JPH03187188A - Moisture-proof structure of thin film el device - Google Patents
Moisture-proof structure of thin film el deviceInfo
- Publication number
- JPH03187188A JPH03187188A JP1325932A JP32593289A JPH03187188A JP H03187188 A JPH03187188 A JP H03187188A JP 1325932 A JP1325932 A JP 1325932A JP 32593289 A JP32593289 A JP 32593289A JP H03187188 A JPH03187188 A JP H03187188A
- Authority
- JP
- Japan
- Prior art keywords
- moisture
- thin film
- glass cap
- proof structure
- absorbing material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 22
- 239000011521 glass Substances 0.000 claims abstract description 31
- 239000011358 absorbing material Substances 0.000 claims abstract description 10
- 229910010272 inorganic material Inorganic materials 0.000 claims abstract description 9
- 239000011147 inorganic material Substances 0.000 claims abstract description 9
- 239000000758 substrate Substances 0.000 claims description 8
- 238000000034 method Methods 0.000 abstract description 3
- 230000006866 deterioration Effects 0.000 abstract description 2
- 230000001747 exhibiting effect Effects 0.000 abstract description 2
- 239000007788 liquid Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910021536 Zeolite Inorganic materials 0.000 description 1
- 239000005083 Zinc sulfide Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 239000010457 zeolite Substances 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Electroluminescent Light Sources (AREA)
Abstract
Description
【発明の詳細な説明】 （イ）産業上の利用分野 この発明は薄膜ＥＬ素子の防湿構造に関する。[Detailed description of the invention] (b) Industrial application field The present invention relates to a moisture-proof structure for a thin film EL element.
（ロ）従来技術・発明が解決しようとする問題点Ｍ膜Ｅ
Ｌ素子の防湿構造としては例えば、特公昭５７−４７５
５９号公報に示されたものが知られている。(b) Problems to be solved by the prior art/invention M membrane E
For example, the moisture-proof structure of the L element is shown in Japanese Patent Publication No. 57-475.
The one shown in Publication No. 59 is known.
しかし、上記した従来のものは防湿構造が複雑であり、
また、膜ＥＬ素子保護用としてシリコンオイル等の流体
を充填封入するため製造工程が複雑になるという欠点が
あった。However, the conventional type mentioned above has a complicated moisture-proof structure,
Another drawback is that the manufacturing process becomes complicated because a fluid such as silicone oil is filled and sealed to protect the membrane EL element.
特に、上記注入流体に水分が侵入するとこの水分が製造
工程途中で発生したピンホールやマイクロクラックに入
り込むため薄膜ＥＬ素子の特性を劣化させるという欠点
も有している。Particularly, when moisture enters the injection fluid, this moisture enters pinholes and microcracks generated during the manufacturing process, resulting in deterioration of the characteristics of the thin film EL element.
この発明は上記した点に鑑みてなされたものであり、そ
の目的とするところは、注入流体を用いることなしに防
湿を行うことの可能な新規の薄膜ＥＬ素子の防湿構造を
提供するところにある。This invention has been made in view of the above points, and its purpose is to provide a novel moisture-proof structure for thin-film EL elements that can perform moisture-proofing without using injection fluid. .
（ハ〉問題を解決するための手段
この発明の薄膜ＥＬ素子の防湿構造は、ガラス基板上に
形成したＥＬ光発光呈する薄膜ＥＬ素子を断面略凹形の
ガラスキャップを用いて防湿する薄膜ＥＬ素子の防湿構
造において、前記ガラスキャップのＰＩＪ膜ＥＬ素子と
対抗する凹部に吸湿材を混合した塗布形無機材料を焼成
し固化させたものである。(C) Means for Solving the Problem The moisture-proof structure of the thin-film EL device of the present invention is a thin-film EL device in which a thin-film EL device formed on a glass substrate and emitting EL light is moisture-proofed using a glass cap having a substantially concave cross section. In the moisture-proof structure, a coated inorganic material mixed with a moisture-absorbing material is baked and solidified in the concave portion of the glass cap facing the PIJ film EL element.
（ニ）作用
この発明によれば、ガラス基板上に形成したＥＬ光発光
呈するＦｉＪ膜ＥＬ素子を断面略凹形のガラスキャップ
を用いて防湿する薄１１ＥＬ素子の防湿構造において、
前記ガラスキャップの薄膜ＥＬ素子と対抗する凹部に吸
湿材を混合した塗布形無機材料を焼成し固化させたので
１組立工程においてガラスキャップ内に侵入した水分も
吸湿材で吸湿される。(D) Function According to the present invention, in the moisture-proof structure of a thin 11 EL element, the FiJ film EL element formed on a glass substrate and exhibiting EL light emission is moisture-proofed using a glass cap having a substantially concave cross section.
Since the coated inorganic material mixed with a hygroscopic material is baked and solidified in the concave portion of the glass cap facing the thin-film EL element, moisture that has entered the glass cap during one assembly process is also absorbed by the hygroscopic material.
したがって、薄１ｉＱＥＬ素子は長期にわたり、特性の
劣化がなくなる。Therefore, the characteristics of the thin 1iQEL element do not deteriorate over a long period of time.
（ホ）実施例
この発明に係るｉｇＩＪｉｌＥＬ素子の防湿構造の実施
例を第１図及び第２図に基づいて説明する。(E) Embodiment An embodiment of the moisture-proof structure of the igIJilEL element according to the present invention will be described with reference to FIGS. 1 and 2.
図中、Ａは薄膜ＥＬ素子であり５この薄膜ＥＬ素子Ａは
、ガラス基板１の上に第１の電極（透明電極）２をスパ
ッタ等で膜形成して電極パターンを構成し１次で、第１
の絶縁層３を形成している。さらに、この第１の絶縁層
３の上にＺｌＩＳ：Ｍ、（硫化亜鉛）等からなる発光層
４を蒸着またはスパッタ等で形成した後、真空中熱処理
を施し、第２の絶縁層５をスパッタ等で形成する。そし
て、この第２の絶縁層５の上に第２の電極（背面電極）
６を形成したものである。In the figure, A is a thin film EL device 5. This thin film EL device A has an electrode pattern formed by forming a first electrode (transparent electrode) 2 on a glass substrate 1 by sputtering or the like. 1st
An insulating layer 3 is formed. Furthermore, after forming a light-emitting layer 4 made of ZlIS:M, (zinc sulfide), etc. by vapor deposition or sputtering on this first insulating layer 3, heat treatment is performed in a vacuum, and a second insulating layer 5 is formed by sputtering. Formed with etc. Then, a second electrode (back electrode) is placed on this second insulating layer 5.
6 was formed.
７はガラス基板１上に設けられた薄膜ＥＬ素子Ａを覆う
断面略凹形のガラスキャップ、８は薄膜ＥＬ素子Ａを囲
むように設けたガラスキャップ７の凹部、９はゼオライ
トまたはシリカゲル粉末からなる吸湿材、１０は吸湿材
９を混合させた塗布型無機材料、１１はガラス基板ｌと
ガラスキャップ７とをエポキシ樹脂等で接着している接
着部である。7 is a glass cap having a substantially concave cross section that covers the thin film EL element A provided on the glass substrate 1; 8 is a concave portion of the glass cap 7 provided to surround the thin film EL element A; 9 is made of zeolite or silica gel powder. The hygroscopic material 10 is a coated inorganic material mixed with the hygroscopic material 9, and the numeral 11 is an adhesive part that adheres the glass substrate 1 and the glass cap 7 with epoxy resin or the like.
１２は塗布形無機材料１０に吸湿材９を混合させた混合
液であり、この混合液１２をガラスキャップ７の凹部８
に焼成し固化するように構成している。Reference numeral 12 denotes a liquid mixture in which the moisture absorbing material 9 is mixed with the coated inorganic material 10, and this liquid mixture 12 is poured into the recess 8 of the glass cap 7.
It is configured to be fired and solidified.
さて、混合液１２をガラスキャップ７に焼成し固化させ
るには、ガラスキャップ７の凹部８に混合液Ｉ２を滴下
し、室温乾燥、８０℃乾燥、５００℃乾燥をそれぞれ３
０分ずつ行い、１００℃の状態でガラスキャップ７をガ
ラス基板１に接着する。Now, in order to bake and solidify the mixed liquid 12 on the glass cap 7, drop the mixed liquid I2 into the recess 8 of the glass cap 7, and dry it at room temperature, at 80°C, and at 500°C for 3 times.
The glass cap 7 is bonded to the glass substrate 1 at 100° C. for 0 minutes at a time.
なお、ガラスキャップ７の厚さ寸法りを小さくする必要
がある場合には混合液１２を滴下してからガラスキャッ
プ７をスピンナーにかけてスピンコードし、スピンコー
ド後は上記した乾燥を行う。If it is necessary to reduce the thickness of the glass cap 7, the mixed liquid 12 is dropped, and then the glass cap 7 is spin-coded using a spinner, and after the spin-code, the above-described drying is performed.
なお、より防湿効果を高めるには真空槽内でガラスキャ
ップ７をガラス基板１にガラス接着する。In order to further enhance the moisture-proofing effect, the glass cap 7 is bonded to the glass substrate 1 in a vacuum chamber.
（へ）発明の効果
この発明に係るｌ’１１５１ＥＬ素子の防湿構造は前述
の上述のように構成したので１組立工程においてガラス
キャップ内に侵入した水分も吸湿材で吸湿される。(f) Effects of the Invention Since the moisture-proof structure of the l'1151EL element according to the present invention is constructed as described above, moisture that enters the glass cap during one assembly process is also absorbed by the moisture-absorbing material.
したがって、薄膜ＥＬ素子は長期にわたり特性の劣化が
なくなる。Therefore, the characteristics of the thin film EL element do not deteriorate over a long period of time.
また、薄膜ＥＬ素子が絶縁破壊を起こした際放出するガ
スも吸湿材に吸収されるから従来にない効果をも有する
。Furthermore, since the gas released when the thin film EL element undergoes dielectric breakdown is also absorbed by the moisture absorbing material, it has an effect that has not been seen in the past.
しかも、構造が簡単であって、また、安価に構成するこ
とができるため実施も容易である等の優れた特長を有し
ている。In addition, it has excellent features such as a simple structure, low cost, and easy implementation.
第１図及び第２図はこの発明に係る薄１１ｉＥＬ素子の
防湿構造の実施例を示し、第１図は断面図、第２図は滴
下の状態を示す図である。
主な符号の説明
Ａ：ｔｌ膜ＥＬ素子
７：ガラスキャップ
８：凹部
９：吸湿材
ｌＯ：塗布形無機材料
１２：混合液1 and 2 show an embodiment of the moisture-proof structure of a thin 11iEL element according to the present invention, with FIG. 1 being a sectional view and FIG. 2 being a diagram showing a dripping state. Explanation of main symbols A: TL film EL element 7: Glass cap 8: Recess 9: Moisture absorbing material 1O: Coated inorganic material 12: Mixed liquid
Claims (1)
子を断面略凹形のガラスキヤツプを用いて防湿する薄膜
ＥＬ素子の防湿構造において、前記ガラスキヤツプの薄
膜ＥＬ素子と対抗する凹部に吸湿材を混合した塗布形無
機材料を焼成し固化させたことを特徴とする薄膜ＥＬ素
子の防湿構造。In a moisture-proof structure for a thin-film EL device in which a thin-film EL device that emits EL light and is formed on a glass substrate is moisture-proofed using a glass cap having a substantially concave cross section, a moisture-absorbing material is mixed in a concave portion of the glass cap that faces the thin-film EL device. A moisture-proof structure for a thin-film EL device characterized by baking and solidifying a coated inorganic material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1325932A JPH03187188A (en) | 1989-12-18 | 1989-12-18 | Moisture-proof structure of thin film el device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1325932A JPH03187188A (en) | 1989-12-18 | 1989-12-18 | Moisture-proof structure of thin film el device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03187188A true JPH03187188A (en) | 1991-08-15 |
Family
ID=18182209
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1325932A Pending JPH03187188A (en) | 1989-12-18 | 1989-12-18 | Moisture-proof structure of thin film el device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03187188A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003005774A1 (en) * | 2001-05-24 | 2003-01-16 | Orion Electric Co., Ltd. | Container for encapsulating oled and manufacturing method thereof |
-
1989
- 1989-12-18 JP JP1325932A patent/JPH03187188A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003005774A1 (en) * | 2001-05-24 | 2003-01-16 | Orion Electric Co., Ltd. | Container for encapsulating oled and manufacturing method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH11329717A (en) | Color el panel | |
| US20050046349A1 (en) | OLED display and production method thereof | |
| US4037930A (en) | Liquid crystal display cells | |
| JPH03187188A (en) | Moisture-proof structure of thin film el device | |
| JPS5683851A (en) | Optical recording material | |
| JPS63105495A (en) | Thin film el panel | |
| JPH0917572A (en) | Seal formation of thin-film electroluminescence element and electroluminescence element | |
| JPS63131494A (en) | Thin film el device and manufacture of the same | |
| JPH0648799Y2 (en) | AC thin film EL device | |
| JPS6010320Y2 (en) | Thin film EL panel | |
| JP2003187966A (en) | Light-emitting device | |
| JPH0298091A (en) | Electroluminescent device | |
| JPH0275193A (en) | Sealing method for thin film el panel | |
| JPS5448262A (en) | Image transducer | |
| JPH0121519Y2 (en) | ||
| JPS52129296A (en) | Thin film light emitting element | |
| JPH08162275A (en) | Electroluminescent element and manufacture thereof | |
| KR20020082038A (en) | Organic electroluminescence element package and method for manufacturing same | |
| JPH049756Y2 (en) | ||
| JPS56131267A (en) | Solid image pickup device | |
| JPS59224145A (en) | Semiconductor device | |
| JPH01274383A (en) | Sealing method for membranous el panel | |
| JPH03272592A (en) | Thin film el panel | |
| JPH0532874B2 (en) | ||
| JPH03280390A (en) | Structure of thin film type el element |