JPH0322272Y2 - - Google Patents
Info
- Publication number
- JPH0322272Y2 JPH0322272Y2 JP250084U JP250084U JPH0322272Y2 JP H0322272 Y2 JPH0322272 Y2 JP H0322272Y2 JP 250084 U JP250084 U JP 250084U JP 250084 U JP250084 U JP 250084U JP H0322272 Y2 JPH0322272 Y2 JP H0322272Y2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- pallet
- sealing
- sealing material
- seal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000003566 sealing material Substances 0.000 claims description 16
- 238000007789 sealing Methods 0.000 description 13
- 239000000758 substrate Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 229920000459 Nitrile rubber Polymers 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229920001967 Metal rubber Polymers 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP250084U JPS60117858U (ja) | 1984-01-12 | 1984-01-12 | 真空シ−ル |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP250084U JPS60117858U (ja) | 1984-01-12 | 1984-01-12 | 真空シ−ル |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60117858U JPS60117858U (ja) | 1985-08-09 |
| JPH0322272Y2 true JPH0322272Y2 (enrdf_load_stackoverflow) | 1991-05-15 |
Family
ID=30476235
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP250084U Granted JPS60117858U (ja) | 1984-01-12 | 1984-01-12 | 真空シ−ル |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60117858U (enrdf_load_stackoverflow) |
-
1984
- 1984-01-12 JP JP250084U patent/JPS60117858U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60117858U (ja) | 1985-08-09 |
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