JPH03241509A - Thin-film magnetic head and production thereof - Google Patents

Abstract

PURPOSE:To provide the thin-film magnetic head which has high heat resistance and good soft magnetic characteristics as well as improved recording and reproducing characteristics and the production thereof by constituting cores of materials consisting of different compsns. using a high saturation magnetic flux density material for either of the upper and lower magnetic cores forming a gap. CONSTITUTION:The leakage of a magnetic flux is liable to arise in the thin-film magnetic head as the sectional area decreases near the magnetic gap. The improvement in recording and reproducing efficiency is, therefore, resulted by the improved saturation magnetic flux density of the magnetic core. The material (1.2 to 1.4T saturation magnetic flux density), such as Co, Ta or Zr, having the relatively high heat resistance is adopted only for the upper magnetic core 2 of the thin-film magnetic head forming the gap 6 by the two upper and lower magnetic cores 2, 1 consisting of the metallic thin films formed on a nonmagnetic substrate 4. The material which has the saturation magnetic flux density lower than the saturation magnetic flux density of the material used for the upper magnetic core 2 but has the good heat resistance and sufficiently withstands the heat history during the process is used for the lower magnetic core 1. The recording and reproducing efficiency is thereby improved over the entire part of the head.

Description

[Detailed Description of the Invention] [Recommended Field of Use] The present invention provides video tape V, -da (hereinafter referred to as 77''t4
The present invention is concerned with the family of magnetic heads, and is concerned with a thin film magnetic head and its H4 manufacturing method, which is also suitable for magnetic head reproduction.

[Traditional skill hire]

An example of a manufacturing method for a conventional 04nttb magnetic head (
May 11, 1985) P41-P49, published by Mr. Kitemu et al., in an edition titled ``Hard disk jjtifUll film - Qihe 1 de''. In these conventional low-quality perm-dos, upper and lower magnetic cores & C same-sex paid perm a were used.

In such a magnetic head, in order to make a custom magnetic core, in order to give the desired instantaneous versatility at the Kue/'--Ko-Yang'R eave step, the blood circle judgment is made in the direction of propagation. A field was applied in the direct direction, and the salt of Nakajima was generated.

[The invention attempts to determine M1] In order to make the -m negative of a VTR, the coercive force of the rotating medium is generally increased. In response to this, it has become necessary for magnetic heads to improve the *, tgmllm quality of the magnetic core.

In the conventional example described above, permalloy (saturation magnetic flux density 1.2 T) is used as the magnetic material, but permalloy has a high resistance to J.
#It cannot be said to be a regular charge because its wear resistance is inferior to other materials.

For this reason, general KC
6A amorphous is used for a fee.

However, the heat resistance of amorphous materials is inferior to that of permalloy, and the heat resistance decreases as the saturation magnetic flux density increases. Then, the saturation magnetic flux @tomo 1.At over OT, the resistance # & warm armpit is 48
For charges below Ω℃, some may not be able to withstand the heat history during the process and may crystallize.

It had not been used.

On the other hand, according to Keisuke Joki, in order to perform heat treatment during the wafer 1Q process to give the magnetic core a unique appearance,
It is necessary to meet heat escape conditions.

as a constraining condition.

41) To provide a temperature that improves the properties of the 11i1i core.

t2) Minimize the non-aqueous expansion and mutual expansion of the magnetic core and coil so as not to deteriorate the head characteristics. or 1 layer 1i
No deformation such as separation or cracking of each layer occurs.

There are 02. (Under the conditions of 1J, it is generally better to set the heat sensation@temperature to a high temperature, and for buttons, there is a tendency that a lower temperature is better.
It is common to choose a temperature of 5ΩΩ℃ or lower.

Therefore, as a core magnetic material, the heat release @T is higher than 500℃! The material in which the degree of tL was accumulated was unreasonable.

The ninth aspect of the present invention is to use thin JR as the core material, which has high heat resistance, good soft magnetic properties, and high saturation magnetic flux density. An object of the present invention is to provide a thin film magnetic head with good recording and reproducing properties and a method thereof.

[Means for solving problem a]

In order to achieve the above objective, in the present invention, a highly saturated 6-bundle density material was selected for either the upper or lower core based on the following criteria. Furthermore, recording and reproducing efficiency can be improved by fixing the traveling direction by using a core arranged with a high saturation magnetic flux @ skin material group.

(1) Lower core IHc, as a material that can obtain good II km fie properties by circulating thermal sensation @ at high temperatures, and its soft sulfur properties are not impaired even by the heat a history of the same.
Select nitrided CaNbZr and other Co-based amorphous oxides (or Sendus), Fg-5i-based iron M.

) In the upper core, Ca is used as a material that deteriorates in properties due to crystallization when subjected to thermal history during the process for a long time, but does not deteriorate even if subjected to low temperature or time.
Zr (Mu, Nb, Ta, iij', Y
).

Select a Co-based amorphous alloy such as

In addition, as a manufacturing method, we selected the materials for the upper and lower cores so that the characteristics of the lower magnetic core would not deteriorate during core formation, and also set the heat treatment temperature of the upper magnetic core to the heat escape temperature. But the heat treatment of the lower part - Qi core is F! Set so that it exceeds L @ [Action] # Area of magnetic core S # Coil turn tXN , :y
Il'il&&, core throughput 1iB''4μ, gap cross-sectional area Sl.

- Abbreviation i9. j and the gap 5j, the recording magnetic field Hp generated in the gap iil is expressed by the following equation.

In the magnetic core, μ or 22! - It is sufficient if the ratio is large. μ is the saturation magnetization M of the − air core.

Magnetic field H generated by the coil.

Since the core is exposed to a saturated magnetic field H0, increasing Ms t' increases the recording field B and improves the recording efficiency.

However, when the cross-sectional area in the magnetic core is small and one flux is saturated, the magnetic flux does not reach the tip of the gap and magnetic flux leakage occurs between the magnetic cores.

In particular, in the magnetic iB magnetic head, the cross-sectional area becomes small near the magnetic gap, which causes leakage of magnetic flux.

Therefore, by increasing the saturation magnetic flux density in some or all of the magnetic cores, the recording and reproducing efficiency in self-recording and reproducing is improved.

In thin-film magnetic heads, the heat resistance temperature of the head as a whole is low as mentioned above, so materials that require heat treatment temperatures of 500°C or higher to obtain good soft tear characteristics (such as sendust) cannot be used with other materials. A review will be necessary.

However, by using this magnetic material only for the lower magnetic core, the leakage of % magnetic flux is reduced, and it has superior soft magnetic properties that allow heat treatment to be performed without being constrained by other constituent materials. be able to.

On the other hand, the saturation magnetic flux density is 1.0T in the SCO-based amorphous alloy.
There is more than that. However, it has low heat resistance.

Experiencing high-temperature, thin-film side nib a for a long time may cause crystallization or deterioration of soft magnetic properties.

Therefore, in order to reduce the process time after good formation,
CO# Tc, which has relatively high heat resistance, is used only in the above magnetic core.
L#z, etc. materials (saturation magnetic flux density 1.2T~1.aT
) The lower magnetic core is made of a material that has a lower saturation magnetic flux density than the material used for the upper magnetic core, but has good heat resistance and can withstand the heat history during the process, making it possible to record and play as a whole head. Efficiency can be increased as above.

[Laughter example]

Below, the uninvented joke will be continued with drawings.

Kumi Mf! i1> Figure 1 shows unexploded F! FIG. 3 is a perspective view showing an example of a thin film magnetic hecdometry according to A. Figures 2 and 5 are diagrams showing the subsequent development of an afL mill of a thin film magnetic head according to an embodiment of the present invention.

In the first core, 1 is a lower magnetic core, 2 is an upper magnetic core, 4 is a non-magnetic substrate, 5 is a thin film coil, 6 is a magnetic gear 1, and the magnetic flux transmission in the magnetic core is S. Set it on the arrow.

The lower SiB magnetic core 1 and the upper &i magnetic core are made of CoNb Zr 8, which is one of the CO-based amorphous alloys, and are made of DC
%Co by the same magnetone sputtering method.

It was formed using a #b15 Zrs alloy target. The lower magnetic core 1 on the buttock is formed of a nitride layer formed by mixing 10 to 100% hydrogen gas into argon gas, which is a normal sputtering gas. Table 1 shows the characteristics of the two-dimensional magnetic film formed at this time. Nitriding +!
The 1l171Iii+ property has a large coercive force and is unsuitable as a magnetic core material.

Below, the method for forming the lower core 1 in this practical example will be explained in the second example.
Bladder man with diagram. In the 2nd coring, ■ indicates the shape of an expanded wave during in-situ heat treatment, and ■ indicates the lower air core portion 12 embedded in the base IF5 after removing excess magnetic dust by processing.

First, a base film (-not shown) for increasing the applied force is formed on the non-magnetic substrate 4 which has been grooved, and then a 50P magnetic film 11 is formed. In order to improve the toughness, the following heat treatment is performed. That is, as a first step, #J'FH1■ parallel to the normal direction is applied to the sliding surface of the grand body, and the temperature is increased at 600°C.
Heat treatment for minutes. As the second stage, a magnetic field in the direction perpendicular to the track was applied in the direction of the 6-bundle transmission, and the temperature was kept at 550°C for 50 minutes to l.
FE & threshold heat treated knife. The heat treatment described above was performed as follows.
A percentage of about 000 is obtained. Also, the taste magnetism is 0.4
A good timing of 01 or less was obtained.

&1, magnetic bone properties of the a-core material, and of course, the film formation method is the RF sputtering method DC (t
(or RF) In addition to magneto vaporization, nitrogen gas is mixed using the ion beam vaporization method in which two gases are introduced during electron beam vaporization.

Similar results can be obtained with other sputtering methods.

Furthermore, if the magnetic force is not reduced by heat treatment,
It is also necessary to insert an interlayer material to create a multilayer structure so as to divide the columnar structure that occurs when a Co 2 -based non-alfX alloy is made into two. In addition to the above-mentioned valve chamber membrane, interlayer materials include magnetic materials such as permalloy thin g Co, Ih, etc.
By appropriately translating the non-magnetic materials d # No, Sin, etc., the soft magnetic time characteristics can be improved.

Of course, even if a soft magnetic material such as Sendant, which has heat resistance up to about 600°C in lIi saturation and flux density, is used as the magnetic group for the magnetic core 1, the same effect as in this example will not be obtained. Needless to say, it can be done.

FIG. S shows how to use the thin film magnetic head according to this embodiment.

After forming the lower v magnetic core 1 ((i)), 5LO
A thin film coil 5 is formed by vaporization or the like using a non-magnetic low resistance material such as Cb via a non-magnetic insulating layer 61 such as No. 1).
Furthermore, an interlayer insulating layer 62 is made of MIO, S-poor O8-based (7-orsteite steatite) non-magnetic ceramic. Formed with a thickness of 2Ωμ (■).

As mentioned above, the upper magnetic core 2 has C'o -Nb -
Use Zr's non-7 & Teigopo. J: The core 2 is formed into the desired shape by 7 otolithography, and then an ial film (not shown) is formed using a forsterite ceramic material. Furthermore, considering the sliding column, a protective plate (not shown) is bonded to the protective plate by glass bonding. At this time, the temporal ditto of the upper magnetic core 2 and the stable %
temperature at 450°C for 50 minutes, and
Heat treatment was performed by applying a heat treatment in parallel to the perpendicular direction within the magnetic flux propagation direction KrkJ (■).

Furthermore, tip cuff 1. Assembles and outperforms the /Ill magnetic head.

Figure 4 shows the rice feeding measured by the reproduction output of the obtained magnetic head. No. 48 is a tape with magnetic force of 1500 ohy 0-, relative velocity 5, 887 JF g
This is the result of measuring the playback output by self-recording and playback in C. The present example is shown in (3). In the conventional example (cL), a magnetic head was used in which the lower saline cocoa material was made of the same material as the upper SiB core material used this time.

According to this, the improved saturation magnetic flux density improves the low frequency range (I M
Hz), the output was improved by 1.8dB.

However, during recording, the traveling direction was fixed so that the lower magnetic core side was the protruding tooth. The vehicle was run in the same direction during playback.

According to this example, the following effects were further improved. In other words, scoop up the target.

By introducing methane gas, the magnetic flux density was improved from 0.75 to 1.0'r@g. Furthermore, the abrasion resistance increases due to the increased weight of temporary storage due to electrification.

Therefore, as shown in Figure A45 (α), if the P[oxide film α is used only in a part of the upper SiB magnetic core 2 or the lower magnetic core 1 (2(!, 1α)), the magnetic flux of 1 horizontally per unit cross section is W!
It is possible to improve the degree of wear and improve the wear life.

Example 2 As in the previous example, Table 2 shows the characteristics of the magnetic layers used for the lower and upper SMi cores.

Table 2. For the lower magnetic core, heat treatment can be easily carried out at 450°C by applying a 4IB field to the magnetic flux propagation path at all in-plane mK and heat-treating for 50 minutes to obtain a relative permeability ≧4000 (
The excellent characteristics of I MHz) can be obtained.

For the upper magnetic core, 400℃50 at 81ht
By heating the 12-step MAJ at 550° C. for 1 hour in the second stage, good characteristics were obtained and the characteristics of the lower core were not deteriorated.

The configuration of the magnetic head is the same as that of the above embodiment, and the manufacturing method is also similar to that of the above embodiment.The 4th section shows the results of measurement of the reproduction output using the thin pij&m head obtained by the above method. .

In FIG. 4, (b) (■) shows the output results of the head obtained in this excitation example. Saturation magnetic flux VPj of head magnetic core
Due to the above, the low frequency output was increased by 5 dB compared to the conventional example.

Note that the measurements were performed under the same conditions as in the previous example.

〔Effect of the invention〕

According to the present invention, since it is possible to use a Co'-based amorphous material (t) which is more familiar than permalloy in terms of wear resistance, a high saturation magnetic flux @ 2M material can be used as the core material, so recording and reproducing are possible. The characteristics are the same as those of large m.

[Brief explanation of drawings]

FIG. 1 is a close-up view of a thin film magnetic head according to an embodiment of the present invention. FIG. 4 is a diagram illustrating a method of manufacturing a thin T&magnetic hekkudo according to an embodiment of the present invention, FIG. It is a diagram showing another embodiment of the invention. 1. Lower W magnetic core 2- Upper s.
m Magnetic core - non-magnetic substrate 5... Thin film coil 6 - (fi air gap 7... Medium sliding surface gruel 1 Figure 1 - "?" Train T 5--Ichikoku rtJ Iten #2 direction 4-4 #magnetic a low class 7-medium Jn Burma 5-1〉lip l change l ino L・G--ichifumu 3℃ 10+γ)゛

Claims (1)

[Claims] 1. A thin film magnetic head in which two upper and lower magnetic cores made of metal thin films and a thin film coil are formed on a non-magnetic substrate, and a gap is formed by the upper and lower magnetic cores. A thin film magnetic head characterized in that a magnetic core and a lower magnetic core are made of materials having a certain composition or materials having different constituent elements. 2. A thin film magnetic head according to claim 1, wherein at least one of the two cores is made of a magnetic thin film having a saturation magnetic flux density of 1.0 T or more. 3. A thin film magnetic head according to claim 2, wherein the magnetic thin film is made of a nitride of a Co-based amorphous alloy. 4. The Co-based amorphous alloy nitride according to claim 3 is sputtered in a space in which 10 to 100% nitrogen gas and the remaining inert sputtering gas such as Algol are mixed or simultaneously introduced as a sputtering gas. A method of manufacturing a thin film magnetic head, which comprises forming a thin film magnetic head and then performing heat treatment at a high temperature in the range of 450 to 650°C. 5. In claim 1, one of the materials constituting the two magnetic cores is Co-Ta-Zr and the other is Co-Ta.
A thin film magnetic head characterized in that -Nb is used. 6. In a thin film magnetic head comprising two magnetic cores made of thin metal films, a thin film coil, and a magnetic gap made of a nonmagnetic metal or a nonmagnetic insulating film, the substrate surface of one of the magnetic cores. A part or all of the vicinity and a part or all of the other magnetic core in contact with the non-magnetic metal or the non-magnetic insulating film are composed of a nitride of a Co-based amorphous alloy. Thin film magnetic head.