JPH0317617B2 - - Google Patents
Info
- Publication number
- JPH0317617B2 JPH0317617B2 JP9917884A JP9917884A JPH0317617B2 JP H0317617 B2 JPH0317617 B2 JP H0317617B2 JP 9917884 A JP9917884 A JP 9917884A JP 9917884 A JP9917884 A JP 9917884A JP H0317617 B2 JPH0317617 B2 JP H0317617B2
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- pallet
- setup
- processing
- cart
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
- B23Q11/10—Arrangements for cooling or lubricating tools or work
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Auxiliary Devices For Machine Tools (AREA)
- Feeding Of Workpieces (AREA)
- Multi-Process Working Machines And Systems (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9917884A JPS60242933A (ja) | 1984-05-16 | 1984-05-16 | 加工設備 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9917884A JPS60242933A (ja) | 1984-05-16 | 1984-05-16 | 加工設備 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60242933A JPS60242933A (ja) | 1985-12-02 |
JPH0317617B2 true JPH0317617B2 (enrdf_load_html_response) | 1991-03-08 |
Family
ID=14240393
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9917884A Granted JPS60242933A (ja) | 1984-05-16 | 1984-05-16 | 加工設備 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60242933A (enrdf_load_html_response) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2023167965A (ja) * | 2022-05-13 | 2023-11-24 | 株式会社荏原製作所 | 処理システム、パッド搬送装置、液受け装置、および研磨装置 |
-
1984
- 1984-05-16 JP JP9917884A patent/JPS60242933A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS60242933A (ja) | 1985-12-02 |
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