JPH0317072B2 - - Google Patents
Info
- Publication number
- JPH0317072B2 JPH0317072B2 JP5772684A JP5772684A JPH0317072B2 JP H0317072 B2 JPH0317072 B2 JP H0317072B2 JP 5772684 A JP5772684 A JP 5772684A JP 5772684 A JP5772684 A JP 5772684A JP H0317072 B2 JPH0317072 B2 JP H0317072B2
- Authority
- JP
- Japan
- Prior art keywords
- alloy
- container
- crucible
- atmosphere
- clad
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910000629 Rh alloy Inorganic materials 0.000 claims description 6
- 229910052703 rhodium Inorganic materials 0.000 claims description 6
- 229910001182 Mo alloy Inorganic materials 0.000 claims description 3
- 230000003647 oxidation Effects 0.000 description 5
- 238000007254 oxidation reaction Methods 0.000 description 5
- 230000008018 melting Effects 0.000 description 4
- 238000002844 melting Methods 0.000 description 4
- 229910044991 metal oxide Inorganic materials 0.000 description 4
- 150000004706 metal oxides Chemical class 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910018967 Pt—Rh Inorganic materials 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000007733 ion plating Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910001295 No alloy Inorganic materials 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 230000004580 weight loss Effects 0.000 description 1
- ZFZQOKHLXAVJIF-UHFFFAOYSA-N zinc;boric acid;dihydroxy(dioxido)silane Chemical compound [Zn+2].OB(O)O.O[Si](O)([O-])[O-] ZFZQOKHLXAVJIF-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
- C03B5/06—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture in pot furnaces
- C03B5/08—Glass-melting pots
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B14/00—Crucible or pot furnaces
- F27B14/08—Details peculiar to crucible or pot furnaces
- F27B14/10—Crucibles
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Metallurgy (AREA)
- General Engineering & Computer Science (AREA)
- Glass Melting And Manufacturing (AREA)
- Physical Vapour Deposition (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
Description
【発明の詳細な説明】 本発明は、クラツド容器に関するものである。[Detailed description of the invention] The present invention relates to a clad container.
従来、Mo又はMo合金の容器は高温ガラスや
金属酸化物を含む鉱石溶解用るつぼや真空蒸着用
のトレー、ボートなどに広く用いられていた。こ
れは、Moの融点が約2610℃と非常に高く、高温
での機械的性質に優れているからである。ところ
が、Moは500℃をこえると空気中の酸素と反応
して酸化物を作り、この酸化物が蒸発しやすいた
め不活性雰囲気で使用しなければならないという
わずらわしさがあつた。さらに、このような不活
性雰囲気中で使用しても、金属酸化物を含むガラ
スや鉱石などを溶解する場合には、溶融物の中に
含まれる酸素とMoが結合して酸化物を作り、容
器のMoが溶出して容器の寿命が短かいという欠
点があつた。このため他の金属を加えて合金とし
て耐消耗性の向上が図られているが、Moの酸化
を防止するに足る合金が発見されていないのが実
情である。 Conventionally, containers made of Mo or Mo alloys have been widely used in crucibles for melting ores containing high-temperature glass and metal oxides, trays for vacuum deposition, boats, etc. This is because Mo has a very high melting point of approximately 2610°C and has excellent mechanical properties at high temperatures. However, when the temperature exceeds 500°C, Mo reacts with oxygen in the air to form an oxide, and this oxide easily evaporates, making it difficult to use it in an inert atmosphere. Furthermore, even when used in such an inert atmosphere, when melting glass or ore containing metal oxides, oxygen contained in the melt and Mo combine to form oxides. The drawback was that the Mo contained in the container was eluted and the life of the container was short. For this reason, attempts have been made to improve wear resistance by adding other metals to the alloy, but the reality is that no alloy has been discovered that is sufficient to prevent Mo from oxidizing.
本発明は上記欠点に鑑みなされたものであり、
耐消耗性の優れた長寿命の容器を提供することを
目的とする。 The present invention has been made in view of the above drawbacks,
The purpose is to provide a long-life container with excellent wear resistance.
本発明は、Mo又はMo合金の表面にRh又はRh
合金が被覆されていることを特徴とするクラツド
容器である。 The present invention provides Rh or Rh on the surface of Mo or Mo alloy.
This is a clad container characterized by being coated with an alloy.
本発明において、Rh又はRh合金を用いるの
は、Rhの融点が1966℃とMoと同様に高く、しか
も600℃をこえれば酸素と結合して酸化するもの
の1100℃では分解し耐酸化性特に金属酸化物に対
する耐酸化性に優れているからである。しかし、
無垢のRhやRh合金の容器は高価で加工が困難な
ため被覆することとした。被覆はイオンプレーテ
イングやスパツタリングや蒸着などの物理的蒸着
が湿式蒸着よりも良い。これは、物理的蒸着によ
ればMo容器の表面層にRh原子が埋没されてRh
とMo接合面の密着硬度が高くなり、機械的強度
の高いクラツド容器が得られるからである。この
ように、Rh又はRh合金を被覆したるつぼは耐酸
化性に優れ、接合面の機械的強度も優れているこ
とから長寿命のものとなる。なお、Rh合金とし
ては、Pt−Rh、Ir−Rhがある。 In the present invention, Rh or Rh alloy is used because Rh has a high melting point of 1966°C, similar to Mo, and although it combines with oxygen and oxidizes at temperatures above 600°C, it decomposes at 1100°C, making it particularly resistant to oxidation. This is because it has excellent oxidation resistance against metal oxides. but,
Since solid Rh and Rh alloy containers are expensive and difficult to process, we decided to cover them. For coating, physical vapor deposition such as ion plating, sputtering or vapor deposition is better than wet vapor deposition. According to physical vapor deposition, Rh atoms are buried in the surface layer of the Mo container.
This is because the adhesion hardness between the and Mo joint surfaces is increased, and a clad container with high mechanical strength can be obtained. As described above, a crucible coated with Rh or Rh alloy has excellent oxidation resistance and excellent mechanical strength of the joint surface, so it has a long life. Note that Rh alloys include Pt-Rh and Ir-Rh.
以下、実施例と従来例について説明する。 Examples and conventional examples will be described below.
実施例 １
肉厚５mm、高さ100mm、内径80mmの断面コの字
形Mo製るつぼの内壁に次の条件でRhを厚さ10μ
ｍまでイオンプレーテイングした。Example 1 Rh was applied to a thickness of 10μ on the inner wall of a U-shaped Mo crucible with a wall thickness of 5mm, a height of 100mm, and an inner diameter of 80mm under the following conditions.
Ion plating was performed up to m.
雰囲気：ガス2.0×10-4mmHg イオン化電圧、電流：40V、5A 電子ビーム：9kv、300ｍＡ 熱電子：10V、100A これを実施品１とする。Atmosphere: Gas 2.0×10 -4 mmHg Ionization voltage, current: 40 V, 5 A Electron beam: 9 kV, 300 mA Thermal electron: 10 V, 100 A This is referred to as Example 1.
実施例 ２
実施例１と同一形状のMo製るつぼの内外壁に
次の条件でPt−Rh合金を厚さ0.1mmマグネトロン
スパツタリングした。Example 2 Pt-Rh alloy was magnetron sputtered to a thickness of 0.1 mm on the inner and outer walls of a Mo crucible having the same shape as in Example 1 under the following conditions.
圧力：Arガス３×10-3mmHg 印加電圧：400V 高周波電源：13.56MHz これを実施品２とする。Pressure: Ar gas 3 x 10 -3 mmHg Applied voltage: 400V High frequency power source: 13.56MHz This will be implemented product 2.
従来例
実施例１で用いたMo製るつぼを従来品とし
た。Conventional Example The Mo crucible used in Example 1 was used as a conventional product.
次に、上記実施品１、２と従来品にアルカリ亜
鉛硼珪酸ガラスを500ｇ入れAr雰囲気、温度約
1200℃×60分間で使用した。これを10回くり返し
たところ、従来品は60μｍそのMo容器の表面か
ら削られたのに対し、実施品１は10μｍ、実施品
２は5μｍ削られたにとどまつた。 Next, 500 g of alkali zinc borosilicate glass was added to the above-mentioned products 1 and 2 and the conventional product in an Ar atmosphere at a temperature of approximately
It was used at 1200°C for 60 minutes. When this process was repeated 10 times, 60 μm of the conventional product was removed from the surface of the Mo container, whereas only 10 μm of Example 1 and 5 μm of Example 2 were removed.
次に、実施品２と従来品の容器の底部を大気中
で直接ヒーター加熱して温度約1000℃で10時間保
持したところ、従来品はMoが酸化され、蒸発し
て12ｇ減量したのに対し、実施品２は減量しなか
つた。 Next, when the bottoms of the containers for Product 2 and the conventional product were heated directly in the air with a heater and held at a temperature of approximately 1000°C for 10 hours, Mo was oxidized and evaporated in the conventional product, resulting in a weight loss of 12 g. However, the weight of Example 2 did not decrease.
これらのことから本発明のクラツドるつぼは従
来品に比べて金属酸化物の溶解用るつぼとして著
しく耐酸化性が優れ、しかも外壁までRh合金被
覆した実施品２は大気加熱しても耐酸化性が優れ
ていることがわかる。 From these facts, the clad crucible of the present invention has significantly superior oxidation resistance as a crucible for dissolving metal oxides compared to conventional products, and in addition, Example 2, which is coated with Rh alloy up to the outer wall, has oxidation resistance even when heated in the atmosphere. It turns out that it is excellent.
以上詳述したように本発明によれば、耐消耗性
の優れた長寿命のクラツド容器を提供することが
できる。しかも、Mo製容器を完全に被覆すれば
大気中でも長寿命のものがえられ、高価な設備を
必要とせず、高価なRhが少量ですむことと併せ
て安価なものとなる。 As described in detail above, according to the present invention, it is possible to provide a clad container with excellent wear resistance and long life. Moreover, if the Mo container is completely coated, it can have a long life even in the atmosphere, does not require expensive equipment, and requires only a small amount of expensive Rh, making it inexpensive.
Claims (1)
覆されていることを特徴とするクラツド容器。1. A clad container characterized in that the surface of Mo or Mo alloy is coated with Rh or Rh alloy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5772684A JPS60200981A (en) | 1984-03-26 | 1984-03-26 | Clad vessel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5772684A JPS60200981A (en) | 1984-03-26 | 1984-03-26 | Clad vessel |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60200981A JPS60200981A (en) | 1985-10-11 |
| JPH0317072B2 true JPH0317072B2 (en) | 1991-03-07 |
Family
ID=13063931
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5772684A Granted JPS60200981A (en) | 1984-03-26 | 1984-03-26 | Clad vessel |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60200981A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2565935B2 (en) * | 1987-11-17 | 1996-12-18 | 田中貴金属工業株式会社 | Clad container |
| JPH01219179A (en) * | 1988-02-26 | 1989-09-01 | Tanaka Kikinzoku Kogyo Kk | Clad container |
| JPH01275779A (en) * | 1988-04-28 | 1989-11-06 | Tanaka Kikinzoku Kogyo Kk | Clad vessel |
| JPH04243918A (en) * | 1991-01-30 | 1992-09-01 | Shimadzu Corp | Crucible for melting glass |
| CN102990054B (en) * | 2012-04-01 | 2016-05-25 | 鹤山市沃得钨钼实业有限公司 | Rare earth molybdenum crucible blank and utilize this blank to manufacture the method for rare earth molybdenum crucible |
-
1984
- 1984-03-26 JP JP5772684A patent/JPS60200981A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60200981A (en) | 1985-10-11 |
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