JPH0320781Y2 - - Google Patents
Info
- Publication number
- JPH0320781Y2 JPH0320781Y2 JP15722684U JP15722684U JPH0320781Y2 JP H0320781 Y2 JPH0320781 Y2 JP H0320781Y2 JP 15722684 U JP15722684 U JP 15722684U JP 15722684 U JP15722684 U JP 15722684U JP H0320781 Y2 JPH0320781 Y2 JP H0320781Y2
- Authority
- JP
- Japan
- Prior art keywords
- solder
- weight
- cantilever beam
- film
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910000679 solder Inorganic materials 0.000 claims description 26
- 239000000758 substrate Substances 0.000 claims description 17
- 239000004065 semiconductor Substances 0.000 claims description 14
- 230000001133 acceleration Effects 0.000 claims description 13
- 239000002184 metal Substances 0.000 claims description 2
- 239000010408 film Substances 0.000 description 18
- 238000013016 damping Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 230000004907 flux Effects 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000011800 void material Substances 0.000 description 3
- GNFTZDOKVXKIBK-UHFFFAOYSA-N 3-(2-methoxyethoxy)benzohydrazide Chemical compound COCCOC1=CC=CC(C(=O)NN)=C1 GNFTZDOKVXKIBK-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229920002545 silicone oil Polymers 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 241000269851 Sarda sarda Species 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Landscapes
- Pressure Sensors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15722684U JPH0320781Y2 (enrdf_load_stackoverflow) | 1984-10-19 | 1984-10-19 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15722684U JPH0320781Y2 (enrdf_load_stackoverflow) | 1984-10-19 | 1984-10-19 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6172678U JPS6172678U (enrdf_load_stackoverflow) | 1986-05-17 |
JPH0320781Y2 true JPH0320781Y2 (enrdf_load_stackoverflow) | 1991-05-07 |
Family
ID=30715224
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15722684U Expired JPH0320781Y2 (enrdf_load_stackoverflow) | 1984-10-19 | 1984-10-19 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0320781Y2 (enrdf_load_stackoverflow) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2706676B2 (ja) * | 1988-10-15 | 1998-01-28 | 株式会社フジクラ | 傾斜監視システム |
JP2714961B2 (ja) * | 1988-10-15 | 1998-02-16 | 株式会社フジクラ | 傾斜角発信器 |
-
1984
- 1984-10-19 JP JP15722684U patent/JPH0320781Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS6172678U (enrdf_load_stackoverflow) | 1986-05-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH0453267B2 (enrdf_load_stackoverflow) | ||
US4553436A (en) | Silicon accelerometer | |
US5725729A (en) | Process for micromechanical fabrication | |
KR102448668B1 (ko) | 실리콘 헤어스프링을 제조하기 위한 방법 | |
JP2940293B2 (ja) | 半導体加速度センサの製造方法 | |
JP2560140B2 (ja) | 半導体装置 | |
CN102495234A (zh) | 一种双面对称弹性梁结构电容式微加速度传感器及方法 | |
JPH08220134A (ja) | 捩りビーム式加速度計の検出要素 | |
JP3399660B2 (ja) | 表面型の加速度センサの製造方法 | |
US8220338B2 (en) | Pressure sensor and manufacturing method | |
JPH0320781Y2 (enrdf_load_stackoverflow) | ||
JP3191770B2 (ja) | 半導体加速度センサ及びその製造方法 | |
JPS6376483A (ja) | 半導体加速度センサの製造方法 | |
JP3234652B2 (ja) | 加速度センサおよびその製造方法 | |
JPH0320780Y2 (enrdf_load_stackoverflow) | ||
JPH0443226B2 (enrdf_load_stackoverflow) | ||
JPH10239345A (ja) | 半導体センサ | |
JP3427462B2 (ja) | 半導体加速度センサの製造方法 | |
JPH1144705A (ja) | 半導体加速度センサおよびその製造方法 | |
JP2936926B2 (ja) | 半導体加速度センサ | |
JPH03107767A (ja) | 加速度センサ | |
JPS6348427B2 (enrdf_load_stackoverflow) | ||
JPH07221323A (ja) | 半導体センサおよびその製造方法 | |
JPS6037177A (ja) | 半導体圧力センサ | |
JPH0374926B2 (enrdf_load_stackoverflow) |