JPH0321845B2 - - Google Patents

Info

Publication number
JPH0321845B2
JPH0321845B2 JP16352184A JP16352184A JPH0321845B2 JP H0321845 B2 JPH0321845 B2 JP H0321845B2 JP 16352184 A JP16352184 A JP 16352184A JP 16352184 A JP16352184 A JP 16352184A JP H0321845 B2 JPH0321845 B2 JP H0321845B2
Authority
JP
Japan
Prior art keywords
signal
detection signal
counter
pilot
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16352184A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6141911A (ja
Inventor
Kazunobu Nagasawa
Yasutaka Akyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Aviation Electronics Industry Ltd
Original Assignee
Japan Aviation Electronics Industry Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Aviation Electronics Industry Ltd filed Critical Japan Aviation Electronics Industry Ltd
Priority to JP16352184A priority Critical patent/JPS6141911A/ja
Publication of JPS6141911A publication Critical patent/JPS6141911A/ja
Publication of JPH0321845B2 publication Critical patent/JPH0321845B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/16—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring distance of clearance between spaced objects

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP16352184A 1984-08-03 1984-08-03 形状検査装置 Granted JPS6141911A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16352184A JPS6141911A (ja) 1984-08-03 1984-08-03 形状検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16352184A JPS6141911A (ja) 1984-08-03 1984-08-03 形状検査装置

Publications (2)

Publication Number Publication Date
JPS6141911A JPS6141911A (ja) 1986-02-28
JPH0321845B2 true JPH0321845B2 (OSRAM) 1991-03-25

Family

ID=15775446

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16352184A Granted JPS6141911A (ja) 1984-08-03 1984-08-03 形状検査装置

Country Status (1)

Country Link
JP (1) JPS6141911A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2926703B2 (ja) * 1988-02-12 1999-07-28 東京エレクトロン株式会社 基板処理方法及び装置

Also Published As

Publication number Publication date
JPS6141911A (ja) 1986-02-28

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