JPH0317770B2 - - Google Patents

Info

Publication number
JPH0317770B2
JPH0317770B2 JP22394582A JP22394582A JPH0317770B2 JP H0317770 B2 JPH0317770 B2 JP H0317770B2 JP 22394582 A JP22394582 A JP 22394582A JP 22394582 A JP22394582 A JP 22394582A JP H0317770 B2 JPH0317770 B2 JP H0317770B2
Authority
JP
Japan
Prior art keywords
reaction
wall material
reaction chamber
chamber
transparent quartz
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP22394582A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59115739A (ja
Inventor
Yosha Iida
Takao Hasegawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokuyama Corp
Original Assignee
Tokuyama Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokuyama Corp filed Critical Tokuyama Corp
Priority to JP22394582A priority Critical patent/JPS59115739A/ja
Publication of JPS59115739A publication Critical patent/JPS59115739A/ja
Publication of JPH0317770B2 publication Critical patent/JPH0317770B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0006—Controlling or regulating processes
    • B01J19/0013—Controlling the temperature of the process
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049—Controlling or regulating processes
    • B01J2219/00051—Controlling the temperature
    • B01J2219/00074—Controlling the temperature by indirect heating or cooling employing heat exchange fluids
    • B01J2219/00087—Controlling the temperature by indirect heating or cooling employing heat exchange fluids with heat exchange elements outside the reactor
    • B01J2219/00094—Jackets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049—Controlling or regulating processes
    • B01J2219/00051—Controlling the temperature
    • B01J2219/00132—Controlling the temperature using electric heating or cooling elements
    • B01J2219/00135—Electric resistance heaters

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Silicon Compounds (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP22394582A 1982-12-22 1982-12-22 反応装置 Granted JPS59115739A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22394582A JPS59115739A (ja) 1982-12-22 1982-12-22 反応装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22394582A JPS59115739A (ja) 1982-12-22 1982-12-22 反応装置

Publications (2)

Publication Number Publication Date
JPS59115739A JPS59115739A (ja) 1984-07-04
JPH0317770B2 true JPH0317770B2 (en:Method) 1991-03-08

Family

ID=16806157

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22394582A Granted JPS59115739A (ja) 1982-12-22 1982-12-22 反応装置

Country Status (1)

Country Link
JP (1) JPS59115739A (en:Method)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2011139137A (ru) * 2009-02-27 2013-04-10 Токуяма Корпорейшн Стержень поликристаллического кремния и устройство для его получения
DE102011084137A1 (de) * 2011-10-07 2013-04-11 Wacker Chemie Ag Vorrichtung und Verfahren zur Abscheidung von polykristallinemSilicium

Also Published As

Publication number Publication date
JPS59115739A (ja) 1984-07-04

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