JPH031800B2 - - Google Patents

Info

Publication number
JPH031800B2
JPH031800B2 JP5936485A JP5936485A JPH031800B2 JP H031800 B2 JPH031800 B2 JP H031800B2 JP 5936485 A JP5936485 A JP 5936485A JP 5936485 A JP5936485 A JP 5936485A JP H031800 B2 JPH031800 B2 JP H031800B2
Authority
JP
Japan
Prior art keywords
magnet
plasma
magnetic field
magnetized
central axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5936485A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61220300A (ja
Inventor
Shusuke Matsuzawa
Tetsuya Akitsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
YAMANASHI DAIGAKUCHO
Original Assignee
YAMANASHI DAIGAKUCHO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by YAMANASHI DAIGAKUCHO filed Critical YAMANASHI DAIGAKUCHO
Priority to JP5936485A priority Critical patent/JPS61220300A/ja
Publication of JPS61220300A publication Critical patent/JPS61220300A/ja
Publication of JPH031800B2 publication Critical patent/JPH031800B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP5936485A 1985-03-26 1985-03-26 プラズマ装置 Granted JPS61220300A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5936485A JPS61220300A (ja) 1985-03-26 1985-03-26 プラズマ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5936485A JPS61220300A (ja) 1985-03-26 1985-03-26 プラズマ装置

Publications (2)

Publication Number Publication Date
JPS61220300A JPS61220300A (ja) 1986-09-30
JPH031800B2 true JPH031800B2 (US07122603-20061017-C00045.png) 1991-01-11

Family

ID=13111138

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5936485A Granted JPS61220300A (ja) 1985-03-26 1985-03-26 プラズマ装置

Country Status (1)

Country Link
JP (1) JPS61220300A (US07122603-20061017-C00045.png)

Also Published As

Publication number Publication date
JPS61220300A (ja) 1986-09-30

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