JPH03240503A - Method for laminating green sheet - Google Patents

Abstract

PURPOSE:To heighten the positional accuracy of lamination by a method wherein positioning holes are simultaneously formed with via holes. CONSTITUTION:A green sheet 36 is sucked one by one with the carrying arm 35 of a carrying device 12 and carried through a space between a X-stage 20 and television cameras 30 - 33 onto the X-stage 20. The green sheet 36, which is carried first, is placed on the X-stage 20 and vacuum-sucked with a groove 25. The green sheet 36, which is carried next, is automatically positioned by a table device and placed on the green sheet 36 placed first and temporarily fixed to each other. The positioning holes 38 - 41 of the green sheet 36 carried onto the X-stage 20 are read with the respective television cameras 30 - 33. Boring action is performed by actuating the predetermined air cylinder mechanism through computer control so as to punch the positioning holes 38 - 41 simultaneously with via holes 45 in the boring process of the via holes 45. Thus, the positional accuracy of the positioning hole can be enhanced and consequently the positional accuracy of the lamination of green sheet can be improved.

Description

[Detailed Description of the Invention] [Outline] To manufacture ceramic printed wiring boards [Regarding the green sheet lamination method in the process of frh layering green sheets in the culm, the object is to improve the lamination position accuracy. Then, form a via hole in the green sheet - [Form a positioning hole in conjunction with the via hole in the culm, and position the green sheet by carving it into the green sheet stacked just before, using the positioning hole as a reference. The structure is such that they are stacked together. .

(Industrial Application Field) The present invention relates to a method for laminating green sheets in the step of layering green seal 1- in the steps of manufacturing ceramic pudding 1 to wiring boards.

[Conventional technology]

Conventionally, the green sheets have a configuration in which positioning holes are provided in each corner, and the green sheets are stacked by fitting the holes into positioning pins on the mold.

[Problem to be solved by the invention]

The green sheet is relatively soft, and when fitting the hole into the pin, the green sheet around the hole may tear.

In this case, (well, the level regulation of the green sheet becomes uncertain, positional deviation occurs between the layers, and the 1+tis positional accuracy decreases.

Therefore, it has been desired to realize a lamination method that does not use holes or pins.

An object of the present invention is to provide a green sheet stacking method that enables improvement in stacking position accuracy.

(Means for Solving the Problem) The present invention forms a positioning hole together with the via hole in the process of forming the via hole in the green sheet, and the green sheet is set using the positioning hole as a reference.
This is a configuration in which the green sheets are positioned and stacked relative to the green sheets stacked immediately before.

[Effect]

The positioning hole is formed together with the via hole, and the positioning accuracy of the positioning hole on the green sheet is high.

This makes it possible to stack the green sheets at a good position of 8 degrees.

〔Example〕

FIG. 1 shows a schematic diagram of an apparatus using the method of the present invention.

In the same figure, a control unit 10 controls a conveyance device 12 via a mechanical control unit 11, and controls green sea]・13 from 7 to pull device 1.
Transport it up to 4. The television camera 15 reads the positioning mark on the green sheet 13, and this read information is supplied to the control unit 10 via the image processing unit 16, and the control unit controls the table device 14 based on this read information. The green sheet 17 and the green sheet 13 fixed to each other are positioned.

The green sheets 13 and 17 have vias and fine patterns formed thereon, and have predetermined external dimensions.

FIG. 2 shows a perspective view of an embodiment of the mechanism of the method of the present invention.

In the figure, the table device 14 includes an X stage 20°, a Y stage 21. Consisting of a θ stage 22, the θ stage 22
The X stage 20 and Y stage 2 are controlled by the built-in motor.
The motor 23 rotates the Y stage 21 in the direction of arrow Y with the X stage 20 placed thereon.
The stage 201a is moved in the direction of the arrow X by the motor 24 of the X stage 201a. A groove 25 for vacuum suction is provided on the X stage 20.

Television cameras 30, 31, 32, 33 are provided above the four corners of the X stage 20 (in the direction of arrow Z).

The conveying arm 35 of the conveying device 12 picks up the green sheets 36 one by one and transfers them to the X stage 20 and the television camera 30.
. The green sheet 36 conveyed first is placed on the X stage 20 and vacuum-adsorbed by the groove 25, and the green sheet 36 conveyed next is placed on the green sheet 36 after automatic positioning by the table device and temporarily Fixed.

Positioning holes 38 to 41, which will be described below, in the green sheet 36 conveyed to the top of the X stage 20 are read by television cameras 30 to 33, respectively.

In addition, when the green sheet 36 is conveyed, the television camera 30
33 are in the way, the television cameras 30 to 33 are mounted and rotated by shafts 42a to 42d.

As shown in FIG. 5, the green sheet 36 has many pie holes 45 in the product area, and positioning holes 38, 39, 40°41 as positioning marks at four corners has.

FIG. 6 shows a drilling device 60 for forming the pie hole 45. As shown in FIG.

The punching device 60 includes an upper die 61 and a lower die 62, and a large number of bonders 62-t to 6 in the die 61.
2-n lfi aligned and incorporated. Each bond 6
2-1・"62-nf' F5 is equipped with a cylinder machine] Name 6
To 3-63-TI is installation-j.

Drilling work ('I = 1) A predetermined air cylinder mechanism is activated by computer control, the corresponding pump is ejected, and in this state, the upper mold 61 moves downward, and the green sheet is moved downward from 1 to 61. This is done by sandwiching the green sheet between the mold 62 and the protruding punch punching the green sheet.

Here (to the pump 62-1, the punches G2-1 and 62nL on both ends of the 62TI, the bonder for punching and forming the positioning hole 38-41).
Yes, it is installed in the mold 61 along with other bonders D. The green seals 1 to 3G are perforated using the perforating device 60 having the above configuration.

Positioning holes 38-41 are via holes/'15
It is formed by simultaneously punching out the pie 7 balls 45 at the T culm for drilling the hole.

When forming the positioning hole in a process different from the process of forming the pie hole 45, it is necessary to expect sufficiently high positional accuracy of the positioning hole due to errors in the green sheet device and the cellar 1, etc. It is difficult. However, as described above, by forming the pie 17 holes 45 at the same time, compared to the case where they are formed in a separate process as described above,
Positioning accuracy of positioning ports 38 to 42 (higher).

FIG. 3 shows a flowchart of an embodiment of the method of the present invention.

In the same figure, first, the A☆ direct determination marks 38 to 4 on the green sheet 36 fixed to the X stage 20 that was conveyed first.
1 are read by TV cameras 30 to 33, respectively, and FIG. 4 (A
), the center of gravity Gn of each positioning pole 38 to 41
(t is 1, 2, 3./i) (Step 50)
.

Next, as shown in FIG. 4(B), the center of gravity G of the quadrangle formed by the centers of gravity 01 to G4. and calculate the intersection angle θ of the diagonals (
Step 51).

After this, the positioning 7-ri 38...41 of the next conveyed green sheet 36 is read, and the respective centers of gravity G1-,
G), G3-. Calculate G4-Stetsu, 752
), calculate the center of gravity G o − of the rectangle formed by this center of gravity 01″・～・G4− and the intersection angle θ− of the diagonal lines (
SARTSUB53).

Historically, as shown in Figure 4 (C), x table 20 and Y
Move Azol 21 to center of gravity G.

The center of gravity G. (step 54). Also, as shown in Figure 4 (I), by aligning the bisector 2' of the intersection angle θ' with the bisector of the intersection angle θ, we can find the intersection angles θ- and θ! l
(Subset 55)

Thereafter, the conveyed green sheet 36 is placed on the previously fixed green sheet 36, and both are temporarily fixed with adhesive (step 5G).

The above steps 52 to 56 are repeatedly executed until it is determined in step 57 that the lamination is completed.

Of course, the green sheets 36 are welded together by the heating and pressurizing treatment after lamination described above, and a green sheet M4 layered body is completed.

Here, the positioning balls 38 to 41 are connected to the pie hole 45.
The positional accuracy is high.

Therefore, the green sheets 36 can be stacked with higher positional accuracy. Thereby, high quality ceramic pudding 1 to wiring board can be manufactured.

Furthermore, since positioning is performed by matching the center of gravity and matching bisectors of intersection angles, deviations in position can be minimized even if the expansion/contraction ratios differ between the green seats 36.

This also improves the positional accuracy between the layers of the green sheet.

(Effects of the Invention) As explained above, according to the present invention, the positioning accuracy of the positioning hole above the green seal 1 can be increased, and thereby the positional accuracy of the stacking of the green seals I can be improved. .

0

[Brief explanation of drawings]

FIG. 1 is a schematic diagram of an apparatus using the method of the present invention, i1'
Figure N2 is a perspective view of an embodiment of the mechanical part of the method of the present invention, Figure 3 is a flowchart of an embodiment of the method of the present invention, Figure 4 is a diagram for explaining the method of the present invention, and Figure 5 is a diagram for explaining the method of the present invention. FIG. 6 is a diagram showing a device for perforating (i7i?2?) balls. 60 is a perforation device, 61 is an upper mold, 62 is a lower mold, 62-1 to 62 -Shows a sword.

Claims (1)

[Claims] In the process of forming via holes in the green sheet, the positioning holes (38 to 38) are used together with the via holes (45).
41) and the green sheet (36) with its positioning hole (38).
A green sheet stacking method characterized by positioning and stacking green sheets (36) with reference to 41) to 41).