JPH03165350A - Magneto-optical recording medium - Google Patents
Magneto-optical recording mediumInfo
- Publication number
- JPH03165350A JPH03165350A JP30441689A JP30441689A JPH03165350A JP H03165350 A JPH03165350 A JP H03165350A JP 30441689 A JP30441689 A JP 30441689A JP 30441689 A JP30441689 A JP 30441689A JP H03165350 A JPH03165350 A JP H03165350A
- Authority
- JP
- Japan
- Prior art keywords
- magneto
- reflective film
- recording medium
- metal
- optical recording
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010408 film Substances 0.000 claims abstract description 38
- 229910052751 metal Inorganic materials 0.000 claims abstract description 21
- 239000002184 metal Substances 0.000 claims abstract description 21
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 11
- 239000000956 alloy Substances 0.000 claims abstract description 11
- 229910052709 silver Inorganic materials 0.000 claims abstract description 10
- 239000000758 substrate Substances 0.000 claims abstract description 10
- 229910052726 zirconium Inorganic materials 0.000 claims abstract description 10
- 229910052715 tantalum Inorganic materials 0.000 claims abstract description 9
- 229910052802 copper Inorganic materials 0.000 claims abstract description 7
- 229910052761 rare earth metal Inorganic materials 0.000 claims abstract description 5
- 150000002910 rare earth metals Chemical class 0.000 claims abstract description 5
- 229910052723 transition metal Inorganic materials 0.000 claims abstract description 5
- 239000010409 thin film Substances 0.000 claims abstract description 4
- 229910052782 aluminium Inorganic materials 0.000 claims abstract 2
- 230000035945 sensitivity Effects 0.000 abstract description 10
- 229910001092 metal group alloy Inorganic materials 0.000 abstract 1
- 238000002310 reflectometry Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 16
- 239000000463 material Substances 0.000 description 12
- 230000000694 effects Effects 0.000 description 10
- 239000011241 protective layer Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 8
- 238000004544 sputter deposition Methods 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 4
- -1 Afl Chemical class 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 238000002161 passivation Methods 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 230000005374 Kerr effect Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 229920000515 polycarbonate Polymers 0.000 description 2
- 229910052692 Dysprosium Inorganic materials 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- WTFXARWRTYJXII-UHFFFAOYSA-N iron(2+);iron(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[Fe+2].[Fe+3].[Fe+3] WTFXARWRTYJXII-UHFFFAOYSA-N 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229910001004 magnetic alloy Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、書換えが可能な光磁気記録媒体に関。[Detailed description of the invention] [Industrial application field] The present invention relates to a rewritable magneto-optical recording medium.
するものである。It is something to do.
近年、ＴｂＦｅＣｏ、ＧｄＴｂＦｅＣｏ、ＴｂＤｙＦｅ
Ｃｏなどの非晶質希土類金属一遷移金属合金薄膜（垂直
磁化膜）を記録層とする書換え可能な光磁気記録媒体を
用いた光磁気メモリーシステムが大容量メモリーシステ
ムとして実用化されている。このシステムは。In recent years, TbFeCo, GdTbFeCo, TbDyFe
A magneto-optical memory system using a rewritable magneto-optical recording medium having a recording layer of an amorphous rare earth metal-transition metal alloy thin film (perpendicular magnetization film) such as Co has been put into practical use as a large-capacity memory system. This system is.
半導体レーザー光及び磁石を用いて記録層にＩＩ Ｏ１
１、“１”の信号を磁化の向きでメモリーしておき、磁
気光学効果を用いてこの信号を読み出すものである。こ
こで磁気光学効果としては主にカー効果が利用され、こ
の効果の良否はカー回転角θ８で評価される。読み出し
性能はカー回転角θ８が大きい程よいため、カー回転角
θｋを増大させるべく種々の試みがなされており、その
うちの１つに反射膜を設ける方法がある。この方法は、
基板上に磁性膜及び反射膜を順次積層した媒体構成とし
、基板側からの入射光の一部は磁性膜の表面で反射させ
（この時カー効果を受ける）、その残りは磁性膜を通過
したところで反射膜によって反射させ（この時ファラデ
ー効果を受ける）、みかけのカー回転角を増大させるこ
とにより、読み出し性能の向上を図るものである。この
場合、反射膜は反射率が比較的大きいことが望ましく、
従来はＡｆｌ、 Ｃｕ、Ａｕ、 Ａｇ等の金属が使用さ
れていた（特開昭５７−１２４２８号、特公昭６２−２
７４５８号公報）。II O1 is applied to the recording layer using a semiconductor laser beam and a magnet.
1. A signal of "1" is stored in memory according to the direction of magnetization, and this signal is read out using the magneto-optic effect. Here, the Kerr effect is mainly used as the magneto-optic effect, and the quality of this effect is evaluated by the Kerr rotation angle θ8. Since the read performance is better as the Kerr rotation angle θ8 is larger, various attempts have been made to increase the Kerr rotation angle θk, one of which is a method of providing a reflective film. This method is
The media has a structure in which a magnetic film and a reflective film are sequentially laminated on a substrate, and a portion of the incident light from the substrate side is reflected by the surface of the magnetic film (at this time subjected to the Kerr effect), while the rest passes through the magnetic film. By the way, the reading performance is improved by reflecting the light by a reflective film (at this time, it is subject to the Faraday effect) and increasing the apparent Kerr rotation angle. In this case, it is desirable that the reflective film has a relatively high reflectance.
Conventionally, metals such as Afl, Cu, Au, and Ag were used (Japanese Patent Application Laid-Open No. 57-12428, Japanese Patent Publication No. 62-2
Publication No. 7458).
しかしながら、ＡＱ、 Ｃｕ、Ａｕ、 Ａｇ笠を用いて
反射膜を構成する場合、これらの材料は熱伝導率が大き
いため、記録時にレーザー照射による熱が拡散してしま
い記録感度が著しく低下するという欠点があった。However, when forming a reflective film using AQ, Cu, Au, or Ag caps, these materials have high thermal conductivity, so the drawback is that the heat from laser irradiation during recording is diffused, resulting in a significant decrease in recording sensitivity. was there.
この欠点を解消するため、熱伝導率の小さいＴａやＺｒ
なとの金属を反射膜として利用することが提案された（
特開昭６１−１８２６４９号、特開昭６２−１５４２４
９号）が、これらの材料は反射率が小さいために再生光
量が充分に得られず、Ｃ／Ｎの劣化を招いてしまう。In order to eliminate this drawback, Ta and Zr, which have low thermal conductivity, were used.
It was proposed that the metal of Nato be used as a reflective film (
JP-A-61-182649, JP-A-62-15424
However, since these materials have low reflectance, a sufficient amount of reproduction light cannot be obtained, resulting in deterioration of C/N.
本発明は、このような従来技術の欠点を解消し、再生Ｃ
／Ｎ及び記録感度の双方が改良された光磁気記録媒体を
提供することを目的とする。The present invention solves the drawbacks of the prior art and enables reproduction of C.
An object of the present invention is to provide a magneto-optical recording medium with improved both /N and recording sensitivity.
〔課題を解決するための手段及び作用〕本発明者は、上
記のような従来技術の実情に鑑み鋭意研究を重ねた結果
、反射率の大きいＡＱ、Ｃｕ。[Means and effects for solving the problem] As a result of extensive research in view of the actual state of the prior art as described above, the present inventor has developed AQ, Cu, which has a high reflectance.
Ａｇと、熱伝導率の／ＪｓさいＺｒ、 Ｔａとの合金を
反射膜材料とすることにより反射率及び熱伝導率の双方
の必要特性が満足される反射膜が得られることを見い出
し、本発明を完成するに至った。It was discovered that by using an alloy of Ag and Zr and Ta with a thermal conductivity of /Js as a reflective film material, a reflective film that satisfies the required characteristics of both reflectance and thermal conductivity was obtained, and the present invention I was able to complete it.
すなわち、本発明によれば、透明基板上に少なくとも非
晶質の希土類金属一遷移金属合金薄膜からなる記録層及
び反射膜を設けてなる光磁気記録媒体において、前記反
射膜が、ＡＱ、Ｃｕ及びＡｇよりなる金属群（Ｉ）から
選ばれる少なくとも１種の金属とＺｒ及びＴａよりなる
金属群（ＩＩ）から選ばれる少なくとも１種の金属との
合金により形成されていることを特徴とする光磁気記録
媒体が提供される。That is, according to the present invention, in a magneto-optical recording medium comprising a recording layer and a reflective film made of at least an amorphous rare earth metal-transition metal alloy thin film on a transparent substrate, the reflective film includes AQ, Cu, and A magneto-optical device characterized in that it is formed of an alloy of at least one metal selected from metal group (I) consisting of Ag and at least one metal selected from metal group (II) consisting of Zr and Ta. A recording medium is provided.
以下本発明を図面に基づき詳細に説明する。The present invention will be explained in detail below based on the drawings.
第１図は本発明による光磁気記録媒体の一構成例を示す
断面図であり、該光磁気記録媒体は透明基板１上に、第
１の保護Ｎ２．記録層３、第２の保護層４及び反射膜５
を順次積層して構成されている。FIG. 1 is a sectional view showing an example of the configuration of a magneto-optical recording medium according to the present invention. Recording layer 3, second protective layer 4 and reflective film 5
It is constructed by sequentially laminating layers.
基板１には、光透過性に優れ、耐熱性や耐候性、耐薬品
性に優れた材質が好ましい。プラスチックやガラスはこ
の要求を満たしており、プラスチックはトラッキング用
の案内溝やピットが２Ｐ法又は射呂成形で簡単にしかも
安価に形成でき、ガラスは密着露光法のドライエツチン
グ等でトラッキング用の溝やピットを形成できる。プラ
スチックを用いる場合、特にポリカーボネートやアモル
ファスのポリオレフィン等の材質が好ましく使用される
。The substrate 1 is preferably made of a material that has excellent light transmittance, heat resistance, weather resistance, and chemical resistance. Plastics and glass meet this requirement. For plastics, guide grooves and pits for tracking can be easily and inexpensively formed using the 2P method or by molding, while for glass, tracking grooves and pits can be formed using dry etching using contact exposure methods. can form pits. When using plastic, materials such as polycarbonate and amorphous polyolefin are particularly preferably used.
基板１上に設ける第１の保護層２は、記録層（磁性石）
３を外界の湿気（つまり水分）などによる腐食から防止
するパッシベーション効果と、記録層３の反射カー回転
角を光の多重反射により増大させるエンハンスメント効
果を有する。このため、第１の保護層２としては、屈折
率ｎを大きくでき、しかもパッシベーション効果も十分
であるＳｉＮ、 ＳｉＯなどが好ましく使用される。第
１の保護層２の成膜にはスパッタ法、蒸着法等が使用さ
れ、６００〜１２００人の膜厚に形成される。The first protective layer 2 provided on the substrate 1 is a recording layer (magnetic stone)
It has a passivation effect that prevents the recording layer 3 from being corroded by external humidity (that is, moisture), and an enhancement effect that increases the reflection Kerr rotation angle of the recording layer 3 through multiple reflections of light. Therefore, as the first protective layer 2, SiN, SiO, etc., which can increase the refractive index n and have a sufficient passivation effect, are preferably used. The first protective layer 2 is formed using a sputtering method, a vapor deposition method, or the like, and is formed to a thickness of 600 to 1200 layers.
記録層３には、 Ｔｂ、 Ｇｄ、 Ｄｙ、 Ｎｄ等の希
土類金属を少なくとも１種以上と、遷移金属Ｆｅ、 Ｃ
ｏの少なくとも１種以上とを組合わせた非晶質の磁性合
金が使用される。このような合金としては例えばＴｂＦ
ｅＣｏ、ＧｄＴｂＦｅＣｏ、 ＮｄＤｙＦｅＣｏ、 Ｔ
ｂＤＹＦｅＣｏ等が例示される。この記録層３はスパッ
タ法、蒸着法等により２００〜１０００人の膜厚に形成
される。The recording layer 3 includes at least one rare earth metal such as Tb, Gd, Dy, and Nd, and transition metals Fe and C.
An amorphous magnetic alloy is used in combination with at least one or more of the following. As such an alloy, for example, TbF
eCo, GdTbFeCo, NdDyFeCo, T
bDYFeCo etc. are exemplified. This recording layer 3 is formed to a thickness of 200 to 1000 layers by sputtering, vapor deposition, or the like.
第２の保護層４には、記録層３の腐食劣化を防止するた
めにパッシベーション効果の大きいＳｉＮ、ＳｉＯなど
の材料が使用され、第１の保護層２と同様の成膜法によ
り３００〜２０００人の膜厚に形成される。The second protective layer 4 is made of a material such as SiN or SiO, which has a large passivation effect, in order to prevent corrosion deterioration of the recording layer 3, and is formed using the same film forming method as the first protective layer 2. Formed to the thickness of a person.
反射膜５は本発明の特徴となるもので、前述したように
、ＡＱ、 Ｃｕ及びＡｇよりなる金属群（Ｉ）から選ば
れる少なくとも一種の金属と、Ｚｒ及びＴａよりなる金
属群（ＩＩ）から選ばれる少なくとも一種の金属との合
金が構成材料として使用される。本発明の反射膜５はみ
かけ上のカー回転角を増大させ再生信号を大きくすると
ともに、記録時におけるレーザー光照射による熱の拡散
を小さくし記録感度を向上させる役割をする。このため
、反射膜５の反射率は７５−９０％であるのが好ましく
、熱伝導率は７０〜２００Ｖ／Ｉｌ＋にであるのが好ま
しい。反射膜５の反射率が上記範囲外であるとＣ／Ｎ比
が低下し、また熱伝導率が上記範囲外であると記録感度
が低下する。The reflective film 5 is a feature of the present invention, and as described above, it is made of at least one metal selected from metal group (I) consisting of AQ, Cu, and Ag, and metal group (II) consisting of Zr and Ta. An alloy with at least one selected metal is used as the constituent material. The reflective film 5 of the present invention serves to increase the apparent Kerr rotation angle and increase the reproduction signal, and also serves to reduce the diffusion of heat caused by laser beam irradiation during recording and improve recording sensitivity. Therefore, the reflectance of the reflective film 5 is preferably 75-90%, and the thermal conductivity is preferably 70-200 V/Il+. If the reflectance of the reflective film 5 is outside the above range, the C/N ratio will decrease, and if the thermal conductivity is outside the above range, the recording sensitivity will decrease.
また、反射膜５の成膜にはスパッタ法、蒸着法等が使用
され、その膜厚は３００〜１０００人が適当である。Further, a sputtering method, a vapor deposition method, etc. are used to form the reflective film 5, and a film thickness of 300 to 1000 is appropriate.
以上本発明による光磁気記録媒体の一構成例について述
べてきたが、本発明はこの構成例のみに限定されるもの
ではなく、例えば、反射層５の上に有機カバー層を設け
たり、接着層を介して第１図の如き媒体を貼り合せ両面
記録型とするなど、種々の変形、変更が可能である。Although one configuration example of the magneto-optical recording medium according to the present invention has been described above, the present invention is not limited to this configuration example. For example, an organic cover layer may be provided on the reflective layer 5, an adhesive layer Various modifications and changes are possible, such as making a double-sided recording type by bonding the media as shown in FIG. 1 through the media.
次に実施例をあげて本発明をさらに詳細に説明するが１
本発明はここに例示の実施例に限定されるものではない
。Next, the present invention will be explained in more detail with reference to Examples.
The invention is not limited to the embodiments illustrated herein.
（実施例）
基板として直径１３０ｍ、厚さ１．２ｍｎ＋のポリカー
ボネート基板（プリグループ付）をスパッタ装置にセッ
トし、該基板上スパッタ法を用いて、ＳｉＮからなる第
１の保護層を８００人の厚さに形成し、その上に（Ｔｂ
ｉｏＤｙｓｏ）ｚ４ＦｅｓｅｃＯｅなる組成の記録層を
２５０人の厚さに形成し、さらにその上にＳｉＮからな
る第２の保護層を３００人の膜厚に形成した。次に、第
２の保護層の上に、スパッタ法により、表−１に示す反
射膜材料（試料Ｎ［１２−５，８〜１１．１３−２０．
２２−２９）を用いて反射膜を５００人の厚さに形成す
ることにより２４種類の光磁気ディスクを作製した。な
お、反射膜の組成を変えるために、ＡＱ、 Ａｇ、 Ｃ
ｕのスパッタターゲット上にＴａ、 Ｚｒのｌ（！ＩＩ
ＸＩＱ１１チップをおく、いわゆるコンポジットターゲ
ツト法を用いた。また、反射膜材料としてｉ、 Ｔａ、
Ａｇ、 Ｃｕ、 Ｚｒの単体、金ｉ（試料Ｎａｌ、６
，７，１２，２１）を用い、上記と同様にして反射膜を
形成し、比較例とした。(Example) A polycarbonate substrate (with a pre-group) with a diameter of 130 m and a thickness of 1.2 mm+ was set in a sputtering device as a substrate, and a first protective layer made of SiN was deposited using the on-substrate sputtering method by 800 people. (Tb
A recording layer having a composition of ioDyso)z4FesecOe was formed to a thickness of 250 nm, and a second protective layer made of SiN was further formed thereon to a thickness of 300 nm. Next, on the second protective layer, the reflective film materials shown in Table 1 (Samples N [12-5, 8 to 11.13-20.
22-29) was used to form a reflective film to a thickness of 500 mm, thereby producing 24 types of magneto-optical disks. In addition, in order to change the composition of the reflective film, AQ, Ag, C
Ta, Zr l (!II
A so-called composite target method was used in which an XIQ11 chip was placed. In addition, as reflective film materials, i, Ta,
Elements of Ag, Cu, and Zr, gold i (sample Nal, 6
, 7, 12, 21), a reflective film was formed in the same manner as above to provide a comparative example.
表−１
以上のようにして作製した２９種類の光磁気ディスクに
ついて評価袋Ｍ（ナカミチ０ＮＳ−１０００（ＩＩＩ
））を用いて下記の条件で記録再生特性を評価した。そ
の結果を表−２に示す。Table 1 Evaluation bag M (Nakamichi 0NS-1000 (III)
)) was used to evaluate the recording and reproducing characteristics under the following conditions. The results are shown in Table-2.
・ディスク回転数： １８００ｒρｍ
・記録周波数： ３．７７ＭＨｚ
・測 定 位 置：Ｒ（半径）＝３２皿・外 部 磁
界： Ｈｅｘ＝４０００ｅ・再生ＬＤパワー： ＰＲｄ
、５１１１１１’表−２
本は比較例
表−１及び表−２から明らかなように、反射膜材料とし
てｉ、 Ａｇ、 Ｃｕ（試料Ｎ（１１，７，１２）を用
いた比較例の光磁気ディスクでは、反射膜材料の反射率
が高いためＣハが４９ｄＢと高いが感度が劣っている。・Disc rotation speed: 1800 rρm ・Recording frequency: 3.77 MHz ・Measurement position: R (radius) = 32 plates ・External magnet
Field: Hex=4000e・Reproduction LD power: PRd
, 511111'Table-2 As is clear from Comparative Examples Table-1 and Table-2, this is a comparative example of magneto-optical using i, Ag, Cu (sample N(11, 7, 12)) as the reflective film material. In the case of the disk, since the reflectance of the reflective film material is high, C is as high as 49 dB, but the sensitivity is poor.
また、反射膜材料としてＴａ又はＺｒ（試料Ｎα６，２
１）を用いた比較例の光磁気ディスクでは、熱伝導率が
小さいので感度は良いが、Ｃハは４６．５ｄＢと劣って
いる。これに対し、本発明の実施例の光磁気ディスクは
Ｃ／Ｎ及び感度とも単金属からなる反射膜による欠点を
補って両特性ともに優れていることが確認された。In addition, Ta or Zr (sample Nα6,2
The magneto-optical disk of the comparative example using 1) has a low thermal conductivity and therefore has good sensitivity, but its Cc is poor at 46.5 dB. On the other hand, it was confirmed that the magneto-optical disk of the example of the present invention was excellent in both C/N and sensitivity, compensating for the defects caused by the reflective film made of a single metal.
以上詳細に説明したように、本発明によれば、ｉ、 Ｃ
ｕ、及びＡｇよりなる金属群（１）から選ばれる少なく
とも１種の金属とＺｒ及びＴａよりなる金属群（ＩＩ）
から選ばれる少なくとも１種の金属との合金を反射膜材
料に用いたので、再生Ｃ／Ｎ及び感度の両特性を同時に
改良することが可能となる。As explained in detail above, according to the present invention, i, C
u, and at least one metal selected from metal group (1) consisting of Ag, and metal group (II) consisting of Zr and Ta.
Since an alloy with at least one metal selected from the following is used for the reflective film material, it is possible to simultaneously improve both reproduction C/N and sensitivity characteristics.
第１図は本発明による光磁気記録媒体の一構成例を示す
断面図である６
１・・・透明基板
２・・・第１の保護層
３・・・記録層
４・・・第２の保護層
５・・・反射膜FIG. 1 is a cross-sectional view showing an example of the configuration of a magneto-optical recording medium according to the present invention. Protective layer 5... reflective film
Claims (1)
移金属合金薄膜からなる記録層及び反射膜を設けてなる
光磁気記録媒体において、 前記反射膜が、Ａｌ、Ｃｕ及びＡｇよりなる金属群（
I ）から選ばれる少なくとも１種の金属とＺｒ及びＴａ
よりなる金属群（II）から選ばれる少なくとも１種の金
属との合金により形成されていることを特徴とする光磁
気記録媒体。(1) A magneto-optical recording medium comprising a recording layer and a reflective film made of at least an amorphous rare earth metal-transition metal alloy thin film on a transparent substrate, wherein the reflective film is a metal group made of Al, Cu, and Ag. (
I) at least one metal selected from Zr and Ta
1. A magneto-optical recording medium characterized in that it is formed of an alloy with at least one metal selected from metal group (II) consisting of:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30441689A JPH03165350A (en) | 1989-11-22 | 1989-11-22 | Magneto-optical recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30441689A JPH03165350A (en) | 1989-11-22 | 1989-11-22 | Magneto-optical recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03165350A true JPH03165350A (en) | 1991-07-17 |
Family
ID=17932739
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30441689A Pending JPH03165350A (en) | 1989-11-22 | 1989-11-22 | Magneto-optical recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03165350A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH073363A (en) * | 1993-04-22 | 1995-01-06 | Mitsubishi Materials Corp | High corrosion resistant ag-mg alloy and thin film thereof |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6486349A (en) * | 1987-09-28 | 1989-03-31 | Mitsubishi Chem Ind | Magneto-optical recording medium |
| JPH01173455A (en) * | 1987-12-28 | 1989-07-10 | Mitsubishi Kasei Corp | Magneto-optical recording medium |
| JPH01204243A (en) * | 1988-02-09 | 1989-08-16 | Mitsubishi Kasei Corp | Magneto-optical recording medium |
| JPH02226531A (en) * | 1989-02-27 | 1990-09-10 | Hitachi Ltd | Structure of optical disk |
| JPH02308454A (en) * | 1989-05-24 | 1990-12-21 | Teijin Ltd | Magneto-optical recording medium |
| JPH0376038A (en) * | 1989-08-16 | 1991-04-02 | Oki Electric Ind Co Ltd | Magneto-optical recording medium |
| JPH03142728A (en) * | 1989-10-30 | 1991-06-18 | Teijin Ltd | Optical recording medium |
-
1989
- 1989-11-22 JP JP30441689A patent/JPH03165350A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6486349A (en) * | 1987-09-28 | 1989-03-31 | Mitsubishi Chem Ind | Magneto-optical recording medium |
| JPH01173455A (en) * | 1987-12-28 | 1989-07-10 | Mitsubishi Kasei Corp | Magneto-optical recording medium |
| JPH01204243A (en) * | 1988-02-09 | 1989-08-16 | Mitsubishi Kasei Corp | Magneto-optical recording medium |
| JPH02226531A (en) * | 1989-02-27 | 1990-09-10 | Hitachi Ltd | Structure of optical disk |
| JPH02308454A (en) * | 1989-05-24 | 1990-12-21 | Teijin Ltd | Magneto-optical recording medium |
| JPH0376038A (en) * | 1989-08-16 | 1991-04-02 | Oki Electric Ind Co Ltd | Magneto-optical recording medium |
| JPH03142728A (en) * | 1989-10-30 | 1991-06-18 | Teijin Ltd | Optical recording medium |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH073363A (en) * | 1993-04-22 | 1995-01-06 | Mitsubishi Materials Corp | High corrosion resistant ag-mg alloy and thin film thereof |
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