JPS5846767B2 - Method for smoothing the surface of a magnetic disk substrate - Google Patents
Method for smoothing the surface of a magnetic disk substrateInfo
- Publication number
- JPS5846767B2 JPS5846767B2 JP54165234A JP16523479A JPS5846767B2 JP S5846767 B2 JPS5846767 B2 JP S5846767B2 JP 54165234 A JP54165234 A JP 54165234A JP 16523479 A JP16523479 A JP 16523479A JP S5846767 B2 JPS5846767 B2 JP S5846767B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic disk
- disk substrate
- slider
- substrate
- head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Description
【発明の詳細な説明】
本発明は最終的浮上保証を行うための磁気ディスク用基
板の表面平滑化方法の改良に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an improvement in a method for smoothing the surface of a magnetic disk substrate to ensure final flying.
磁気ディスクは一般にアルミニウム基板上に磁気塗料を
塗布し高温焼付を行って形成されるが、その表面はパフ
研摩、テープポリッシュ等により仕上げられている。Magnetic disks are generally formed by applying magnetic paint onto an aluminum substrate and baking it at a high temperature, but the surface is finished by puff polishing, tape polishing, or the like.
また、酸化鉄(aFe203)をアルマイト基板上にス
パッタにより成膜した後、aFe202に変化させると
か、磁性金属を基板に成膜することによって製造されて
いる。Further, it is manufactured by forming a film of iron oxide (aFe203) on an alumite substrate by sputtering and then changing it to aFe202, or by forming a film of magnetic metal on the substrate.
この場合、磁性被膜を形成した研摩仕上後の磁気ディス
ク表面には高さ0.1μm以上の微小突起が多数残存し
ている。In this case, many microprotrusions with a height of 0.1 μm or more remain on the surface of the magnetic disk after polishing on which a magnetic coating is formed.
これは塗膜強度を高めるために磁性塗料中に混入させて
L・るアルミナ等の硬い非磁性微粒子に起因しており、
その存在により磁気ヘッドが摩耗劣化したりヘッド浮上
性が悪くなる等の悪影響がある。This is due to hard non-magnetic particles such as L-alumina that are mixed into the magnetic paint to increase the strength of the coating.
The presence of such particles has adverse effects such as abrasion and deterioration of the magnetic head and deterioration of head flying performance.
またとりわけ磁性体をスパッタ又は蒸着によって基板上
に形成する場合には、磁性被膜形成前においても基板表
面を平滑化することが望ましい。In particular, when a magnetic material is formed on a substrate by sputtering or vapor deposition, it is desirable to smooth the substrate surface even before forming the magnetic coating.
これを解決するため、鏡面研摩されたスライダ面を有す
るバーニッシュヘッド(ヘッド形状は実際のヘッドと同
じで、アルミナ等の硬質材料のもの)を浮上量を下げて
回転する磁気ディスク上を浮上往復させてヘッドと衝突
する微小突起を除去する方法が従来採用されている。To solve this problem, we used a burnish head (the head shape is the same as the actual head, made of hard material such as alumina) with a mirror-polished slider surface to lower the flying height and fly back and forth over the rotating magnetic disk. Conventionally, a method has been adopted in which the microprotrusions that collide with the head are removed by causing the head to collide with the head.
しかし、このような方法では、バーニッシュ効率が悪く
、またディスク表面の微小突起が完全に除去できなかっ
た。However, with such a method, the burnishing efficiency was poor, and microprotrusions on the disk surface could not be completely removed.
これはスライダが鏡面で浮上障害物である微小突起をつ
ぶす働きしかないためである。This is because the slider has a mirror surface that only serves to crush minute protrusions that are flying obstacles.
本発明は上述の問題を解決するためのもので、ディスク
用基板表面の微小突起を効率よく除去できる磁気ディス
ク用基板の表面平滑化方法を提供することを目的として
いる。The present invention is intended to solve the above-mentioned problems, and an object of the present invention is to provide a method for smoothing the surface of a magnetic disk substrate, which can efficiently remove minute protrusions on the surface of a disk substrate.
次に図面に関連して本発明の詳細な説明する。The invention will now be described in detail in conjunction with the drawings.
図中、1は磁気ディスク用基板、2はスライダである。In the figure, 1 is a magnetic disk substrate, and 2 is a slider.
磁気ディスク用基板1は表面仕上を施されたもので、そ
の表面には微小突起3が存在している。The magnetic disk substrate 1 has a surface finish, and minute protrusions 3 are present on the surface.
スライダ2はアルミナ、SiC、プリント、ガーネット
等の硬質材料よりなり、そのスライダ面には粗面部4が
後述するように砥粒により形成されている。The slider 2 is made of a hard material such as alumina, SiC, print, garnet, etc., and a rough surface portion 4 is formed on the slider surface by abrasive grains as described later.
この粗面部4は、表面粗さ1〜30μmRmaX(3〜
20μmRmaXが望ましい)のものである。This rough surface portion 4 has a surface roughness of 1 to 30 μm RmaX (3 to 30 μm
20 μmRmaX is desirable).
このようなスライダ2を備えたバーニッシュヘッドを回
転する磁気ディスク用基板1上に接触状態で矢印方向に
往復させると、磁気ディスク用基板1上の微小突起3は
粗面部4より除去され、表面が平滑化されるが、この場
合バーニッシュヘッドを数往復させるだけで優れたバー
ニッシュ効果を上げることができ、ヘッドの浮上性が改
善される。When the burnish head equipped with such a slider 2 is moved back and forth in the direction of the arrow while in contact with the rotating magnetic disk substrate 1, the minute protrusions 3 on the magnetic disk substrate 1 are removed from the rough surface portion 4, and the surface In this case, an excellent burnishing effect can be achieved by simply moving the burnish head back and forth several times, and the flying performance of the head is improved.
実験によれば、バーニッシュ前表面あらさが0.15〜
0.3’ p m、最小浮上高さが0.25pm以上で
あったものが、バーニッシュ後、表面あらさが0.05
μm以下、最小浮上高さが0.1μm以下となった。According to experiments, the surface roughness before burnishing is 0.15~
0.3' pm, and the minimum flying height was 0.25 pm or more, but after burnishing, the surface roughness was 0.05 pm.
The minimum flying height was 0.1 μm or less.
上述の説明ではスライダを硬質材料より形成する例につ
いて述べたがスライダを通常の材質のものとし、そのス
ライダ面に、同様にアルミナ等の硬質材料の微粒子をバ
インダ中に分散させた砥粒層を皮覆形成してもよく、ま
た粒度0.3〜20μm(1〜9μ胤カ望ましい)のア
ルミナ等の硬質材料の砥粒を表面に備えた市販のラッピ
ングフィルムをスライダ面に貼りつげてもよい。In the above explanation, an example was described in which the slider is made of a hard material. However, it is also possible to make the slider of a normal material and to apply an abrasive layer made of fine particles of a hard material such as alumina dispersed in a binder on the slider surface. A coating may be formed, or a commercially available lapping film having abrasive grains of hard material such as alumina with a grain size of 0.3 to 20 μm (preferably 1 to 9 μm) on the surface may be attached to the slider surface. .
これらの場合も上述と同様のバーニッシュ効果がある。In these cases as well, there is a burnish effect similar to that described above.
また砥粒によって粗面部を形成しているため、エツチン
グや、機械加工により粗面を形成するのに比較すると、
突起の尖鋭度が大であると共に、緻密に形成することが
できるのでバーニッシュ効率が著しく高く、しかも加工
に手間がかからないという見逃せなL・利点がある。Also, since the rough surface is formed by abrasive grains, compared to forming a rough surface by etching or machining,
The sharpness of the protrusions is high and the varnishing efficiency is extremely high because the protrusions can be formed densely, and the process does not require much effort, which is an advantage that cannot be overlooked.
なお、これらのスライダは通常のスライダのように回転
する磁気ディスク用基板上を浮上するのではなく常に接
触するようになっており、除去し得る突起の高さを0.
1〜0.05μm以下としうるが、そのためスライダの
粗面部と磁気ディスク間の摩擦が太きいと両者の接触面
が焼ける等の障害が起る。Note that these sliders do not float above the rotating magnetic disk substrate like normal sliders, but are always in contact with the rotating magnetic disk substrate, and the height of the protrusion that can be removed is reduced to 0.
Although it may be 1 to 0.05 μm or less, if the friction between the rough surface of the slider and the magnetic disk is large, problems such as burning of the contact surface between the two may occur.
この防止策としては、磁気ディスク用基板表面に液体潤
滑剤、固体潤滑剤により潤滑処理を施しておけばよい。To prevent this, the surface of the magnetic disk substrate may be lubricated with a liquid lubricant or a solid lubricant.
以上述べたように、本発明によれば、スライダ面に硬質
粗面部を形成したバーニッシュヘッドを回転する磁気デ
ィスク用基板、すなわち磁性被膜形成前、又は形成後の
基板上に接触摺動させて数往復させてバーニッシュする
だげで優れたバーニッシュ効果を上げることができ、ヘ
ッド浮上性を著しく改善することが可能である。As described above, according to the present invention, a burnish head having a hard rough surface formed on the slider surface is slid in contact with a rotating magnetic disk substrate, that is, a substrate before or after a magnetic coating is formed. An excellent burnishing effect can be achieved simply by making the burnish back and forth several times, and it is possible to significantly improve head flying performance.
図は本発明に係る磁気ディスクの表面平滑化方法を実施
するためのバーニッシュヘッドのスライダの実施例を示
す概要図で、図中、1は磁気ディスク用基板、2はスラ
イダ、3は微小突起、4は粗面部である。The figure is a schematic diagram showing an embodiment of a slider of a burnish head for carrying out the method for smoothing the surface of a magnetic disk according to the present invention. In the figure, 1 is a magnetic disk substrate, 2 is a slider, and 3 is a microprotrusion. , 4 is a rough surface portion.
Claims (1)
イダ面に硬質微粒子を含む砥粒層よりなる粗面部を形成
したバーニッシュヘッドを接触状態で往復させることを
特徴とする磁気ディスク用基板の表面平滑化方法。1. A magnetic disk substrate, which is characterized in that a magnetic disk substrate is rotated, and a burnish head having a rough surface formed of an abrasive grain layer containing hard fine particles reciprocates over the substrate in contact with the slider surface. Surface smoothing method.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP54165234A JPS5846767B2 (en) | 1979-12-19 | 1979-12-19 | Method for smoothing the surface of a magnetic disk substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP54165234A JPS5846767B2 (en) | 1979-12-19 | 1979-12-19 | Method for smoothing the surface of a magnetic disk substrate |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5690427A JPS5690427A (en) | 1981-07-22 |
JPS5846767B2 true JPS5846767B2 (en) | 1983-10-18 |
Family
ID=15808400
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP54165234A Expired JPS5846767B2 (en) | 1979-12-19 | 1979-12-19 | Method for smoothing the surface of a magnetic disk substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5846767B2 (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4803577A (en) * | 1985-06-12 | 1989-02-07 | Tdk Corporation | Vertical magnetic recording system using rigid disk |
JPH0770051B2 (en) * | 1987-01-22 | 1995-07-31 | 松下電器産業株式会社 | Polishing device for magnetic recording media |
JPH0770052B2 (en) * | 1987-01-22 | 1995-07-31 | 松下電器産業株式会社 | Polishing device for magnetic recording media |
JPH02117712U (en) * | 1990-03-15 | 1990-09-20 | ||
JPH03116416A (en) * | 1990-04-27 | 1991-05-17 | Hitachi Ltd | Production of magnetic disk medium |
US5768076A (en) * | 1993-11-10 | 1998-06-16 | International Business Machines Corporation | Magnetic recording disk having a laser-textured surface |
JP2000067430A (en) | 1998-08-19 | 2000-03-03 | Fujitsu Ltd | Magnetic disk device |
-
1979
- 1979-12-19 JP JP54165234A patent/JPS5846767B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5690427A (en) | 1981-07-22 |
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