JPH0323883B2 - - Google Patents
Info
- Publication number
- JPH0323883B2 JPH0323883B2 JP14231885A JP14231885A JPH0323883B2 JP H0323883 B2 JPH0323883 B2 JP H0323883B2 JP 14231885 A JP14231885 A JP 14231885A JP 14231885 A JP14231885 A JP 14231885A JP H0323883 B2 JPH0323883 B2 JP H0323883B2
- Authority
- JP
- Japan
- Prior art keywords
- exposure
- detection means
- diffraction grating
- light intensity
- intensity distribution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 23
- 238000001514 detection method Methods 0.000 claims description 19
- 238000005259 measurement Methods 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 description 14
- 238000010586 diagram Methods 0.000 description 3
- 238000005305 interferometry Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000011295 pitch Substances 0.000 description 3
- 230000005856 abnormality Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Automatic Focus Adjustment (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Holo Graphy (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14231885A JPS623280A (ja) | 1985-06-28 | 1985-06-28 | 回折格子露光装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14231885A JPS623280A (ja) | 1985-06-28 | 1985-06-28 | 回折格子露光装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS623280A JPS623280A (ja) | 1987-01-09 |
| JPH0323883B2 true JPH0323883B2 (ko) | 1991-03-29 |
Family
ID=15312565
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14231885A Granted JPS623280A (ja) | 1985-06-28 | 1985-06-28 | 回折格子露光装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS623280A (ko) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0823604B2 (ja) * | 1989-04-28 | 1996-03-06 | 株式会社島津製作所 | 露光装置 |
| JPH0572405A (ja) * | 1991-09-11 | 1993-03-26 | Toppan Printing Co Ltd | 回折格子プロツター |
| US9104118B2 (en) | 2011-12-09 | 2015-08-11 | Hitachi High-Technologies Corporation | Exposure device and method for producing structure |
| US10388098B2 (en) | 2014-02-07 | 2019-08-20 | Korea Institute Of Machinery & Materials | Apparatus and method of processing anti-counterfeiting pattern, and apparatus and method of detecting anti-counterfeiting pattern |
-
1985
- 1985-06-28 JP JP14231885A patent/JPS623280A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS623280A (ja) | 1987-01-09 |
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