JPH0316550B2 - - Google Patents
Info
- Publication number
- JPH0316550B2 JPH0316550B2 JP13886786A JP13886786A JPH0316550B2 JP H0316550 B2 JPH0316550 B2 JP H0316550B2 JP 13886786 A JP13886786 A JP 13886786A JP 13886786 A JP13886786 A JP 13886786A JP H0316550 B2 JPH0316550 B2 JP H0316550B2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- vacuum
- diaphragm
- chamber
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 8
- 239000007864 aqueous solution Substances 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 7
- 230000001105 regulatory effect Effects 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 12
- 230000000694 effects Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 230000005587 bubbling Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
Landscapes
- Details Of Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13886786A JPS62297583A (ja) | 1986-06-13 | 1986-06-13 | 真空度調節弁装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13886786A JPS62297583A (ja) | 1986-06-13 | 1986-06-13 | 真空度調節弁装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62297583A JPS62297583A (ja) | 1987-12-24 |
| JPH0316550B2 true JPH0316550B2 (de) | 1991-03-05 |
Family
ID=15231977
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13886786A Granted JPS62297583A (ja) | 1986-06-13 | 1986-06-13 | 真空度調節弁装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62297583A (de) |
-
1986
- 1986-06-13 JP JP13886786A patent/JPS62297583A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62297583A (ja) | 1987-12-24 |
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