JPH03161943A - Spark device - Google Patents

Spark device

Info

Publication number
JPH03161943A
JPH03161943A JP1302709A JP30270989A JPH03161943A JP H03161943 A JPH03161943 A JP H03161943A JP 1302709 A JP1302709 A JP 1302709A JP 30270989 A JP30270989 A JP 30270989A JP H03161943 A JPH03161943 A JP H03161943A
Authority
JP
Japan
Prior art keywords
torch
rod
bonding
time
spark
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1302709A
Other languages
Japanese (ja)
Inventor
Atsushi Okamoto
淳 岡本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP1302709A priority Critical patent/JPH03161943A/en
Publication of JPH03161943A publication Critical patent/JPH03161943A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/78Apparatus for connecting with wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78Apparatus for connecting with wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78Apparatus for connecting with wire connectors
    • H01L2224/7825Means for applying energy, e.g. heating means
    • H01L2224/78268Discharge electrode
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78Apparatus for connecting with wire connectors
    • H01L2224/7825Means for applying energy, e.g. heating means
    • H01L2224/783Means for applying energy, e.g. heating means by means of pressure
    • H01L2224/78301Capillary
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/85009Pre-treatment of the connector or the bonding area
    • H01L2224/8503Reshaping, e.g. forming the ball or the wedge of the wire connector
    • H01L2224/85035Reshaping, e.g. forming the ball or the wedge of the wire connector by heating means, e.g. "free-air-ball"
    • H01L2224/85045Reshaping, e.g. forming the ball or the wedge of the wire connector by heating means, e.g. "free-air-ball" using a corona discharge, e.g. electronic flame off [EFO]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/00014Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01082Lead [Pb]

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Wire Bonding (AREA)

Abstract

PURPOSE:To shorten working time by installing a torch rod which is fixed to a bonding head and moved in the vertical direction, mounting a solenoid which is connected to the rear end of, the torch rod and drives the torch rod and shortening a bonding time. CONSTITUTION:A torch rod 1 is set up to a bonding head 3 so as to be able to be vertically moved, the plunger 9 of a solenoid 8 is connected to the base section of the torch rod 1, and the torch rod 1 is lifted when electricity is conducted through the solenoid 8 and the plunger 9 is projected. A torch 2 is positioned at the lower section of a capillary 4 under the state in which a spark is not flown, and brought to the same state as the state in which the spark is flown, thus preventing the vertical movement of a bonding tool 5. Consequently, the time required for bonding is shortened. The rod 1 is elevated for obviate the interference of the torch 2 and the work hold-down 7 of a lead- frame carrying path 11 at the time of the shifting of a lead frame 10, and the torch 2 is moved to a position higher than the work hold-down 7. Accordingly, the bonding time is shortened, thus shortening workhours.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明はスパーク装置、特にワイヤーポンタに適用しう
るスパーク装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a spark device, particularly to a spark device applicable to a wire ponter.

〔従来の技術〕[Conventional technology]

従来のスパーク装置は、キャピラリの中心線と一定位離
隔して後端がボンディングヘットに固着するトーチロッ
ドと、トーチロットの先端に固定したI〜−チとを含ん
で楕或される。
A conventional spark device has an oval shape and includes a torch rod whose rear end is fixed to a bonding head at a certain distance from the center line of a capillary, and an I--CH fixed to a tip of the torch rod.

次に、従来のスパーク装置について図面を参照して詳細
に説明する。
Next, a conventional spark device will be described in detail with reference to the drawings.

第3図は従来のスパーク装置の一例を示す斜視図である
FIG. 3 is a perspective view showing an example of a conventional spark device.

第3図に示すスパーク装置は、1〜−ヂロッ1へ1bと
1・−チ2を含んで構或される。
The spark device shown in FIG. 3 is constructed to include 1 to 1 to 1b and 1 to 2.

1一一チロッド1bはボンディンクヘッド3に固設して
おり、キャピラリ4を保持するポンディンクツール5が
上方向に移動し、キャピラリ4がトーチ2よりも高い位
置になった状態でキャピラリ4に通された金線6とトー
チ2間でスパークを飛ばす構造となっている。
The bonding rod 1b is fixed to the bonding head 3, and the bonding tool 5 that holds the capillary 4 moves upward, and when the capillary 4 is at a higher position than the torch 2, it is attached to the capillary 4. The structure is such that sparks are emitted between the gold wire 6 and the torch 2.

次に、第4図を参照しながら動作を説明する。Next, the operation will be explained with reference to FIG.

あるチップのボンディンクが終了し、次のチップのボン
ディンクに移る際には、リートフレーム搬送路11のワ
ーク押え7を上けて、り−1ヘフレーl\10の移動を
行う。
When the bonding of one chip is completed and the next chip is to be bonded, the work holder 7 of the REET frame conveyance path 11 is raised and the frame 10 is moved to the RI-1.

その場合に、スパークを飛ばさない状態では1一−チロ
ッF ]. bは、リードフレーム搬送路11のワーク
押え7と干渉しないように常にリートフレーム搬送路1
1のワーク押え7よりもトーチ2か高い状態に位置する
ように設置されている。
In that case, in a state where no spark is emitted, 1-chiro F ]. b is always connected to the lead frame transport path 1 so as not to interfere with the work holder 7 of the lead frame transport path 11.
The torch 2 is installed so as to be located higher than the work holder 7 of the torch 1.

また、スパークを飛はず状態では、キャピラリ4がトー
ヂ2の」゛、方に拉置するようにポンティングヘッ1−
5は士.昇する。
In addition, when the spark is not flying, the capillary 4 is placed on the ponting head 1- to the side of the torque 2.
5 is a master. rise

従来のスパーク装置ではスパークを飛ばずことにボンテ
ィングツールが上下移動するので、スパークを飛はずの
に要する時間が長くなり、それにj心してボンーj−イ
ンク11.47問うゝ体の長さムf<: < !’fる
With conventional spark devices, the bonding tool moves up and down without causing a spark to fly, which increases the time required to make the spark fly. <: <! 'fru.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

−E述したスパーク装置ては、スパークを飛ばずごとに
ボンディングツールが上下移動するので、スパークを飛
ばすのに要する時間か長くなり、それに応じてホンティ
ング時間全体の長さも長くなるという欠点がある。
- EThe sparking device described above has the disadvantage that the bonding tool moves up and down every time the spark is ejected, which increases the time required to emit the spark, and the overall length of the bonding time increases accordingly. .

〔課題を解決するための手段〕 本発明のスパーク装置は、キャピラリの中心線と一定位
離隔してボンディンクヘッドに固着し垂直方向に可動す
る1・−チロッ}へと、前記1ヘーチロットの後端と連
結し前記+−−チロットを駆動するソレ,ノイドと、前
記1一一チロッドの先端に固定したトーチとを含んて横
戒される。
[Means for Solving the Problems] The spark device of the present invention connects a 1.-chirot that is fixed to a bonding head at a certain distance from the center line of a capillary and is movable in a vertical direction, after the 1-hachirot. The rod includes a solenoid connected to the end and driving the +-- pilot rod, and a torch fixed to the tip of the rod.

〔実施例〕〔Example〕

次に、本発明の実施例について、図面を参照して詳細に
説明する。
Next, embodiments of the present invention will be described in detail with reference to the drawings.

第1図は本発明の一実施例を示す斜視図である。FIG. 1 is a perspective view showing an embodiment of the present invention.

第1図に示すスパーク装置は、トーチロッド]とソレノ
イ1〜8と1ランシャ9と1ヘーチ2とを含んで構戒さ
れる。
The spark device shown in FIG. 1 includes a torch rod, solenoids 1 to 8, a runner 9, and a hitch 2.

1・−チロット1は上下移動できるようにホンディンク
ヘット3に設置されていて、1・−チロッド1の基部に
はソレノイド8のプランシャ9を連結し、ソレノイド8
に通電されてプランジャ9が突出するとトーチロットl
は上昇する。
1.-Chirod 1 is installed in the Hondink head 3 so that it can move up and down, and the plunger 9 of solenoid 8 is connected to the base of 1.-chirod 1.
When energized and the plunger 9 protrudes, the torch rod l
will rise.

次に、第2図を参照しながら動作を説明する。Next, the operation will be explained with reference to FIG.

スパークを飛ばさない状態ではトーチ2はキャピラリ4
の下方に位置しており、スパークを飛ばす状態の同一の
状態になっているので、ボンディングツール5は上下移
動する必要はない。
When no spark is emitted, torch 2 is capillary 4.
The bonding tool 5 does not need to be moved up or down because it is located below the 2nd position and is in the same state where sparks are emitted.

よって、ポンティンクツールの移動時間がないので、ボ
ンディンクに要する時間は短縮する。また、リードフレ
ーム10の移動を行う際の1〜−チ2とリードフレーl
\搬送路]1のワーク押え7の干渉を防ぐため、トーチ
ロッド1を上昇させ、トーヂ2はワーク押え7より高い
位置に移動する。
Therefore, since there is no time to move the ponting tool, the time required for bonding is shortened. Also, when moving the lead frame 10, 1 to 2 and the lead frame l
\Conveyance Path] In order to prevent interference with the work holder 7 of 1, the torch rod 1 is raised and the torch 2 is moved to a position higher than the work holder 7.

作業時間全体からみて、リードフレームの移動に要する
時間の割合は小さく、実際のポンディング時間が大半を
占めるため、ボンティンク時間を短縮することにより全
体の作業時間を短縮できる。
In view of the total working time, the time required for moving the lead frame is small and the actual bonding time accounts for most of the time, so by shortening the bonding time, the overall working time can be shortened.

〔発明の効果〕〔Effect of the invention〕

本発明のスパーク装置は、トーチロッドの上下移動機構
を設けることによりスパークを飛ばすのに要する時間か
短くなり、それに応してボンデインク時間も短くなるの
で、作業時間が短縮化するという効果がある。
By providing a mechanism for moving the torch rod up and down, the spark device of the present invention reduces the time required to blow a spark, and the bonding time is correspondingly shortened, resulting in an effect of shortening the working time.

【図面の簡単な説明】[Brief explanation of the drawing]

5 第1図は本発明の一実施例を示す斜視図、第2図は本発
明の動作例を示す動作説明図、第3図は従来の一例を示
す斜視図、第4図は従来の動作例を示す動作説明図であ
る。 1.,].b  ・・トーチロッド、2・・・トーチ、
3・・・ボンディングヘッド、4・・・キャピラリ、5
・・・ボンディンクツール、6・・・金線、7 ・ワー
ク押え、8・・・ソレノイド、9・・・プランジャ、]
0・・・リートフレーム、1]・・り−1〜フレーム搬
送路。
5. Fig. 1 is a perspective view showing an embodiment of the present invention, Fig. 2 is an operation explanatory diagram showing an example of the operation of the present invention, Fig. 3 is a perspective view showing an example of the conventional method, and Fig. 4 is a conventional operation diagram. FIG. 3 is an operation explanatory diagram showing an example. 1. ,]. b...Torch rod, 2...Torch,
3... Bonding head, 4... Capillary, 5
... bonding tool, 6 ... gold wire, 7 - work holder, 8 ... solenoid, 9 ... plunger, ]
0...Reet frame, 1]...Ri-1~frame conveyance path.

Claims (1)

【特許請求の範囲】[Claims] キャピラリの中心線と一定位離隔してボンディングヘッ
ドに固着し垂直方向に可動するトーチロッドと、前記ト
ーチロッドの後端と連結し前記トーチロッドを駆動する
ソレノイドと、前記トーチロッドの先端に固定したトー
チとを含むことを特徴とするスパーク装置。
a torch rod that is fixed to the bonding head at a certain distance from the center line of the capillary and movable in the vertical direction; a solenoid that is connected to the rear end of the torch rod and drives the torch rod; and a solenoid that is fixed to the tip of the torch rod. A spark device comprising a torch.
JP1302709A 1989-11-20 1989-11-20 Spark device Pending JPH03161943A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1302709A JPH03161943A (en) 1989-11-20 1989-11-20 Spark device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1302709A JPH03161943A (en) 1989-11-20 1989-11-20 Spark device

Publications (1)

Publication Number Publication Date
JPH03161943A true JPH03161943A (en) 1991-07-11

Family

ID=17912243

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1302709A Pending JPH03161943A (en) 1989-11-20 1989-11-20 Spark device

Country Status (1)

Country Link
JP (1) JPH03161943A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102666332A (en) * 2010-11-15 2012-09-12 松下电器产业株式会社 Tape adhesion device and tape adhesion method
CN110620054A (en) * 2019-08-19 2019-12-27 浙江锐群科技有限公司 Full-automatic deep cavity ball lead bonding head device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102666332A (en) * 2010-11-15 2012-09-12 松下电器产业株式会社 Tape adhesion device and tape adhesion method
CN110620054A (en) * 2019-08-19 2019-12-27 浙江锐群科技有限公司 Full-automatic deep cavity ball lead bonding head device
CN110620054B (en) * 2019-08-19 2021-03-23 浙江锐群科技有限公司 Full-automatic deep cavity ball lead bonding head device

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