JPH0317233Y2 - - Google Patents
Info
- Publication number
- JPH0317233Y2 JPH0317233Y2 JP16594887U JP16594887U JPH0317233Y2 JP H0317233 Y2 JPH0317233 Y2 JP H0317233Y2 JP 16594887 U JP16594887 U JP 16594887U JP 16594887 U JP16594887 U JP 16594887U JP H0317233 Y2 JPH0317233 Y2 JP H0317233Y2
- Authority
- JP
- Japan
- Prior art keywords
- resistor
- thin film
- capacitor
- vacuum
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 claims description 21
- 230000010355 oscillation Effects 0.000 claims description 19
- 239000003990 capacitor Substances 0.000 claims description 16
- 230000000087 stabilizing effect Effects 0.000 claims description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 238000005259 measurement Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16594887U JPH0317233Y2 (enrdf_load_stackoverflow) | 1987-10-28 | 1987-10-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16594887U JPH0317233Y2 (enrdf_load_stackoverflow) | 1987-10-28 | 1987-10-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0170141U JPH0170141U (enrdf_load_stackoverflow) | 1989-05-10 |
| JPH0317233Y2 true JPH0317233Y2 (enrdf_load_stackoverflow) | 1991-04-11 |
Family
ID=31452895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16594887U Expired JPH0317233Y2 (enrdf_load_stackoverflow) | 1987-10-28 | 1987-10-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0317233Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-10-28 JP JP16594887U patent/JPH0317233Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0170141U (enrdf_load_stackoverflow) | 1989-05-10 |
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