JPH0813321B2 - Corrosive gas trap device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a corrosive harmful gas such as phosphorus trichloride exhausted from a diffusion furnace that performs various surface treatments on the surface of a wafer used in the production of semiconductor chips. The present invention relates to a trap device for collecting and separating by cooling.

[Conventional technology]

Generally, corrosive harmful gas such as phosphorus trichloride exhausted from the diffusion furnace is introduced into a closed trap container,
It is well known that the trap container is cooled from the outside so as to be collected and separated.

In the conventional trap device of this type, the closed trap container is made of glass such as quartz glass having extremely high corrosion resistance, and a jacket is provided on the outside of the glass trap container such as quartz glass. By providing cooling water cooled by the cooling device in this jacket, the corrosive harmful gas in the trap container is cooled through the wall surface plate of the trap container.

[Problems to be Solved by the Invention]

However, while making the trap container made of glass such as quartz glass as described above has extremely high corrosion resistance, the glass trap container made of quartz glass or the like is very easily and often damaged. Therefore, as in the conventional case, a jacket is formed on the outside of the glass trap container such as quartz glass, and the cooling water cooled by the cooling device is made to flow into the jacket. If the trap container made of steel is damaged, the corrosive harmful components collected and separated in the trap container will be mixed in a large amount of cooling water circulating between the inside of the jacket and the cooling device. .

Therefore, in the conventional trap device, a cooling device for cooling the cooling water, a circulation pump for circulating the cooling water between the jacket and the cooling device, and further a pipe for the cooling water, Since it has to be made of an expensive material having corrosion resistance, not only is there a problem that the equipment cost will increase significantly, but it also costs a lot of money to purify a large amount of cooling water mixed with corrosive harmful components. There was also a problem that was said to be necessary.

It is an object of the present invention to provide a trap device capable of preventing the above-mentioned problems from occurring when the trap container is made of glass such as quartz glass having extremely high corrosion resistance. To do.

[Means for solving the problem]

In order to achieve this object, the present invention provides a closed trap container configured to introduce a corrosive harmful gas into a trap device made of glass such as quartz glass, in which an outer case is provided for the trap container. A double cylinder composed of an inner cylinder and an outer cylinder, and a jacket for allowing cooling water to flow is formed between the inner cylinder and the outer cylinder of the outer case. The trap container is inserted into the inner cylindrical body of the outer case so as to form an appropriate gap between the inner surface of the inner cylindrical body and the outer surface of the trap container, and the heat exchange liquid is inserted into the gap. It was configured to inject.

[Functions and effects of the invention]

In this configuration, the heat of the corrosive harmful gas introduced into the trap container is the heat injected into the wall between the trap container and the gap between the outer surface of the trap container and the inner surface of the inner cylinder of the outer case. Since heat is transferred to the cooling water flowing in the jacket of the outer case via the replacement liquid and the wall surface plate of the inner cylinder of the outer case, the corrosive harmful gas in the trap container is transferred to the outer case. It can be cooled by the cooling water flowing in the jacket of.

Then, when the trap container is damaged, the corrosive harmful components in the trap container become a small amount of heat exchange liquid injected into the gap between the trap container and the inner surface of the inner cylindrical body in the outer case. Only by mixing, it is possible to reliably prevent mixing in a large amount of cooling water circulating between the jacket in the outer case and the cooling device.

Therefore, according to the present invention, when the trap container is made of glass such as quartz glass which has extremely high corrosion resistance and is easily broken, as in the conventional case, a cooling device and a circulation pump for cooling water, and further cooling Since it is not necessary to make the water piping made of a corrosion-resistant material, and only the inner cylinder of the outer case needs to be made of a corrosion-resistant material, the equipment cost can be significantly reduced and the inner case of the outer case can be significantly reduced. Since only a small amount of heat exchange liquid injected into the gap between the tubular body and the trap container needs to be purified, the cost required for the purification treatment can be significantly reduced.

〔Example〕

An embodiment of the present invention will be described below with reference to the drawings. In the drawings, reference numeral 1 indicates a trap container formed of quartz glass in an open upper surface, and a flange portion 1a is integrally formed on the outer periphery of the upper end of the trap container 1. Has been modeled.

Reference numeral 2 denotes a lid plate for closing the upper surface of the trap container 1, and this lid plate 2 is made of quartz glass like the trap container 1, and the lid plate 2 has the inside of the trap container 1. Inlet pipe 3 for corrosive harmful gas to trap and trap container 1
An outlet pipe 4 for corrosive harmful gas from inside is provided.

Reference numeral 5 denotes an outer case made of stainless steel. The outer case 5 is configured as a double cylinder body including an inner cylinder body 6 and an outer cylinder body 7, and the outer cylinder body 7 is An inlet pipe 9 for introducing cooling water cooled by a cooling device (not shown) into a jacket 8 formed between the outer cylindrical body 7 and the inner cylindrical body 6.
And an outlet pipe 10 for sending cooling water in the jacket 8 to the cooling device via a circulation pump (not shown).
Are provided.

Then, the trap container 1 is inserted into the inner cylindrical body 6 of the outer case 5 so as to form an appropriate gap 11 between the inner surface of the inner cylindrical body 6 and the outer surface of the trap container 1, A heat exchange liquid 12 such as water is injected into the gap 11.

The flange portion 1a of the trap container 1 is
A rubber O-ring 13 for sealing is sandwiched between the upper surface of a flange portion 5a provided on the outer periphery of the upper end of the outer case 5, and the lid plate 2 is mounted on the flange portion 1a of the trap container 1.
A rubber O-ring 14 for sealing is sandwiched between the upper surface of the trap container 1 and the flange portion 1a of the trap container 1.
The lid plate 2 is detachably attached to the flange portion 5a of the outer case 5 by tightening it with a plurality of screws 16 via a holding ring 15. The outer case 5 is mounted on the upper surface of the dish-shaped receiving body 17.

In this structure, the inlet pipe 3 is provided in the trap container 1.
The heat of the corrosive harmful gas that has flowed in further is generated by the wall surface plate of the trap container 1 and the outer surface of the trap container 1 and the outer case 5.
The cooling water flowing in the jacket 8 in the outer case 5 via the heat exchange liquid 12 injected into the gap 11 between the inner case 6 and the inner surface of the inner case 6 and the wall plate of the inner cylinder 6 in the outer case 5. Therefore, the corrosive harmful gas in the trap container 1 can be cooled by the cooling water flowing in the jacket 8 in the outer case 5.

When the trap container 1 is damaged, the corrosive harmful components in the trap container 1 are separated by the gap 11 between the trap container 1 and the inner cylindrical body 6 in the outer case 5.
It is only mixed in the small amount of the heat exchange liquid 12 injected therein, and is not mixed in the large amount of cooling water circulating between the jacket 8 and the cooling device in the outer case 5.

[Brief description of drawings]

The drawings show an embodiment of the present invention, FIG. 1 is a vertical sectional front view, and FIG. 2 is a sectional view showing an exploded state. 1 ... Trap container, 2 ... Lid plate, 3 ... Corrosive harmful gas inlet pipe, 4 ... Corrosive harmful gas outlet pipe, 5 ... Outer case, 6 ... Inner cylinder, 7 ... Outer cylinder Body, 8 ... jacket,
9 ... Cooling water inlet pipe, 10 ... Cooling water outlet pipe, 11 ... Gap, 12 ... Heat exchange liquid.

Claims (1)

[Claims] 1. A trap device comprising a closed trap container made of glass such as quartz glass, in which a corrosive harmful gas is introduced, and an outer case for the trap container is an inner cylinder. A double cylinder composed of an outer cylinder and a jacket for allowing cooling water to flow is formed between the inner cylinder and the outer cylinder of the outer case, while the inner cylinder of the outer case is formed. In the body, the trap container is inserted so as to form an appropriate gap between the inner surface of the inner cylindrical body and the outer surface of the trap container, and in the gap,
A device for trapping corrosive harmful gases, characterized in that a liquid for heat exchange is injected.