JPH0324740A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPH0324740A
JPH0324740A JP16032989A JP16032989A JPH0324740A JP H0324740 A JPH0324740 A JP H0324740A JP 16032989 A JP16032989 A JP 16032989A JP 16032989 A JP16032989 A JP 16032989A JP H0324740 A JPH0324740 A JP H0324740A
Authority
JP
Japan
Prior art keywords
pattern
layer pattern
inner layer
pair chip
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16032989A
Other languages
Japanese (ja)
Inventor
Toshinao Kawashima
川島 利尚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP16032989A priority Critical patent/JPH0324740A/en
Publication of JPH0324740A publication Critical patent/JPH0324740A/en
Pending legal-status Critical Current

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  • Wire Bonding (AREA)

Abstract

PURPOSE:To realize a thin type by the amount of a pair chip thickness, and improve strength and reliability, by face-down-bonding and mounting a pair chip on an inner layer pattern of a mulilayered substrate. CONSTITUTION:A pair chip 1 is subjected to face down bonding on at least the inner layer pattern of a multilayered substrate 6, made to drop in the multilayer substrate 6, and mounted thereon. That is, a hole in which the pair chip 1 is dropped is made in a first layer substrate 7; an inner layer substratum 8 having a pattern 5 capable of connecting the pair chip 1 by using a gold bump 2 is stuck by using adhesive agent and the like; the first Layer pattern 4 and the inner layer pattern 6 are electrically connected by using through holes and the Iike; the inner pattern 5 is gold-plated. The pair chip 1 and the inner pattern 5 are electrically connected, and simultaneously the first layer pattern 4 is also electrically connected, which are packaged by using sealing material 3. Thereby a thin type device can be realized, and strength and reliability can be improved.

Description

【発明の詳細な説明】 [産業上の利用分野」 本発明は、多層基板にペアチップをフェイスダウンボン
ディングし実装する半導体装置に関する[発明の砥要コ 本発明は、多層基板にペアチップをフエイスダ[発明が
解決しようとする課題コ しかし、前述の従来技術ではペアチップが露出してしま
い、厚くなってしまうという問題点を有する。又、第2
図に示す様に封止剤が少量しか塗布できない為、強度的
、信頼性面がおどるという間題点を有する。そこで本発
明はこのような問題点を解決するもので、その目的とす
るところは薄型化でき.かつ、強度的、信頼性面で向上
のできる半導体装置を提供するところにある。
Detailed Description of the Invention [Field of Industrial Application] The present invention relates to a semiconductor device in which paired chips are face-down bonded and mounted on a multilayer board. However, the above-mentioned conventional technology has the problem that the paired chips are exposed and the chip becomes thick. Also, the second
As shown in the figure, since only a small amount of sealant can be applied, there are problems in terms of strength and reliability. The present invention is intended to solve these problems, and its purpose is to make it thinner. Another object of the present invention is to provide a semiconductor device that can be improved in terms of strength and reliability.

[課題を解決するための手段コ 本発明の半導体装置は3層基板以上の多層基板にペアチ
ップを7エイスダウンボンディングし実装する半導体装
置において、前記ベアチノプを少なくとも、前記多層基
板の内層パターン上にフェイスダウンボンディングし、
前記多層基板に前記ペアチップを落し込み実装されてい
ることを特徴とする。
[Means for Solving the Problems] The semiconductor device of the present invention is a semiconductor device in which paired chips are mounted by seven-eighth down bonding on a multilayer board having three or more layers, in which the bare chip is mounted face-to-face on an inner layer pattern of the multilayer board. down bonding,
It is characterized in that the paired chips are mounted on the multilayer board.

[実施例] 第1図は本発明の実施例における主要断面図である。第
1層目基材7Kペアチップ1を落し込むための穴をあけ
、前記ペアチップ1を金バンプ2により接続できうるパ
ターン5を有する。内層基材8を接着剤等で貼り合わせ
、スルーホール等により第1層目パターン4と内層パタ
ーン5を電気的に接続し、電解メッキにより、内層パタ
ーン5に金メッキ処理をおこなう。ペアチップ1を熱及
び超音波等により、金バンブ2と前記内層パターン5を
接続し、前記ペアチップ1と内層パターン5を電気的に
接続すると共に前記スルーホールにより第1層目パター
ン4とも電気的に接続し、封止剤5によりパッケージし
たフェイスダウンボンディング実装構造である。多層基
板60表面パターン4にペアチップ1を直接接続せず、
多層基板6の厚み内にペアチップ1を落し込んでしまう
ものである。
[Embodiment] FIG. 1 is a main sectional view in an embodiment of the present invention. The first layer base material 7K has a pattern 5 in which holes are made into which paired chips 1 can be inserted, and the paired chips 1 can be connected by gold bumps 2. The inner layer base material 8 is bonded together with an adhesive or the like, the first layer pattern 4 and the inner layer pattern 5 are electrically connected through a through hole or the like, and the inner layer pattern 5 is plated with gold by electrolytic plating. The pair chips 1 are connected to the gold bumps 2 and the inner layer pattern 5 by heat, ultrasonic waves, etc., and the pair chips 1 and the inner layer pattern 5 are electrically connected, and the first layer pattern 4 is also electrically connected to the pair chips 1 through the through holes. This is a face-down bonding mounting structure in which the components are connected and packaged with a sealant 5. Pair chip 1 is not directly connected to multilayer board 60 surface pattern 4,
The paired chips 1 are dropped into the thickness of the multilayer substrate 6.

[発明の効果コ 以上述べたように本発明によれば、前記多層基板の内層
パターンにペアチップを7エイスダウンボンディングし
実装することにより、本発明の半導体装置はペアチップ
の厚み分だけ薄型化が可能であるという効果を有する。
[Effects of the Invention] As described above, according to the present invention, the semiconductor device of the present invention can be made thinner by the thickness of the paired chips by 7-eight down bonding and mounting the paired chips on the inner layer pattern of the multilayer board. It has the effect that

また、ペアチップを基板内にうめ込んでしまう為、封止
剤が厚くでき強度的、信頼性面で向上するという効果を
有する。
Furthermore, since the paired chips are embedded in the substrate, the sealant can be made thicker, which has the effect of improving strength and reliability.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の半導体装置の一実施例を示す主要断面
図。 第2図は従来の半導体装置を示す主要断面図。 1・・・・・・・・・ペアチノプ 2・・・・・・・・・ペアチップ上に形成された金バン
プ3・・・・・・・・・封止剤 4・・・・・・・・・多j一基板の1層目パターン5・
・・・・・・・・多層基板の2層目パターン6・・・・
・・・・多層基板 7・・・・・・・・・多層基板の第1鳩基材8・・・・
・・・・・多層基板の第2層基材以上
FIG. 1 is a main sectional view showing an embodiment of the semiconductor device of the present invention. FIG. 2 is a main sectional view showing a conventional semiconductor device. 1...Pair chip 2...Gold bumps formed on the pair chip 3...Sealant 4...・1st layer pattern 5 of multi-layer board 5・
......Second layer pattern 6 of multilayer board...
...Multilayer board 7...First pigeon base material 8 of multilayer board...
...Second layer base material of multilayer board or higher

Claims (1)

【特許請求の範囲】[Claims] 3層基板以上の多層基板にペアチップをフェイスダウン
ボンディングし実装する半導体装置において、前記ペア
チップを少なくとも前記多層基板の内層パターン上にフ
ェイスダウンボンディングし実装されていることを特徴
とする半導体装置。
A semiconductor device in which paired chips are face-down bonded and mounted on a multilayer board having three or more layers, characterized in that the paired chips are face-down bonded and mounted on at least an inner layer pattern of the multilayer board.
JP16032989A 1989-06-22 1989-06-22 Semiconductor device Pending JPH0324740A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16032989A JPH0324740A (en) 1989-06-22 1989-06-22 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16032989A JPH0324740A (en) 1989-06-22 1989-06-22 Semiconductor device

Publications (1)

Publication Number Publication Date
JPH0324740A true JPH0324740A (en) 1991-02-01

Family

ID=15712611

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16032989A Pending JPH0324740A (en) 1989-06-22 1989-06-22 Semiconductor device

Country Status (1)

Country Link
JP (1) JPH0324740A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6442043B1 (en) 1999-08-11 2002-08-27 Fujikura Limited Chip assembly module of bump connection type using a multi-layer printed circuit substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6442043B1 (en) 1999-08-11 2002-08-27 Fujikura Limited Chip assembly module of bump connection type using a multi-layer printed circuit substrate

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