JPH03220709A - Manufacture of laminated ceramic capacitor - Google Patents
Manufacture of laminated ceramic capacitorInfo
- Publication number
- JPH03220709A JPH03220709A JP1489990A JP1489990A JPH03220709A JP H03220709 A JPH03220709 A JP H03220709A JP 1489990 A JP1489990 A JP 1489990A JP 1489990 A JP1489990 A JP 1489990A JP H03220709 A JPH03220709 A JP H03220709A
- Authority
- JP
- Japan
- Prior art keywords
- grooves
- ceramic capacitor
- green sheet
- internal electrode
- ceramic green
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003985 ceramic capacitor Substances 0.000 title claims description 33
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 239000000919 ceramic Substances 0.000 claims abstract description 26
- 239000007772 electrode material Substances 0.000 claims abstract description 12
- 238000011049 filling Methods 0.000 claims abstract description 8
- 238000007650 screen-printing Methods 0.000 claims abstract description 6
- 238000000034 method Methods 0.000 claims description 11
- 238000000576 coating method Methods 0.000 abstract description 19
- 239000011248 coating agent Substances 0.000 abstract description 15
- 230000032798 delamination Effects 0.000 abstract description 7
- 238000005245 sintering Methods 0.000 abstract description 4
- 239000003990 capacitor Substances 0.000 description 7
- 239000002002 slurry Substances 0.000 description 6
- 239000011230 binding agent Substances 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000007606 doctor blade method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 229920002799 BoPET Polymers 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Landscapes
- Producing Shaped Articles From Materials (AREA)
- Ceramic Capacitors (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、セラミックグリーンシートに内部電極塗膜を
設ける設は方を改良して得られる積層セラミックコンデ
ンサの製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a method for manufacturing a multilayer ceramic capacitor obtained by improving the method of providing an internal electrode coating on a ceramic green sheet.
セラミックグリーンシートは、積層セラミックコンデン
サを得る場合等に用いられるものであって、セラくツク
の原料粉末を樹脂等のバインダーと混合しシート状に底
形したものである。これを積層セラミックコンデンサに
するには、その複数枚がその主面に電極を形成してから
積層されて焼成される。Ceramic green sheets are used to obtain multilayer ceramic capacitors, and are made by mixing ceramic raw material powder with a binder such as a resin and shaping the mixture into a sheet shape. To make a multilayer ceramic capacitor, a plurality of the capacitors are laminated and fired after electrodes are formed on their main surfaces.
ところで、セラミックグリーンシートは、例えば表面加
工ポリエチレンテレフタレートフィルムの担体フィルム
を同行させておき、これに粘稠なセラミックグリーンシ
ート配合物のスラリーを供給してドクターブレード法よ
り一定の厚さになるようにのばし、乾燥させてシートを
担体フィルムから剥がし取る、いわゆるドクターブレー
ド法に；〇−
よって製造されたり、あるいは上記回行する担体フィル
ムに隣接して互いに逆回転する２一つノロルと、これら
ロールにより供給量を制限されたスラリーを付着させ、
この付着したスラリーを担体フィルムに転移させる第３
のロールを設けた、いわゆる３本ロールリバースコータ
ーによって製造される。By the way, ceramic green sheets can be produced by attaching a carrier film, for example, a surface-treated polyethylene terephthalate film, and supplying a slurry of a viscous ceramic green sheet compound to this to obtain a constant thickness using the doctor blade method. It is produced by the so-called doctor blade method, in which the sheet is rolled out, dried and peeled off from the carrier film; Deposit slurry with limited supply,
The third step is to transfer this adhered slurry onto the carrier film.
It is manufactured using a so-called three-roll reverse coater equipped with several rolls.
このようにして製造されたセラミックグリーンシートに
は所定形状の内部電極塗膜が導電ヘーストをスクリーン
印刷し、乾燥することにより形成され、セラミックコン
デンサグリーンシートが得られる。An internal electrode coating film having a predetermined shape is formed on the thus produced ceramic green sheet by screen printing a conductive paste and drying it, thereby obtaining a ceramic capacitor green sheet.
このセラミックコンデンサグリーンシートの複数枚が重
ねられ圧着されて、セラミックコンデンサグリーンシー
ト積層体が得られるが、この際、各々のセラミックコン
デンサグリーンシートの内部電極塗膜はセラミックグリ
ーンシートの両側及び一端部を余白にして他端がセラミ
ンクグリーンシートの端部に引き出されるように塗布さ
れる。A plurality of these ceramic capacitor green sheets are stacked and crimped to obtain a ceramic capacitor green sheet laminate. At this time, the internal electrode coating of each ceramic capacitor green sheet covers both sides and one end of the ceramic capacitor green sheet. Apply it so that the other end is drawn out to the edge of the ceramic green sheet with a blank space.
ついで、セラミックコンデンサグリーンシートは引き出
された内部電極塗膜が左右交互に位置するように積層さ
れ、積層体の左右に引き出された内部電極膜はこれら左
右の面に外部電極膜を形成することにより接続される。Next, the ceramic capacitor green sheets are stacked so that the internal electrode coatings pulled out are positioned alternately on the left and right sides, and the internal electrode coatings pulled out on the left and right sides of the laminate are stacked by forming external electrode coatings on these left and right surfaces. Connected.
このようにして内部電極塗膜にセラミックグリーンシー
トが挟まれ、これが複数繰り返された積層体となり、こ
れが焼成されて積層セラミックコンデンサになる。In this way, the ceramic green sheets are sandwiched between the internal electrode coatings, and this is repeated multiple times to form a laminate, which is fired to form a multilayer ceramic capacitor.
しかしながら、上記のようにして得られたセラミックコ
ンデンサグリーンシート積層体は、内部電極塗膜がその
膜厚分だけセラ主ツクグリーンシート上に突出して形成
され、セラミックコンデンサグリーンシートは内部電極
塗膜がセラミックグリーンシートを挟み対向されて重ね
られるので、全体としては内部電極膜交叉部分の厚さが
（内部電極の膜厚×積層枚数）分だけセラミックグリー
ンシートのみを積層した場合より厚くなって最も厚く、
ついでセラミックグリーンシートの片面に内部電極膜を
有する左右両端部のエンドマージン部が（内部電極の膜
厚×積層枚数Ｘ１／２）分だけ厚くなり、内部電極の全
く形成されない前後側のサイドマージン部がセラミック
グリーンシートのみを積層した厚みとなり最も薄くなる
。However, in the ceramic capacitor green sheet laminate obtained as described above, the internal electrode coating film is formed so as to protrude from the ceramic main green sheet by the thickness of the internal electrode coating film. Since the ceramic green sheets are stacked facing each other with the ceramic green sheets in between, the overall thickness of the intersecting part of the internal electrode films is thicker by (internal electrode film thickness x number of laminated sheets) than when only the ceramic green sheets are laminated, making it the thickest. ,
Next, the end margins at both the left and right ends, which have an internal electrode film on one side of the ceramic green sheet, are thickened by (internal electrode film thickness x number of laminated sheets x 1/2), and the front and rear side margins where no internal electrode is formed are formed. is the thickness of only ceramic green sheets laminated and is the thinnest.
このような積層方向に厚みの差があるセラミックコンデ
ンサグリーンシート積層体を焼成して積層コンデンサを
得ても、密度差があることにより焼結むらが生じ、セラ
ミックコンデンサグリーンシートの焼結体間に剥離、す
なわちデラミネーションが生じたり、コンデンサの容量
落ちの原因となることがある。Even if a laminated capacitor is obtained by firing such a ceramic capacitor green sheet laminate having a thickness difference in the stacking direction, uneven sintering will occur due to the density difference, and there will be unevenness between the sintered ceramic capacitor green sheets. This may cause peeling, or delamination, or a decrease in capacitance.
そこで、セラミックコンデンサグリーンシート積層体に
ついて厚みの差を生じさせないように、担体フィルム上
に内部電極塗膜パターンを印刷したのち、その上にセラ
ミックグリーンシートを形成して担体フィルムから剥が
し取る方法も知られている（特開昭５９−２２８７１１
号公報）。しかし、この方法は担体フィルム上に直接内
部電極塗膜パターンを形成するため、担体フィルムから
剥がし取るときに内部電極塗膜に応力が生じ、後に焼成
してできあがった積層コンデンサに上記と同様のデラミ
ネーションや容量落ちを起こすことがある。Therefore, in order to prevent thickness differences in ceramic capacitor green sheet laminates, a method is known in which an internal electrode coating pattern is printed on a carrier film, and then a ceramic green sheet is formed on it and then peeled off from the carrier film. (Japanese Unexamined Patent Publication No. 59-228711)
Publication No.). However, since this method forms the internal electrode coating pattern directly on the carrier film, stress is generated in the internal electrode coating when it is peeled off from the carrier film, and the resulting multilayer capacitor is later baked with the same pattern as above. This may cause lamination or loss of capacity.
本発明の目的は、セラミックグリ−シートに内部電極塗
膜を設ける設は方を改良し、積層コンデンサにデラミネ
ーションや容量落ちが起こることがないようにすること
にある。An object of the present invention is to improve the method of providing an internal electrode coating on a ceramic green sheet so that delamination and capacitance loss do not occur in a multilayer capacitor.
本発明は、上記課題を解決するために、凹溝を有するセ
ラミックグリーンシートを形成し、該凹溝に内部電極材
料を充填して得られたセラミックコンデサグリーンシー
トの積層体を主要部に用いて積層セラミンクコンデンサ
を得る積層セラミックコンデンサの製造方法を提供する
ものである。In order to solve the above problems, the present invention uses a laminate of ceramic capacitor green sheets obtained by forming a ceramic green sheet having grooves and filling the grooves with an internal electrode material as the main part. The present invention provides a method for manufacturing a multilayer ceramic capacitor to obtain a multilayer ceramic capacitor.
この際、凹溝は間隔をおいて形成された凹条溝であり、
内部電極材料の充填はスクリーン印刷により行われたセ
ラミンクコンデンサシートの積層体を主要部に有する積
層体を個別チップに分割した分割体を用いて積層セラミ
ックコンデンサを得ることも好ましく、また、内部電極
材料の充填は凹溝の全幅かつ上面と同一平面をなすよう
に行われることも好ましい。At this time, the grooves are grooves formed at intervals,
It is also preferable to obtain a multilayer ceramic capacitor by using a divided body in which a laminate having a laminate of ceramic capacitor sheets as the main part is divided into individual chips, and filling the internal electrode material by screen printing. It is also preferred that the filling of the material is carried out over the entire width of the groove and flush with the upper surface.
セラ【ツクグリーンシートに凹溝を形成し、これに内部
電極材料を充填したセラミックコンデンサグリーンシー
トを用いて積層体を得、これを用いて積層セラミックコ
ンデンサを得るようにしたので、セラミックコンデンサ
グリーンシートは内部電極塗膜が突出せず、平坦な面と
なり、また、内部電極塗膜に何等の応力もかからないよ
うにできる。そのため、これらセラミックコンデンサグ
リーンシートを重ね圧着し積層体としてもその厚さの差
がなく、密度を一様にできるので、その焼成体に焼結む
らを生しることがなく、デラミネーションや容量落ちを
防止することができる。Ceramic capacitor green sheets are made by forming grooves in green sheets and filling them with internal electrode material to obtain a laminate. In this case, the internal electrode coating film does not protrude, resulting in a flat surface, and no stress is applied to the internal electrode coating film. Therefore, these ceramic capacitor green sheets can be piled up and pressed together to make a laminate with no difference in thickness and uniform density, so there will be no sintering unevenness in the fired product, and there will be no delamination or capacitance. Falling can be prevented.
次に本発明の実施例を図面に基づいて説明する。 Next, embodiments of the present invention will be described based on the drawings.
ポリビニルブチラールをバインダーとしたセラミック材
料のスラリーを作製した。A slurry of ceramic material was prepared using polyvinyl butyral as a binder.
第２図にに示すように、このスラリーａをＰＥＴフィル
ム１上に、凸部２ａを等間隔に有するドクターブレード
２を用いて塗工する。塗工直後のセラミックグリーンシ
ートにマイクロウェーブを照射し、極短時間に固化・乾
燥させ、第１図（イ）に示すセラミックグリーンシート
３を得た。同図中、３ａ、３ａ・・は凹条溝であり、そ
の底部までの厚さは３５μｍ１その上面までの厚さは４
０μｍ１その幅は２．６ｕとする。As shown in FIG. 2, this slurry a is applied onto a PET film 1 using a doctor blade 2 having convex portions 2a at equal intervals. Immediately after coating, the ceramic green sheet was irradiated with microwaves to solidify and dry in a very short time, thereby obtaining the ceramic green sheet 3 shown in FIG. 1(A). In the same figure, 3a, 3a, etc. are concave grooves, the thickness of which is 35 μm to the bottom and 4 μm to the top surface.
0μm1 Its width is 2.6u.
次に、第１図（ロ）に示すように、上記凹条溝３ａ、３
ａ・・・にスクリーン印刷にて導電ペースト（内部電極
材料）４．４ ・・ を全幅にわたって印刷し、内部電
極膜パターンを形成した。この際、乾燥後の導電膜の表
面が凹条溝の上面と同一平面をなすようにした。Next, as shown in FIG. 1(b), the grooves 3a, 3
Conductive paste (internal electrode material) 4.4 was printed over the entire width of a... by screen printing to form an internal electrode film pattern. At this time, the surface of the conductive film after drying was made to be on the same plane as the upper surface of the groove.
このようにして得られたシートを所定寸法にカットした
ものを２０枚重ね、熱圧着した。この際上下にカバーシ
ートとして従来の方法で作製した表裏両面が平坦なセラ
主タグリーンシートを各々１０枚づつ重ねて圧着した。Twenty sheets obtained in this manner were cut into predetermined dimensions, stacked one on top of the other, and bonded together by thermocompression. At this time, 10 Cera main tag green sheets each having flat front and back surfaces prepared by a conventional method were stacked and pressure-bonded on top and bottom as cover sheets.
得られた圧着体を個々のチップの大きさにカットしてセ
ラミンクコンデンサグリーンシート積層体を得、これを
３００℃、１０時間加熱してバインダーを焼失させ、そ
の後１ｏｏｏ℃で焼威し、更に焼成積層体を銀ペースト
に浸漬して乾燥させ、８００℃で焼付け、外部電極を有
する積層コンデンサを得た。The obtained crimped body was cut into the size of individual chips to obtain a ceramic capacitor green sheet laminate, which was heated at 300°C for 10 hours to burn out the binder, then burned out at 100°C, and then The fired laminate was immersed in silver paste, dried, and baked at 800° C. to obtain a multilayer capacitor having external electrodes.
この積層コンデンサ１００ケについて、内部電極交叉部
分、サイドマージン部分それぞれの焼結体粒径の測定結
果及びデラミネーションを目視により調べその発生率を
求めた結果を表に示す。For these 100 multilayer capacitors, the results of measuring the sintered particle size at the internal electrode intersection portion and the side margin portion, and visually inspecting delamination and determining the occurrence rate are shown in the table.
なお、表には特開昭５９−２２８７１１号公報に記載さ
れた方法により得られた積層コンデンサについて試験し
た結果を比較例として示した。The table shows, as a comparative example, the results of testing a multilayer capacitor obtained by the method described in JP-A-59-228711.
表
上記は凹条溝をドクターブレードの形状により形成した
が、平滑なセラ主タグリーンシートを形成し、その表面
をグラインダーの如き高速回転刃を用いて削って凹条溝
を形成しても良い。In the table above, the grooves were formed using the shape of a doctor blade, but the grooves may also be formed by forming a smooth Cera main tag green sheet and grinding the surface using a high-speed rotating blade such as a grinder. .
また、上記はマイクロウェーブを乾燥手段として用いた
が、構造粘性を有しており、レベリング性を持たないセ
ラ主ツクグリーンシート用スラリーを用いても良い。Furthermore, although microwaves were used as the drying means in the above example, a slurry for ceramic-based green sheets that has structural viscosity and does not have leveling properties may also be used.
また、内部電極塗膜の印刷方法もスクリーン印刷に限ら
ず、凹条部に内部電極材料を充填でき、かつ乾燥表面が
凹条部の上面と同等高さになるものであれば好ましい。Furthermore, the printing method for the internal electrode coating film is not limited to screen printing, but any method is preferable as long as the grooves can be filled with the internal electrode material and the dry surface can be at the same height as the upper surface of the grooves.
本発明によれば、セラミックグリーンシートに凹部を形
成してこれに電極材料を充填し、得られたセラミックコ
ンデンサグリーンシートの表面に凹凸がなく、内部電極
塗膜に応力が生じないようにしたので、この積層体を用
い焼成して得られた積層セラミックコンデンサは厚みの
相違による密度の差がなく、また内部応力もない。その
ため、焼結むらが生しないので、デラミネーションや容
量落ちを防止することができる。According to the present invention, recesses are formed in the ceramic green sheet and filled with electrode material, so that the surface of the obtained ceramic capacitor green sheet is free from irregularities and stress is not generated in the internal electrode coating. The laminated ceramic capacitor obtained by firing this laminated body has no difference in density due to difference in thickness, and also has no internal stress. Therefore, since uneven sintering does not occur, delamination and loss of capacity can be prevented.
第１図（イ〉（ロ）は本発明の一実施例の積層セラミッ
クコンデンサの製造工程を示す図、第２図はその製造の
際用いるドクタプレートを示す図である。
図中、３はセラミックグリーンシート、３ａは凹条溝、
４は内部電極材料である。
平成２年０１月２６日
第
図Figures 1 (A) and (B) are diagrams showing the manufacturing process of a multilayer ceramic capacitor according to an embodiment of the present invention, and Figure 2 is a diagram showing a doctor plate used in the manufacturing. In the figure, 3 is a ceramic Green sheet, 3a is groove groove,
4 is an internal electrode material. Figure January 26, 1990
Claims (3)
し、該凹溝に内部電極材料を充填して得られたセラミッ
クコンデサグリーンシートの積層体を主要部に用いて積
層セラミックコンデンサを得る積層セラミックコンデン
サの製造方法。(1) A multilayer ceramic capacitor in which a multilayer ceramic capacitor is obtained using a laminate of ceramic capacitor green sheets obtained by forming a ceramic green sheet having grooves and filling the grooves with an internal electrode material as the main part. Production method.
内部電極材料の充填はスクリーン印刷により行われたセ
ラミックコンデンサシートの積層体を主要部に有する積
層体を個別チップに分割した分割体を用いて積層セラミ
ックコンデンサを得ることを特徴とする請求項１記載の
積層セラミックコンデンサの製造方法。(2) The grooves are grooves formed at intervals,
2. The multilayer ceramic capacitor according to claim 1, wherein the filling of the internal electrode material is performed by screen printing, and the multilayer ceramic capacitor is obtained by dividing a multilayer structure into individual chips. A method for manufacturing multilayer ceramic capacitors.
一平面をなすように行われることを特徴とする請求項１
又は２記載の積層セラミックコンデンサの製造方法。(3) Claim 1, characterized in that the filling of the internal electrode material is carried out over the entire width of the groove and on the same plane as the upper surface.
Or the method for manufacturing a multilayer ceramic capacitor according to 2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1489990A JPH03220709A (en) | 1990-01-26 | 1990-01-26 | Manufacture of laminated ceramic capacitor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1489990A JPH03220709A (en) | 1990-01-26 | 1990-01-26 | Manufacture of laminated ceramic capacitor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03220709A true JPH03220709A (en) | 1991-09-27 |
Family
ID=11873839
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1489990A Pending JPH03220709A (en) | 1990-01-26 | 1990-01-26 | Manufacture of laminated ceramic capacitor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03220709A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100845642B1 (en) * | 2006-08-23 | 2008-07-10 | 한국정보통신대학교 산학협력단 | Tunable inter-digital capacitor and method for manufacturing thereof |
| JP2010065276A (en) * | 2008-09-10 | 2010-03-25 | Mitsubishi Materials Corp | Porous metal body and production method therefor |
| JP2010077491A (en) * | 2008-09-25 | 2010-04-08 | Mitsubishi Materials Corp | Method for producing metal porous body |
| JP2010095738A (en) * | 2008-10-14 | 2010-04-30 | Mitsubishi Materials Corp | Method for manufacturing porous metal body |
| JP2011131494A (en) * | 2009-12-24 | 2011-07-07 | Denso Corp | Method for manufacturing ceramic substrate |
| JP2013049925A (en) * | 2012-10-29 | 2013-03-14 | Mitsubishi Materials Corp | Method for manufacturing metal porous body |
| JP2013241680A (en) * | 2013-07-12 | 2013-12-05 | Mitsubishi Materials Corp | Method for manufacturing metal porous body |
-
1990
- 1990-01-26 JP JP1489990A patent/JPH03220709A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100845642B1 (en) * | 2006-08-23 | 2008-07-10 | 한국정보통신대학교 산학협력단 | Tunable inter-digital capacitor and method for manufacturing thereof |
| JP2010065276A (en) * | 2008-09-10 | 2010-03-25 | Mitsubishi Materials Corp | Porous metal body and production method therefor |
| JP2010077491A (en) * | 2008-09-25 | 2010-04-08 | Mitsubishi Materials Corp | Method for producing metal porous body |
| JP2010095738A (en) * | 2008-10-14 | 2010-04-30 | Mitsubishi Materials Corp | Method for manufacturing porous metal body |
| JP2011131494A (en) * | 2009-12-24 | 2011-07-07 | Denso Corp | Method for manufacturing ceramic substrate |
| JP2013049925A (en) * | 2012-10-29 | 2013-03-14 | Mitsubishi Materials Corp | Method for manufacturing metal porous body |
| JP2013241680A (en) * | 2013-07-12 | 2013-12-05 | Mitsubishi Materials Corp | Method for manufacturing metal porous body |
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