JPH0317073B2 - - Google Patents
Info
- Publication number
- JPH0317073B2 JPH0317073B2 JP5772784A JP5772784A JPH0317073B2 JP H0317073 B2 JPH0317073 B2 JP H0317073B2 JP 5772784 A JP5772784 A JP 5772784A JP 5772784 A JP5772784 A JP 5772784A JP H0317073 B2 JPH0317073 B2 JP H0317073B2
- Authority
- JP
- Japan
- Prior art keywords
- alloy
- container
- crucible
- atmosphere
- clad
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910000575 Ir alloy Inorganic materials 0.000 claims description 9
- 229910001080 W alloy Inorganic materials 0.000 claims description 4
- 229910052741 iridium Inorganic materials 0.000 claims description 3
- 230000008018 melting Effects 0.000 description 5
- 238000002844 melting Methods 0.000 description 5
- 230000003647 oxidation Effects 0.000 description 5
- 238000007254 oxidation reaction Methods 0.000 description 5
- 229910044991 metal oxide Inorganic materials 0.000 description 4
- 150000004706 metal oxides Chemical class 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000007733 ion plating Methods 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 230000004580 weight loss Effects 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910001295 No alloy Inorganic materials 0.000 description 1
- 229910002835 Pt–Ir Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
- C03B5/06—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture in pot furnaces
- C03B5/08—Glass-melting pots
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B14/00—Crucible or pot furnaces
- F27B14/08—Details peculiar to crucible or pot furnaces
- F27B14/10—Crucibles
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Metallurgy (AREA)
- General Engineering & Computer Science (AREA)
- Glass Melting And Manufacturing (AREA)
- Physical Vapour Deposition (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
Description
【発明の詳細な説明】 本発明は、クラツド容器に関するものである。[Detailed description of the invention] The present invention relates to a clad container.
従来、Ｗ又はＷ合金の容器は高温ガラスや金属
酸化物を含む鉱石溶解用るつぼや真空蒸着用のト
レー、ボートなどに広く用いられていた。これ
は、Ｗの融点が約3400℃と非常に高く、高温での
機械的性質に優れているからである。ところが、
Ｗは500℃をこえると空気中の酸素と反応して酸
化物を作り、この酸化物が蒸発しやすいため不活
性雰囲気で使用しなければならないというわずら
わしさがあつた。さらに、このような不活性雰囲
気中で使用しても、金属酸化物を含むガラスや鉱
石などを溶解する場合には、溶融物の中に含まれ
る酸素とＷが結合して酸化物を作り、容器のＷが
溶出して容器の寿命が短かいという欠点があつ
た。このため他の金属を加えて合金として耐消耗
性の向上が図られているが、Ｗの酸化を防止する
に足る合金が発見されていないのが実情である。 Conventionally, containers made of W or W alloy have been widely used as crucibles for melting ores containing high-temperature glass and metal oxides, trays for vacuum deposition, boats, and the like. This is because W has a very high melting point of about 3400°C and has excellent mechanical properties at high temperatures. However,
When the temperature exceeds 500°C, W reacts with oxygen in the air to form an oxide, and this oxide easily evaporates, so it has to be used in an inert atmosphere, which is a hassle. Furthermore, even when used in such an inert atmosphere, when melting glass or ore containing metal oxides, oxygen and W contained in the melt combine to form oxides. The disadvantage was that the W in the container was eluted and the life of the container was short. For this reason, attempts have been made to improve wear resistance by adding other metals to the alloy, but the reality is that no alloy sufficient to prevent oxidation of W has been discovered.
本発明は上記欠点に鑑みなされたものであり、
耐消耗性の優れた長寿命の容器を提供することを
目的とする。 The present invention has been made in view of the above drawbacks,
The purpose is to provide a long-life container with excellent wear resistance.
本発明は、Ｗ又はＷ合金の表面にIr又はIr合金
が被覆されていることを特徴とするクラツド容器
である。 The present invention is a clad container characterized in that the surface of W or W alloy is coated with Ir or Ir alloy.
本発明において、Ir又はIr合金を用いるのは、
Irの融点が2454℃とＷと同様に高く、しかも高温
における耐酸化性特に金属酸化物に対する耐酸化
性に優れているからである。しかし、無垢のIrや
Ir合金の容器は高価で加工が困難なため被覆する
こととした。被覆はイオンプレーテイングやスパ
ツタリングや蒸着などの物理的蒸着が湿式蒸着よ
りも良い。これは、物理的蒸着によればＷ容器の
表面層にIr原子が埋没されてIrとＷ合金の接合面
の密着硬度が高くなり、機械的強度の高いクラツ
ド容器が得られるからである。このように、Ir又
はIr合金を被覆したルツボは耐酸化性に優れ、接
合面の機械的強度も優れていることから長寿命の
ものとなる。なお、Ir合金としては、Pt−Ir、Ph
−Ir、がある。 In the present invention, Ir or Ir alloy is used because
This is because Ir has a melting point of 2454° C., which is as high as W, and also has excellent oxidation resistance at high temperatures, particularly against metal oxides. However, solid Ir or
Since Ir alloy containers are expensive and difficult to process, we decided to coat them. For coating, physical vapor deposition such as ion plating, sputtering or vapor deposition is better than wet vapor deposition. This is because physical vapor deposition embeds Ir atoms in the surface layer of the W container, increasing the hardness of the bond between the Ir and W alloy and providing a clad container with high mechanical strength. In this way, a crucible coated with Ir or an Ir alloy has excellent oxidation resistance and mechanical strength of the joint surface, so it has a long life. In addition, as Ir alloys, Pt-Ir, Ph
-Ir, there is.
以下、実施例と従来例について説明する。 Examples and conventional examples will be described below.
実施例 １
肉厚５mm、高さ100mm、内径80mmの断面コの字
形Ｗ製るつぼの内壁に次の条件でPtを厚さ10μｍ
までイオンプレーテイングした。Example 1 Pt was applied to a thickness of 10 μm on the inner wall of a U-shaped W crucible with a wall thickness of 5 mm, a height of 100 mm, and an inner diameter of 80 mm under the following conditions.
Ion plating was performed up to.
雰囲気真空度：2.0×10-4mmHg イオン化電圧、電流：40V、5A 電子ビーム溶解：9kv、300ｍＡ 熱電子：10V、100A これを実施品１とする。Atmosphere Vacuum degree: 2.0×10 -4 mmHg Ionization voltage, current: 40 V, 5 A Electron beam melting: 9 kV, 300 mA Thermal electron: 10 V, 100 A This is referred to as implementation product 1.
実施例 ２
実施例１と同一形状のＷ製るつぼの内外壁に次
の条件でRt−Ir合金を厚さ0.1mmマグネトロンス
パツタリングした。Example 2 An Rt-Ir alloy was magnetron sputtered to a thickness of 0.1 mm on the inner and outer walls of a W crucible having the same shape as in Example 1 under the following conditions.
圧力：Arガス３×10-3mmHg 印加電圧：400V 高周波電源：13.56MHz これを実施品２とする。Pressure: Ar gas 3 x 10 -3 mmHg Applied voltage: 400V High frequency power source: 13.56MHz This will be implemented product 2.
従来例 実施例１で用いたＷ製るつぼを従来品とした。Conventional example The W crucible used in Example 1 was used as a conventional product.
次に、上記実施品１、２と従来品にSiO2Al2O3
ガラスを500ｇ入れAr雰囲気、温度約2200℃×60
分間で使用した。これを10回くり返したところ、
従来品は50μそのＷ容器の表面から削られたのに
対し、実施品１は5μ、実施品２は3μ削られたに
とどまつた。 Next, SiO 2 Al 2 O 3 was added to the above implementation products 1 and 2 and the conventional product.
Put 500g of glass in Ar atmosphere, temperature about 2200℃ x 60
Used in minutes. After repeating this 10 times,
While 50μ was removed from the surface of the W container in the conventional product, only 5μ was removed in Example 1 and 3μ in Example 2.
次に、実施品２と従来品の容器の底部を大気中
で直接ヒーター加熱して温度約1000℃で10時間保
持したところ、従来品はＷが酸化され、蒸発して
20ｇ減量したのに対し、実施品２は減量しなかつ
た。 Next, when the bottoms of the containers of Implementation Product 2 and the conventional product were directly heated in the atmosphere with a heater and held at a temperature of approximately 1000°C for 10 hours, W in the conventional product was oxidized and evaporated.
The weight loss was 20g, whereas the weight loss of Example 2 was not.
これらのことから本発明のクラツドるつぼは従
来品に比べて金属酸化物の溶解用るつぼとして著
しく耐酸化性が優れしかも外壁までIr合金被覆し
た実施品２は大気加熱しても耐酸化性が優れてい
ることがわかる。 From these facts, the clad crucible of the present invention has significantly better oxidation resistance as a crucible for dissolving metal oxides than conventional products, and Example 2, which is coated with Ir alloy up to the outer wall, has excellent oxidation resistance even when heated in the atmosphere. It can be seen that
以上詳述したように本発明によれば、耐消耗性
の優れた長寿命のクラツド容器を提供することが
できる。しかも、Ｗ製容器を完全に被覆すれば大
気中でも長寿命のものがえられ、高価な設備を必
要とせず、高価なIrが少量ですむことと併せて安
価なものとなる。 As described in detail above, according to the present invention, it is possible to provide a clad container with excellent wear resistance and long life. Moreover, if the W container is completely coated, it can have a long life even in the atmosphere, does not require expensive equipment, and requires only a small amount of expensive Ir, making it inexpensive.
Claims (1)
れていることを特徴とするクラツド容器。1. A clad container characterized in that the surface of W or W alloy is coated with Ir or Ir alloy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5772784A JPS60200982A (en) | 1984-03-26 | 1984-03-26 | Clad material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5772784A JPS60200982A (en) | 1984-03-26 | 1984-03-26 | Clad material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60200982A JPS60200982A (en) | 1985-10-11 |
| JPH0317073B2 true JPH0317073B2 (en) | 1991-03-07 |
Family
ID=13063957
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5772784A Granted JPS60200982A (en) | 1984-03-26 | 1984-03-26 | Clad material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60200982A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2565940B2 (en) * | 1987-11-17 | 1996-12-18 | 田中貴金属工業株式会社 | Clad container |
| JPH01275780A (en) * | 1988-04-28 | 1989-11-06 | Tanaka Kikinzoku Kogyo Kk | Clad vessel |
| JPH01275779A (en) * | 1988-04-28 | 1989-11-06 | Tanaka Kikinzoku Kogyo Kk | Clad vessel |
| US6422861B1 (en) * | 2000-11-20 | 2002-07-23 | General Electric Company | Quartz fusion furnace and method for forming quartz articles |
| US20140227527A1 (en) * | 2011-09-29 | 2014-08-14 | Nitride Solutions Inc. | Inorganic materials, methods and apparatus for making same, and uses thereof |
-
1984
- 1984-03-26 JP JP5772784A patent/JPS60200982A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60200982A (en) | 1985-10-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US3459583A (en) | Body of industrial carbon with an oxidation inhibiting coating,and method of producing such bodies | |
| US6607787B2 (en) | Process for producing a coating on a refractory structural member | |
| US2771666A (en) | Refractory bodies | |
| US4600659A (en) | Emissive coating on alloy x-ray tube target | |
| JPH0317073B2 (en) | ||
| US1335024A (en) | Process for preventing distortion of precious metals at temperatures higher than their fusing-points and article produced thereby | |
| JPH0317070B2 (en) | ||
| JPH0317072B2 (en) | ||
| JPH0317067B2 (en) | ||
| JPH0317071B2 (en) | ||
| US5604164A (en) | Refractory boat and method of manufacture | |
| US5157706A (en) | X-ray tube anode with oxide coating | |
| JPH0317074B2 (en) | ||
| JPH0317068B2 (en) | ||
| JPH0317069B2 (en) | ||
| JPH0317066B2 (en) | ||
| US5972522A (en) | Corrosion resistant Zn or part-Zn plated steel sheet with MgO coating free of Mg | |
| US4054500A (en) | Method of making refractory metal-ceramic crucible | |
| US3393084A (en) | Coating carbon substrates with refractory metal carbides | |
| US4198449A (en) | Method for the preparation of thin films of high-temperature-resistant metals such as tungsten, molybdenum, rhenium or osmium | |
| US4129765A (en) | Electrical switching contact | |
| JPH04267040A (en) | X-ray-tube anode and manufacture thereof | |
| JPS6367540B2 (en) | ||
| JP2565936B2 (en) | Clad container | |
| JPS6148563A (en) | Source for vacuum deposition |