JPH03221286A - Method and device for laser beam machining - Google Patents

Method and device for laser beam machining

Info

Publication number
JPH03221286A
JPH03221286A JP2018569A JP1856990A JPH03221286A JP H03221286 A JPH03221286 A JP H03221286A JP 2018569 A JP2018569 A JP 2018569A JP 1856990 A JP1856990 A JP 1856990A JP H03221286 A JPH03221286 A JP H03221286A
Authority
JP
Japan
Prior art keywords
laser beam
cutting
workpiece
laser
during
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2018569A
Other languages
Japanese (ja)
Inventor
Hidehiko Karasaki
秀彦 唐崎
Akio Tanaka
田中 昭男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2018569A priority Critical patent/JPH03221286A/en
Publication of JPH03221286A publication Critical patent/JPH03221286A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To effectually reduce the time of a piercing process by setting the focus of laser beam to the surface of a material to be machined and making holes in a piercing process and moving the focus of the laser beam in a cutting process after holes are made and cutting the material to be machined. CONSTITUTION:The laser beam 1 generated in a laser beam oscillator is introduced as far as the material 3 to be machined. The surface of the material 3 to be machined is irradiated with the laser beam 1 and cut. The cutting process is composed of a piercing process and a cutting process. The focus F of the laser beam 1 is set to the surface of the material 3 to be machined and the holes are made on the way to the piercing process time or before the piercing process is completed. On the way to the piercing process or after it is completed, the focus F of the laser beam 1 is moved to the focal position of the laser beam 1 in a cutting process and cutting work is executed. In this way, the total hours of the laser beam machining process can be reduced drastically.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、レーザ光を用いて被加工物の切断を行なうレ
ーザ加工方法およびレーザ加工装置に関する。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a laser processing method and a laser processing apparatus for cutting a workpiece using laser light.

従来の技術 レーザ光を被加工物に照射して切断加工を行なう場合、
まず第1段階として穴を被加工物の規定の位置にあけ、
次いでその穴のあいた部分から切断を切断パターンにし
たがって始める。このときの穴あけ段階をピアッシング
と称し、切断図形パターンにもよるが、切断加工工程の
全時間の約半分を占めることも珍しくない。特に、板厚
が厚くなると、切断工程に対するピアッシング時間の割
合が増加し、ピアッシング時間は切断加工工程の時間の
大部分を支配するようになる。したがって、ピアッシン
グ時間を短縮することは、切断加工工程の時間を短縮す
ることに大きく寄与し、切断加工の効率を向上させるこ
とになる。
Conventional technology: When cutting a workpiece by irradiating it with laser light,
First, the first step is to drill a hole in the specified position of the workpiece.
Cutting then begins at the perforated area according to the cutting pattern. The hole-making step at this time is called piercing, and although it depends on the cutting pattern, it is not uncommon for it to occupy about half of the total time of the cutting process. In particular, as the plate thickness increases, the ratio of piercing time to cutting process increases, and piercing time comes to dominate most of the cutting process time. Therefore, shortening the piercing time greatly contributes to shortening the time of the cutting process and improves the efficiency of the cutting process.

発明が解決しようとする課題 しかしながら、従来のレーザ加工方法およびレーザ加工
装置においては、板厚か厚くなった場合のピアッシング
時間の短縮に対する有効な手段を持ち合わせていなかっ
た。また、板厚か厚くなると、広い切断幅が要求される
だけでなく、レーザ光の焦点位置の許容範囲が狭くなる
ため、切断加工時のレーザ光の焦点位置を微妙に調整す
る必要かあり、穴あけ過程時のレーザ光の焦点位置と切
断J8程時のレーザ光の焦点位置とが両立しなくなり、
ピアッシング時間が長くなるという問題があ っ ノこ
 。
Problems to be Solved by the Invention However, conventional laser processing methods and laser processing apparatuses do not have effective means for shortening the piercing time when the plate thickness becomes thick. In addition, as the plate thickness increases, not only is a wider cutting width required, but the tolerance range for the laser beam focal position becomes narrower, so it is necessary to delicately adjust the laser beam focal position during cutting. The focal position of the laser beam during the drilling process and the focal position of the laser beam during cutting J8 are no longer compatible,
There is a problem with the piercing time being longer.

本発明は1.このような従来の問題を解決するものであ
り、ピアッシング時間を有効に短縮することのできる優
れたレーザ加工方法およびレーザ加工装置を提供するこ
とを目的とする。
The present invention consists of 1. It is an object of the present invention to provide an excellent laser processing method and laser processing apparatus that can solve such conventional problems and can effectively shorten piercing time.

課題を解決するための手段 本発明は、前記目的を達成するために、切断加工工程を
穴あけ過程と切断過程とに分け、穴あけ過程時の途中ま
たは終了まではレーザ光の焦点を被加工物の表面に合わ
せて穴あけ加工を行ない、穴あけ過程の途中または終了
後にはレーザ光の焦点を切断過程時のレーザ光の焦点位
置に移動して切断加工を行なうように構成したものであ
る。
Means for Solving the Problems In order to achieve the above object, the present invention divides the cutting process into a drilling process and a cutting process, and focuses the laser beam on the workpiece during or until the end of the drilling process. The structure is such that drilling is performed in accordance with the surface, and during or after the drilling process, the focal point of the laser beam is moved to the focal position of the laser beam during the cutting process to perform the cutting process.

作用 本発明は、前記構成により次のような作用を有する。す
なわち、被加工物の表面にレーザ光の焦点を合わせると
、レーザ光の1パルスで穴をあけられる深さが深く、穴
あけ過程の時間が短縮されるので、被加工物の表面にレ
ーザ光の焦点を合わせて穴あけを行ない、穴あけ加工の
途中または終了後に切断過程時の焦点位置にレーザ光の
焦点を移動して切断加工を行なうことにより、ピアッシ
ング時間すなわち穴あけ過程の時間を有効に短縮するこ
とができる。
Effects The present invention has the following effects due to the above structure. In other words, when the laser beam is focused on the surface of the workpiece, the depth that can be drilled with one pulse of the laser beam is deep, and the time for the drilling process is shortened. To effectively shorten the piercing time, that is, the time for the drilling process, by performing the drilling while focusing and moving the focal point of the laser beam to the focal position during the cutting process during or after the drilling process. I can do it.

実施例 以下、本発明の一実施例を図面を参照して説明する。第
1図は本発明の一実施例を示し、第1図(a)は穴あけ
過程時のレーザ光の焦点位置を示し、第1図(b)は切
断過程時のレーザ光の焦点位置を示している。第1図(
a)において、レーザ光1は集光レンズ2によりその焦
点Fを被加工物3の表面に合わされている。また第1図
(b)においては、レーザ光1は集光レンズ2を移動さ
せることにより、その焦点Fを被加工物3の表面から△
rだけ離れた位置に合わされている。このようにレーザ
光1の焦点Fを穴あけ過程時(a)と切断過程時(b)
とで異ならせることにより、レーザ光を用いた切断加工
工程の時間を短縮することができる。
EXAMPLE Hereinafter, an example of the present invention will be described with reference to the drawings. Fig. 1 shows an embodiment of the present invention, Fig. 1(a) shows the focal position of the laser beam during the drilling process, and Fig. 1(b) shows the focal position of the laser beam during the cutting process. ing. Figure 1 (
In a), the laser beam 1 is focused F on the surface of the workpiece 3 by the condenser lens 2. In addition, in FIG. 1(b), the laser beam 1 moves its focal point F away from the surface of the workpiece 3 by moving the condensing lens 2.
They are aligned at a distance of r. In this way, the focus F of the laser beam 1 is adjusted during the drilling process (a) and during the cutting process (b).
By making these different, the time required for the cutting process using laser light can be shortened.

次に前記実施例の作用について説明する。前述したよう
に、板厚が厚くなると切断工程に対するビアッシンク時
間の割合が増加し、ピアッンング時間は切断加工工程の
時間の大部分を支配するようになる。また板厚が厚くな
ると、広い切断幅が要求される。
Next, the operation of the above embodiment will be explained. As mentioned above, as the plate thickness increases, the ratio of via sinking time to the cutting process increases, and the piercing time comes to dominate most of the cutting process time. Furthermore, as the plate thickness increases, a wider cutting width is required.

第2図はSPCの場合の切断に必要な切断幅と板厚との
関係を示している。切断幅は材質による熱伝導係数と板
厚およびアシストガスによる溶融した材料の易動度によ
って決定される。アシストガスの条件は、材料の酸化反
応速度から制限を受けるため、切断幅は材質と板厚とを
指定すればほぼ一義的に決定される。
FIG. 2 shows the relationship between the cutting width and plate thickness required for cutting in the case of SPC. The cutting width is determined by the thermal conductivity coefficient of the material, the plate thickness, and the mobility of the molten material by the assist gas. Since the assist gas conditions are limited by the oxidation reaction rate of the material, the cutting width is almost uniquely determined by specifying the material and plate thickness.

このように、板厚が厚くなると穴あけ過程の占める割合
が多くなるだけでなく、広い切断幅が要求されるため、
従来においては穴あけ過程時のレーザ光の焦点位置を被
加工物の内部または外部に合わせることが多い。しかし
ながら、第3図に示すように、レーザ光の焦点がその定
められた焦点位置から離れると、それだけレーザ光の1
パルス当たりであけられる穴の深さが浅くなるので、焦
点位置を被加工物の内部または外部に設定すると、それ
だけピアッシング時間が長くかかることになる。したが
って、前記実施例のように被加工物の表面にレーザ光の
焦点を合わせて穴あけ加工を行ない、穴あけ加工終了後
には、切断過程時の切断輻に応した焦点位置にレーザ光
の焦点を移動して切断加工を行なうことにより、第4図
に示すように、例えば4.5mm厚の鉄板(SPC)に
15mmの円穴をあける場合、従来のレーザ光を用いた
方法に比較して切断加工時間が約10%以上短縮するこ
とができる。この傾向は、板厚が厚くなるほど顕著にな
り、例えば9mm厚の鉄板(5PC)では、約30%以
上の切断加工工程の時間が短縮される。
In this way, as the plate thickness increases, not only does the drilling process take up a larger proportion of the board, but a wider cutting width is required.
In the past, the focal position of laser light during the drilling process was often focused on the inside or outside of the workpiece. However, as shown in FIG. 3, as the focus of the laser beam moves away from its fixed focal position, the
Since the depth of the hole drilled per pulse becomes shallower, if the focal point is set inside or outside the workpiece, the piercing time will take longer. Therefore, as in the above embodiment, drilling is performed by focusing the laser beam on the surface of the workpiece, and after the drilling is completed, the focus of the laser beam is moved to a focal position corresponding to the cutting radius during the cutting process. As shown in Figure 4, for example, when drilling a 15 mm circular hole in a 4.5 mm thick steel plate (SPC), the cutting process is faster than the conventional method using a laser beam. The time can be reduced by about 10% or more. This tendency becomes more pronounced as the plate thickness increases; for example, in the case of a 9 mm thick iron plate (5PC), the cutting process time is reduced by about 30% or more.

第5図は、前記実施例におけるレーザ光の焦点位置の移
動タイミングの一例を示している。本例では、穴あけ過
程終了後にレーザ光の焦点位置を移動しているが、穴あ
け過程の途中でレーザ光の焦点位置が移動可能な材料で
あれば、レーザ切断加工工程の時間をさらに短縮するこ
とができる。
FIG. 5 shows an example of the movement timing of the focal position of the laser beam in the embodiment. In this example, the focal position of the laser beam is moved after the drilling process is completed, but if the material is a material that allows the focal position of the laser beam to be moved during the drilling process, the time for the laser cutting process can be further shortened. I can do it.

このレーザ光の焦点位置の移動のタイミンクは、被加工
物の材質および板厚によって決定される。したがって、
被加工物の材質および板厚の情報があれば、移動のタイ
ミングを一義的に発生させることができる。
The timing of movement of the focal position of the laser beam is determined by the material and thickness of the workpiece. therefore,
If there is information on the material and thickness of the workpiece, the movement timing can be uniquely determined.

第6図は、このようなタイミング発生のためのデータベ
ースを備え、レーザ光の焦点位置を自動的に調整するた
めの手段を備えたレーザ加工装置の一例を示している。
FIG. 6 shows an example of a laser processing apparatus equipped with a database for generating such timing and means for automatically adjusting the focal position of the laser beam.

第6図において、1はレーザ光、2は集光レンズ、3は
被加工物、4はレーザ発振器、5はレーザ発振器4から
のレーザ光1を集光レンズ2へ導くためのビームベンダ
ー、6は集光レンズ2を保持してレーザ光1を被加工物
3の表面へ導くためのレーザノズル軸、7はレーサノズ
ル#I6を移動させて集光レンズ2の焦点位置を調節す
るためのサーボモータ、8は被加工物3を保持してX−
Y方向へ移動させるためのテーブル、9はテーブル8を
駆動するためのサーボモータ、10はサーボモータ7お
よび9を制御する数値制御装置、11は被加工物3の材
質および板厚の情報に基ついて焦点位置の移動量を決定
するための焦点位置のデータベース、12は数値制御装
置10および焦点位置のデータベース11を制御するた
めのCAD/CAMシステムである。
In FIG. 6, 1 is a laser beam, 2 is a condensing lens, 3 is a workpiece, 4 is a laser oscillator, 5 is a beam bender for guiding the laser beam 1 from the laser oscillator 4 to the condensing lens 2, 6 7 is a laser nozzle axis for holding the condensing lens 2 and guiding the laser beam 1 to the surface of the workpiece 3; 7 is a servo motor for moving the laser nozzle #I6 and adjusting the focal position of the condensing lens 2; , 8 holds the workpiece 3 and
A table for moving in the Y direction, 9 a servo motor for driving the table 8, 10 a numerical controller for controlling the servo motors 7 and 9, 11 a control system based on information on the material and thickness of the workpiece 3 12 is a CAD/CAM system for controlling the numerical controller 10 and the focus position database 11.

次に、前記レーザ加工装置の動作について説明する。レ
ーザ発振器4から発せられたパルス状のレーザ光lは、
ビームベンダー5を経て集光レンズ2によりスポット状
に集光されて被加工物3の表面を照射する。被加工物3
は、集光されたレーザ光1の熱エネルギにより加熱溶融
されて穴をあけられる。被加工物3の表面に焦点を合わ
されたレーザ光1は、その焦点位置で最もエネルギ密度
が高く、そのエネルギはレーザ光1のスポット径の2乗
に比例する。被加工物3に穴があけられると、切断図形
パターンにしたがってテーブル8が移動し、切断が行わ
れる。この制御は、CAD/C/\Mシステム12内に
格納された切断図形パターンに基づき、数値制御装置1
0を介してサーボモータ9を駆動することにより行なわ
れる。また、穴あけ過程時と切断過程時との集光レンズ
2の黒点位置の調整は、焦点位置のデータムース11内
に格納された被加工物3の材質および板厚情報に基づき
、数+If制御装置10を介してサーボモータ7を駆動
することにより行なわれる。このようにして、従来より
も少なくとも10%以上切断加工工程の時間が短縮され
たレーザ加工が行なわれる。前記実施例における焦点位
置のデータベース11は、CAD/CAMシステム12
のようなレーザ加工装置に付属するプログラム人力支援
装置内に備えることも可能である。焦点位置のデータベ
ースをこのようなプログラム人力支援装置内に備えた場
合は、従来のレーザ加工装置を使用した場合でも、レー
ザ切断加工工程の時間短縮という本発明の利益を享受す
ることができる。
Next, the operation of the laser processing apparatus will be explained. The pulsed laser beam l emitted from the laser oscillator 4 is
The beam passes through a beam bender 5 and is focused into a spot by a condensing lens 2, and irradiates the surface of a workpiece 3. Workpiece 3
is heated and melted by the thermal energy of the focused laser beam 1 to form a hole. The laser beam 1 focused on the surface of the workpiece 3 has the highest energy density at its focal position, and the energy is proportional to the square of the spot diameter of the laser beam 1. When a hole is made in the workpiece 3, the table 8 moves according to the cutting pattern to perform cutting. This control is performed by the numerical control device 1 based on the cutting figure pattern stored in the CAD/C/\M system 12.
This is done by driving the servo motor 9 via 0. In addition, the adjustment of the black spot position of the condenser lens 2 during the drilling process and during the cutting process is performed by the number + If controller based on the material and plate thickness information of the workpiece 3 stored in the data mousse 11 at the focal position. This is done by driving the servo motor 7 via the motor 10. In this way, laser processing is performed in which the cutting process time is reduced by at least 10% compared to the conventional method. The focal position database 11 in the embodiment is stored in the CAD/CAM system 12.
It is also possible to provide it in a program manual support device attached to a laser processing device such as a laser processing device. If a database of focus positions is provided in such a programmable human assistance device, the benefits of the present invention of shortening the time of the laser cutting process can be enjoyed even when a conventional laser processing device is used.

発明の効果 以上の説明から明らかなように、本発明のレーザ加工方
法およびレーザ加工装置によれば、切断加工工程を穴あ
け過程と切断過程とに分け、穴あけ過程時の途中または
終了まではレーザ光の焦点を被加工物の表面に合わせて
穴あけ加工を行ない、穴あけ過程の途中または終了後に
はレーザ光の焦点を切断過程時のレーザ光の焦点位置に
移動して切断加工を行なうようにしたので、穴あけ過程
時の時間を有効に短縮できることにより、レーザ加工工
程の全体の時間を著しく短縮することができ、もって生
産性を飛躍的に向上させることができるという効果を有
する。
Effects of the Invention As is clear from the above explanation, according to the laser processing method and laser processing apparatus of the present invention, the cutting process is divided into the drilling process and the cutting process, and the laser beam is not used during or until the end of the drilling process. Drilling is performed by aligning the focus of the laser beam with the surface of the workpiece, and during or after the drilling process, the focus of the laser beam is moved to the focal position of the laser beam during the cutting process to perform cutting. Since the time during the drilling process can be effectively shortened, the overall time of the laser machining process can be significantly shortened, thereby dramatically improving productivity.

【図面の簡単な説明】[Brief explanation of drawings]

第1図(a)、(b)は本発明のレーザ加工方法の一実
施例における穴あけ過程時および切断過程時のレーザ光
の焦点位置と被加工物との関係を示す概念図、第2図は
レーザ加工方法における被加工物の板厚と要求される切
断幅との関係を示すグラフ、第3図はレーザ加工方法に
おける被加工物/焦点位置間距離とレーザ光1パルスで
穴のあく深さとの関係を示すグラフ、第4図は被加工物
の板厚と本発明の時間短縮率(従来比)との関係を示す
グラフ、第5図は本発明の一実施例における穴あけ過程
と切断過程のタイミングを示すタイミングチャート、第
6図は本発明のレーザ加工方法の一実施例におけるシス
テム構成を示す概略ブロック図である。 1・・・レーザ光、2・・・集光レンズ、3・・・被加
工物、4・・・レーザ発振器、5・・・ビームベンダー
、6・・・ビームノズル軸、7・・・サーボモータ、8
・・・テーブル、9・・・サーボモータ、10・・・数
値制御装置、・・・焦点位置のデータへ ス、 12・・CA D 、/ CAMシステム、 F・・・焦点。
FIGS. 1(a) and 1(b) are conceptual diagrams showing the relationship between the focal position of the laser beam and the workpiece during the drilling process and cutting process in an embodiment of the laser processing method of the present invention, and FIG. Figure 3 is a graph showing the relationship between the thickness of the workpiece and the required cutting width in the laser processing method, and Figure 3 shows the distance between the workpiece/focal position and the depth of the hole drilled with one pulse of laser light in the laser processing method. Figure 4 is a graph showing the relationship between the thickness of the workpiece and the time reduction rate of the present invention (compared to conventional technology), Figure 5 is the drilling process and cutting in one embodiment of the present invention. A timing chart showing the timing of the process, and FIG. 6 is a schematic block diagram showing the system configuration in an embodiment of the laser processing method of the present invention. DESCRIPTION OF SYMBOLS 1...Laser beam, 2...Condenser lens, 3...Workpiece, 4...Laser oscillator, 5...Beam bender, 6...Beam nozzle axis, 7...Servo motor, 8
...Table, 9...Servo motor, 10...Numerical controller,...Focus position data, 12...CAD, / CAM system, F...Focus.

Claims (2)

【特許請求の範囲】[Claims] (1)レーザ発振器で発生したレーザ光を被加工物まで
誘導し、前記被加工物の表面にレーザ光を照射すること
により切断する切断加工工程を有し、前記切断加工工程
が穴あけ過程と切断過程からなり、穴あけ過程時の途中
または終了まではレーザ光の焦点を前記被加工物の表面
に合わせて穴あけ加工を行ない、穴あけ過程の途中また
は終了後には前記レーザ光の焦点を切断過程時のレーザ
光の焦点位置に移動して切断加工を行なうレーザ加工方
法。
(1) It has a cutting process in which a laser beam generated by a laser oscillator is guided to a workpiece and the surface of the workpiece is cut by irradiating the laser beam, and the cutting process is a drilling process and a cutting process. During or after the drilling process, the laser beam is focused on the surface of the workpiece to perform drilling, and during or after the drilling process, the laser beam is focused on the surface of the workpiece during the cutting process. A laser processing method that performs cutting by moving to the focal position of the laser beam.
(2)レーザ発振器で発生したレーザ光を被加工物まで
誘導して前記被加工物の表面にレーザ光を照射する手段
と、前記レーザ光の焦点位置を調整する手段と、切断加
工工程における穴あけ過程時には前記レーザ光の焦点を
前記被加工物の表面に合わせて穴あけ加工を行ない、穴
あけ過程の途中または終了後には前記レーザ光の焦点を
切断過程時のレーザ光の焦点位置に移動して切断加工を
行なうように前記各手段を制御する制御手段とを備えた
レーザ加工装置。
(2) A means for guiding a laser beam generated by a laser oscillator to a workpiece and irradiating the surface of the workpiece with the laser beam, a means for adjusting the focal position of the laser beam, and a hole drilling process in the cutting process. During the drilling process, the focus of the laser beam is aligned with the surface of the workpiece to perform drilling, and during or after the drilling process, the focus of the laser beam is moved to the focal position of the laser beam during the cutting process for cutting. A laser processing device comprising a control means for controlling each of the means to perform processing.
JP2018569A 1990-01-29 1990-01-29 Method and device for laser beam machining Pending JPH03221286A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2018569A JPH03221286A (en) 1990-01-29 1990-01-29 Method and device for laser beam machining

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018569A JPH03221286A (en) 1990-01-29 1990-01-29 Method and device for laser beam machining

Publications (1)

Publication Number Publication Date
JPH03221286A true JPH03221286A (en) 1991-09-30

Family

ID=11975258

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018569A Pending JPH03221286A (en) 1990-01-29 1990-01-29 Method and device for laser beam machining

Country Status (1)

Country Link
JP (1) JPH03221286A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5444211A (en) * 1992-06-24 1995-08-22 Fanuc, Ltd. Laser beam machine for cutting a workpiece using multiple machine conditions
US5916460A (en) * 1995-07-07 1999-06-29 Hitachi Cable, Ltd. Method and apparatus for dicing a substrate

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57181786A (en) * 1981-04-28 1982-11-09 Amada Eng & Service Laser working method
JPS60154892A (en) * 1984-01-23 1985-08-14 Mitsubishi Electric Corp Laser cutting device
JPS63108984A (en) * 1986-10-24 1988-05-13 Mitsubishi Electric Corp Laser beam machining method
JPS63268585A (en) * 1986-12-01 1988-11-07 Komatsu Ltd Cutting method by laser beam

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57181786A (en) * 1981-04-28 1982-11-09 Amada Eng & Service Laser working method
JPS60154892A (en) * 1984-01-23 1985-08-14 Mitsubishi Electric Corp Laser cutting device
JPS63108984A (en) * 1986-10-24 1988-05-13 Mitsubishi Electric Corp Laser beam machining method
JPS63268585A (en) * 1986-12-01 1988-11-07 Komatsu Ltd Cutting method by laser beam

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5444211A (en) * 1992-06-24 1995-08-22 Fanuc, Ltd. Laser beam machine for cutting a workpiece using multiple machine conditions
US5916460A (en) * 1995-07-07 1999-06-29 Hitachi Cable, Ltd. Method and apparatus for dicing a substrate

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