JPH03209618A - Supporting body for ferromagnetic metallic thin film - Google Patents

Supporting body for ferromagnetic metallic thin film

Info

Publication number
JPH03209618A
JPH03209618A JP528190A JP528190A JPH03209618A JP H03209618 A JPH03209618 A JP H03209618A JP 528190 A JP528190 A JP 528190A JP 528190 A JP528190 A JP 528190A JP H03209618 A JPH03209618 A JP H03209618A
Authority
JP
Japan
Prior art keywords
film
thin film
ferromagnetic metal
metal thin
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP528190A
Other languages
Japanese (ja)
Other versions
JP2887326B2 (en
Inventor
Kazunori Tanaka
和典 田中
Koichi Abe
晃一 阿部
Tsuyoshi Ota
堅 太田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Industries Inc
Original Assignee
Toray Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries Inc filed Critical Toray Industries Inc
Priority to JP2005281A priority Critical patent/JP2887326B2/en
Publication of JPH03209618A publication Critical patent/JPH03209618A/en
Application granted granted Critical
Publication of JP2887326B2 publication Critical patent/JP2887326B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Compositions Of Macromolecular Compounds (AREA)
  • Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To obtain the ferromagnetic metallic thin film supporting body excellent in an electromagnetic conversion characteristic and a handling characteristic by specifying the range of the average height of projections formed on a face which does not come into contact with the ferromagnetic metal of a biaxial orientation film. CONSTITUTION:The ferromagnetic metallic thin film supporting body is the biaxial orientation film consisting of thermoplastic resin and inactive grains A contained in the resin as main components. Surface projections consisting of the grains A contained in the resin as nucleuses are formed on the face not contacted with the thin film, i.e. a traveling face. The average height of the surface projections is 1/4 or more the average grain size of the grains A. The preferable value of the average height is >=1/3.5 and the more preferable value is >=1/3. The average height <1/4 is not preferable because a film having both the output and handling characteristics can not be obtained.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は強磁性金属薄膜用支持体に関するものである。[Detailed description of the invention] [Industrial application field] The present invention relates to a support for a ferromagnetic metal thin film.

詳しくは支持体上に強磁性金属薄膜を形成して高密度磁
気記録媒体として利用する際、良好なハンドリング特性
を有する強磁性金属薄膜用支持体に関する。
Specifically, the present invention relates to a support for a ferromagnetic metal thin film that has good handling characteristics when a ferromagnetic metal thin film is formed on the support and used as a high-density magnetic recording medium.

[従来の技術] 強磁性金属薄膜用支持体は、その上に強磁性金属薄膜を
真空蒸着などの方法によって形成し、主に高密度磁気記
録媒体として用いられる。この際に支持体に求められる
機能は塗布型の高密度磁気記録媒体の場合と同様に、単
に磁性層を支持する機械特性だけでなく、きわめて薄い
磁性層を平滑に支持して望ましい電磁変換特性を付与す
る表面形状や、支持体自身が良好なハンドリング特性を
持つことすなわち易滑性などが要求されてきた。
[Prior Art] A support for a ferromagnetic metal thin film, on which a ferromagnetic metal thin film is formed by a method such as vacuum deposition, is mainly used as a high-density magnetic recording medium. In this case, the functions required of the support are not just mechanical properties to support the magnetic layer, but also desirable electromagnetic conversion properties to smoothly support the extremely thin magnetic layer, as in the case of coated high-density magnetic recording media. There has been a demand for a surface shape that imparts this, and for the support itself to have good handling characteristics, that is, to be easy to slip.

高密度磁気記録媒体用支持体の材料としては従来から二
軸配向ポリエステルフィルムが主に用いられてきたが、
上記のような要求を満たすためにフィルムの表裏を特化
する事が試みられた(特開昭49−74910号公報、
特開昭51−149006号公報、特開昭52−842
64号公報)。
Conventionally, biaxially oriented polyester films have been mainly used as materials for supports for high-density magnetic recording media.
In order to meet the above requirements, attempts were made to specialize the front and back sides of the film (Japanese Patent Laid-Open No. 49-74910,
JP-A-51-149006, JP-A-52-842
Publication No. 64).

すなわち、良好な電磁変換特性を満たすためにフィルム
の強磁性金属と接する面(以下磁性面と呼ぶ)を平滑に
形成し、反対面(以下走行面と呼ぶ)を粗面易滑化して
良好なハンドリング特性を確保するものである。
In other words, in order to achieve good electromagnetic conversion characteristics, the surface of the film in contact with the ferromagnetic metal (hereinafter referred to as the magnetic surface) is formed to be smooth, and the opposite surface (hereinafter referred to as the running surface) is made rough and easy to smooth. This ensures good handling characteristics.

この技術によって支持体の機能は磁性面と走行面に分離
して開発が進められるようになった。磁性面は単に平滑
であるだけでなく、その表面に粒状やミミズ状の突起を
有する皮膜を設けて強磁性金属薄膜のへラドタッチや耐
摩耗性、耐久性を改良したもの(特開昭56−1693
7号公報、特開昭58−68223号公報等)や、フィ
ルム中の重合触媒残査や添加微粒子に基ずく表面隆起に
よってヘッドクリーニング効果を持たせたちの(特開昭
58−68225号公報等)、皮膜中に微細粒子を存在
させて高温高湿下における耐久性を向上したもの(特開
昭59−84927号公報等)がある。しかし走行面に
ついては単にいくらでも粗面易滑化すれば良いと言うも
のではなく、巻取った際に磁性面の強磁性金属薄膜に転
写してその平滑性や微細形状を損なってはならない制限
から表面粗さに上限があったり、易滑性の皮膜と組み合
わせる必要があった(特開昭58−153639号公報
等)。
This technology has allowed development to proceed by separating the functions of the support into the magnetic surface and running surface. The magnetic surface is not only smooth, but also has a film with granular or earthworm-like protrusions on the surface to improve the held touch, abrasion resistance, and durability of the ferromagnetic metal thin film (Japanese Unexamined Patent Publication No. 1983-1999). 1693
No. 7, JP-A No. 58-68223, etc.), and methods that have a head cleaning effect due to surface ridges based on polymerization catalyst residues and added fine particles in the film (JP-A No. 58-68225, etc.). ), and those in which fine particles are present in the film to improve durability under high temperature and high humidity conditions (JP-A-59-84927, etc.). However, when it comes to the running surface, it is not enough to simply make it as rough and smooth as possible, but there is a restriction that it must not be transferred to the ferromagnetic metal thin film on the magnetic surface during winding, impairing its smoothness and fine shape. There was an upper limit to the surface roughness, and it was necessary to combine it with an easily slippery film (Japanese Patent Laid-Open Publication No. 153639/1983, etc.).

[発明が解決しようとする課題] 最近金属薄膜型磁気記録媒体の進歩は著しく、その高密
度記録適性を活かした高画質蒸着ビデオテープが民生用
に発売されるに至った。蒸着テープが工業化されるにあ
たって、強磁性金属薄膜用支持体に対するハンドリング
特性向上の要求はますます厳しくなってきた。
[Problems to be Solved by the Invention] Recently, metal thin film magnetic recording media have made remarkable progress, and high-quality vapor-deposited video tapes that take advantage of their suitability for high-density recording have come on the market for consumer use. With the industrialization of vapor deposition tapes, demands for improved handling characteristics of supports for ferromagnetic metal thin films have become increasingly severe.

しかしながら、従来の技術では前述の転写の制限から走
行面の改良には限度があり、ハンドリング特性も限界に
達していた。走行面をさらに粗面易滑化してハンドリン
グ特性を向上させると、その表面形状が磁性層である強
磁性金属薄膜に転写して、電磁変換特性を悪化させてし
まうのである。
However, with the conventional technology, there is a limit to the improvement of the running surface due to the above-mentioned transfer limitations, and the handling characteristics have also reached their limits. If the handling characteristics are improved by making the running surface smoother, the surface shape will be transferred to the ferromagnetic metal thin film that is the magnetic layer, deteriorating the electromagnetic conversion characteristics.

本発明はかかる課題を解決し、強磁性金属薄膜型磁気記
録媒体にした時の電磁変換特性がきわめて優れ、同時に
すぐれたハンドリング特性をもった強磁性金属薄膜用支
持体を提供することを目的とする。
The purpose of the present invention is to solve these problems and provide a support for a ferromagnetic metal thin film that has extremely excellent electromagnetic conversion characteristics when made into a ferromagnetic metal thin film type magnetic recording medium, and at the same time has excellent handling characteristics. do.

[課題を解決するための手段] 本発明は、 (1)熱可塑性樹脂と該樹脂内に含有された不活性粒子
を主たる成分とする二軸配向フィルムであって、強磁性
金属薄膜と接しない面には該樹脂内に含有された不活性
粒子(A)を核とする表面突起が形成されており、しか
も該表面突起の平均高さが該不活性粒子(A)の平均粒
径の1/4以上であることを特徴とする強磁性金属薄膜
用支持体、 (2)請求項1に記載の強磁性金属薄膜用支持体の、強
磁性金属薄膜と接しない面上に、易滑性の皮膜が形成さ
れてなる強磁性金属薄膜用支持体、を要旨とする。
[Means for Solving the Problems] The present invention provides: (1) A biaxially oriented film whose main components are a thermoplastic resin and inert particles contained in the resin, which does not come into contact with a ferromagnetic metal thin film. On the surface, surface protrusions are formed with the inert particles (A) contained in the resin as the core, and the average height of the surface protrusions is 1 of the average particle diameter of the inert particles (A). 2. A support for a ferromagnetic metal thin film, characterized in that: The gist of the invention is a support for a ferromagnetic metal thin film on which a film is formed.

本発明を構成する熱可塑性樹脂は特に限定されないが、
ポリエステル、ポリオレフィン、ポリアミド、ポリフェ
ニレンスルフィドなど結晶性の熱可塑性樹脂、中でもポ
リエステル、ポリフェニレンスルフィド、特にポリエス
テルが好ましく用いられる。また、ポリエステルの中で
も、エチレンテレフタレート、エチレンα、β−ビス(
2−クロルフェノキシ)エタン−4,4′−ジカルボキ
シレート、エチレン2.6−ナフタレート単位から選ば
れた少なくとも一種の構造単位を主要構成成分とするも
のが本発明範囲の表面形態を得るのに望ましい。ここ−
でいう結晶性とはいわゆる非晶質ではないことを示すも
のであり、定量的には示差走査熱量計(D S C)に
よる昇温速度10°C/分の熱分析によって融点か検出
され、好ましくは結晶化パラメータΔTcgが150℃
以下のものである。
The thermoplastic resin constituting the present invention is not particularly limited, but
Crystalline thermoplastic resins such as polyester, polyolefin, polyamide, and polyphenylene sulfide are preferably used, among which polyester and polyphenylene sulfide, particularly polyester, are preferably used. Also, among polyesters, ethylene terephthalate, ethylene α, β-bis(
In order to obtain the surface morphology within the scope of the present invention, the main constituent is at least one structural unit selected from 2-chlorophenoxy)ethane-4,4'-dicarboxylate and ethylene 2,6-naphthalate units. desirable. Here-
Crystallinity means that it is not so-called amorphous, and quantitatively the melting point is detected by thermal analysis using a differential scanning calorimeter (DSC) at a heating rate of 10°C/min. Preferably the crystallization parameter ΔTcg is 150°C
These are as follows.

本発明を構成する不活性粒子は、特に限定されないが、
粒径比(粒子の長径/短径)が16 o〜1.3の球形
状の粒子の場合に本発明範囲の表面形態が得られやすい
ので望ましい。
The inert particles constituting the present invention are not particularly limited, but include:
Spherical particles having a particle size ratio (longer axis/breadth axis of particles) of 16° to 1.3 are preferable because the surface morphology within the range of the present invention can be easily obtained.

本発明を構成する不活性粒子は、特に限定されないが、
粒子径分布の相対標準偏差が0.6以下、好ましくは0
.5以下の場合に本発明範囲の表面形態が得られやすい
ので望ましい。
The inert particles constituting the present invention are not particularly limited, but include:
The relative standard deviation of particle size distribution is 0.6 or less, preferably 0.
.. When it is 5 or less, it is preferable because a surface morphology within the range of the present invention can be easily obtained.

不活性粒子の種類として、上記の望ましい特性を満足す
るにはコロイダルシリカに起因する実質的に球形のシリ
カ粒子、架橋高分子による粒子(たとえば架橋ポリスチ
レン)などがあるが、これらに限定されるわけではなく
、製膜方法の工夫により他の粒子、例えば二酸化チタン
、アルミナ、炭酸カルシウムなどでも使いこなし得るも
のである。
Types of inert particles that satisfy the above desirable characteristics include substantially spherical silica particles derived from colloidal silica, particles made of crosslinked polymers (for example, crosslinked polystyrene), but are not limited to these. Rather, it is possible to use other particles such as titanium dioxide, alumina, and calcium carbonate by devising a film-forming method.

不活性粒子(A)の大きさは、特に限定されないが平均
粒径(直径)が5〜2000nm、特に10〜1500
nm、さらに10〜300nmの場合に摩擦係数、出力
特性がより一層良好となるので特に望ましい。
The size of the inert particles (A) is not particularly limited, but the average particle size (diameter) is 5 to 2000 nm, particularly 10 to 1500 nm.
nm, and more preferably from 10 to 300 nm, because the friction coefficient and output characteristics are even better.

本発明における不活性粒子(A)、(B)の全含有量は
特に限定されないがフィルム全体の含有量が0.000
5〜0.5重量%、好ましくは0゜001〜0.3重量
%、さらに好ましくは0.001〜0.15重量%であ
る場合にハンドリング特性、出力特性がより一層良好と
なるので特に望ましい。
The total content of inert particles (A) and (B) in the present invention is not particularly limited, but the content of the entire film is 0.000
A content of 5 to 0.5% by weight, preferably 0°001 to 0.3% by weight, and more preferably 0.001 to 0.15% by weight is particularly desirable because handling characteristics and output characteristics are even better. .

本発明の支持体は上記熱可塑性樹脂と不活性粒子からな
る組成物を主要成分とするが、本発明の目的を阻害しな
い範囲内で、他種ポリマをブレンドしてもよいし、また
酸化防止剤、熱安定剤、滑剤、紫外線吸収剤などの有機
添加剤が通常添加される程度添加されていてもよい。ま
た、その表面に易滑性の皮膜や、非平滑皮膜、微粒子を
含む皮膜が形成されていてもよい。また、その磁性面側
には有機粒子が密着されて突起を形成していても良い。
The support of the present invention has a composition consisting of the above-mentioned thermoplastic resin and inert particles as a main component, but other types of polymers may be blended within a range that does not impede the purpose of the present invention. Organic additives such as additives, heat stabilizers, lubricants, and ultraviolet absorbers may be added to the extent that they are normally added. Moreover, a slippery film, a non-smooth film, or a film containing fine particles may be formed on the surface. Further, organic particles may be closely attached to the magnetic surface side to form protrusions.

これらの皮膜、有機粒子の材料は特に限定されないが磁
気記録用途分野、金属防食用途分野で公知の材料が使用
できる。その形成方法も特に限定されないが、材料を水
あるいは溶媒で希釈して塗布し乾燥させる方法が望まし
い。
The materials for these films and organic particles are not particularly limited, but materials known in the fields of magnetic recording and metal corrosion protection can be used. The method of forming the material is not particularly limited, but it is desirable to dilute the material with water or a solvent, apply it, and dry it.

本発明の支持体は上記組成物の二軸配向フィルムである
。−軸あるいは無配向フィルムではハンドリング特性が
不良となるので好ましくない。この配向の程度は特に限
定されないが、高分子の分子配向の程度の目安であるヤ
ング率が長手方向、幅方向ともに200 k g/mm
2以上である場合にハンドリング特性がより一層良好と
なるのできわめて望ましい。分子配向の程度の目安であ
るヤング率の上限は熱可塑性樹脂の種類によって異なり
一種には言えないが、通常、5000kg/mm2程度
が製造上の限界である。
The support of the present invention is a biaxially oriented film of the above composition. - An axially or non-oriented film is not preferable because its handling properties are poor. The degree of this orientation is not particularly limited, but the Young's modulus, which is a measure of the degree of molecular orientation of the polymer, is 200 kg/mm in both the longitudinal direction and the width direction.
When it is 2 or more, handling characteristics become even better, so it is extremely desirable. Although the upper limit of Young's modulus, which is a measure of the degree of molecular orientation, varies depending on the type of thermoplastic resin and cannot be defined as one type, the manufacturing limit is usually about 5000 kg/mm 2 .

アツベ屈折率計、レーザーを用いた屈折率計、全反射レ
ーザーラマン法などによって測定される、本発明の走行
面の皮膜を除いた表面から深さ1μmまで(フィルム厚
さが1μm以下の場合は反対面まで)の分子配向が二軸
配向である場合に出力特性、ハンドリング特性がより一
層良好となるので特に望ましい。さらにこの部分の熱可
塑性樹脂が結晶性である場合にハンドリング特性、出力
特性がより一層良好となるので特に望ましい。
Measured by Atsube refractometer, laser refractometer, total internal reflection laser Raman method, etc., from the surface of the running surface of the present invention excluding the coating to a depth of 1 μm (if the film thickness is 1 μm or less, It is particularly desirable when the molecular orientation (up to the opposite surface) is biaxial because the output characteristics and handling characteristics become even better. Furthermore, it is particularly desirable if the thermoplastic resin in this portion is crystalline, since handling characteristics and output characteristics will be even better.

本発明の支持体は、走行面から皮膜を除いた表面の表面
突起の平均高さが該突起の核となる不活性粒子(A)の
平均粒径(直径)の1/4以上、好ましくは1/3.5
以上、さらに好ましくは1/3以上であることが必要で
ある。走行面の平均突起高さが平均粒径の1/4未満で
ある場合には出力特性、ハンドリング特性の両立させる
フィルムが得られないので好ましくない。平均突起高さ
の上限は特に限定されないが平均粒径の1.5〜2倍程
度が製造上の限界である。
In the support of the present invention, the average height of the surface protrusions on the surface excluding the coating from the running surface is preferably 1/4 or more of the average particle size (diameter) of the inert particles (A) forming the core of the protrusions. 1/3.5
Above, it is more preferable that it is 1/3 or more. If the average protrusion height on the running surface is less than 1/4 of the average particle diameter, it is not preferable because a film that achieves both output characteristics and handling characteristics cannot be obtained. The upper limit of the average protrusion height is not particularly limited, but the manufacturing limit is about 1.5 to 2 times the average grain size.

本発明の支持体の走行面から皮膜を除いた表面の表面突
起高さは特に限定されないが、平均高さが3〜500n
m、特に10〜250nmの場合に磁気テープにした時
の出力特性、フィルムのノ1ンドリング特性がより一層
良好となるので特に望ましい。
The height of the surface projections on the running surface of the support of the present invention excluding the film is not particularly limited, but the average height is 3 to 500n.
m, particularly from 10 to 250 nm, is particularly desirable since the output characteristics when made into a magnetic tape and the rolling characteristics of the film are even better.

本発明の支持体の走行面から皮膜を除いた表面の突起密
度は特に限定されないが、請求項1の範囲の表面形態を
満足する表面の全突起数がN(個/mm2)、フィルム
中の不活性粒子(A)の含有量Φ(重量%)、該粒子の
平均粒径D (nm)が下式(1)、好ましくは(2)
、さらに好ましくは(3)を満足する場合に磁気テープ
にした時の出力特性、フィルムのハンドリング特性がよ
り一層良好となるので特に望ましい。
The density of protrusions on the running surface of the support of the present invention excluding the film is not particularly limited, but if the total number of protrusions on the surface satisfying the surface morphology of claim 1 is N (number/mm2), The content Φ (wt%) of the inert particles (A) and the average particle diameter D (nm) of the particles are expressed by the following formula (1), preferably (2)
, and more preferably, when (3) is satisfied, it is particularly desirable because the output characteristics and handling characteristics of the film when made into a magnetic tape are even better.

N/(Φ/D  )≧ 5×1013 ・・・(1)N
/(Φ/D  )≧ 7×1013 ・・・(2)N/
(Φ/D  )≧10×1013 ・・・(3)本発明
の支持体は、走行面から皮膜を除いた表面の中心線平均
粗さRaと最大高さRtの比、Rt / Raが8.5
以下、特に8.0以下の場合にハンドリング特性、出力
特性がより一層良好となるので特に望ましい。
N/(Φ/D)≧5×1013...(1)N
/(Φ/D)≧7×1013...(2)N/
(Φ/D)≧10×1013 (3) The support of the present invention has a ratio of the center line average roughness Ra of the surface excluding the coating from the running surface to the maximum height Rt, Rt/Ra of 8 .5
Below, it is particularly preferable to use a value of 8.0 or less because the handling characteristics and output characteristics become even better.

本発明の支持体は上述したように、構成する熱可塑性樹
脂が結晶性であることが望ましいが、特に皮膜を除いた
表層部分、特に走行面から皮膜を除いた表面から深さ1
μmのポリマの結晶化パラメータΔTcgが10〜10
0℃である場合にハンドリング特性がより一層良好とな
るので特に望ましい。
As mentioned above, it is desirable that the thermoplastic resin constituting the support of the present invention is crystalline, but in particular, the surface layer excluding the coating, especially the running surface from the surface excluding the coating, to a depth of 1
The crystallization parameter ΔTcg of the μm polymer is 10 to 10
A temperature of 0° C. is particularly desirable because the handling characteristics become even better.

本発明の支持体は、走行面から皮膜を除いた表面の中心
線平均粗さRaが1〜1100nである場合にハンドリ
ング特性、出力特性がより一層良好となるので特に望ま
しい。
The support of the present invention is particularly desirable when the centerline average roughness Ra of the surface excluding the coating from the running surface is 1 to 1100n, since the handling characteristics and output characteristics will be even better.

本発明の支持体は、走行面から皮膜を除いた表面の表面
突起の相対標準偏差(高さ分布の標準偏差/平均高さ)
が0.5以下、特に0.4以下、さらには0.35以下
の場合にハンドリング特性、出力特性がより一層良好と
なるので特に望ましい本発明の支持体は、走行面から皮
膜を除いた表面の2次イオンマススペクトルによって測
定される表層粒子濃度比が1/10以下、特に1150
以下である場合にハンドリング特性、出力特性がより一
層良好となるので特に望ましい。
The support of the present invention has a relative standard deviation (standard deviation of height distribution/average height) of surface protrusions on the surface excluding the coating from the running surface.
The support of the present invention is particularly preferable because the handling characteristics and output characteristics are even better when it is 0.5 or less, particularly 0.4 or less, and even 0.35 or less. The surface layer particle concentration ratio measured by secondary ion mass spectrum is 1/10 or less, especially 1150
It is particularly desirable that the following is the case, since the handling characteristics and output characteristics will be even better.

次に本発明の支持体の製造方法について説明する。Next, a method for manufacturing the support of the present invention will be explained.

まず、熱可塑性樹脂に不活性粒子(A)を含有せしめる
方法としては、重合後、重合中、重合前のいずれでも良
いがポリマにベント方式の2軸押比機を用いて練り込む
方法が本発明範囲の表面形態のフィルムを得るのに有効
である。また、不活性粒子(A)の含有量を調節する方
法としては、上記方法で高濃度マスターを作っておき、
それを製膜時に不活性粒子を実質的に含有しない熱可塑
性樹脂で希釈して粒子の含有量を調節する方法が本発明
の表面形態のフィルムを得るのに有効である。さらにこ
の不活性粒子(A)高濃度マスターポリマの溶融粘度、
共重合成分などを調節して、その結晶化パラメータΔT
cgを30〜80℃の範囲にしておく方法は延伸破れな
く、本発明範囲の表面形態のフィルムを得るのに有効で
ある。
First, the inert particles (A) can be incorporated into the thermoplastic resin either after, during, or before polymerization, but the most common method is to knead them into the polymer using a vent-type twin-screw presser. This is effective in obtaining a film having a surface morphology within the range of the invention. In addition, as a method of adjusting the content of inert particles (A), a high concentration master is made by the above method,
A method in which the particle content is adjusted by diluting it with a thermoplastic resin that does not substantially contain inert particles during film formation is effective for obtaining a film having the surface morphology of the present invention. Furthermore, the melt viscosity of this inert particle (A) high concentration master polymer,
By adjusting copolymerization components etc., its crystallization parameter ΔT
A method in which the cg is kept in the range of 30 to 80°C is effective in obtaining a film without stretching tearing and having a surface morphology within the range of the present invention.

かくして、不活性粒子(A)を含有するペレットAを十
分乾燥したのち、公知の溶融押出機に供給し、熱可塑性
樹脂の融点以上分解点以下の温度で溶融し、もう一方の
1.50 n m以下の不活性粒子(B)を含有する熱
可塑性樹脂Bやあるいは実質的に不活性粒子を含有しな
い熱可塑性樹脂Cを公知の積層用装置に供給し、スリッ
ト状のダイからシート状に押出し、キャスティングロー
ル上で冷却固化せしめて未延伸フィルムを作る。すなわ
ち、2または3台の押出し機、2または3層用の合流ブ
ロックあるいは口金を用いて、これらの熱可塑性樹脂を
積層する。合流ブロック方式を用いる場合は積層部分を
矩形のものとし、両者の熱可塑性樹脂の溶融粘度の差(
絶対値)を0〜2000ポイズ、好ましくはO〜100
0ボイズの範囲にしておくことが本発明範囲の表面形態
のフィルムを安定して、幅方向の斑なく、工業的に製造
するのに有効である。
After thoroughly drying the pellet A containing the inert particles (A), it is supplied to a known melt extruder and melted at a temperature above the melting point and below the decomposition point of the thermoplastic resin, and then the other 1.50 n Thermoplastic resin B containing inert particles (B) of 1.0 m or less, or thermoplastic resin C containing substantially no inert particles, is supplied to a known lamination device and extruded into a sheet from a slit-shaped die. The film is then cooled and solidified on a casting roll to form an unstretched film. That is, these thermoplastic resins are laminated using two or three extruders, a merging block for two or three layers, or a die. When using the confluence block method, the laminated portion is rectangular, and the difference in melt viscosity of the two thermoplastic resins (
absolute value) from 0 to 2000 poise, preferably from O to 100
Keeping the voids within the range of 0 is effective for industrially producing a film having a surface morphology within the scope of the present invention stably and without unevenness in the width direction.

また、未延伸フィルムの状態で、不活性粒子(A)を含
有する熱可塑性樹脂層の厚さtと含有する不活性粒子の
平均粒径(直径)Dとの比、t/Dを24以下、好まし
くは12以下、さらに好ましくは8.5以下にしておく
ことが本発明範囲の表面形態を有するフィルムを製造す
るのにきわめて有効である。
In addition, in the state of an unstretched film, the ratio of the thickness t of the thermoplastic resin layer containing the inert particles (A) to the average particle size (diameter) D of the included inert particles, t/D, is 24 or less. , preferably 12 or less, more preferably 8.5 or less, is extremely effective for producing a film having a surface morphology within the range of the present invention.

上記は積層構成がA/B、A/C,A/C/Bの場合で
あるがもちろん、それ以上の多層構造でも良い(ここで
、A、B、Cそれぞれの熱可塑性樹脂の種類は同種でも
、異種でも良い)。そしてAの面を本発明の走行面とす
る。
The above is for the case where the laminated structure is A/B, A/C, A/C/B, but of course, a multilayer structure with more than that is also possible (here, the type of thermoplastic resin for each of A, B, and C is the same). However, it can also be a different species). The surface A is the running surface of the present invention.

次にこの多層の未延伸フィルムを二軸延伸し、二軸配向
せしめる。二軸延伸の方法は同時二軸延伸、逐次二軸延
伸法のどちらでもよいが、長手方向、幅方向の順に延伸
する逐次二軸延伸法の場合に本発明範囲の表面形態のフ
ィルムを安定して、幅方向の斑なく、工業的に製造する
のに有効である。逐次二軸延伸の場合、長手方向の延伸
を、3段階、特に4段階以上に分けて、40〜150°
Cの範囲で、かつ、1000〜50000%/分という
延伸速度で、3〜6倍行なう方法は本発明範囲の表面形
態を有するフィルムを得るのに有効である。幅方向の延
伸温度、速度は、80〜170℃、1000〜2000
0%/分の範囲が好適である。延伸倍率は3〜10倍が
好適である。また必要に応じてさらに長手方向、幅方向
の少なくとも一方向に延伸することもできる。いずれに
しても不活性粒子を含有するきわめて薄い層を設けてか
ら、面積延伸倍率(長手方向倍率X幅方向倍率)として
9倍以上の延伸を行なうことが本発明のポイントである
。次にこの延伸フィルムを熱処理する。この場合の熱処
理条件としては、幅方向に弛緩、微延伸、定長下のいず
れかの状態で140〜280℃、好ましくは160〜2
20℃の範囲で0.5〜60秒間が好適であるが、熱処
理にマイクロ波加熱を併用することにって本発明範囲の
表面形態を有するフィルムが得られやすくなるので望ま
しい。必要に応じてフィルム表面に皮膜を形成する場合
は、横延伸工程直前あるいは熱処理工程直前に公知の塗
布工程を設け、材料を塗布すると特別に乾燥工程を設け
る必要がなく望ましい。
Next, this multilayer unstretched film is biaxially stretched and biaxially oriented. The biaxial stretching method may be either a simultaneous biaxial stretching method or a sequential biaxial stretching method, but in the case of a sequential biaxial stretching method in which the film is stretched in the longitudinal direction and then in the width direction, the film having the surface morphology within the range of the present invention can be stabilized. Therefore, it is effective for industrial production without unevenness in the width direction. In the case of sequential biaxial stretching, the stretching in the longitudinal direction is divided into three stages, especially four or more stages, and the stretching is performed at 40 to 150°.
C and a stretching speed of 1,000 to 50,000%/min for 3 to 6 times is effective for obtaining a film having a surface morphology within the range of the present invention. The stretching temperature and speed in the width direction are 80 to 170°C, 1000 to 2000
A range of 0%/min is preferred. The stretching ratio is preferably 3 to 10 times. Further, if necessary, it can be further stretched in at least one of the longitudinal direction and the width direction. In any case, the key point of the present invention is to provide an extremely thin layer containing inert particles and then stretch the film to an areal stretching ratio (lengthwise magnification x widthwise magnification) of 9 times or more. Next, this stretched film is heat treated. In this case, the heat treatment conditions are 140 to 280 °C, preferably 160 to 2
The temperature is preferably 20° C. for 0.5 to 60 seconds, but it is preferable to use microwave heating in combination with the heat treatment, as this makes it easier to obtain a film having a surface morphology within the range of the present invention. If a film is to be formed on the surface of the film if necessary, a known coating step is performed immediately before the transverse stretching step or immediately before the heat treatment step to apply the material, which eliminates the need for a special drying step.

また、製品フィルムの状態で、不活性粒子(A)を含有
する熱可塑性樹脂層の厚さtと含有する不活性粒子(A
)の平均粒径(直径)Dとの比、t/Dを2以下、好ま
しくは1以下、さらに好ましくlよ0.7以下とするこ
とが本発明範囲の表面形態を有するフィルムを製造する
のにきわめて有効である。したがって、適切な積層厚さ
は用いる不活性粒子(A)の大きさによって異なり一概
には言えないが、通常、5〜1ooonm、好ましくは
10〜500nmの場合に本発明範囲の表面形態が得ら
れやすいので特に有効である。
In addition, in the state of the product film, the thickness t of the thermoplastic resin layer containing the inert particles (A) and the thickness t of the thermoplastic resin layer containing the inert particles (A)
) to the average particle size (diameter) D, t/D is 2 or less, preferably 1 or less, and more preferably 1 to 0.7 or less to produce a film having a surface morphology within the range of the present invention. It is extremely effective. Therefore, although the appropriate lamination thickness varies depending on the size of the inert particles (A) used and cannot be generalized, it is usually 5 to 100 nm, preferably 10 to 500 nm, to obtain the surface morphology within the range of the present invention. It is particularly effective because it is easy.

本発明の製法の特徴は、特殊な方法で調整した高濃度粒
子ポリマを用いて、不活性粒子(A)を含有するきわめ
て薄い層を設けた後にフィルムを二軸延伸することであ
る。
A feature of the process according to the invention is the biaxial stretching of the film after the application of a very thin layer containing inert particles (A) using a specially prepared highly concentrated particle polymer.

[作用] 本発明は不活性粒子(A)を含有する熱可塑性樹脂を高
濃度マスターポリマを特殊な条件で積層した後二軸延伸
すること1こよって、従来の方法では得られない表面形
態の走行面を有するフィルムとしたので、表面の突起特
性が飛躍的に向上した結果、本発明の効果が得られたも
のと推定される。
[Function] The present invention involves laminating a thermoplastic resin containing inert particles (A) with a high concentration master polymer under special conditions, and then biaxially stretching (1). Since the film had a running surface, it is presumed that the effects of the present invention were obtained as a result of the dramatic improvement in the protrusion characteristics of the surface.

[物性の測定方法ならびに効果の評価方法]本発明の特
性値の測定方法並びに効果の評価方法は次の通りである
[Method of Measuring Physical Properties and Evaluating Effects] The methods of measuring the characteristic values and evaluating the effects of the present invention are as follows.

(1)粒子の平均粒径 強磁性金属薄膜用支持体の走行面側から熱可塑性樹脂を
プラズマ低温灰化処理法(たとえばヤマト科学製PR−
503型)で除去し粒子を露出させる。処理条件は皮膜
や熱可塑性樹脂は灰化されるか粒子はダメージを受けな
い条件を選択する。
(1) Average particle size of particles A thermoplastic resin is removed from the running surface side of a support for a ferromagnetic metal thin film using a plasma low-temperature ashing method (for example, Yamato Scientific PR-
503) to expose the particles. The processing conditions are selected so that the film and thermoplastic resin are incinerated, but the particles are not damaged.

これをSEM(走査型電子顕微鏡)で観察し、粒子の画
像(粒子によってできる光の濃淡)をイメージアナライ
ザー(たとえはケンブリッジインストルメント製QTM
900)に結ひ付け、観察箇所を変えて粒子数1.00
00個以上で次の数値処理を行ない、それによって求め
た数平均径りを平均粒径とする。
This is observed with a SEM (scanning electron microscope), and an image of the particles (shades of light created by the particles) is analyzed using an image analyzer (for example, a QTM manufactured by Cambridge Instruments).
900) and changed the observation point to obtain a particle number of 1.00.
00 or more, perform the following numerical processing, and use the number average diameter obtained thereby as the average particle diameter.

D−ΣDi/N ここで、Diは粒子の円相当径、Nは個数である。D-ΣDi/N Here, Di is the circle-equivalent diameter of the particles, and N is the number of particles.

強磁性金属薄膜用支持体の走行面に不活性粒子を含む皮
膜があった場合にはあらかじめこの皮膜を取り除いてか
ら灰化を行うか、灰化前のSEM画像と灰化後のSEM
画像から粒径分布を求めて比較し、数値処理によって皮
膜中の不活性粒子の影響を排除する。同一粒径の不活性
粒子の場合にはこの必要はない。
If there is a film containing inert particles on the running surface of the support for ferromagnetic metal thin film, either remove this film in advance and then perform ashing, or SEM images before ashing and SEM after ashing.
The particle size distribution is determined from the images and compared, and the influence of inert particles in the film is eliminated through numerical processing. This is not necessary in the case of inert particles of the same particle size.

(2)粒子の含有量 熱可塑性樹脂は溶解し不活性粒子は溶解させない溶媒を
選択し、粒子を熱可塑性樹脂から遠心分離し、粒子の全
体重量に対する比率(重量%)をもって粒子含有量とす
る。場合によっては赤外分光法の併用も有効である。
(2) Particle content Select a solvent that dissolves the thermoplastic resin but does not dissolve the inert particles, centrifuge the particles from the thermoplastic resin, and determine the particle content as the ratio (wt%) to the total weight of the particles. . In some cases, infrared spectroscopy may also be effective.

強磁性金属薄膜用支持体表面に不溶性物質を含む皮膜が
あった場合はあらかじめこの皮膜を取り除いてから溶解
を行う。
If there is a film containing an insoluble substance on the surface of the support for a ferromagnetic metal thin film, this film is removed in advance before dissolution.

(3)ガラス転移点Tg、冷結晶化温度Tcc。(3) Glass transition point Tg, cold crystallization temperature Tcc.

結晶化パラメータΔTcg、融点 パーキンエルマー社製のDSC(示差走査熱量計)■型
を用いて測定した。DSCの測定条件は次の通りである
。すなわち、試料10mgをDSC装置にセットし、3
00°Cの温度で5分間溶融した後、液体窒素中に急冷
する。この急冷試料を10℃/分で昇温し、ガラス転移
点Tgを検知する。さらに昇温を続け、ガラス状態から
の結晶化発熱ピーク温度をもって冷結晶化温度Tccと
した。さらに昇温を続け、融解ピーク温度を融点とした
。また、TccとTgの差(Tcc−Tg)を結晶化パ
ラメータΔTcgと定義する。
Crystallization parameter ΔTcg and melting point were measured using a PerkinElmer DSC (differential scanning calorimeter) type II. The DSC measurement conditions are as follows. That is, 10 mg of sample was set in the DSC device, and 3
After melting for 5 minutes at a temperature of 00°C, it is quenched into liquid nitrogen. This rapidly cooled sample is heated at a rate of 10° C./min, and the glass transition point Tg is detected. The temperature was further increased, and the exothermic peak temperature of crystallization from the glass state was defined as the cold crystallization temperature Tcc. The temperature was further increased, and the melting peak temperature was taken as the melting point. Further, the difference between Tcc and Tg (Tcc - Tg) is defined as a crystallization parameter ΔTcg.

(4)表面の分子配向(屈折率) 強磁性金属薄膜用支持体の走行面を測定する。(4) Surface molecular orientation (refractive index) Measure the running surface of the support for ferromagnetic metal thin film.

この面に皮膜がある場合にはあらかじめこの皮膜を取り
除いてから測定を行う。
If there is a film on this surface, remove this film before starting the measurement.

ナトリウムD線(589nm)を光源として、アツベ屈
折率計を用いて測定した。マウント液にはヨウ化メチレ
ンを用い、25°C165%RHにて測定した。ポリマ
の二軸配向性は長手方向、幅方向、厚さ方向の屈折率を
Nl 、N2 、N3とした時、(Nl −N2 )の
絶対値が0.07以下、かつ、N3 / [(Nl +
N2 )/2]か0.95以下であることをひとつの基
準とできる。また、レーザー型屈折率計を用いて屈折率
を測定しても良い。さらに、この方法では測定が難しい
場合は全反射レーサーラマン法を用いることもできる。
Measurement was performed using an Atsube refractometer using sodium D line (589 nm) as a light source. Methylene iodide was used as the mounting solution, and the measurement was performed at 25°C and 165%RH. The biaxial orientation of the polymer is such that when the refractive index in the longitudinal direction, width direction, and thickness direction is Nl, N2, and N3, the absolute value of (Nl - N2) is 0.07 or less, and N3 / [(Nl +
One criterion can be that N2)/2] is 0.95 or less. Alternatively, the refractive index may be measured using a laser refractometer. Furthermore, if measurement is difficult with this method, a total internal reflection laser Raman method can also be used.

レーサー全反射ラマンの測定は、Jobin−Yvon
社製Ramanor U −1000ラマンシステムに
より、全反射ラマンスペクトルを測定し、例えばPET
の場合では、1615cm ’(ベンゼン環の骨格振動
)と1730cm’(カルボニル基の伸縮振動)のバン
ド強度比の偏光測定比(YY/XX比など。
Racer total internal reflection Raman measurement is performed by Jobin-Yvon
The total reflection Raman spectrum was measured using a Ramanor U-1000 Raman system manufactured by
In the case of , the polarization measurement ratio (YY/XX ratio, etc.) of the band intensity ratio of 1615 cm' (skeletal vibration of benzene ring) and 1730 cm' (stretching vibration of carbonyl group).

ここでYY:レーザーの偏光方向をYにしてYに対して
平行なうマン光検出、XX:レーザーの偏光方向をXに
してXに対して平行なうマン光検出)が分子配向と対応
することを利用できる。ポリマの二軸配向性はラマン測
定から得られたパラメータを長手方向、幅方向の屈折率
に換算して、その絶対値、差などから判定できる。この
場合の測定条件は次のとおりである。
Here, YY: detection of Mann light parallel to Y with the polarization direction of the laser set to Y; XX: detection of Mann light parallel to X with the polarization direction of the laser set to X) corresponds to molecular orientation. Available. The biaxial orientation of a polymer can be determined by converting the parameters obtained from Raman measurement into refractive indices in the longitudinal direction and width direction, and based on their absolute values, differences, etc. The measurement conditions in this case are as follows.

■光源 アルゴンイオンレーザ−(5145A)■試料のセツテ
ィング フィルム表面を全反射プリズムに圧着させ、レーザーの
プリズムへの入射角(フィルム厚さ方向との角度)は6
0’ とした。
■Light source Argon ion laser (5145A) ■Setting the sample The surface of the film is pressed against a total reflection prism, and the incident angle of the laser to the prism (angle with the film thickness direction) is 6
It was set to 0'.

■検出器 PM : RCA31034/Photon Coun
ting System(Hamamalsu C12
30)  (supply 1600V)■測定条件 5LIT        ]000μmLASER10
0mW GATE  TIME        1.0secS
CAN 5PEED     12cn+−1/min
SAMPLING INTERVAL O,2cm ’
REPEAT  TIME      6(5)表面突
起の平均高さ 強磁性金属薄膜用支持体の走行面を測定する。
■Detector PM: RCA31034/Photon Coun
ting System (Hamanalsu C12
30) (supply 1600V) ■Measurement conditions 5LIT ] 000μm LASER10
0mW GATE TIME 1.0secS
CAN 5PEED 12cn+-1/min
SAMPLING INTERVAL O, 2cm'
REPEAT TIME 6 (5) Average height of surface projections Measure the running surface of the support for ferromagnetic metal thin film.

この面に皮膜がある場合にはあらかじめこの皮膜を取り
除いてから測定を行う。
If there is a film on this surface, remove this film before starting the measurement.

2検出器力式の走査型電子顕微鏡[ESM−3200、
エリオニクス(株)製]と断面測定装置[PMS−1、
エリオニクス(株)製]においてフィルム表面の平坦面
の高さを0として走査した時の突起の高さ測定値を画像
処理装置[I BA82000、カールツアイス(株)
製]に送り、画像処理装置上にフィルム表面突起画像を
再構築する。次に、この表面突起画像で突起部分を2値
化して得られた個々の突起の面積から円相当径を求めこ
れをその突起の平均径とする。また、この2値化された
個々の突起部分の中で最も高い値をその突起の高さとし
、これを個々の突起について求める。この測定を場所を
かえて500回繰返し、突起個数を求め、測定された全
突起についてその高さの平均値を平均高さとした。また
個々の突起の高さデータをもとに、高さ分布の標準偏差
を求めた。また走査型電子顕微鏡の倍率は、1000〜
8000倍の間の値を選択する。なお、場合によっては
、高精度光干渉式3次元表面解析装置(WYKO社製T
OPO−3D、対物レンズ:40〜200倍、高解像度
カメラ使用が有効)を用いて得られる高さ情報を上記S
EMの値に読み替えて用いてもよい。
Two-detector scanning electron microscope [ESM-3200,
manufactured by Elionix Co., Ltd.] and a cross-sectional measuring device [PMS-1,
The measured height of the protrusions was measured using an image processing device [I BA82000, Carl Zeiss Co., Ltd.] when the height of the flat surface of the film was set as 0.
[Manufacturer] and reconstructs the image of the film surface protrusions on an image processing device. Next, a circular equivalent diameter is determined from the area of each protrusion obtained by binarizing the protrusion portion using this surface protrusion image, and this is taken as the average diameter of the protrusion. Furthermore, the highest value among the binarized individual protrusion portions is determined as the height of the protrusion, and this value is determined for each protrusion. This measurement was repeated 500 times at different locations to determine the number of protrusions, and the average value of the heights of all the measured protrusions was taken as the average height. Furthermore, the standard deviation of the height distribution was determined based on the height data of each protrusion. Furthermore, the magnification of a scanning electron microscope is 1000~
Select a value between 8000 times. In some cases, a high-precision optical interferometric three-dimensional surface analysis device (WYKO T
The above S
It may be used by replacing it with the value of EM.

(6)中心線平均表面粗さRa、最大高さRt強磁性金
属薄膜用支持体の走行面を測定する。
(6) Center line average surface roughness Ra and maximum height Rt of the running surface of the support for ferromagnetic metal thin film are measured.

この面に皮膜がある場合にはあらかじめこの皮膜を取り
除いてから測定を行う。
If there is a film on this surface, remove this film before starting the measurement.

小板研究所製の高精度薄膜段差測定器ET−10を用い
て測定した。条件は下記のとおりであり、20回の測定
の平均値をもって値とした。
The measurement was performed using a high-precision thin film step measuring device ET-10 manufactured by Koita Research Institute. The conditions were as follows, and the average value of 20 measurements was taken as the value.

・触針先端半径:0.5μm ・触針荷重  : 5mg ・測定長   :1mm ・カットオフ値:0.08mm なお、Ra、Rtの定義は、たとえば、奈良治部著1表
面粗さの測定・評価法」 (総合技術センター 198
3)に示されているものである。
・Stylus tip radius: 0.5μm ・Stylus load: 5mg ・Measurement length: 1mm ・Cutoff value: 0.08mm The definitions of Ra and Rt can be found, for example, in 1 Surface Roughness Measurement by Jibu Nara. Evaluation Method” (General Technology Center 198
3).

(7)ヤング率 J I 5−Z−1702に規定された方法にしたがっ
て、インストロンタイプの引っ張り試験機を用いて、2
5℃、65%RHにて測定した。
(7) Young's modulus 2 using an Instron type tensile tester according to the method specified in J I 5-Z-1702.
Measurement was performed at 5° C. and 65% RH.

(8)溶融粘度 高化式フローテスターを用いて、温度290’C。(8) Melt viscosity Temperature: 290'C using Koka flow tester.

ずり速度200cm−1で測定した。Measurements were made at a shear rate of 200 cm-1.

(9)粒径比 上記(1)の測定において個々の粒子の長径の平均値/
短径の平均値の比である。
(9) Particle size ratio In the measurement of (1) above, the average value of the long diameter of each particle /
It is the ratio of the average value of the short axis.

すなわち、下式で求められる。That is, it can be obtained using the following formula.

長径=ΣDli/N 短径−ΣD2i/N Dli、 Djiはそれぞれ個々の粒子の長径(最大径
)、短径(最短径)、Nは総個数である。
Major axis = ΣDli/N Minor axis - ΣD2i/N Dli, Dji are the major axis (maximum diameter) and minor axis (shortest axis) of each individual particle, and N is the total number.

(10)粒径の相対標準偏差 上記(1)の方法で測定された個々の粒子径Di1平均
平均径0予 差σ(=f(Σ(Di −D) 2/N))を平均径り
で割った値(σ/D)で表わした。
(10) Relative standard deviation of particle diameter The individual particle diameter Di1 average mean diameter 0 error σ (=f(Σ(Di −D) 2/N)) measured by the method in (1) above is calculated as the average diameter. It is expressed as the value divided by (σ/D).

(11)表層濃度比 強磁性金属薄膜用支持体の走行面側を測定する。(11) Surface concentration ratio Measure the running surface side of the support for ferromagnetic metal thin film.

2次イオン質量分析装置(SIMS)を用いて、フィル
ム中の粒子に起因する元素の内のもっとも高濃度の元素
とポリエステルの炭素元素の濃度比を粒子濃度とし、厚
さ方向の分析を行なう。SIMSによって測定される最
表層粒子濃度(深さ0の点)における粒子濃度Aとさら
に深さ方向の分析を続けて得られる最高濃度Bの比、A
/Bを表層濃度比と定義した。測定する面に皮膜がある
場合にはあらかじめこの皮膜を取り除いてから測定を行
うか、STMSによって皮膜とフィルムの界面が検出可
能な場合はその界面を前述の深さ0の点とする。測定装
置、条件は下記のとおりである。
Using a secondary ion mass spectrometer (SIMS), the particle concentration is determined as the concentration ratio of the element with the highest concentration among the elements caused by particles in the film and the carbon element of the polyester, and analysis is performed in the thickness direction. The ratio of the particle concentration A at the outermost layer particle concentration (point at depth 0) measured by SIMS to the maximum concentration B obtained by further analysis in the depth direction, A
/B was defined as the surface layer concentration ratio. If there is a film on the surface to be measured, the film is removed beforehand before measurement, or if the interface between the film and the film can be detected by STMS, the interface is set as the zero depth point described above. The measuring device and conditions are as follows.

■ 測定装置 2次イオン質量分析装置(SIMS) 西独、ATOMIKA社製 A−DIDA3000■ 
測定条件 1次イオン種 :0□ 1次イオン加速電圧:12kV 1次イオン電流: 200nA ラスター領 域:400μm口 分 析領域:ゲート30% 測定真空度  :6. 0XIO”TartE−GUN
   :0.5kV−3,OAなお、S IMSによる
測定か難しい粒子の場合には全反射赤外分光法、コンフ
ォーカル顕微鏡なども粒子のデプスプロファイルを測定
するのに有効である。
■ Measuring device Secondary ion mass spectrometer (SIMS) A-DIDA3000 manufactured by ATOMIKA, West Germany ■
Measurement conditions Primary ion species: 0□ Primary ion acceleration voltage: 12kV Primary ion current: 200nA Raster area: 400μm Analysis area: Gate 30% Measurement vacuum degree: 6. 0XIO”TartE-GUN
: 0.5 kV-3, OA Note that in the case of particles that are difficult to measure by SIMS, total reflection infrared spectroscopy, confocal microscopy, etc. are also effective in measuring the depth profile of the particles.

(12)摩擦係数μに フィルムを幅1層2インチのテープ状にスリ・ソトした
ものをテープ走行性試験機TBT−300型(■横浜シ
ステム研究新製)を使用し、20°C160%RH雰囲
気で走行させ、初期の摩擦係数を下記の式より求めた(
フィルム幅は1層2インチとした)。
(12) Using a tape runnability tester model TBT-300 (manufactured by Yokohama System Research Co., Ltd.), a film with a friction coefficient μ of 1 layer and 2 inch wide tape was prepared at 20°C, 160% RH. The vehicle was run in an atmosphere, and the initial coefficient of friction was determined using the following formula (
The film width was 2 inches per layer).

μに=0.733 l og (T2 /Tl )ここ
でTIは入側張力、T2は出側張力である。
μ = 0.733 l og (T2 /Tl) where TI is the inlet tension and T2 is the outlet tension.

ガイド径は6mmφであり、ガイド材質は5US27(
表面粘度0.23)、巻き付は角は180゜走行速度は
3.3cm/秒である。この測定によって得られたμk
か0. 3以下の場合は摩擦係数:良好、0.3を越え
る場合は摩擦係数:不良と判定した。このμにはフィル
ムを磁気記録媒体、コンデンサ、包装用などの加工する
時のハンドリング特性を左右する臨界点である。
The guide diameter is 6mmφ, and the guide material is 5US27 (
The surface viscosity is 0.23), the winding angle is 180°, and the running speed is 3.3 cm/sec. μk obtained by this measurement
Or 0. If the friction coefficient was 3 or less, the friction coefficient was determined to be good, and if it exceeded 0.3, the friction coefficient was determined to be poor. This μ is the critical point that affects the handling characteristics when processing the film into magnetic recording media, capacitors, packaging, etc.

(13)ハンドリング特性 製造した強磁性金属薄膜用支持体を、内径6インチのプ
ラスチックコアを用いて走行面が内側になるようにして
、500mm幅X5000m長さでスリットしロール状
に巻き上げる。このようにしたロールを10本スリット
して、そのうち皺なく良好に巻取れたロール数を数え表
示する。10本中5本以上が良好に巻取れないものは、
ハンドリング特性不良と判定する。
(13) Handling characteristics The produced support for a ferromagnetic metal thin film was slit into a 500 mm width x 5000 m length using a plastic core with an inner diameter of 6 inches so that the running surface was on the inside, and then rolled up into a roll. Ten rolls thus prepared are slit, and the number of rolls that can be wound well without wrinkles is counted and displayed. If more than 5 out of 10 rolls cannot be wound properly,
It is determined that the handling characteristics are poor.

(14)出力特性 連続真空斜め蒸着法により、フィルムの磁性面にCo、
Ni強磁性金属薄膜(Ni=20重量%、膜厚150n
m)を微量の酸素の存在下に形成させる。酸素濃度は強
磁性金属薄膜の酸素含有量が金属に対する原子数比で5
%となるように調整する。そののち、得られた強磁性金
属薄膜表面にステアリン酸を約10mg/rrfとなる
ように塗布し、8mm幅にスリットして磁気テープとす
る。このテープ50m長さを5ONY製ハイエイトカセ
ツトに組み込みVTRカセットテープとした。
(14) Output characteristics By continuous vacuum oblique evaporation method, Co,
Ni ferromagnetic metal thin film (Ni = 20% by weight, film thickness 150n
m) is formed in the presence of trace amounts of oxygen. The oxygen concentration is such that the oxygen content in the ferromagnetic metal thin film is 5 in terms of the atomic ratio to the metal.
%. Thereafter, stearic acid is applied to the surface of the obtained ferromagnetic metal thin film at a concentration of about 10 mg/rrf, and the film is slit into a width of 8 mm to obtain a magnetic tape. A 50 m length of this tape was assembled into a 5ONY High Eight cassette to make a VTR cassette tape.

コノテープim S ON Y製家庭用VTR(EVS
 900)を用いてシバツク製のテレビ試験波形発生器
(TG7/U706)により100%クロマ信号を記録
し、その再生信号からシバツク製カラービデオノイズ測
定器(925D/1)でクロマS/Nを測定した。
Konotape im S ON Y home use VTR (EVS
900) was used to record a 100% chroma signal using a Shibaku TV test waveform generator (TG7/U706), and measure the chroma S/N from the playback signal using a Shibaku color video noise measuring device (925D/1). did.

[実施例] 本発明を実施例に基づいて説明する。[Example] The present invention will be explained based on examples.

実施例1〜4、比較例1〜2 平均粒径の異なるコロイダルシリカに起因するシリカ粒
子を含有する水ゾル(粒子濃度=50%)をそれぞれベ
ント式の二軸押出機を用いてポリエチレンテレフタレー
トに所定量練り込み、30w%の高濃度マスターペレッ
トを作った。このマスターペレットと不活性粒子を実質
的に含有しないポリエチレンテレフタレートのペレット
を所定割合で混合した。これらの混合ペレットAを18
000で3時間減圧乾燥した後(5To r r) 、
押出機1に供給した。一方、実質的に不活性粒子を含有
しないポリエチレンテレフタレートのペレットCを同様
に乾燥した後、押出機2に供給し、それぞれ300°C
に溶融した後、矩形のフィードブロックを用いて溶融状
態で2層に積層しくA/C)、口金スリットからシート
状に押し出し、静電印加キャスト法を用いて表面温度3
0℃のキャスティング・ドラムに巻きつけて冷却固化し
、2層構造の未延伸フィルムを作った。この時、押出機
の吐出量を調節し不活性粒子の平均粒径りとA層の片側
厚さtとの比、t/Dを変更した。この未延伸フィルム
を温度80℃にて長手方向に3.3倍延伸した。この延
伸は2組ずつのロールの周速差で、3段階で行なった。
Examples 1 to 4, Comparative Examples 1 to 2 Aqueous sol containing silica particles (particle concentration = 50%) caused by colloidal silica with different average particle sizes were converted into polyethylene terephthalate using a vented twin-screw extruder, respectively. By kneading a predetermined amount, a high concentration master pellet of 30w% was made. This master pellet and polyethylene terephthalate pellets containing substantially no inert particles were mixed at a predetermined ratio. 18 of these mixed pellets A
After drying under reduced pressure at 000 for 3 hours (5 Torr),
It was fed to extruder 1. On the other hand, polyethylene terephthalate pellets C containing substantially no inert particles were similarly dried and then fed to extruder 2 at 300°C.
After melting, the molten state is laminated into two layers using a rectangular feed block (A/C), extruded into a sheet form from a slit in the mouthpiece, and the surface temperature is set to 3 using an electrostatic casting method.
It was wound around a casting drum at 0° C. and cooled and solidified to produce an unstretched film with a two-layer structure. At this time, the discharge rate of the extruder was adjusted to change the ratio of the average particle diameter of the inert particles to the thickness t on one side of layer A, t/D. This unstretched film was stretched 3.3 times in the longitudinal direction at a temperature of 80°C. This stretching was carried out in three stages using different peripheral speeds between two sets of rolls.

この−軸延伸フィルムを、ステツクを用いて100℃に
過熱乾燥し、延伸速度2000%/分で幅方向に3.4
倍延伸した。このフィルムを定長下で、200℃にて5
秒間熱処理し、総厚さ10μmの二軸配向ポリエステル
フィルムを得た。これらのフィルムのA面(走行面)に
はA層に練り込こんだシリカ粒子に基づく表面突起が多
数存在し、反対面(磁性面)には突起が存在しなかった
。これらのフィルムの本発明のパラメータは第1表に示
したとおりであり、本発明のパラメータ範囲内の場合は
ハンドリング特性、出力特性は第1表に示したとおりき
わめて良好であったが、そうでない場合はハンドリング
特性、出力特性をともに満足するフィルムは得られなか
った。
This -axially stretched film was heated and dried at 100°C using a stick, and stretched at a stretching rate of 2000%/min to a width of 3.4 mm in the width direction.
Stretched twice. This film was heated to 200°C for 5 minutes under a fixed length.
A biaxially oriented polyester film having a total thickness of 10 μm was obtained by heat treatment for seconds. On the A side (running surface) of these films, there were many surface protrusions based on the silica particles kneaded into the A layer, and on the opposite side (magnetic side) there were no protrusions. The parameters of the present invention for these films are as shown in Table 1, and when the parameters were within the parameter range of the present invention, the handling characteristics and output characteristics were extremely good as shown in Table 1, but when they were not. In this case, a film satisfying both handling characteristics and output characteristics could not be obtained.

比較例3 平均粒径150nmのシリカ粒子を2重量%含有するポ
リエチレンテレフタレートを実施例1と同様に乾燥した
のち、300℃に溶融して単層で押し出し、静電印加キ
ャスト法を用いて表面温度30℃のキャスティング・ド
ラムに巻きつけて冷却固化し、単層構造の未延伸フィル
ムをつくった。
Comparative Example 3 Polyethylene terephthalate containing 2% by weight of silica particles with an average particle size of 150 nm was dried in the same manner as in Example 1, then melted at 300°C and extruded in a single layer, and the surface temperature was adjusted using an electrostatic casting method. It was wound around a casting drum at 30°C and cooled and solidified to produce an unstretched film with a single layer structure.

この未延伸フィルムを実施例1と同様にして延伸、熱処
理し、厚み10μmの二軸配向ポリエステルフィルムを
得た。このフィルムの両面には内部に含有するシリカ粒
子に基づく表面突起が多数存在していた。このフィルム
の特性は第1表に示すとおり本発明の範囲外であり、ハ
ンドリング特性は良かったが、出力特性は不良であった
This unstretched film was stretched and heat treated in the same manner as in Example 1 to obtain a biaxially oriented polyester film with a thickness of 10 μm. There were many surface protrusions on both sides of this film based on the silica particles contained inside. As shown in Table 1, the properties of this film were outside the scope of the present invention; the handling properties were good, but the output properties were poor.

実施例5 長手方向に1軸延伸した1軸延伸フイルムの、層Aの外
面に下記処方の水分散塗液をメイヤバーコーターで8m
l/m塗布した後、ステツクを用いて横延伸した。他は
実施例1と同様にして厚み10μmの2軸配向ポリエス
テルフイルムを得た。
Example 5 A water dispersion coating liquid with the following formulation was applied to the outer surface of layer A of a uniaxially stretched film uniaxially stretched in the longitudinal direction for 8 m using a Meyer bar coater.
After applying the film at a rate of 1/m, it was laterally stretched using a stick. Otherwise, a biaxially oriented polyester film having a thickness of 10 μm was obtained in the same manner as in Example 1.

これらのフィルムのA面(走行面)にはA層に練り込こ
んだシリカ粒子に基づく表面突起が多数存在し、その表
面上には塗液中に入れたシリカ粒子を含むミミズ構造を
もっ易滑性の皮膜が形成されていた。また、反対面(磁
性面)には突起が存在しなかった。このフィルムの特性
は表1に示すとおりであり、本発明の範囲内であると同
時にに高いハンドリング特性、出力特性を備えていた。
The A side (running surface) of these films has many surface protrusions based on the silica particles kneaded into the A layer, and the worm structure containing the silica particles added to the coating liquid can be easily formed on the surface. A slippery film was formed. Furthermore, no protrusions were present on the opposite surface (magnetic surface). The characteristics of this film are as shown in Table 1, and it was within the scope of the present invention and at the same time had high handling characteristics and output characteristics.

(処方) 水溶性ポリエステル メチルセルロース コロイダルシリカ (粒径30nm) 実施例6 長手方向に1軸延伸した1軸延伸フイルムの、層Cの外
面に下記処方の水分散塗液をメイヤバーコーターで6 
m l / rd塗布した後、ステツクを用いて横延伸
した。他は実施例1と同様にして厚み10μmの2軸配
向ポリエステルフイルムを得た。
(Formulation) Water-soluble polyester methylcellulose colloidal silica (particle size 30 nm) Example 6 A water-dispersed coating liquid with the following formulation was applied to the outer surface of layer C of a uniaxially stretched film uniaxially stretched in the longitudinal direction using a Meyer bar coater.
After applying ml/rd, it was stretched laterally using a stick. Otherwise, a biaxially oriented polyester film having a thickness of 10 μm was obtained in the same manner as in Example 1.

これらのフィルムのA面(走行面)にはA層に練り込こ
んだシリカ粒子に基づく表面突起が多数存在し、反対面
(磁性面)には塗液中に添加したア0.3重量% 0.2重量% 0.03重量% グリル粒子が密着して突起を形成していた。このフィル
ムの特性は表1に示すとおりであり、本発明の範囲内で
あると同時にに高いハンドリング特性、出力特性を備え
ていた。
The A side (running surface) of these films has many surface protrusions based on silica particles kneaded into the A layer, and the opposite side (magnetic side) has 0.3% by weight of A added to the coating liquid. 0.2% by weight 0.03% by weight Grill particles were closely attached to form protrusions. The characteristics of this film are as shown in Table 1, and it was within the scope of the present invention and at the same time had high handling characteristics and output characteristics.

(処方) アクリル酸エマルジョン 0.2重量%メチルセルロー
ス    0.05重量%実施例7 長手方向に1軸延伸した1軸延伸フイルムの、層Cの外
面に下記処方の水分散塗液をメイヤバーコーターで6m
l/m塗布した後、ステツクを用いて横延伸した。他は
実施例1と同様にして厚み10μmの2軸配向ポリエス
テルフイルムを得た。
(Formulation) Acrylic acid emulsion 0.2% by weight Methyl cellulose 0.05% by weight Example 7 A water-dispersed coating liquid with the following formulation was applied to the outer surface of layer C of a uniaxially stretched film uniaxially stretched in the longitudinal direction using a Meyer bar coater. 6m
After applying the film at a rate of 1/m, it was laterally stretched using a stick. Otherwise, a biaxially oriented polyester film having a thickness of 10 μm was obtained in the same manner as in Example 1.

これらのフィルムのA面(走行面)にはA層に練り込こ
んだシリカ粒子に基づく表面突起が多数存在し、反対面
(磁性面)にはミミズ構造を有する皮膜が形成されてい
た。このフィルムの特性は表1に示すとおりであり、本
発明の範囲内であると同時にに高いハンドリング特性、
出力特性を備えていた。
On the A side (running surface) of these films, there were many surface protrusions based on the silica particles kneaded into the A layer, and on the opposite side (magnetic side), a film having a wormlike structure was formed. The properties of this film are as shown in Table 1, and are within the scope of the present invention, as well as having high handling properties.
It had output characteristics.

(処方) メチルセルロース   0.15重量%実施例8 長手方向に1軸延伸した1軸延伸フイルムの、層Cの外
面に下記処方の水分散塗液をメイヤバーコーターで6m
l/n(塗布した後、ステンタを用いて横延伸した。他
は実施例1と同様にして厚み10μmの2軸配向ポリエ
ステルフイルムを得た。
(Formulation) Methyl cellulose 0.15% by weight Example 8 A water-dispersed coating liquid with the following formulation was applied to the outer surface of layer C of a uniaxially stretched film uniaxially stretched in the longitudinal direction for 6 m using a Meyer bar coater.
l/n (After coating, it was laterally stretched using a stenter.Otherwise, it was carried out in the same manner as in Example 1 to obtain a biaxially oriented polyester film with a thickness of 10 μm.

これらのフィルムのA面(走行面)にはA層に練り込こ
んだシリカ粒子に基づく表面突起が多数存在し、反対面
(磁性面)には塗液中に入れたシリカ粒子を含むミミズ
構造をもつ皮膜が形成されていた。このフィルムの特性
は表1に示すとおりであり、本発明の範囲内であると同
時にに高いハンドリング特性、出力特性を備えていた。
The A side (running surface) of these films has many surface protrusions based on silica particles kneaded into the A layer, and the opposite side (magnetic side) has an earthworm structure containing silica particles added to the coating liquid. A film with a coating was formed. The characteristics of this film are as shown in Table 1, and it was within the scope of the present invention and at the same time had high handling characteristics and output characteristics.

(処方) 水溶性ポリエステル  0. 3重量%メチルセルロー
ス   011重量% コロイダルシリカ   0.03重量%(粒径20nm
) 実施例9 実施例1において、実質的に不活性粒子を含有しないポ
リエチレンテレフタレートCのかわりに、平均粒径11
00nのシリカ粒子(B)を0.05重量%含むポリエ
チレンテレフタレートBを使用した他は、実施例1と同
様にして厚み10μmの2軸配向ポリエステルフイルム
を得た。これらのフィルムのA面(走行面)にはA層に
練り込こんだシリカ粒子に基づく表面突起が多数存在し
、反対面(磁性面)にはB層に含まれるシリカ粒子に基
づく突起が約2万個/ m m 2形成されていた。
(Formulation) Water-soluble polyester 0. 3% by weight Methyl cellulose 011% by weight Colloidal silica 0.03% by weight (particle size 20 nm
) Example 9 In Example 1, instead of polyethylene terephthalate C containing substantially no inert particles, an average particle size of 11
A biaxially oriented polyester film having a thickness of 10 μm was obtained in the same manner as in Example 1, except that polyethylene terephthalate B containing 0.05% by weight of 00n silica particles (B) was used. On the A side (running surface) of these films, there are many surface protrusions based on the silica particles incorporated in the A layer, and on the opposite side (magnetic side), there are about 1,000 protrusions based on the silica particles contained in the B layer. 20,000 pieces/m2 were formed.

このフィルムの特性は表1に示すとおりであり、本発明
の範囲内であると同時に高いハンドリング特性、出力特
性を備えていた。
The characteristics of this film are as shown in Table 1, and it was within the scope of the present invention and at the same time had high handling characteristics and output characteristics.

実施例10 長手方向に1軸延伸した1軸延伸フイルムの、層Bの外
面に下記処方の水分散塗液をメイヤバーコーターで6m
l/n(塗布した後、ステンタを用いて横延伸した他は
、実施例9と同様にして厚み10μmの2軸配向ポリエ
ステルフイルムを得た。
Example 10 A water dispersion coating liquid with the following formulation was applied to the outer surface of layer B of a uniaxially stretched film uniaxially stretched in the longitudinal direction for 6 m using a Meyer bar coater.
A biaxially oriented polyester film having a thickness of 10 μm was obtained in the same manner as in Example 9, except that after coating, the film was laterally stretched using a stenter.

これらのフィルムのA面(走行面)にはA層に練り込こ
んだシリカ粒子に基づく表面突起が多数存在し、反対面
(磁性面)にはB層に含まれるシリカ粒子に基づく突起
が約2万個/mm2形成され、その上にミミズ構造を持
つ皮膜が形成されていた。
On the A side (running surface) of these films, there are many surface protrusions based on the silica particles incorporated in the A layer, and on the opposite side (magnetic side), there are about 1,000 protrusions based on the silica particles contained in the B layer. 20,000 pieces/mm2 were formed, and a film having a wormlike structure was formed thereon.

このフィルムの特性は表1に示すとおりであり、本発明
の範囲内であると同時にに高いハンドリング特性、出力
特性を備えていた。
The characteristics of this film are as shown in Table 1, and it was within the scope of the present invention and at the same time had high handling characteristics and output characteristics.

(処方) メチルセルロース 0.15重量% 実施例11 長手方向に1軸延伸した1軸延伸フイルムの、層Bの外
面に下記処方の水分散塗液をメイヤバーコーターで6m
l/rr?塗布した後、ステンタを用いて横延伸した他
は、実施例9と同様にして厚み10μmの2軸配向ポリ
エステルフイ、ルムを得た。
(Formulation) Methyl cellulose 0.15% by weight Example 11 A water-dispersed coating liquid with the following formulation was applied to the outer surface of layer B of a uniaxially stretched film uniaxially stretched in the longitudinal direction for 6 m using a Meyer bar coater.
l/rr? After coating, a biaxially oriented polyester film having a thickness of 10 μm was obtained in the same manner as in Example 9, except that it was laterally stretched using a stenter.

これらのフィルムのA面(走行面)にはA層に練り込こ
んだシリカ粒子に基づく表面突起が多数存在し、反対面
(磁性面)にはB層に含まれるシリカ粒子に基づく突起
が約2万個/mm2形成され、その上に塗液中に入れた
シリカ粒子を含むミミズ構造をもつ皮膜が形成されてい
た。このフィルムの特性は表1に示すとおりであり、本
発明の範囲内であると同時に高いハンドリング特性、出
力特性を備えていた。
On the A side (running surface) of these films, there are many surface protrusions based on the silica particles incorporated in the A layer, and on the opposite side (magnetic side), there are about 1,000 protrusions based on the silica particles contained in the B layer. 20,000 particles/mm2 were formed, and a film having a worm-like structure containing silica particles contained in the coating solution was formed thereon. The characteristics of this film are as shown in Table 1, and it was within the scope of the present invention and at the same time had high handling characteristics and output characteristics.

(処方) 水溶性ポリエステル メチルセルロース コロイダルシリカ (粒径20nm) 0.3重量% 0.1重量% 0.03重量% [発明の効果コ 本発明は、製法の工夫により、従来得られなかった特殊
な表面形態を有するフィルムとしたので、この面を走行
面として強磁性金属薄膜型磁気記録媒体に用いた時のハ
ンドリング特性と出力特性をきわめて高い次元で両立で
きるフィルムが得られたものであり、今後の強磁性金属
薄膜型ビデオテープの高画質化に有用である。また、こ
の特異な表面のため耐摩耗性にも優れた過酷な苛酷使用
にも耐え得るフィルムとなり、各用途でのフィルム加工
速度の増大に対応できるものである。本発明フィルムの
用途は特に限定されないが、上述した磁気記録媒体以外
にも摩擦係数に関わるハンドリング特性と特殊な表面に
起因する透明性の良さを利用した包装用、さらには特殊
な表面に起因する電気絶縁性の良さを利用したコンデン
サー用など広く各用途に展開できるものである。なお、
本発明フィルムは本発明の範囲内の表面形態を有する面
が走行面(強磁性金属薄膜用支持体としては強磁性金属
薄膜が形成されない面、その他の用途では印刷やその他
塗材の塗布などの処理かはどこされない面) として用いることが望ましい。
(Formulation) Water-soluble polyester methylcellulose colloidal silica (particle size 20 nm) 0.3% by weight 0.1% by weight 0.03% by weight Since we created a film with a surface morphology, we have obtained a film that can achieve both handling characteristics and output characteristics at an extremely high level when used in ferromagnetic metal thin film magnetic recording media with this surface as the running surface. It is useful for improving the image quality of ferromagnetic metal thin film video tapes. In addition, this unique surface makes the film excellent in abrasion resistance and can withstand severe use, making it suitable for increasing film processing speeds in various applications. Applications of the film of the present invention are not particularly limited, but in addition to the above-mentioned magnetic recording media, it can also be used for packaging that takes advantage of the handling characteristics related to the coefficient of friction and the good transparency caused by the special surface, and furthermore, it can be used for packaging that takes advantage of the good transparency caused by the special surface. It can be used in a wide variety of applications, such as capacitors, which take advantage of its good electrical insulation properties. In addition,
The film of the present invention has a surface having a surface morphology within the scope of the present invention, which is a running surface (as a support for a ferromagnetic metal thin film, the surface on which a ferromagnetic metal thin film is not formed), and for other uses such as printing or application of other coating materials. It is desirable to use it as a surface that will not be processed.

Claims (7)

【特許請求の範囲】[Claims] (1)熱可塑性樹脂と該樹脂内に含有された不活性粒子
を主たる成分とする二軸配向フィルムであって、強磁性
金属薄膜と接しない面には該樹脂内に含有された不活性
粒子(A)を核とする表面突起が形成されており、しか
も該表面突起の平均高さが該不活性粒子(A)の平均粒
径の1/4以上であることを特徴とする強磁性金属薄膜
用支持体。
(1) A biaxially oriented film whose main components are a thermoplastic resin and inert particles contained in the resin, with the inert particles contained in the resin on the surface not in contact with the ferromagnetic metal thin film. A ferromagnetic metal characterized in that surface protrusions having (A) as a core are formed, and the average height of the surface protrusions is 1/4 or more of the average particle diameter of the inert particles (A). Support for thin films.
(2)請求項1に記載の強磁性金属薄膜用支持体の、強
磁性金属薄膜と接しない面上に、易滑性の皮膜が形成さ
れてなる強磁性金属薄膜用支持体。
(2) A support for a ferromagnetic metal thin film, which is obtained by forming an easily slippery film on the surface of the support for a ferromagnetic metal thin film according to claim 1 that is not in contact with the ferromagnetic metal thin film.
(3)強磁性金属薄膜と接する面には、熱可塑性樹脂中
に含有した不活性粒子を核とする突起が実質的に存在し
ないことを特徴とする請求項1または請求項2に記載の
強磁性金属薄膜用支持体。
(3) The ferromagnetic metal film according to claim 1 or 2, characterized in that the surface in contact with the ferromagnetic metal thin film is substantially free of protrusions whose cores are inert particles contained in the thermoplastic resin. Support for magnetic metal thin films.
(4)強磁性金属薄膜と接する面に、熱可塑性樹脂中に
分散した粒径150nm以下の不活性粒子(B)を核と
する突起が形成されてなり、しかも該突起の存在密度が
1万個/mm^2以上であることを特徴とする請求項1
または請求項2に記載の強磁性金属薄膜用支持体。
(4) On the surface in contact with the ferromagnetic metal thin film, protrusions are formed with inert particles (B) having a particle size of 150 nm or less dispersed in a thermoplastic resin as nuclei, and the density of the protrusions is 10,000 or less. Claim 1 characterized in that the number of particles/mm^2 or more is
Or the support for a ferromagnetic metal thin film according to claim 2.
(5)強磁性金属薄膜と接する面に、有機粒子が密着さ
れて突起を形成しており、該突起の平均高さが50nm
以下、平均突起径が100nm以上、両者の比(高さ/
径)が0.3以下で、しかも該突起の存在密度が50万
個/mm^2以上であることを特徴とする請求項3また
は請求項4に記載の強磁性金属薄膜用支持体。
(5) Organic particles are closely attached to the surface in contact with the ferromagnetic metal thin film to form protrusions, and the average height of the protrusions is 50 nm.
Below, the average protrusion diameter is 100 nm or more, the ratio of both (height /
5. The support for a ferromagnetic metal thin film according to claim 3 or 4, characterized in that the diameter) is 0.3 or less, and the density of the projections is 500,000 pieces/mm^2 or more.
(6)強磁性金属薄膜と接する面に、高さ50nm以下
の粒状、波状、しわ状、網状、山脈状、またはミミズ状
の突起をもつ非平滑皮膜が形成されてなることを特徴と
する請求項3、請求項4または請求項5に記載の強磁性
金属薄膜用支持体。
(6) A claim characterized in that a non-smooth film having granular, wavy, wrinkled, net-like, mountain-like, or earthworm-like protrusions with a height of 50 nm or less is formed on the surface in contact with the ferromagnetic metal thin film. A support for a ferromagnetic metal thin film according to claim 3, claim 4, or claim 5.
(7)強磁性金属薄膜と接する面に、粒子径50nm以
下の微粒子を含む厚さ50nm以下の皮膜が形成されて
なり、しかも該微粒子の存在密度が50万個/mm^2
以上であることを特徴とする請求項3、請求項4、請求
項5または請求項6に記載の強磁性金属薄膜用支持体。
(7) A film with a thickness of 50 nm or less containing fine particles with a particle size of 50 nm or less is formed on the surface in contact with the ferromagnetic metal thin film, and the density of the fine particles is 500,000 pieces/mm^2
The support for a ferromagnetic metal thin film according to claim 3, claim 4, claim 5, or claim 6, wherein the support is as follows.
JP2005281A 1990-01-12 1990-01-12 Support for ferromagnetic metal thin film Expired - Lifetime JP2887326B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005281A JP2887326B2 (en) 1990-01-12 1990-01-12 Support for ferromagnetic metal thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005281A JP2887326B2 (en) 1990-01-12 1990-01-12 Support for ferromagnetic metal thin film

Publications (2)

Publication Number Publication Date
JPH03209618A true JPH03209618A (en) 1991-09-12
JP2887326B2 JP2887326B2 (en) 1999-04-26

Family

ID=11606861

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005281A Expired - Lifetime JP2887326B2 (en) 1990-01-12 1990-01-12 Support for ferromagnetic metal thin film

Country Status (1)

Country Link
JP (1) JP2887326B2 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62248131A (en) * 1986-04-21 1987-10-29 Teijin Ltd Magnetic recording medium

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62248131A (en) * 1986-04-21 1987-10-29 Teijin Ltd Magnetic recording medium

Also Published As

Publication number Publication date
JP2887326B2 (en) 1999-04-26

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