JPS60117858U - 真空シ−ル - Google Patents

真空シ−ル

Info

Publication number
JPS60117858U
JPS60117858U JP250084U JP250084U JPS60117858U JP S60117858 U JPS60117858 U JP S60117858U JP 250084 U JP250084 U JP 250084U JP 250084 U JP250084 U JP 250084U JP S60117858 U JPS60117858 U JP S60117858U
Authority
JP
Japan
Prior art keywords
vacuum
vacuum seal
seal
sealing material
tough
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP250084U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0322272Y2 (enrdf_load_stackoverflow
Inventor
孝志 氏原
仁 仲田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pioneer Corp
Original Assignee
Pioneer Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pioneer Corp filed Critical Pioneer Corp
Priority to JP250084U priority Critical patent/JPS60117858U/ja
Publication of JPS60117858U publication Critical patent/JPS60117858U/ja
Application granted granted Critical
Publication of JPH0322272Y2 publication Critical patent/JPH0322272Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP250084U 1984-01-12 1984-01-12 真空シ−ル Granted JPS60117858U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP250084U JPS60117858U (ja) 1984-01-12 1984-01-12 真空シ−ル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP250084U JPS60117858U (ja) 1984-01-12 1984-01-12 真空シ−ル

Publications (2)

Publication Number Publication Date
JPS60117858U true JPS60117858U (ja) 1985-08-09
JPH0322272Y2 JPH0322272Y2 (enrdf_load_stackoverflow) 1991-05-15

Family

ID=30476235

Family Applications (1)

Application Number Title Priority Date Filing Date
JP250084U Granted JPS60117858U (ja) 1984-01-12 1984-01-12 真空シ−ル

Country Status (1)

Country Link
JP (1) JPS60117858U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0322272Y2 (enrdf_load_stackoverflow) 1991-05-15

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