭意研究の結
果、炉壁から発生するアウトガスの発生するタイミング
と真空加熱処理されるジルコニウム、チタンなどの製品
の温度が上昇するタイミングをずらすことにより上記課
題が解決できることを確認し、本発明を完成するに至っ
た。
As a result of intensive research to solve the above technical problems, the present invention has been developed by shifting the timing at which outgas is generated from the furnace wall and the timing at which the temperature of products such as zirconium and titanium subjected to vacuum heat treatment rises. It was confirmed that the problem could be solved, and the present invention was completed.

すなわち、本発明は活性金属を真空熱処理するに際し、
被熱処理物である活性金属とヒータとの間に防熱板を介
在させ、炉壁面の温度上昇よりも活性金属の温度上昇を
遅らせることを特徴とする活性金属の真空熱処理方法で
ある。
That is, in the present invention, when performing vacuum heat treatment on active metals,
This is a method for vacuum heat treatment of active metals, which is characterized in that a heat shield plate is interposed between the active metal to be heat treated and the heater, so that the temperature rise of the active metal is delayed more than the temperature rise of the furnace wall surface.

〔作用〕 真空熱処理炉内のヒータと被熱処理物である活性金属(
製品)の間に防熱板を設けることにより、ヒータからの
輻射熱は防熱板を加熱し、加熱された防熱板の二次輻射
によって被熱処理物の温度が上がるので、被熱処理物の
温度上昇速度がその分だけ遅れることになる。
[Operation] The heater in the vacuum heat treatment furnace and the active metal that is the object to be heat treated (
By providing a heat shield between the products), the radiant heat from the heater heats the heat shield, and the secondary radiation of the heated heat shield increases the temperature of the object to be heat treated, reducing the rate of temperature rise of the object. You will be delayed by that amount.

方、炉壁はヒータの輻射熱を直接受けるので、すぐに温
度が上がり約150°〜250゜に達しアウトガスを発
生させることができる。
On the other hand, since the furnace wall directly receives the radiant heat from the heater, the temperature quickly rises to about 150° to 250°, and outgas can be generated.

このガスは真空ポンプにより炉外に放出される。This gas is discharged outside the furnace by a vacuum pump.

したがって、アウトガスの発生後に被熱処理物の温度が
上がることになりスケールのない熱処理を行なうことが
できる。
Therefore, the temperature of the object to be heat-treated increases after outgas is generated, so that scale-free heat treatment can be performed.

〔実施例〕〔Example〕

以下、本発明を第1図、第2図によって説明する。 The present invention will be explained below with reference to FIGS. 1 and 2.

真空チャンバ7内には断熱材1、加熱用のヒータ2、防
熱板5a及び炉内温度計測用の温度計8が設けられてい
る。又、真空チャンバ7内を真空引きする真空ポンプ4
が外部に備えられている。
Inside the vacuum chamber 7, a heat insulating material 1, a heater 2 for heating, a heat shield plate 5a, and a thermometer 8 for measuring the temperature inside the furnace are provided. Also, a vacuum pump 4 that evacuates the inside of the vacuum chamber 7.
is provided externally.

被熱処理物6を搬送する台車3には、その−辺に防熱板
5bが設けられ、前記防熱板5aと一体となり被熱処理
物6を保護するようになっている。
A heat insulating plate 5b is provided on the negative side of the trolley 3 for transporting the object 6 to be heat treated, and the heat insulating plate 5b is integrated with the heat insulating plate 5a to protect the object 6 to be heat treated.

上記構成の真空熱処理炉中で活性金属(製品)である被
熱処理物6を真空加熱処理することにより、防熱板5a
、5bの存在により、炉壁からのアウトガスの発生時点
が被熱処理物6の昇温時点より速いので、炉壁から発生
したアウトガスは直ちに真空ポンプ4により外部に排出
されるので、被熱処理物6がアウトガスと反応して表面
に皮膜を形成されることはない。
By subjecting the heat treatment object 6, which is an active metal (product), to vacuum heat treatment in the vacuum heat treatment furnace configured as described above, the heat shield plate 5a
, 5b, the time point at which outgas is generated from the furnace wall is earlier than the time point at which the temperature of the object to be heat treated 6 is raised.The outgas generated from the furnace wall is immediately discharged to the outside by the vacuum pump 4. does not react with outgas to form a film on the surface.

〔発明の効果〕〔Effect of the invention〕

従来のバッチ式真空熱処理炉に防熱板を設けることでス
ケールの全く付着しない活性金属(製品)の熱処理が可
能となる。
By providing a heat shield to a conventional batch-type vacuum heat treatment furnace, it becomes possible to heat treat active metals (products) with no scale adhesion.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例で使用した真空熱処理炉の正
面断面図、第2図は第1図のA−A矢視側面断面図であ
る。
FIG. 1 is a front sectional view of a vacuum heat treatment furnace used in an embodiment of the present invention, and FIG. 2 is a side sectional view taken along the line A--A in FIG.

Claims (1)

【特許請求の範囲】[Claims]  活性金属を真空熱処理するに際し、被熱処理物である
活性金属とヒータとの間に防熱板を介在させ、炉壁面の
温度上昇よりも活性金属の温度上昇を遅らせることを特
徴とする活性金属の真空熱処理方法。
A vacuum for active metals characterized in that when performing vacuum heat treatment on active metals, a heat shield plate is interposed between the active metals to be heat treated and the heater, so that the temperature rise of the active metals is delayed more than the temperature rise of the furnace wall surface. Heat treatment method.
JP4444690A 1990-02-27 1990-02-27 Method for vacuum heat treatment of active metal Pending JPH03249157A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4444690A JPH03249157A (en) 1990-02-27 1990-02-27 Method for vacuum heat treatment of active metal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4444690A JPH03249157A (en) 1990-02-27 1990-02-27 Method for vacuum heat treatment of active metal

Publications (1)

Publication Number Publication Date
JPH03249157A true JPH03249157A (en) 1991-11-07

Family

ID=12691718

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4444690A Pending JPH03249157A (en) 1990-02-27 1990-02-27 Method for vacuum heat treatment of active metal

Country Status (1)

Country Link
JP (1) JPH03249157A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103045979A (en) * 2012-12-28 2013-04-17 河北省电力公司电力科学研究院 Method for preparing twin crystals in TA1 tissues

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103045979A (en) * 2012-12-28 2013-04-17 河北省电力公司电力科学研究院 Method for preparing twin crystals in TA1 tissues

Similar Documents

Publication Publication Date Title
JPS6456867A (en) Method for metallizing aln ceramic
JP4318504B2 (en) Deposition equipment substrate tray
JPH03249157A (en) Method for vacuum heat treatment of active metal
GB1101973A (en) Method of coating ferrous metal with molten aluminium or aluminium alloy
JPH07194965A (en) Method and apparatus for forming film
SU633932A1 (en) Method of gas nitriding of articles made of refractory metals
Rembges et al. Plasma(Ion) Carburizing, Applications and Experiences
JP2635265B2 (en) Rolling material heating method
JPH0679218A (en) Drying and baking device for belt-like coated body
JP3933734B2 (en) Deposition equipment
Putina Contact Titanizing of Steel 12 Kh 18 N 10 T by Thermal Diffusion
JPS63176422A (en) Heat treatment preventing oxidation decarburization
JPS52139373A (en) Treating method for compound semiconductor
GB1273191A (en) Method of cleaning and optionally annealing coiled metal foil
JPS582242A (en) Treatment of glass product
JPS6167919A (en) Substrate after-treatment device
JPH06249583A (en) Oxidizing method for deposit in vacuum furnace shell
JPS6431921A (en) Heating method
JPH0230440Y2 (en)
JPS6477829A (en) Manufacture of cathode-ray tube with reflex preventive film
JPS5677323A (en) Heat treatment method of tool steel
JPH03215936A (en) Semiconductor manufacturing device
Gonzalez Vacuum Heat Treatment
JPS5661132A (en) Heat treatment
JPH09171967A (en) Semiconductor manufacturing apparatus