JPH0317066B2 - - Google Patents

Info

Publication number
JPH0317066B2
JPH0317066B2 JP5064284A JP5064284A JPH0317066B2 JP H0317066 B2 JPH0317066 B2 JP H0317066B2 JP 5064284 A JP5064284 A JP 5064284A JP 5064284 A JP5064284 A JP 5064284A JP H0317066 B2 JPH0317066 B2 JP H0317066B2
Authority
JP
Japan
Prior art keywords
alloy
product
container
crucible
hardness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5064284A
Other languages
Japanese (ja)
Other versions
JPS60194086A (en
Inventor
Chiharu Ishikura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tanaka Kikinzoku Kogyo KK
Original Assignee
Tanaka Kikinzoku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tanaka Kikinzoku Kogyo KK filed Critical Tanaka Kikinzoku Kogyo KK
Priority to JP5064284A priority Critical patent/JPS60194086A/en
Publication of JPS60194086A publication Critical patent/JPS60194086A/en
Publication of JPH0317066B2 publication Critical patent/JPH0317066B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/16Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
  • Physical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Description

【発明の詳細な説明】 本発明は、クラツド容器に関するものである。[Detailed description of the invention] The present invention relates to a clad container.

従来、Mo又はMo合金の容器は高温ガラスや
金属酸化物を含む鉱石溶解用るつぼや真空蒸着用
のトレー、ボートなどに広く用いられていた。こ
れは、Moの融点が約2610℃と非常に高く、延性
展性に富むため容易に加工できるからである。と
ころが、Moは500℃をこえると空気中の酸素と
反応して酸化物を作り、この酸化物が蒸発しやす
いため不活性雰囲気で使用しなければならないと
いうわずらわしさがあつた。さらに、このような
不活性雰囲気中で使用しても、金属酸化物を含む
ガラスや鉱石又は酸素を含んだ金属、合金などを
溶解する場合には、溶融物の中に含まれる酸素と
Moが結合して酸化物を作り、容器のMoが溶出
して容器の寿命が短かいという欠点があつた。こ
のため他の金属を加えて合金として耐消耗性の向
上が図られているが、Moの酸化を防止するに足
る合金が発見されていないのが実情である。
Conventionally, containers made of Mo or Mo alloys have been widely used in crucibles for melting ores containing high-temperature glass and metal oxides, trays for vacuum deposition, boats, etc. This is because Mo has a very high melting point of approximately 2610°C and is highly ductile and malleable, making it easy to process. However, when the temperature exceeds 500°C, Mo reacts with oxygen in the air to form an oxide, and this oxide easily evaporates, making it difficult to use it in an inert atmosphere. Furthermore, even when used in such an inert atmosphere, when melting glass or ore containing metal oxides, or metals or alloys containing oxygen, the oxygen contained in the melt and the
The drawback was that Mo combined to form oxides and Mo eluted from the container, shortening the life of the container. For this reason, attempts have been made to improve wear resistance by adding other metals to the alloy, but the reality is that no alloy has been discovered that is sufficient to prevent Mo from oxidizing.

本発明は上記欠点に鑑みなされたものであり、
耐消耗性の優れた長寿命の容器を提供することを
目的とする。
The present invention has been made in view of the above drawbacks,
The purpose is to provide a long-life container with excellent wear resistance.

本発明は、Mo又はMo合金の表面にIr又はIr合
金が被覆されていることを特徴とするクラツド容
器である。
The present invention is a clad container characterized in that the surface of Mo or Mo alloy is coated with Ir or Ir alloy.

本発明において、Ir又はIr合金を用いるのは、
Irの融点が2454℃とMoと同様に高く、しかも高
温における耐酸化性特に金属酸化物に対する耐酸
化性に優れているからである。しかし、IrやIr合
金を板にするなどの加工が困難なため被覆するこ
ととした。被覆はイオンプレーテイングやスパツ
タリングや蒸着などの物理的蒸着が湿式メツキよ
りも良い。これは、物理的蒸着によればMo容器
の表面層にIr原子が埋没されてMo原子とIr原子
のなじみが良い結果Ir−Mo合金の接合面の密着
硬度が高くなり、機械的強度の高いクラツド容器
が得られるからである。このように、Ir又はIr合
金を被覆したルツボは耐酸化性に優れ、機械的強
度も優れていることから長寿命のものとなる。な
お、Ir合金としては、Ir−Mo、Ir−Wなどがあ
る。
In the present invention, Ir or Ir alloy is used because
This is because the melting point of Ir is 2454°C, which is as high as Mo, and it also has excellent oxidation resistance at high temperatures, especially against metal oxides. However, it was difficult to process Ir or Ir alloy into plates, so we decided to cover it. For coating, physical vapor deposition such as ion plating, sputtering or vapor deposition is better than wet plating. This is because physical vapor deposition allows Ir atoms to be buried in the surface layer of the Mo container, resulting in good compatibility between Mo and Ir atoms, resulting in a high adhesion hardness at the joint surface of the Ir-Mo alloy, resulting in high mechanical strength. This is because a clad container can be obtained. In this way, a crucible coated with Ir or an Ir alloy has excellent oxidation resistance and mechanical strength, so it has a long life. Note that Ir alloys include Ir-Mo, Ir-W, and the like.

以下、実施例と従来例について説明する。 Examples and conventional examples will be described below.

実施例 1 肉厚5mm、高さ100mm、内径80mmの断面コの字
形Mo製るつぼの内壁に次の条件でIrを厚さ10μm
までイオンプレーテイングした。
Example 1 Ir was applied to a thickness of 10 μm on the inner wall of a U-shaped Mo crucible with a wall thickness of 5 mm, a height of 100 mm, and an inner diameter of 80 mm under the following conditions.
Ion plating was performed up to.

圧力:Arガス2.0×10-4mmHg 電圧:400V 電流:1A 電子ビーム溶解:9kv、300mA 熱電子:10V、100A これを実施品1とする。Pressure: Ar gas 2.0×10 -4 mmHg Voltage: 400V Current: 1A Electron beam melting: 9kV, 300mA Thermal electron: 10V, 100A This is referred to as Implementation Product 1.

実施例 2 実施例1と同一形状のMo製るつぼの内外壁に
次の条件でIr−W合金を厚さ0.1mmマグネトロン
スパツタリングした。
Example 2 An Ir-W alloy was magnetron sputtered to a thickness of 0.1 mm on the inner and outer walls of a Mo crucible having the same shape as in Example 1 under the following conditions.

圧力:Arガス3×10-3mmHg 電圧:400V 電流:1A 高周波電源:13.56MHz これを実施品2とする。Pressure: Ar gas 3×10 -3 mmHg Voltage: 400V Current: 1A High frequency power source: 13.56MHz This is implementation product 2.

従来例 実施例1で用いたMo製るつぼを従来品とし
た。
Conventional Example The Mo crucible used in Example 1 was used as a conventional product.

次に、上記実施品1、2と従来品にSiO2
Al2O3ガラスを500g入れAr雰囲気、温度約2200
℃×60分間で使用した。これを10回くり返したと
ころ、従来品は60μmそのMo容器の表面から削
られたのに対し、実施品1は5μm、実施品2は
3μm削られたにとどまつた。
Next, we added SiO 2 − to the above implementation products 1 and 2 and the conventional product.
Put 500g of Al 2 O 3 glass in Ar atmosphere, temperature about 2200.
It was used at ℃×60 minutes. When this process was repeated 10 times, 60 μm was scraped from the surface of the Mo container with the conventional product, while 5 μm was scraped with product 1 and 5 μm was scraped with product 2.
Only 3μm was removed.

次に、実施品1と2の容器の底部を大気中で直
接ヒーター加熱して温度約1000℃で10時間保持し
たところ、実施品1はMoが酸化され、蒸発して
12g減量したのに対し、実施品2は減量しなかつ
た。
Next, when the bottoms of the containers for products 1 and 2 were directly heated in the atmosphere with a heater and held at a temperature of about 1000°C for 10 hours, Mo in product 1 was oxidized and evaporated.
The weight loss was 12g, whereas the weight loss of Example 2 was not.

なお、従来品の表面層の硬度と実施品1、2の
境界層の硬度はそれぞれ150Hv、250Hv、300Hv
であつた。
The hardness of the surface layer of the conventional product and the hardness of the boundary layer of implemented products 1 and 2 are 150Hv, 250Hv, and 300Hv, respectively.
It was hot.

これらのことから本発明のクラツドるつぼは従
来品に比べて金属酸化物の溶解用るつぼとして著
しく耐酸化性が優れ、しかも外壁までIr合金被覆
した実施品2は大気加熱しても耐酸化性が優れて
いることがわかる。また、実施品の境界層の硬度
は従来品の表面層の硬度よりはるかに高いことか
ら、実施品は機械的強度に優れていることがわか
る。特に実施品2は、2つの硬度の高いIr−Mo
合金層にMo層がはさまれたサンドイツチ構造を
とつているため特に機械的強度が優れていること
がわかる。
From these facts, the clad crucible of the present invention has significantly superior oxidation resistance as a crucible for dissolving metal oxides compared to conventional products, and in addition, Example 2, which is coated with Ir alloy up to the outer wall, has oxidation resistance even when heated in the atmosphere. It turns out that it is excellent. Furthermore, the hardness of the boundary layer of the implemented product is much higher than the hardness of the surface layer of the conventional product, which indicates that the implemented product has excellent mechanical strength. In particular, product 2 consists of two highly hard Ir-Mo
It can be seen that it has particularly excellent mechanical strength because it has a sandwich structure in which a Mo layer is sandwiched between alloy layers.

以上詳述したように本発明によれば、耐消耗性
の優れた長寿命のクラツド容器を提供することが
できる。しかも、Mo製容器を完全に被覆すれば
大気中でも長寿命のものがえられ、高価な設備を
必要とせず、高価なIrが少量ですむことと併せて
安価なものとなる。
As described in detail above, according to the present invention, it is possible to provide a clad container with excellent wear resistance and long life. Moreover, if the Mo container is completely coated, it can have a long life even in the atmosphere, does not require expensive equipment, and requires only a small amount of expensive Ir, making it inexpensive.

Claims (1)

【特許請求の範囲】[Claims] 1 Mo又はMo合金の表面にIr又はIr合金が被覆
されていることを特徴とするクラツド容器。
1. A clad container characterized in that the surface of Mo or Mo alloy is coated with Ir or Ir alloy.
JP5064284A 1984-03-16 1984-03-16 Clad vessel Granted JPS60194086A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5064284A JPS60194086A (en) 1984-03-16 1984-03-16 Clad vessel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5064284A JPS60194086A (en) 1984-03-16 1984-03-16 Clad vessel

Publications (2)

Publication Number Publication Date
JPS60194086A JPS60194086A (en) 1985-10-02
JPH0317066B2 true JPH0317066B2 (en) 1991-03-07

Family

ID=12864602

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5064284A Granted JPS60194086A (en) 1984-03-16 1984-03-16 Clad vessel

Country Status (1)

Country Link
JP (1) JPS60194086A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2565934B2 (en) * 1987-11-17 1996-12-18 田中貴金属工業株式会社 Clad container
JPH01219179A (en) * 1988-02-26 1989-09-01 Tanaka Kikinzoku Kogyo Kk Clad container
JPH01275779A (en) * 1988-04-28 1989-11-06 Tanaka Kikinzoku Kogyo Kk Clad vessel
US6422861B1 (en) * 2000-11-20 2002-07-23 General Electric Company Quartz fusion furnace and method for forming quartz articles

Also Published As

Publication number Publication date
JPS60194086A (en) 1985-10-02

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