JPH0316550B2 - - Google Patents

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Publication number
JPH0316550B2
JPH0316550B2 JP13886786A JP13886786A JPH0316550B2 JP H0316550 B2 JPH0316550 B2 JP H0316550B2 JP 13886786 A JP13886786 A JP 13886786A JP 13886786 A JP13886786 A JP 13886786A JP H0316550 B2 JPH0316550 B2 JP H0316550B2
Authority
JP
Japan
Prior art keywords
valve
vacuum
diaphragm
chamber
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13886786A
Other languages
Japanese (ja)
Other versions
JPS62297583A (en
Inventor
Takayuki Morii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TLV Co Ltd
Original Assignee
TLV Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TLV Co Ltd filed Critical TLV Co Ltd
Priority to JP13886786A priority Critical patent/JPS62297583A/en
Publication of JPS62297583A publication Critical patent/JPS62297583A/en
Publication of JPH0316550B2 publication Critical patent/JPH0316550B2/ja
Granted legal-status Critical Current

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Description

【発明の詳細な説明】 1 産業上の利用分野 本発明は真空蒸発器、真空濃縮器や蒸溜の促進
時に所望の真空圧力に自己制御機能を持つ真空度
調節弁に関し、特にこれらの周辺機器システムに
関する。
[Detailed Description of the Invention] 1. Field of Industrial Application The present invention relates to a vacuum evaporator, a vacuum concentrator, and a vacuum level control valve that has a self-control function to maintain a desired vacuum pressure when promoting distillation, and is particularly applicable to peripheral equipment systems of these devices. Regarding.

上記装置に於て製品の品質を一定に保つ為に、
真空圧力を一定に制御しなければならないし、ま
た装置から発生したガスは凝縮させ完全除去しな
ければ、ガスの種類によつては真空発生装置自体
の寿命を短くする。
In order to maintain constant product quality in the above equipment,
The vacuum pressure must be controlled at a constant level, and if the gas generated from the device is not completely removed by condensation, the life of the vacuum generator itself may be shortened depending on the type of gas.

2 従来技術 従来この種の真空圧力制御機器に於ては、メイ
ンの真空ラインがあつて、そこから枝別れした管
を真空にすべき装置の吸引口に連結していた。そ
して、真空装置内の真空度を一定に保持する為に
装置の吸引側にバイパス用のニードル弁を設け、
強制的に空気を吸入させ装置内の真空度を調整し
ていた。
2. Prior Art Conventionally, in this type of vacuum pressure control equipment, there was a main vacuum line, and branched pipes from the main vacuum line were connected to the suction port of the device to be evacuated. In order to maintain a constant degree of vacuum inside the vacuum device, a bypass needle valve is installed on the suction side of the device.
The degree of vacuum inside the device was adjusted by forcibly inhaling air.

また、装置から発生したガスは、液体窒素等の
極低温溶液により強制的に凝縮させるコールドト
ラツプで除去し、真空発生装置には流れ込まない
ようにしていた。
In addition, the gas generated from the device was removed by a cold trap that was forcibly condensed using an extremely low temperature solution such as liquid nitrogen, and was prevented from flowing into the vacuum generator.

3 本発明が解決しようとする問題点 上記システムでは所望の真空度を精度よく得る
ことは困難である。つまり、真空発生装置側の圧
力変化に応じて、バイパスのニードル弁の開度を
常時調節する必要がある。また、管内に空気を吸
入させるということは、それだけ真空発生装置の
余分な運転につながり、ランニングコストが高く
なる。
3 Problems to be Solved by the Present Invention With the above system, it is difficult to obtain a desired degree of vacuum with high accuracy. In other words, it is necessary to constantly adjust the opening degree of the bypass needle valve in accordance with pressure changes on the vacuum generator side. Furthermore, sucking air into the pipe leads to extra operation of the vacuum generator, increasing running costs.

コールドトラツプ自体高価なものであり、また
それに類する配管をしなければならず、さらには
極低温溶液を使用するのでコストが非常に高くな
る。
The cold trap itself is expensive, requires similar piping, and uses cryogenic solutions, making the cost very high.

4 問題を解決する為の手段 本発明が講じた技術的手段は、入口出口を有す
る弁筐体内に両者を連通する弁口を設け、ダイヤ
フラムで仕切つた弁室を入口側に形成し、当該弁
口を開閉せしめる弁体を当該ダイヤフラムの弁室
内側に設け、弁室内圧力に応じて当該ダイヤフラ
ムをバランスさせる調整ばねを、当該ダイヤフラ
ムの弁室内側、又は外側、又は両側に配置せしめ
た真空度調節弁に於て、真空気体中の未凝縮ガス
を摘出せしめる為に、入口と出口の通路間に液溜
室を設け、その液溜室内に水溶液を溜め、その中
へ焼結金属フイルターを通して未凝縮ガスを噴
出・発泡せしめたものである。あるいは液溜室の
二次側通路に活性炭フイルターを配置したもので
ある。
4 Means for Solving the Problem The technical means taken by the present invention is to provide a valve port that communicates the two in a valve housing having an inlet and an outlet, and to form a valve chamber partitioned by a diaphragm on the inlet side. A vacuum degree adjustment system in which a valve body that opens and closes the mouth is provided inside the valve chamber of the diaphragm, and an adjustment spring that balances the diaphragm according to the pressure in the valve chamber is placed inside or outside the valve chamber of the diaphragm, or on both sides. In the valve, in order to remove uncondensed gas from the vacuum air body, a liquid reservoir is provided between the inlet and outlet passages, and an aqueous solution is stored in the reservoir and passed through a sintered metal filter to remove the uncondensed gas. Gas is ejected and foamed. Alternatively, an activated carbon filter is placed in the secondary passage of the liquid storage chamber.

5 作用 本発明の弁の入口側と真空にしたい機器、出口
側と真空ポンプをそれぞれ配管接続し、真空ポン
プにて吸引する。調整ねじを操作してダイヤフラ
ム及びそれに設けられた弁を所望の状態に押し付
ける。運転初期は弁室の圧力がまだ所望の圧力よ
り高い為に、ダイヤフラムはそのままの状態にあ
り弁口は吸引を続ける。やがて弁室の圧力が下が
り所望の圧力に近付いてくると、上調整ばねの付
勢力が勝つてダイヤフラムが下へ撓み、弁口を閉
じる様に働く。通常はこのバランス状態を保ちな
がら作動する。この調整ばね力を操作することに
より任意の真空度を容易に得ることが出来る。
5. Effect The inlet side of the valve of the present invention is connected to a device to be evacuated, and the outlet side is connected to a vacuum pump, respectively, and suction is performed by the vacuum pump. Manipulate the adjustment screw to force the diaphragm and its associated valve to the desired state. At the beginning of operation, the pressure in the valve chamber is still higher than the desired pressure, so the diaphragm remains in the same state and the valve port continues to suck. When the pressure in the valve chamber eventually decreases and approaches the desired pressure, the biasing force of the upper adjustment spring overcomes and the diaphragm bends downward, working to close the valve port. Normally, it operates while maintaining this balanced state. Any degree of vacuum can be easily obtained by operating this adjustment spring force.

弁口から出口側への間に未凝縮ガスは、焼結金
属フイルターを通つて液溜室内の水溶液中へ噴出
する。この時ガスは発泡作用により、表面積を多
くして、水溶液中に溶解する。
Between the valve port and the outlet side, uncondensed gas passes through a sintered metal filter and is ejected into the aqueous solution in the liquid reservoir. At this time, the gas increases its surface area due to its bubbling action and dissolves in the aqueous solution.

溶解しきれなかつたガスは、更に出口側に設け
られた活性炭フイルターで吸着される。
The undissolved gas is further adsorbed by an activated carbon filter provided on the outlet side.

6 発明の効果 本発明は下記の特有の効果を生じる。6 Effects of the invention The present invention produces the following unique effects.

大掛かりな装置を必要とせず安価で容易に真空
度を調節でき、更にクリーンな空気を二次側へ送
ることが出来る。
The degree of vacuum can be easily adjusted at low cost without the need for large-scale equipment, and clean air can be sent to the secondary side.

弁はダイヤフラムでバランス作動しているの
で、二次側の真空度の変化に関係なく、一次側圧
力を一定に保持するとが出来る。
Since the valve operates in balance with a diaphragm, the pressure on the primary side can be maintained constant regardless of changes in the degree of vacuum on the secondary side.

7 実施例 上記の技術的手段の具体例を示す実施例を説明
する。(第1図参照) 本体1に入口2、出口3を同軸上に形成し、それ
ぞれに配管接続用の雌ねじを施す。本体の入口出
口を結ぶ軸と垂直方向に本体壁に囲まれた空間を
形成し、底部に弁口4を有する弁座部材5をガス
ケツト9を挾んで挿入する。弁座部材5の下部に
は雄ねじが施され、本体下面にガスケツト6を介
入してキヤツプ7をホルダー8で挾んで固定す
る。弁座部材5の上端部はゴム製の弁座シート1
0を接着接合する。
7 Example An example showing a specific example of the above technical means will be described. (See Figure 1) An inlet 2 and an outlet 3 are coaxially formed in the main body 1, and each is provided with a female thread for piping connection. A space surrounded by walls of the main body is formed in a direction perpendicular to the axis connecting the inlet and outlet of the main body, and a valve seat member 5 having a valve port 4 at the bottom is inserted with a gasket 9 in between. A male thread is provided at the bottom of the valve seat member 5, a gasket 6 is interposed on the lower surface of the main body, and the cap 7 is held and fixed by a holder 8. The upper end of the valve seat member 5 is made of rubber valve seat seat 1.
0 is adhesively bonded.

本体1と蓋13の間にゴム製(または金属製)
のダイヤフラム11を挾み袋ナツト12で締付
け、弁室14に形成する。ダイヤフラム11に弁
体15を弁室14の内側向きに貫通せしめ、座金
16,17を上下に挾んで固定する。
Rubber (or metal) between main body 1 and lid 13
The diaphragm 11 is tightened with a pinch bag nut 12 to form a valve chamber 14. A valve body 15 is passed through the diaphragm 11 toward the inside of the valve chamber 14, and washers 16 and 17 are sandwiched between the upper and lower sides and fixed.

ダイヤフラム11の下面と弁室14の底部の間
に弁口を中心に位置するように下調整ばね19を
配置する。一方上面には上調整ばね20を配置
し、剛性のボール21を圧入したぱね押え22を
挾んで蓋13の上部に螺合せしめた調整ねじ18
で付勢する。
A lower adjustment spring 19 is arranged between the lower surface of the diaphragm 11 and the bottom of the valve chamber 14 so as to be centered on the valve opening. On the other hand, an upper adjustment spring 20 is arranged on the upper surface, and an adjustment screw 18 is screwed into the upper part of the lid 13 by holding a spring retainer 22 into which a rigid ball 21 is press-fitted.
energize with.

蓋13の上部と調整ねじ18の間にロツクナツ
ト23を螺合せしめ、大気との連通口24を開け
る。
A lock nut 23 is screwed between the top of the lid 13 and the adjustment screw 18, and a communication port 24 with the atmosphere is opened.

キヤツプ7下部に捕集ピン25を嵌め込んで取
付ける。弁座部材5の下端は捕集ビン25内に有
り、ゴム製品の管26を取付け、その一端は焼結
金属フイルター27を取付ける。ホルダー8には
出口へ向かう孔が開けられ、その孔を活性炭フイ
ルター28で塞ぐ。捕集ピン25には常時水溶液
で半分程度満たされていて、焼結金属フイルター
27は水中にある。
Insert the collection pin 25 into the lower part of the cap 7 and attach it. The lower end of the valve seat member 5 is located in the collecting bin 25, and a rubber tube 26 is attached thereto, and one end thereof is attached with a sintered metal filter 27. A hole toward the outlet is opened in the holder 8, and the hole is closed with an activated carbon filter 28. The collection pin 25 is always about half filled with an aqueous solution, and the sintered metal filter 27 is underwater.

作用は下記の通りである。 The action is as follows.

入口2と真空にしたに機器、出口3と真空発生
装置をそれぞれ配管で接続する。調整ねじ18を
操作してダイヤフラム11及び弁体15を所望の
状態に押し付ける。運転初期は弁室14の圧力が
まだ所望の圧力より高い為に、ダイヤフラム11
はそのままの状態にあり弁口4を開けて吸引を続
ける。やがて弁室14の圧力が下がり、所望の圧
力に近付いてくると、上調整ばね20の付勢力が
勝つてダイヤフラム11が下へ撓み、弁口4を閉
じる様に働く。通常はこのバランス状態を保ちな
がら作動する。調整ねじ18を押し下げると閉弁
しやすくなるので、設定圧力を高くすることがで
き、逆に引き上げると、閉弁し難くなるので、設
定圧力を低く設けることができる。この様に、調
整ばね力を操作することにより任意の真空度を容
易に得ることが出来る。
Connect the inlet 2 and the vacuum generator, and the outlet 3 and the vacuum generator, respectively, with piping. The adjusting screw 18 is operated to press the diaphragm 11 and the valve body 15 into a desired state. At the beginning of operation, the pressure in the valve chamber 14 is still higher than the desired pressure, so the diaphragm 11
remains as it is, and the valve port 4 is opened to continue suction. When the pressure in the valve chamber 14 eventually decreases and approaches a desired pressure, the biasing force of the upper adjustment spring 20 overcomes and the diaphragm 11 is bent downward, working to close the valve port 4. Normally, it operates while maintaining this balanced state. Pushing down the adjustment screw 18 makes it easier to close the valve, so the set pressure can be increased; conversely, pushing it up makes it difficult to close the valve, so the set pressure can be set low. In this way, by manipulating the adjustment spring force, any degree of vacuum can be easily obtained.

弁口4から出口3への間に未凝縮ガスは、焼結
金属フイルター27を通つて液溜室内の水溶液中
へ噴出する。この時ガスは発泡作用により、表面
積を多くして、水溶液中に溶解する。
Between the valve port 4 and the outlet 3, uncondensed gas passes through a sintered metal filter 27 and is ejected into the aqueous solution in the reservoir chamber. At this time, the gas increases its surface area due to its bubbling action and dissolves in the aqueous solution.

溶解しきれなかつたガスは、更に出口3に設け
られた活性炭フイルター28で吸着される。
The undissolved gas is further adsorbed by an activated carbon filter 28 provided at the outlet 3.

本発明の弁は弁室14の圧力と調整ばね18の
バランス状態で作動しているので、二次側圧力の
真空度が変化した場合でも、調整ねじを操作する
ことなく自動的に自己制御し、常に所望の一時圧
力を提供する。
The valve of the present invention operates in a balanced state between the pressure in the valve chamber 14 and the adjustment spring 18, so even if the degree of vacuum of the outlet pressure changes, it can automatically control itself without operating the adjustment screw. , always providing the desired temporary pressure.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の実施例の真空度調整弁の断面
図である。 1……本体、2……入口、3……出口、4……
弁口、13……蓋、11……ダイヤフラム、14
……弁室、15…弁体、18……調整ねじ、1
9,20……調整ばね、25……捕集ビン、27
……焼結金属フイルター、28……活性炭フイル
ター。
FIG. 1 is a sectional view of a vacuum level regulating valve according to an embodiment of the present invention. 1...Body, 2...Inlet, 3...Exit, 4...
Valve port, 13...Lid, 11...Diaphragm, 14
... Valve chamber, 15 ... Valve body, 18 ... Adjustment screw, 1
9, 20... Adjustment spring, 25... Collection bottle, 27
... Sintered metal filter, 28 ... Activated carbon filter.

Claims (1)

【特許請求の範囲】 1 入口出口を有する弁筐体内に両者を連通する
弁口を設け、ダイヤフラムで仕切つた弁室を入口
側に形成し、当該弁口を開閉せしめる弁体を当該
ダイヤフラムの弁室内側に設け、弁室内圧力に応
じて当該ダイヤフラムをバランスさせる調整ばね
を、当該ダイヤフラムの弁室内側、又は外側、又
は両側に配置せしめた真空度調節弁に於て、真空
気体中の未凝縮ガスを摘出せしめる為に、入口と
出口の通路間に液溜室を設けたことを特徴とする
真空度調節弁装置。 2 特許請求の範囲第1項記載の装置に於いて、
液溜室内に水溶液を溜め、その中へ焼結金属フイ
ルターを通して未凝縮ガスを噴出・発泡せしめた
ことを特徴とする真空度調節弁装置。 3 特許請求の範囲第1項記載の装置に於いて、
液溜室の二次側通路に活性炭フイルターを配置し
たことを特徴とする真空度調節弁装置。
[Scope of Claims] 1. A valve port that communicates the two is provided in a valve housing having an inlet and an outlet, a valve chamber partitioned by a diaphragm is formed on the inlet side, and a valve body for opening and closing the valve port is connected to the valve of the diaphragm. In a vacuum level control valve, an adjustment spring is provided on the inside of the chamber and balances the diaphragm according to the pressure in the valve chamber. A vacuum level control valve device characterized by having a liquid reservoir chamber between an inlet and an outlet passage to extract gas. 2. In the device according to claim 1,
A vacuum degree regulating valve device characterized in that an aqueous solution is stored in a liquid storage chamber, and uncondensed gas is ejected and foamed through a sintered metal filter. 3. In the device described in claim 1,
A vacuum level control valve device characterized in that an activated carbon filter is arranged in a secondary passage of a liquid storage chamber.
JP13886786A 1986-06-13 1986-06-13 Degree of vacuum regulation valve device Granted JPS62297583A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13886786A JPS62297583A (en) 1986-06-13 1986-06-13 Degree of vacuum regulation valve device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13886786A JPS62297583A (en) 1986-06-13 1986-06-13 Degree of vacuum regulation valve device

Publications (2)

Publication Number Publication Date
JPS62297583A JPS62297583A (en) 1987-12-24
JPH0316550B2 true JPH0316550B2 (en) 1991-03-05

Family

ID=15231977

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13886786A Granted JPS62297583A (en) 1986-06-13 1986-06-13 Degree of vacuum regulation valve device

Country Status (1)

Country Link
JP (1) JPS62297583A (en)

Also Published As

Publication number Publication date
JPS62297583A (en) 1987-12-24

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