JPH03183018A - Burnishing head - Google Patents
Burnishing headInfo
- Publication number
- JPH03183018A JPH03183018A JP32237189A JP32237189A JPH03183018A JP H03183018 A JPH03183018 A JP H03183018A JP 32237189 A JP32237189 A JP 32237189A JP 32237189 A JP32237189 A JP 32237189A JP H03183018 A JPH03183018 A JP H03183018A
- Authority
- JP
- Japan
- Prior art keywords
- head
- magnetic
- burnish
- burnishing
- medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims abstract description 17
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 abstract 4
- 229910052593 corundum Inorganic materials 0.000 abstract 2
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 2
- 230000000694 effects Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000006061 abrasive grain Substances 0.000 description 1
- 229910001566 austenite Inorganic materials 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- -1 etc. Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
本光明は磁気ヘッドの最低浮上量を保証するため、磁気
記録媒体表面に存在する微少突起物を除去するのに使用
するバニシュヘッドに関するものであり、特にその構成
材料としてY、 O,とAl。Detailed Description of the Invention (Field of Industrial Application) The present invention relates to a burnish head used to remove minute protrusions present on the surface of a magnetic recording medium in order to guarantee the minimum flying height of a magnetic head. In particular, its constituent materials include Y, O, and Al.
O3を含有するZr01系セラミツクスを用いて作製さ
れたバニシュヘッドに関するものである。The present invention relates to a burnish head manufactured using Zr01-based ceramics containing O3.
(従来の技術)
一般に磁気記録媒体には、非磁性の基板に γ−Fe、
0.、Fe、O,、Go−Fe、04、Go−7Fel
O。(Prior art) Magnetic recording media generally include γ-Fe,
0. ,Fe,O,,Go-Fe,04,Go-7Fel
O.
等の磁性微粒子を塗布した塗布媒体や、非磁性の基板上
に磁性金属をスパッタ法により成膜した薄膜磁気媒体等
がある。これらの磁気媒体においてはおいては、磁性被
膜を形成したままの状態では、その表面に0.05μm
程度、またはそれ以上の微少突起が多数残存している。There are coated media coated with magnetic fine particles such as, etc., and thin film magnetic media where magnetic metal is deposited on a non-magnetic substrate by sputtering. In these magnetic media, when the magnetic film is still formed, the surface has a thickness of 0.05 μm.
A large number of microscopic protrusions of about 100% or more remain.
この突起は、薄膜磁気媒体においては、非磁性の基板上
に磁性膜を成膜する前後で付着した塵挨であったり、塗
布媒体においては磁性塗布過程で混入したアルミナ等の
非磁性微粒子であったりする。これらの突起は、磁気ヘ
ッドの安定浮上を妨げたり磁気ヘッドを摩耗させたりし
て、磁気ヘッドの記録特性を劣化させるとともに、媒体
表面にダメージを与えて、その摩耗や損傷を加速し、磁
気媒体の記録特性を劣化させる原因にもなる。これを解
決するために磁気媒体表面を平滑化することが行われる
が、その−殻内な方法としては、微小な研磨砥粒を表面
に固着させたテープを磁気媒体表面に微小な力で接触さ
せて微小突起を除去したり、鏡面研磨されたスライダ面
を有するバニシュヘッドをジンバルに貼り着け、回転す
る磁気媒体上をほぼ接触に近い状態で浮上させ、往復さ
せてヘッドと衝突する微小突起を除去する方法がある。In thin-film magnetic media, these protrusions are caused by dust that adheres before and after forming a magnetic film on a non-magnetic substrate, and in coated media, they are non-magnetic fine particles such as alumina mixed in during the magnetic coating process. or These protrusions prevent the magnetic head from flying stably and wear out the magnetic head, degrading the recording characteristics of the magnetic head. They also damage the media surface, accelerating its wear and damage, and causing damage to the magnetic head. It also causes deterioration of recording characteristics. To solve this problem, the surface of the magnetic medium is smoothed, but an in-depth method is to contact the surface of the magnetic medium with a small force using a tape with minute abrasive grains fixed to the surface. A burnish head with a mirror-polished slider surface is attached to a gimbal, and the head is levitated almost in contact with a rotating magnetic medium, and the head is reciprocated to remove minute protrusions that collide with the head. There is a way to remove it.
バニシュヘッドを使用して突起を除去する場合では、バ
ニシュヘッドの材料として従来からダイヤモンド、サフ
ァイア、A I、0.−TiB、、Al、O,−TiC
等の硬質材料を用いている。When using a burnish head to remove protrusions, conventional burnish head materials include diamond, sapphire, AI, 0. -TiB,,Al,O,-TiC
Hard materials such as are used.
(発明が解決しようとする課題)
しかし、これらの材料で作製したバニシュヘッドを用い
て突起除去を行う場合には、磁気媒体表面を1〜2回だ
けバニシュしただけ(1〜2回のバニシュサイクル)で
は突起を完全に除去できず、数回のバニシュサイクルが
必要である。そして、このバニシュ効率の低さが磁気媒
体の生産性を低下させる一因になっている。一方、突起
を効率よく除去できても、その際に磁気媒体を傷つける
という問題があった。更に、これらのバニシュヘッドを
構成している材料、特にダイヤモンド、サファイア等は
高価であるほかに、非常に硬質であるため、これらの材
料を加工する際には非常に高価な切削工具、研磨工具が
必要であり、バニシュヘッド自体の作製に多額の費用を
必要とするという問題もある。(Problem to be Solved by the Invention) However, when removing protrusions using a burnish head made of these materials, the surface of the magnetic medium is burnished only once or twice (one or two burnish cycles). ) cannot completely remove the protrusion and requires several burnish cycles. This low burnishing efficiency is one of the reasons for reducing the productivity of magnetic media. On the other hand, even if the protrusions can be removed efficiently, there is a problem that the magnetic medium may be damaged during the process. Furthermore, the materials that make up these burnished heads, especially diamond and sapphire, are not only expensive but also very hard, so when processing these materials, very expensive cutting tools and polishing tools are required. There is also the problem that a large amount of money is required to produce the burnished head itself.
(課題を解決するための手段)
上記の技術課題を解決するために、本発明ではバニシュ
ヘッドの材料として、y、 o、を6〜10mol%、
Al、O,を3〜6IIlo1%の範囲で含有させたZ
rO□セラミックを使用した。これによって、磁気媒体
に傷をつけずに効率良くバニシュを行うことができる。(Means for Solving the Problems) In order to solve the above technical problems, the present invention uses 6 to 10 mol% of y, o, as a material for the burnished head.
Z containing Al, O, in the range of 3 to 6IIlo1%
rO□ ceramic was used. This allows efficient burnishing without damaging the magnetic medium.
また、上記材料は、従来の材料に比べて安価で加工し易
い材料であるため、バニシュヘッドの生産効率を高める
ことができる。Moreover, since the above-mentioned material is cheaper and easier to process than conventional materials, it is possible to improve the production efficiency of the burnish head.
(作用) 本開明はバニシュヘッドの材料としてZ r O。(effect) The present invention uses ZrO as a material for the burnished head.
系セラミックを使用してバニシュ効率を向上させたもの
である。即ち、Z r O,の持っている加工性に優れ
るという性質を利用しており、かつ、その他の成分とし
てY、0.を6〜10mol%、Al。The burnishing efficiency is improved by using ceramics. That is, it utilizes the property of Z r O, which has excellent workability, and also contains Y, 0. 6 to 10 mol%, Al.
Olを3〜6 mol%の範囲で含有させることにより
バニシュヘッドとしての優れた作用効果を得ているもの
である。本発明において、Y、O,の含有量を6〜10
mol%の範囲に規定した理由は、6mol%未満では
Y、 O,の状態が不安定になり相変態が起こりやすい
ためであり、lomol%を越えると強度が低下しすぎ
てバニシュヘッドには適さないためである。また、AI
、Ojの量を3〜6mol%の範囲に規定した理由は、
3mol%未満ではAl。By containing Ol in a range of 3 to 6 mol %, excellent effects as a burnish head are obtained. In the present invention, the content of Y, O, is 6 to 10
The reason for specifying the mol% range is that if it is less than 6 mol%, the state of Y, O, becomes unstable and phase transformation is likely to occur, and if it exceeds mol%, the strength will decrease too much and it is not suitable for burnish heads. This is because there is no Also, AI
The reason for specifying the amount of Oj in the range of 3 to 6 mol% is because
Al if less than 3 mol%.
0、が粒成長して強度が低下するためであり、−方、6
mol%を越えるとAl、O,が分散しやすくなり靭性
が低下するためである。0, is because the strength decreases due to grain growth, - direction, 6
This is because if the content exceeds mol%, Al, O, and the like will be easily dispersed and the toughness will decrease.
(実施例)
以下に本発明を実施例に基づいてさらに詳細に説明する
が、本発明の範囲はこれら実施例に限定されないことは
いうまでもない。(Examples) The present invention will be described in more detail below based on Examples, but it goes without saying that the scope of the present invention is not limited to these Examples.
第1表に示すように、ZrO,を主成分としてこれにy
、o、およびAl、O,を適宜含有させた材料を用いて
それぞれバニシュヘッドを作製した。As shown in Table 1, y
, o, and a material containing Al, O, as appropriate, were used to produce burnish heads, respectively.
これら作製したバニシュヘッドを使用して、直径3.5
インチの薄膜磁気媒体表面に存在する微小突起をパニシ
ュにより除去したときのバニシュ効果(バニシュサイク
ルと磁気媒体片面あたりの残存突起数)を第1表に試料
番号1〜4として示した。ここでバニシュサイクルとは
、回転している磁気媒体上にあるバニシュヘッドが磁気
媒体の最内周と最外周の間を1往復する行程のことであ
る。ここでのバニシュ条件は、バニシュヘッドをバネ荷
重が9゜5gfのジンバルに取り付け、該バニシュヘッ
ドを、周速度3m/秒で回転している薄膜磁気媒体上に
押し付けるというものである。Using these created burnish heads, we used a diameter of 3.5
The burnishing effect (burnish cycle and number of remaining protrusions per side of the magnetic medium) when fine protrusions existing on the surface of an inch thin film magnetic medium were removed by punishing is shown in Table 1 as sample numbers 1 to 4. Here, the burnish cycle is a process in which a burnish head placed on a rotating magnetic medium makes one reciprocation between the innermost circumference and the outermost circumference of the magnetic medium. The burnishing conditions here are that the burnish head is attached to a gimbal with a spring load of 9°5 gf, and the burnish head is pressed onto a thin film magnetic medium rotating at a peripheral speed of 3 m/sec.
また残存突起数は、後部に圧電素子を接着した通常の磁
気ヘッドを、ガニシュ後の磁気媒体上に0゜05μmの
浮上量で浮上させた時、この圧電素子から検出されたパ
ルス状波形の個数として測定したものである。The number of remaining protrusions is the number of pulse-like waveforms detected from the piezoelectric element when a normal magnetic head with a piezoelectric element bonded to the rear is floated at a flying height of 0°05 μm over the magnetic medium after garnishing. It was measured as follows.
また、第1表における試料番号5〜9は、比較例として
、本発明で規定している範囲外の成分組成のZ r O
,材料からなるバニシュヘッド、および従来の材料で作
製されたバニシュヘッドを用い、本実施例と同一の条件
でバニシュ効果を調べた結果である。In addition, sample numbers 5 to 9 in Table 1 are comparative examples containing ZrO with a component composition outside the range specified in the present invention.
These are the results of examining the burnishing effect under the same conditions as in this example using a burnish head made of a material such as , and a burnish head made of a conventional material.
この表から明瞭なように、本発明のバニシュヘラドは従
来のバニシュヘッドに比べて、少ないバニシュサイクル
で完全に突起を除去できるという非常に優れたバニシュ
効果を持っている。また、本究明のバニシュヘッドでバ
ニシュした場合は、磁気媒体を傷つけることがないこと
がわかる。As is clear from this table, the burnishing head of the present invention has an extremely superior burnishing effect in that protrusions can be completely removed in fewer burnishing cycles than the conventional burnishing head. Furthermore, it can be seen that when burnishing is performed using the burnish head of the present study, the magnetic medium is not damaged.
(グミ明の効果)
以上詳細に説明したように、本発明のバニシュヘッドは
非常にバニシュ効率がよく、かつ磁気媒体を傷つけるこ
とがないため、磁気媒体の生産性を高めたり、磁気媒体
の信頼性を向上させるのに効果がある。また、材料が安
価であり加工性に優れているため、バニシュヘッド自体
の生産効率を向上できるという効果がある。(Effect of Gummy Brightness) As explained in detail above, the burnish head of the present invention has very high burnishing efficiency and does not damage the magnetic medium, so it can improve the productivity of the magnetic medium and improve the reliability of the magnetic medium. It is effective in improving sexuality. Furthermore, since the material is inexpensive and has excellent workability, it has the effect of improving the production efficiency of the burnish head itself.
Claims (1)
mol%、残部実質的にZrO_2からなる材料を用い
て構成したことを特徴とする磁気記録媒体用のバニシユ
ヘッド。Y_2O_36-10 mol%, Al_2O_33-6
1. A vanishing head for a magnetic recording medium, characterized in that it is constructed using a material in which the remainder substantially consists of ZrO_2 in mol%.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32237189A JPH03183018A (en) | 1989-12-12 | 1989-12-12 | Burnishing head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32237189A JPH03183018A (en) | 1989-12-12 | 1989-12-12 | Burnishing head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH03183018A true JPH03183018A (en) | 1991-08-09 |
Family
ID=18142900
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP32237189A Pending JPH03183018A (en) | 1989-12-12 | 1989-12-12 | Burnishing head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03183018A (en) |
-
1989
- 1989-12-12 JP JP32237189A patent/JPH03183018A/en active Pending
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