JPH03207402A - Device for trapping corrosive harmful gas - Google Patents

Abstract

PURPOSE:To prevent the mixing of a corrosive harmful component into cooling water by forming a jacket between the inner and outer cylinders in an outer case and injecting a heat-exchange liq. into the gap between the trap and the inner surface of the inner cylinder. CONSTITUTION:The trap vessel 1 is placed in the inner cylinder 6, and the heat-exchange liq. 12 is injected into the gap 11 between the inner surface of the inner cylinder 6 and the outer surface of the trap vessel 1. The heat retained by the corrosive harmful gas introduced into the trap vessel 1 from an inlet pipe 3 is transmitted to the cooling water flowing in the jacket 8 in the outer case 5 through the wall plate of the trap vessel 1, the heat-exchange liq. 12 injected into the gap 11 between the outer surface of the trap vessel 1 and the inner surface of the inner cylinder 6 in the outer case 5 and the wall plate of the inner cylinder 6. Consequently, the corrosive harmful gas in the trap vessel 1 is cooled by the cooling water flowing in the jacket 8. The purification expenses are reduced in this way.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention is directed to the use of corrosive harmful gases such as phosphorus trichloride exhausted from a diffusion furnace that performs various surface treatments on the surfaces of wafers used in the manufacture of semiconductor chips. is collected by cooling.
This invention relates to a trap device for separation.

[Conventional technology]

Generally, corrosive harmful gases such as phosphorus trichloride exhausted from the diffusion furnace are collected and collected by being introduced into a closed trap container and cooling from the outside of the trap container.
It is well known that they are separated.

In a conventional trap device of this kind, the sealed trap container is made of glass such as quartz glass which has extremely high corrosion resistance, and a jacket is provided on the outside of the trap container made of glass such as quartz glass. By setting up
By flowing cooling water cooled by a cooling device into this jacket, the corrosive harmful gas in the trap container is cooled through the wall plate of the trap container.

[Problem to be solved by the invention]

However, while making the trap container made of glass such as quartz glass as described above has extremely high corrosion resistance, the trap container made of glass such as quartz glass is extremely fragile and often breaks. Therefore, forming a jacket on the outside of the trap container made of glass such as quartz glass, and configuring the jacket to flow the cooling water cooled by the cooling device into the jacket, as described above, is not possible. If the glass trap container is damaged, the corrosive harmful components collected and separated in the trap container will be mixed into the large amount of cooling water circulating between the jacket and the cooling device. Become.

Therefore, the conventional trap device includes a cooling device for cooling the cooling water, a circulation pump for circulating the cooling water between the jacket and the cooling device, and further, piping for the cooling water. Not only does it have to be made of expensive corrosion-resistant materials, which significantly increases equipment costs, but it also requires a great deal of expense to purify a large amount of cooling water that is contaminated with corrosive harmful components. There was also the issue of necessity.

SUMMARY OF THE INVENTION An object of the present invention is to provide a trap device that can prevent the above-mentioned problems when the trap container is made of glass such as quartz glass, which has extremely high corrosion resistance. It is something to do.

[Means to solve the problem]

In order to achieve this object, the present invention provides a trap device comprising a closed trap container made of glass such as quartz glass, which introduces a corrosive harmful gas into the trap container. The case is configured as a double cylinder consisting of an inner cylinder and an outer cylinder, and a jacket is formed between the inner cylinder and the outer cylinder in the outer case to allow cooling water to flow. On the other hand, the trap container is inserted into the inner cylinder of the outer case so as to form an appropriate gap between the inner surface of the inner cylinder and the outer surface of the trap container, and heat exchange is performed within this gap. The structure was designed to inject liquid for use.

[Action/effect of the invention]

In this configuration, the heat possessed by the corrosive harmful gas led into the trap container is transferred to the wall plate of the trap container and the heat injected into the gap between the outer surface of the trap container and the inner surface of the inner cylinder in the outer case. Heat is transferred to the cooling water flowing in the jacket of the outer case through the replacement liquid and the wall plate of the inner cylinder in the outer case, so that the corrosive harmful gas in the trap container is transferred to the outer case. It can be cooled by the cooling water flowing inside the jacket.

If the trap container is damaged, the corrosive harmful components in the trap container are transferred to a small amount of heat exchange liquid injected into the gap between the trap container and the inner surface of the inner cylinder in the outer case. It is possible to reliably prevent the water from getting mixed in with the large amount of cooling water circulating between the jacket in the outer case and the cooling device.

Therefore, according to the present invention, when the trap container is made of glass such as quartz glass, which has extremely high corrosion resistance but is easily damaged, the cooling device and circulation pump for the cooling water, as well as the There is no need to make the cooling water piping made of a corrosion-resistant material, and only the inner cylinder in the outer case needs to be made of a corrosion-resistant material. Since only a small amount of the heat exchange liquid injected into the gap between the inner cylinder and the trap container needs to be purified, the cost required for the purification process can be significantly reduced.

〔Example〕

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the drawings, reference numeral 1 indicates a trap container made of quartz glass with an open top surface, and a flange portion 1a is provided on the outer periphery of the upper end of the trap container 1. It is integrally formed.

Reference numeral 2 indicates a lid plate for closing the upper surface of the trap container 1, and this lid plate 2 is made of quartz glass similarly to the trap container 1.
An inlet pipe 3 for corrosive noxious gases into the trap vessel 1 and an outlet pipe 4 for corrosive noxious gases from inside the trap vessel 1 are provided.

Reference numeral 5 indicates an outer case made of stainless steel, and the outer case 5 is constructed as a double cylinder consisting of an inner cylinder 6 and an outer cylinder 7. An inlet pipe 9 for introducing cooling water cooled by a cooling device (not shown) into a jacket 8 formed between the outer cylinder body 7 and the inner cylinder body 6, and a cooling water inside the jacket 8. an outlet pipe 10 for delivering the water to the cooling device via a circulation pump (not shown).
and is provided.

Then, the trap container l is placed in the inner cylindrical body 6 of the outer case 5, and the trap container 1 is placed between the inner surface of the inner cylindrical body 6 and the trap container 1.
The heat exchange liquid 12, such as water, is injected into the gap 11 so as to form an appropriate gap 11 between it and the outer surface.

Note that the flange portion la of the trap container 1 is
A sealing rubber O-ring 13 is placed on the upper surface of the flange portion 5a provided on the outer periphery of the upper end of the outer case 5, and the lid plate 2 is placed on the upper surface of the flange portion 1a of the trap container l. The trap container 1 is placed with a rubber O-ring l4 in between, and the flange la and lid plate 2 of the trap container 1 are attached to the flange part 5a of the outer case 5 via a plurality of retaining rings l5. screw l
It is removably attached by tightening at 6. Further, the outer case 5 is placed on the upper surface of a dish-shaped receiver 17.

In this structure, the heat of the corrosive harmful gas flowing into the trap container 1 from the inlet pipe 3 is transferred to the wall plate of the trap container 1, the outer surface of the trap container 1, and the inner surface of the inner cylinder 6 of the outer case 5. Heat is transferred to the cooling water flowing inside the jacket 8 in the outer case 5 via the heat exchange liquid 12 injected into the gap 11 between the outer case 5 and the wall plate of the inner cylinder 6 in the outer case 5. The corrosive harmful gas in the trap container l is removed from the outer case 5.
The cooling water can be cooled by the cooling water flowing inside the jacket 8.

When the trap container 1 is damaged, the corrosive damage inside the trap container 1 is caused by the gap ll between the trap container 1 and the inner cylindrical body 6 of the outer case 5.
It only mixes with the small amount of heat exchange liquid 12 injected into the outer case 5, and does not mix with the large amount of cooling water that circulates between the jacket 8 and the cooling device in the outer case 5.

[Brief explanation of drawings]

The drawings show an embodiment of the present invention, and FIG. 1 is a vertical front view, and FIG. 2 is a sectional view showing an exploded state. 1... Trap container, 2... Lid plate, 3...
Corrosive harmful gas inlet pipe, 4... Corrosive harmful gas outlet pipe, 5... Outer case, 6... Inner cylinder body, 7...
・Outer cylinder body, 8...Jacket, 9...Cooling water inlet pipe, 10...Cooling water outlet pipe, 1l...Gap,
12...Liquid for heat exchange.

Claims (1)

[Claims] (1) In a trap device comprising a closed trap container made of glass such as quartz glass, which introduces a corrosive harmful gas into the interior, an outer case for the trap container is connected to an inner cylindrical body and an outer case. Between the inner cylinder and the outer cylinder in this outer case,
While forming a jacket that allows cooling water to flow,
The trap container is inserted into the inner cylinder of the outer case so as to form an appropriate gap between the inner surface of the inner cylinder and the outer surface of the trap container, and the heat exchange liquid is inserted into the gap. A corrosive harmful gas trap device characterized by injecting.