JPH031961U - - Google Patents
Info
- Publication number
- JPH031961U JPH031961U JP6349789U JP6349789U JPH031961U JP H031961 U JPH031961 U JP H031961U JP 6349789 U JP6349789 U JP 6349789U JP 6349789 U JP6349789 U JP 6349789U JP H031961 U JPH031961 U JP H031961U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- holder
- rotation mechanism
- rotating
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 19
- 238000010586 diagram Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989063497U JPH0748667Y2 (ja) | 1989-05-31 | 1989-05-31 | 成膜装置の基板回転機構 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989063497U JPH0748667Y2 (ja) | 1989-05-31 | 1989-05-31 | 成膜装置の基板回転機構 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH031961U true JPH031961U (US06826419-20041130-M00005.png) | 1991-01-10 |
JPH0748667Y2 JPH0748667Y2 (ja) | 1995-11-08 |
Family
ID=31593599
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989063497U Expired - Lifetime JPH0748667Y2 (ja) | 1989-05-31 | 1989-05-31 | 成膜装置の基板回転機構 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0748667Y2 (US06826419-20041130-M00005.png) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006057183A (ja) * | 2004-08-20 | 2006-03-02 | Jds Uniphase Corp | 蒸着システム用の磁気ラッチ |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5418985A (en) * | 1977-07-07 | 1979-02-13 | Unitika Ltd | Production of spun like knitted fabric |
JPS6029167U (ja) * | 1983-08-04 | 1985-02-27 | 日本電子株式会社 | エッチング装置等用試料駆動装置 |
JPS6393862A (ja) * | 1986-10-07 | 1988-04-25 | Ulvac Corp | 自公転式基板ホルダ取付装置 |
JPS6428371A (en) * | 1987-07-24 | 1989-01-30 | Oki Electric Ind Co Ltd | Substrate turning mechanism |
-
1989
- 1989-05-31 JP JP1989063497U patent/JPH0748667Y2/ja not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5418985A (en) * | 1977-07-07 | 1979-02-13 | Unitika Ltd | Production of spun like knitted fabric |
JPS6029167U (ja) * | 1983-08-04 | 1985-02-27 | 日本電子株式会社 | エッチング装置等用試料駆動装置 |
JPS6393862A (ja) * | 1986-10-07 | 1988-04-25 | Ulvac Corp | 自公転式基板ホルダ取付装置 |
JPS6428371A (en) * | 1987-07-24 | 1989-01-30 | Oki Electric Ind Co Ltd | Substrate turning mechanism |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006057183A (ja) * | 2004-08-20 | 2006-03-02 | Jds Uniphase Corp | 蒸着システム用の磁気ラッチ |
Also Published As
Publication number | Publication date |
---|---|
JPH0748667Y2 (ja) | 1995-11-08 |