JPH0316287Y2 - - Google Patents

Info

Publication number
JPH0316287Y2
JPH0316287Y2 JP1985173764U JP17376485U JPH0316287Y2 JP H0316287 Y2 JPH0316287 Y2 JP H0316287Y2 JP 1985173764 U JP1985173764 U JP 1985173764U JP 17376485 U JP17376485 U JP 17376485U JP H0316287 Y2 JPH0316287 Y2 JP H0316287Y2
Authority
JP
Japan
Prior art keywords
wafers
wafer
carrier
nozzle
gas pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985173764U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6282738U (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985173764U priority Critical patent/JPH0316287Y2/ja
Publication of JPS6282738U publication Critical patent/JPS6282738U/ja
Application granted granted Critical
Publication of JPH0316287Y2 publication Critical patent/JPH0316287Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1985173764U 1985-11-12 1985-11-12 Expired JPH0316287Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985173764U JPH0316287Y2 (cg-RX-API-DMAC7.html) 1985-11-12 1985-11-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985173764U JPH0316287Y2 (cg-RX-API-DMAC7.html) 1985-11-12 1985-11-12

Publications (2)

Publication Number Publication Date
JPS6282738U JPS6282738U (cg-RX-API-DMAC7.html) 1987-05-27
JPH0316287Y2 true JPH0316287Y2 (cg-RX-API-DMAC7.html) 1991-04-08

Family

ID=31111529

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985173764U Expired JPH0316287Y2 (cg-RX-API-DMAC7.html) 1985-11-12 1985-11-12

Country Status (1)

Country Link
JP (1) JPH0316287Y2 (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPS6282738U (cg-RX-API-DMAC7.html) 1987-05-27

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