JP2008023479A - Cooling trap apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a cooling trap apparatus capable of preventing a seal member provided at an opening part of a trap can from dew condensing and freezing over to avoid vacuum leakage. <P>SOLUTION: A cord heater 17 is disposed at an annular seal member 12 attached to the upper outer periphery of the trap can 11 having a coolant flow path 19 on a peripheral wall of a can body. The annular seal member 12 is provided with a fitting part 12a to be fitted to the trap can 11, a cohering part 12b to be cohered to a top plate 13a of a cabinet 13, a seal part 12c sealing gas-tightly an upper opening 11a and a lid member 14 of the trap can 11, and an annular mounting groove 12d formed at the fitting part 12a for mounting the cord heater. When the cord heater 17 is wound a plurality of times, a string 20 consisting of a silicone and the like is disposed between the cord heaters situated upper and under next to each other. Further, a temperature control means for controlling a supply of a hot gas according to a detected temperature by detecting a temperature of the hot gas flowing out from the coolant flow path. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a cooling trap device, and more particularly, a cooling trap for introducing and collecting harmful vapor exhausted by vacuum room temperature drying or vacuum concentration into a trap can cooled to a low temperature by a refrigerant of a refrigerator. Relates to the device.

As a trap can used in a cooling trap apparatus, a trap can having a coolant channel on a peripheral wall of a can body is known (for example, see Patent Document 1). When attaching such a trap can to the top plate opening of the cold trap device, an annular seal member is attached to the upper outer periphery of the trap can and the gap between the trap can and the top plate opening is sealed by the annular seal member. The same annular seal member is also used to seal between the lid member attached to the upper opening of the trap can and the upper opening of the trap can.
Japanese Utility Model Publication No. 2-150001

  However, the trap can with the coolant channel on the peripheral wall of the can body cools the entire can body at a low temperature, so the annular seal member attached to the upper opening also becomes cold, causing condensation and icing on the annular seal member. There was something to do. Since the annular seal member is made of a flexible rubber, if the annular seal member is condensed by condensation or icing, the sealing performance between the trap can and the cabinet or lid member may be impaired, causing vacuum leakage. was there.

  Accordingly, the present invention provides a cooling trap device that has a simple structure and prevents the annular seal member provided at the opening of the trap can from dewing / freezing, and can prevent the trap can from leaking during the vacuum cooling operation. It is intended to provide.

  In order to achieve the above object, the cooling trap device of the present invention has an annular seal member attached to the upper outer periphery of a trap can provided with a coolant channel on the peripheral wall of the can body, and the trap can is attached to the cabinet via the annular seal member. In the cooling trap device attached to the opening of the top plate, a heater for heating the annular seal member is provided inside the annular seal member. In addition, the annular seal member includes a fitting portion that is fitted to the upper outer periphery of the trap can, a close-contact portion that extends to the outer periphery of the fitting portion and is in close contact with the top plate of the cabinet, and the trap can. A seal portion for sealing the lid member mounted in the upper opening, and forming an annular mounting groove for mounting the heater in the fitting portion, and at least one round of the cord-shaped heater in the annular mounting groove It may be one that is wound in a divided manner, and when a plurality of the cord-shaped heaters are wound, a cord-shaped insulator can be interposed between adjacent heaters. Furthermore, the refrigerator that supplies the refrigerant to the refrigerant flow path of the trap can has a hot gas heating function that supplies hot gas to the refrigerant flow path to defrost the trap can and flows out of the refrigerant flow path. It is preferable to provide temperature control means for detecting the temperature of the hot gas and controlling the supply of the hot gas according to the detected temperature.

  According to the cooling trap device of the present invention, it is possible to prevent the annular seal member from being condensed or frozen by the heater attached to the annular seal member, the annular seal member is not cured at a low temperature, and maintains a good sealing property. be able to. Further, by interposing a heat-resistant insulating material such as a silicon string between adjacent cord-shaped heaters, the heating efficiency can be improved and abnormal heating due to contact between the heaters can be prevented. Furthermore, by controlling the supply of hot gas according to the temperature of the hot gas flowing out from the refrigerant flow path, it becomes possible to maintain the trap can heated to a desired temperature.

  1 to 3 show one embodiment of the cooling trap device of the present invention, FIG. 1 is a sectional front view showing a trap can portion of the cooling trap device, and FIG. FIG. 3 is a system diagram showing an example of a refrigeration cycle for cooling the trap can.

  The cooling trap device 10 according to this embodiment has an annular seal member 12 attached to the upper outer periphery of a bottomed trap can 11, and the trap can 11 is attached to a top plate 13 a of a cabinet (heat insulating box) 13 via the annular seal member 12. It is attached to the formed opening 13b. A lid member 14 is airtightly attached to the upper opening 11 a of the trap can 11 via the annular seal member 12. The lid member 14 is provided with an exhaust pipe 15 and a gas introduction pipe 16 connected to a vacuum pump, and the annular seal member 12 is provided with a code heater 17.

  The trap can 11 is a cylindrical bottomed container, and is formed of a metal material having high thermal conductivity and corrosion resistance, such as aluminum, stainless steel, and copper. A mold material 18 having a hat-shaped cross section is spirally wound around the peripheral wall 11 b of the trap can 11, and a coolant channel 19 is formed between the mold material 18 and the peripheral wall 11 b of the trap can 11.

  The annular seal member 12 is made of rubber, and is fitted to the outer periphery of the upper portion of the trap can 11. The annular seal member 12 extends to the outer periphery of the fitting portion 12 a and is in close contact with the top plate 13 a of the cabinet 13. A portion 12b and a seal portion 12c that is integrally provided on the upper portion of the fitting portion 12a and hermetically seals the upper opening 11a of the trap can 11 and the lid member 14. The cord heater 17 is provided on the fitting portion 12a. An annular mounting groove 12d for mounting is formed.

  The lid member 14 is formed of a disk having a diameter larger than that of the upper opening 11a of the trap can 11, and is placed on the upper portion of the seal portion 12c of the annular seal member 12, and the exhaust pipe 15 and the introduction pipe 16 are provided in the central portion. Penetrates hermetically.

  As the code heater 17, a well-known one in which the outer periphery of the heater wire is coated with a heat-resistant insulating material such as silicon may be used, and an appropriate output and an appropriate thickness may be selected as appropriate. The cord heater 17 is inserted into the annular mounting groove 12d and wound around the annular seal member 12 at least one turn, and a ring or string-like body is fitted into the opening side of the annular mounting groove 12d, thereby removing the cord heater 17 from the groove. The cord heater 17 can be prevented from falling off. Further, when the cord heater 17 is wound a plurality of times, it is preferable that a cord-like insulating material, for example, a silicon string-like body 20 which is a heat-resistant insulating material is interposed between the cord heaters 17 adjacent to each other. .

  Next, the refrigeration cycle of the cold trap device 10 will be described with reference to FIG. In this refrigeration cycle, a cooling side channel 31 and a hot gas channel 32 are connected to the discharge side of the compressor 30, and the cooling side channel 31 is connected via a condenser 33, a dryer 34, and a cooling capillary 35. In addition, the trap can 11 is connected to an inlet of a refrigerant channel 19 formed between the peripheral wall 11b of the trap can 11 and the profile 18. The refrigerant derived from the outlet of the refrigerant flow path 19 is returned to the suction side of the compressor 30 by the refrigerant return flow path 37 via the accumulator 36. Further, a part of the refrigerant and the refrigeration oil are branched into the oil return passage 39 and returned to the suction side of the compressor 30 through the oil return capillary 40, the accumulator 36, and the refrigerant return passage 37.

  The hot gas flow path 32 is connected to the inlet of the refrigerant flow path 19 via a hot gas solenoid valve 38, and the hot gas flowing through the refrigerant flow path 19 passes through the accumulator 36 and the refrigerant return flow path. 37 is returned to the suction side of the compressor 30. Further, a part of the hot gas and the refrigeration oil branch to the oil return passage 39 and are returned to the suction side of the compressor 30 through the oil return capillary 40, the accumulator 36, and the refrigerant return passage 37. . The refrigerant return channel 37 in the vicinity of the outlet of the refrigerant channel 19 has a temperature sensor 41 for detecting the temperature of hot gas flowing out from the refrigerant channel 19, and the temperature sensor 41 detects the temperature based on the detected temperature. Temperature control means 42 for controlling the opening and closing of the hot gas solenoid valve 38 and the operation of the compressor 30 and displaying the temperature is provided.

  In the cooling trap device 10 formed as described above, the refrigeration cycle is operated to introduce a low-temperature refrigerant into the refrigerant flow path 19, and the peripheral wall 11b of the trap can 11 is set to a predetermined temperature, for example, −50 ° C. or −80 ° C. The trap can 11 is evacuated from the exhaust pipe 15 by operating the vacuum pump, and the vapor component generated by vacuum room temperature drying or vacuum concentration is sucked from the gas introduction pipe 16 to the inner peripheral wall of the trap can 11. Solidify and collect. At this time, by operating the cord heater 17, the annular seal member 12 is heated, and it is possible to prevent the annular seal member 12 from being condensed or frozen. Therefore, the dew condensation water of the annular seal member 12 does not flow and adversely affects the device, and the annular seal member 12 is not hardened due to icing and does not impair the sealing performance, and the cooling trap device 10 is kept stable for a long time. You can drive.

  In the present embodiment, the cord heater 17 is fixed in the annular mounting groove 12d by the cord-like body 20, and a space is formed between the cord-like body 20, the cord heater 17, and the annular mounting groove 12d. By heating including the space, the annular seal member 12 can be efficiently heated and kept warm.

  After the trap operation is completed, the hot gas solenoid valve 38 is opened while the compressor 30 is in operation, and the hot gas is allowed to flow into the refrigerant flow path 19 via the hot gas flow path 32, whereby the peripheral wall of the trap can 11. Can be heated. Thereby, the solidified component in the trap can 11 can be melted and taken out. At this time, the temperature control means 42 is operated based on the temperature detected by the temperature sensor 41, and the supply of hot gas is stopped at a predetermined temperature, whereby the peripheral wall and the inside of the trap can 11 have a predetermined defrost temperature (heating temperature). And the abnormal heating and evaporation of the dissolved liquid can be prevented.

  The cooling trap apparatus 10 shown in the present embodiment injects an appropriate amount of liquid into the trap can 11 and cools this liquid to a predetermined temperature with the refrigerant in the refrigerant flow path 19. Can also be used for cooling. Furthermore, a desired heating temperature is set in the temperature control means 42 in a state where an appropriate amount of liquid is injected into the trap can 11, and the supply of hot gas is controlled based on the temperature detected by the temperature sensor 41. The liquid injected into 11 can be brought into a desired heating state.

  The heater used in the present invention is not limited to a cord heater, and any type of heater can be applied as long as it can be attached to an annular seal member, such as a belt heater or a spiral heater.

It is a section front view of the trap can part of the cooling trap device which shows one example of the present invention. It is a principal part sectional front view which expands and shows an annular seal member portion. It is a systematic diagram which shows an example of the refrigerating cycle for cooling a trap can.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 10 ... Cooling trap apparatus, 11 ... Trap can, 11a ... Upper opening, 11b ... Peripheral wall, 12 ... Annular seal member, 12a ... Insertion part, 12b ... Close contact part, 12c ... Seal part, 12d ... Annular mounting groove, 13 ... Cabinet, 13a ... Top plate, 13b ... Opening, 14 ... Lid member, 15 ... Exhaust pipe, 16 ... Inlet pipe, 17 ... Cord heater, 18 ... Mold material, 19 ... Refrigerant flow path, 20 ... String-like body, 30 ... Compressor, 31 ... cooling channel, 32 ... hot gas channel, 33 ... condenser, 34 ... dryer, 35 ... cooling capillary, 36 ... accumulator, 37 ... refrigerant return channel, 38 ... hot gas electromagnetic Valve 39, oil return channel 40, oil return capillary 41, temperature sensor 42, temperature control means

Claims (4)

In the cooling trap device in which an annular seal member is attached to the outer periphery of the upper portion of the trap can provided with a coolant channel on the peripheral wall of the can body, and the trap can is attached to the top plate opening of the cabinet via the annular seal member. A cooling trap device, wherein a heater for heating the annular seal member is provided inside the member. The annular seal member includes a fitting portion that is fitted to an upper outer periphery of the trap can, an adhesion portion that is extended to the outer periphery of the fitting portion and is in close contact with the top plate of the cabinet, and an upper opening of the trap can A sealing portion for sealing the lid member mounted on the mounting portion, and forming an annular mounting groove for mounting the heater on the fitting portion, and winding the cord-shaped heater at least once in the annular mounting groove The cooling trap device according to claim 1, wherein the cooling trap device is turned. 3. The cooling trap device according to claim 2, wherein a cord-shaped insulator is interposed between adjacent heaters when the cord-shaped heater is wound a plurality of times. The refrigerator that supplies the refrigerant to the refrigerant flow path of the trap can has a hot gas heating function of supplying hot gas to the refrigerant flow path to defrost the trap can, and hot gas flowing out of the refrigerant flow path The cooling trap device according to any one of claims 1 to 3, further comprising temperature control means for detecting the temperature of the gas and controlling supply of hot gas in accordance with the detected temperature.

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