JPH0322067U - - Google Patents

Info

Publication number
JPH0322067U
JPH0322067U JP8050289U JP8050289U JPH0322067U JP H0322067 U JPH0322067 U JP H0322067U JP 8050289 U JP8050289 U JP 8050289U JP 8050289 U JP8050289 U JP 8050289U JP H0322067 U JPH0322067 U JP H0322067U
Authority
JP
Japan
Prior art keywords
crucible
molecular beam
coated
pbn
graphite
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8050289U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0619569Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989080502U priority Critical patent/JPH0619569Y2/ja
Publication of JPH0322067U publication Critical patent/JPH0322067U/ja
Application granted granted Critical
Publication of JPH0619569Y2 publication Critical patent/JPH0619569Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP1989080502U 1989-07-07 1989-07-07 分子線セルのｐｂｎるつぼ Expired - Lifetime JPH0619569Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989080502U JPH0619569Y2 (ja) 1989-07-07 1989-07-07 分子線セルのｐｂｎるつぼ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989080502U JPH0619569Y2 (ja) 1989-07-07 1989-07-07 分子線セルのｐｂｎるつぼ

Publications (2)

Publication Number Publication Date
JPH0322067U true JPH0322067U (th) 1991-03-06
JPH0619569Y2 JPH0619569Y2 (ja) 1994-05-25

Family

ID=31625621

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989080502U Expired - Lifetime JPH0619569Y2 (ja) 1989-07-07 1989-07-07 分子線セルのｐｂｎるつぼ

Country Status (1)

Country Link
JP (1) JPH0619569Y2 (th)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020093975A (ja) * 2018-12-07 2020-06-18 昭和電工株式会社 結晶成長装置及び坩堝

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60200895A (ja) * 1984-03-23 1985-10-11 Agency Of Ind Science & Technol 分子線結晶成長装置の噴出セル構造
JPS63199172U (th) * 1987-06-12 1988-12-21
JPH02204391A (ja) * 1989-02-03 1990-08-14 Hitachi Ltd 分子線源用るつぼおよびそれを用いた分子線エピタキシャル成長膜の形成方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60200895A (ja) * 1984-03-23 1985-10-11 Agency Of Ind Science & Technol 分子線結晶成長装置の噴出セル構造
JPS63199172U (th) * 1987-06-12 1988-12-21
JPH02204391A (ja) * 1989-02-03 1990-08-14 Hitachi Ltd 分子線源用るつぼおよびそれを用いた分子線エピタキシャル成長膜の形成方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020093975A (ja) * 2018-12-07 2020-06-18 昭和電工株式会社 結晶成長装置及び坩堝

Also Published As

Publication number Publication date
JPH0619569Y2 (ja) 1994-05-25

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term