JPH0316613U - - Google Patents
Info
- Publication number
- JPH0316613U JPH0316613U JP7816089U JP7816089U JPH0316613U JP H0316613 U JPH0316613 U JP H0316613U JP 7816089 U JP7816089 U JP 7816089U JP 7816089 U JP7816089 U JP 7816089U JP H0316613 U JPH0316613 U JP H0316613U
- Authority
- JP
- Japan
- Prior art keywords
- film forming
- film
- chamber
- discharge port
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010408 film Substances 0.000 claims description 10
- 239000010409 thin film Substances 0.000 claims description 5
- 238000005192 partition Methods 0.000 claims description 2
- 239000003595 mist Substances 0.000 claims 2
- 239000002994 raw material Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 230000001105 regulatory effect Effects 0.000 claims 1
- 238000002791 soaking Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Liquid Crystal (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Non-Insulated Conductors (AREA)
- Manufacturing Of Electric Cables (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7816089U JPH0648685Y2 (ja) | 1989-06-30 | 1989-06-30 | 霧化薄膜形成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7816089U JPH0648685Y2 (ja) | 1989-06-30 | 1989-06-30 | 霧化薄膜形成装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0316613U true JPH0316613U (pt) | 1991-02-19 |
| JPH0648685Y2 JPH0648685Y2 (ja) | 1994-12-12 |
Family
ID=31621184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7816089U Expired - Lifetime JPH0648685Y2 (ja) | 1989-06-30 | 1989-06-30 | 霧化薄膜形成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648685Y2 (pt) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008101254A (ja) * | 2006-10-20 | 2008-05-01 | Mitsubishi Heavy Ind Ltd | 蒸着装置及び蒸着方法 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3717575B2 (ja) * | 1996-02-08 | 2005-11-16 | 株式会社リコー | 薄膜形成装置 |
| JP3717579B2 (ja) * | 1996-02-23 | 2005-11-16 | 株式会社リコー | 巻き取り式成膜装置 |
-
1989
- 1989-06-30 JP JP7816089U patent/JPH0648685Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008101254A (ja) * | 2006-10-20 | 2008-05-01 | Mitsubishi Heavy Ind Ltd | 蒸着装置及び蒸着方法 |
| JP4576370B2 (ja) * | 2006-10-20 | 2010-11-04 | 三菱重工業株式会社 | 蒸着装置及び蒸着方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0648685Y2 (ja) | 1994-12-12 |