JPH03228355A - Substrate of hybrid ic - Google Patents

Substrate of hybrid ic

Info

Publication number
JPH03228355A
JPH03228355A JP2225890A JP2225890A JPH03228355A JP H03228355 A JPH03228355 A JP H03228355A JP 2225890 A JP2225890 A JP 2225890A JP 2225890 A JP2225890 A JP 2225890A JP H03228355 A JPH03228355 A JP H03228355A
Authority
JP
Japan
Prior art keywords
chip
layer
circuit board
wires
main body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2225890A
Other languages
Japanese (ja)
Other versions
JP2797598B2 (en
Inventor
Norio Kasai
笠井 則男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Lighting and Technology Corp
Original Assignee
Toshiba Lighting and Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Lighting and Technology Corp filed Critical Toshiba Lighting and Technology Corp
Priority to JP2225890A priority Critical patent/JP2797598B2/en
Publication of JPH03228355A publication Critical patent/JPH03228355A/en
Application granted granted Critical
Publication of JP2797598B2 publication Critical patent/JP2797598B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484Connecting portions
    • H01L2224/48463Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
    • H01L2224/48465Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/4912Layout
    • H01L2224/49171Fan-out arrangements

Landscapes

  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)

Abstract

PURPOSE:To provide a reliable hybrid IC having its chip and wires sealed with a sufficiently thick protective resin layer by making a frame-shaped opening in a protective film applied over a substrate around the chip, and forming a frame-shaped resin-bottomed dam member of sufficient height in the opening. CONSTITUTION:A circuit board 1 of a hybrid IC includes a circuit pattern 3 on an insulating material 2, and a protective film 4 on the circuit pattern except the areas for external connection. A semiconductor chip 5 is bonded to a predetermined region on the wiring pattern 3, which is connected with electrode pads on the chip 5 through wires 6. The protective film 4 has a frame- shaped opening 7 near the chip and wires, and a framed-shaped dam layer 8 is provided with its bottom seated in the opening 7. A protective resin layer 9 is provided over the chip 5 and the wires 6 on the area of the board 1 surrounded by the dam layer 8. The protective film 4 can be solder resist.

Description

【発明の詳細な説明】 [発明の目的] (産業上の利用分野) 本発明は半導体チップを実装した混成集積回路基板に関
する。
DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a hybrid integrated circuit board on which a semiconductor chip is mounted.

(従来の技術) 近年、回路パターンを有する回路基板本体にICやLS
Iなどの半導体チップを実装した混成集積回路基板が各
種の分野に多用されている。
(Prior art) In recent years, ICs and LS have been installed on circuit boards with circuit patterns.
Hybrid integrated circuit boards mounted with semiconductor chips such as I are widely used in various fields.

従来の混成集積回路基板としては第3図及び第4図に示
す構成のものが知られている。第3図は混成集積回路基
板を示す断面図であり、第4図は第3図の混成集積回路
基板の保護樹脂層を省略した平面図である。回路基板本
体11は、絶縁基材12上に回路パターン13を形成し
た構造になっている。
As a conventional hybrid integrated circuit board, those having the configurations shown in FIGS. 3 and 4 are known. FIG. 3 is a sectional view showing the hybrid integrated circuit board, and FIG. 4 is a plan view of the hybrid integrated circuit board of FIG. 3 with the protective resin layer omitted. The circuit board main body 11 has a structure in which a circuit pattern 13 is formed on an insulating base material 12.

半導体チップ15は、前記本体11の所望の回路パター
ン(グイパッド)にダイボンディングされている。ワイ
ヤ1Bは、前記本体11の回路パターン13と前記チッ
プ15上面の電極パッドとを結線している。
The semiconductor chip 15 is die-bonded to a desired circuit pattern (guid pad) of the main body 11. The wire 1B connects the circuit pattern 13 of the main body 11 and the electrode pad on the top surface of the chip 15.

ダム層18は、前記チップ15及びワイヤ16周辺の前
記本体ll上に枠状に形成されている。前記ダム層18
は、エポキシ系樹脂やシリコーン系樹脂などの液状樹脂
をデイスペンサーなどの装置を用いて描画しながら塗布
した後硬化することにより形成される。保護樹脂層19
は、前記ダム層18で囲まれた前記本体11上に前記チ
ップ15及びワイヤ[6を封止するように設けられてい
る。前記保護樹脂層19は、エポキシ系樹脂などの液状
樹脂を前記ダム層18の枠内にコーティングすることに
より形成される。
The dam layer 18 is formed in a frame shape on the main body 11 around the chip 15 and the wire 16. The dam layer 18
is formed by applying a liquid resin such as an epoxy resin or a silicone resin in a drawing manner using a device such as a dispenser, and then curing the resin. Protective resin layer 19
is provided on the main body 11 surrounded by the dam layer 18 so as to seal the chip 15 and the wire [6]. The protective resin layer 19 is formed by coating the dam layer 18 with a liquid resin such as an epoxy resin.

ところで、前述した混成集積回路基板では十分な厚さの
保護樹脂層[9を設けて前記半導体チップ15及びワイ
ヤ16を良好に封止する必要がある。そのために、前記
ダム層18を所定の高さて全体的に一定な高さにして前
記保護樹脂層19を形成する際の液状樹脂の流れを堰き
止め、十分な厚さの保護樹脂層19を設ける必要がある
By the way, in the above-mentioned hybrid integrated circuit board, it is necessary to provide a protective resin layer [9 of sufficient thickness to seal the semiconductor chip 15 and the wires 16 well. For this purpose, the dam layer 18 is set to a predetermined height and has a uniform height overall to dam the flow of liquid resin when forming the protective resin layer 19, and to provide the protective resin layer 19 with a sufficient thickness. There is a need.

しかしながら、従来の混成集積回路基板では、ダム層1
8を形成する際に液状樹脂が流動変形して回路基板本体
11上に広がって低くなったり、高さがバラついたりす
ることがある。このため、保護樹脂層■9の厚さを十分
に厚くできず、半導体チップ15及びワイヤ16の封止
が不完全になって、信頼性を低下させるという問題があ
った。なお、十分かつ一定な高さのダム層を設けるため
に流動性の低い液状樹脂を用いることが考えられるが、
かかる液状樹脂を用いるとその低流動性により塗布作業
の能率か著しく低下し、実際に採用するのは困難である
However, in conventional hybrid integrated circuit boards, the dam layer 1
When forming the circuit board 8, the liquid resin flows and deforms and spreads over the circuit board body 11, resulting in the height becoming lower or being uneven. For this reason, the thickness of the protective resin layer (1) 9 cannot be made sufficiently thick, resulting in incomplete sealing of the semiconductor chip 15 and the wires 16, resulting in a decrease in reliability. In addition, it is possible to use a liquid resin with low fluidity in order to provide a dam layer with a sufficient and constant height.
When such a liquid resin is used, the efficiency of the coating operation is significantly reduced due to its low fluidity, and it is difficult to use it in practice.

(発明が解決しようとする課題) 本発明は、上記従来の課題を解決するためになされたも
ので、十分かつ一定な高さのダム層を有し、半導体チッ
プ及びワイヤを十分な厚さの保護樹脂層で良好に封止し
た高信頼性の混成集積回路基板を提供しようとするもの
である。
(Problems to be Solved by the Invention) The present invention has been made in order to solve the above-mentioned conventional problems. The present invention aims to provide a highly reliable hybrid integrated circuit board that is well sealed with a protective resin layer.

[発明の構成コ (課題を解決するための手段) 本発明は、絶縁基材上に回路パターンを有すると共に該
回路パターンの外部接続領域を除く表面に保護被膜を有
する回路基板本体と、前記本体の所望の回路パターンに
ダイボンディングされた半導体チップと、前記本体の回
路パターンと前記チップ上面の電極パッドとを結線する
ワイヤと、前記チップ及びワイヤ周辺の前記保護被膜に
形成された枠状の開口部と、この開口部内に底部が充填
された枠状のダム層と、このダム層で囲まれた前記本体
上に前記チップ及びワイヤを封止するように設けられた
保護樹脂層とを具備したことを特徴とする混成集積回路
基板である。
[Structure of the Invention (Means for Solving the Problems) The present invention provides a circuit board main body having a circuit pattern on an insulating base material and having a protective coating on the surface of the circuit pattern except for an external connection area, and the main body. a semiconductor chip die-bonded to a desired circuit pattern, a wire connecting the circuit pattern of the main body and an electrode pad on the top surface of the chip, and a frame-shaped opening formed in the protective coating around the chip and the wire. a frame-shaped dam layer with a bottom filled in the opening, and a protective resin layer provided on the main body surrounded by the dam layer so as to seal the chip and the wire. This is a hybrid integrated circuit board characterized by the following.

(作用) 本発明によれば、ワイヤが結線され、ダイボンディング
された半導体チップ周囲の回路基板本体上に被覆された
保護被膜に枠状の開口部を設け、この開口部内に底部が
充填された枠状のダム層を設けることによって、該ダム
層を液状樹脂で形成する際にこの液状樹脂が前記開口部
の段差により横方向に広がるのを抑制できる。その結果
、十分かつ一定な高さのダム層を前記開口部の位置に設
けることができるため、該ダム層で囲まれ、前記半導体
チップ及びワイヤが位置する前記本体上に十分な厚さの
保護樹脂層を設けることができる。
(Function) According to the present invention, a frame-shaped opening is provided in the protective film coated on the circuit board body around the semiconductor chip to which wires are connected and die-bonded, and the bottom portion is filled in the opening. By providing the frame-shaped dam layer, when the dam layer is formed of liquid resin, it is possible to suppress the liquid resin from spreading in the lateral direction due to the step difference in the opening. As a result, a dam layer of sufficient and constant height can be provided at the location of the opening, so that a sufficient thickness of protection can be provided on the body surrounded by the dam layer and on which the semiconductor chip and wires are located. A resin layer can be provided.

従って、前記保護樹脂層により半導体チップ及びワイヤ
が良好に封止された高信頼性の混成集積回路基板を得る
ことができる。
Therefore, it is possible to obtain a highly reliable hybrid integrated circuit board in which the semiconductor chip and wires are well sealed by the protective resin layer.

(実施例) 以下、本発明の実施例を図面を参照して詳細に説明する
(Example) Hereinafter, an example of the present invention will be described in detail with reference to the drawings.

第1図は本発明の混成集積回路基板を示す断面図であり
、第2図は第1図の混成集積回路基板の保護樹脂層及び
ダム層を省略した平面図である。
FIG. 1 is a sectional view showing a hybrid integrated circuit board of the present invention, and FIG. 2 is a plan view of the hybrid integrated circuit board of FIG. 1 with the protective resin layer and dam layer omitted.

回路基板本体lは、絶縁基材2上に回路パターン3が形
成されていると共に該回路パターン3の外部接続領域を
除く表面に保護被膜であるソルダーレジスト層4を形成
した構造になっている。半導体チップ5は、前記本体l
の所望の回路パターン(ダイパッド)にダイボンディン
グされている。
The circuit board body 1 has a structure in which a circuit pattern 3 is formed on an insulating base material 2, and a solder resist layer 4, which is a protective film, is formed on the surface of the circuit pattern 3 except for the external connection area. The semiconductor chip 5 is connected to the main body l.
is die-bonded to the desired circuit pattern (die pad).

ワイヤ6は、前記本体1の回路パターン3と前記チップ
5上面の電極パッドとを結線している。枠状の開口部7
は、前記チップ5及びワイヤ6周辺の前記ソルダーレジ
スト層4に形成されている。
A wire 6 connects the circuit pattern 3 of the main body 1 and the electrode pad on the upper surface of the chip 5. Frame-shaped opening 7
are formed in the solder resist layer 4 around the chip 5 and the wire 6.

枠状のダム層8は、前記開口部7内にその底部が充填さ
れて設けられている。前記ダム層8は、エポキシ系樹脂
やシリコーン系樹脂などの液状樹脂をデイスペンサーな
どの装置を用いて前記開口部7内の本体1上に描画しな
がら塗布した後硬化することにより形成される。保護樹
脂層8は、前記ダム層7で囲まれた前記本体1上に前記
チップ5及びワイヤ6を封止するように設けらでいる。
The frame-shaped dam layer 8 is provided so that its bottom portion is filled in the opening 7. The dam layer 8 is formed by applying a liquid resin such as an epoxy resin or a silicone resin onto the main body 1 inside the opening 7 using a device such as a dispenser, and then curing the resin. A protective resin layer 8 is provided on the main body 1 surrounded by the dam layer 7 so as to seal the chip 5 and the wires 6.

前記保護樹脂層9は、エポキシ系樹脂などの液状樹脂を
コーティングすることにより形成される。
The protective resin layer 9 is formed by coating a liquid resin such as an epoxy resin.

このような構成によれば、回路基板本体1上のソルダー
レジスト層4に枠状の開口部7を設け、この開口部7内
にダム層8をその底部が充填されるように設けることに
よって、該ダム層8を液状樹脂により形成する際に横方
向の広がりを前記開口部7の段差で抑制できる。その結
果、十分かつ一定な高さのダム層8を設けることができ
るため、該ダム層8で囲まれ、前記半導体チップ5及び
ワイヤ6が位置する前記本体1上に十分な厚さの保護樹
脂層9を設けることができる。このため、前記保護樹脂
層9により半導体チップ5及びワイヤ6が良好に封止で
きる。更に、回路基板本体lの表面から半導体チップ5
までの間にダム層8、ソルダーレジスト層4の一部及び
保護樹脂層9の3層の樹脂をコートした構成であるため
、回路基板本体1の表面から半導体チップ5への水分な
どの浸透を十分に防1卜することができる。従って、信
頼性の高い混成集積回路基板を得ることができる。
According to such a configuration, the frame-shaped opening 7 is provided in the solder resist layer 4 on the circuit board body 1, and the dam layer 8 is provided in the opening 7 so that the bottom thereof is filled. When the dam layer 8 is formed of liquid resin, lateral expansion can be suppressed by the step of the opening 7. As a result, since the dam layer 8 can be provided with a sufficient and constant height, a protective resin of sufficient thickness can be formed on the main body 1 surrounded by the dam layer 8 and on which the semiconductor chip 5 and the wires 6 are located. A layer 9 can be provided. Therefore, the semiconductor chip 5 and the wires 6 can be sealed well by the protective resin layer 9. Furthermore, the semiconductor chip 5 is removed from the surface of the circuit board main body l.
Since the structure is coated with three layers of resin, the dam layer 8, a part of the solder resist layer 4, and the protective resin layer 9, the penetration of moisture from the surface of the circuit board body 1 into the semiconductor chip 5 is prevented. It can be sufficiently defended. Therefore, a highly reliable hybrid integrated circuit board can be obtained.

また、ダム層8を形成するための液状樹脂として比較的
流動性の高いものを用いることもできるため、塗布性な
どが阻害されず、ダム層を効率よく形成することが可能
となる。
Furthermore, since a liquid resin with relatively high fluidity can be used to form the dam layer 8, the applicability is not hindered and the dam layer can be formed efficiently.

[発明の効果コ 以上詳述した如く、本発明によれば十分かつ一定な高さ
のダム層を有し、半導体チップ及びワイヤを十分な厚さ
の保護樹脂層で良好に封止した高信頼性の混成集積回路
基板を提供することができる。
[Effects of the Invention] As detailed above, the present invention has a dam layer with a sufficient and constant height, and is highly reliable in that the semiconductor chip and wires are well sealed with a protective resin layer of sufficient thickness. A hybrid integrated circuit board can be provided.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の混成集積回路基板を示す断面図、第2
図は第1図の混成集積回路基板の一部を省略した平面図
、第3図は従来の混成集積回路基板を示す断面図、第4
図は第3図の混成集積回路基板の一部を省略した平面図
である。 l・・・回路基板本体、2・・・絶縁基板、3・・・回
路パターン、4・・・ソルダーレジスト層(保護被膜)
、5・・・半導体チップ、6・・・ワイヤ、7・・・開
口部、訃・・ダム層、9・・・保護樹脂層。
FIG. 1 is a sectional view showing a hybrid integrated circuit board of the present invention, and FIG.
The figure is a partially omitted plan view of the hybrid integrated circuit board in Figure 1, Figure 3 is a sectional view showing a conventional hybrid integrated circuit board, and Figure 4 is a cross-sectional view showing a conventional hybrid integrated circuit board.
The figure is a partially omitted plan view of the hybrid integrated circuit board of FIG. 3. l... Circuit board body, 2... Insulating board, 3... Circuit pattern, 4... Solder resist layer (protective film)
, 5... Semiconductor chip, 6... Wire, 7... Opening, end... Dam layer, 9... Protective resin layer.

Claims (1)

【特許請求の範囲】[Claims] 絶縁基材上に回路パターンを有すると共に該回路パター
ンの外部接続領域を除く表面に保護被膜を有する回路基
板本体と、前記本体の所望の回路パターンにダイボンデ
ィングされた半導体チップと、前記本体の回路パターン
と前記チップ上面の電極パッドとを結線するワイヤと、
前記チップ及びワイヤ周辺の前記保護被膜に形成された
枠状の開口部と、この開口部内に底部が充填された枠状
のダム層と、このダム層で囲まれた前記本体上に前記チ
ップ及びワイヤを封止するように設けられた保護樹脂層
とを具備したことを特徴とする混成集積回路基板。
A circuit board main body having a circuit pattern on an insulating base material and having a protective coating on the surface except for an external connection area of the circuit pattern, a semiconductor chip die-bonded to a desired circuit pattern of the main body, and a circuit of the main body. a wire connecting the pattern and the electrode pad on the top surface of the chip;
A frame-shaped opening formed in the protective coating around the chip and the wire, a frame-shaped dam layer whose bottom is filled in the opening, and the chip and the wire on the main body surrounded by the dam layer. 1. A hybrid integrated circuit board comprising a protective resin layer provided to seal wires.
JP2225890A 1990-02-02 1990-02-02 Hybrid integrated circuit board Expired - Lifetime JP2797598B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2225890A JP2797598B2 (en) 1990-02-02 1990-02-02 Hybrid integrated circuit board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2225890A JP2797598B2 (en) 1990-02-02 1990-02-02 Hybrid integrated circuit board

Publications (2)

Publication Number Publication Date
JPH03228355A true JPH03228355A (en) 1991-10-09
JP2797598B2 JP2797598B2 (en) 1998-09-17

Family

ID=12077749

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2225890A Expired - Lifetime JP2797598B2 (en) 1990-02-02 1990-02-02 Hybrid integrated circuit board

Country Status (1)

Country Link
JP (1) JP2797598B2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0568635U (en) * 1992-02-25 1993-09-17 スタンレー電気株式会社 Mask for solder paste printing
KR100292033B1 (en) * 1998-05-13 2001-07-12 윤종용 Semiconductor chip package and method for manufacturing same
US6365979B1 (en) * 1998-03-06 2002-04-02 Kabushiki Kaisha Toshiba Semiconductor device and manufacturing method thereof
US6984286B2 (en) 2001-01-17 2006-01-10 International Business Machines Corporation Adjusting fillet geometry to couple a heat spreader to a chip carrier
JP2008277248A (en) * 2006-11-22 2008-11-13 Alps Electric Co Ltd Manufacturing method of light guide member, and light guide member and light guide plate
JP2017005175A (en) * 2015-06-12 2017-01-05 凸版印刷株式会社 Semiconductor package substrate, semiconductor package and manufacturing method of the same

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0568635U (en) * 1992-02-25 1993-09-17 スタンレー電気株式会社 Mask for solder paste printing
US6365979B1 (en) * 1998-03-06 2002-04-02 Kabushiki Kaisha Toshiba Semiconductor device and manufacturing method thereof
KR100292033B1 (en) * 1998-05-13 2001-07-12 윤종용 Semiconductor chip package and method for manufacturing same
US6984286B2 (en) 2001-01-17 2006-01-10 International Business Machines Corporation Adjusting fillet geometry to couple a heat spreader to a chip carrier
JP2008277248A (en) * 2006-11-22 2008-11-13 Alps Electric Co Ltd Manufacturing method of light guide member, and light guide member and light guide plate
JP2012256085A (en) * 2006-11-22 2012-12-27 Mitsubishi Chemicals Corp Light-emitting device, and manufacturing method of light-emitting device
JP2017005175A (en) * 2015-06-12 2017-01-05 凸版印刷株式会社 Semiconductor package substrate, semiconductor package and manufacturing method of the same

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