JPH0315773A - 半導体装置用静電破壊試験装置 - Google Patents

半導体装置用静電破壊試験装置

Info

Publication number
JPH0315773A
JPH0315773A JP2155227A JP15522790A JPH0315773A JP H0315773 A JPH0315773 A JP H0315773A JP 2155227 A JP2155227 A JP 2155227A JP 15522790 A JP15522790 A JP 15522790A JP H0315773 A JPH0315773 A JP H0315773A
Authority
JP
Japan
Prior art keywords
contact
semiconductor device
switch
test
electrostatic breakdown
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2155227A
Other languages
English (en)
Japanese (ja)
Other versions
JPH05668B2 (enrdf_load_stackoverflow
Inventor
Minoru Isaka
井坂　実
Kenji Ando
健二 安藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Microcomputer System Ltd
Hitachi Ltd
Original Assignee
Hitachi Ltd
Hitachi Microcomputer Engineering Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Microcomputer Engineering Ltd filed Critical Hitachi Ltd
Priority to JP2155227A priority Critical patent/JPH0315773A/ja
Publication of JPH0315773A publication Critical patent/JPH0315773A/ja
Publication of JPH05668B2 publication Critical patent/JPH05668B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
JP2155227A 1990-06-15 1990-06-15 半導体装置用静電破壊試験装置 Granted JPH0315773A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2155227A JPH0315773A (ja) 1990-06-15 1990-06-15 半導体装置用静電破壊試験装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2155227A JPH0315773A (ja) 1990-06-15 1990-06-15 半導体装置用静電破壊試験装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP58105715A Division JPS59231458A (ja) 1983-06-15 1983-06-15 半導体装置の静電破壊試験方法

Publications (2)

Publication Number Publication Date
JPH0315773A true JPH0315773A (ja) 1991-01-24
JPH05668B2 JPH05668B2 (enrdf_load_stackoverflow) 1993-01-06

Family

ID=15601307

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2155227A Granted JPH0315773A (ja) 1990-06-15 1990-06-15 半導体装置用静電破壊試験装置

Country Status (1)

Country Link
JP (1) JPH0315773A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5990698A (en) * 1996-02-09 1999-11-23 Nec Corporation Test method and apparatus for semiconductor element

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5780577A (en) * 1980-11-06 1982-05-20 Mitsubishi Electric Corp Testing method of semiconductor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5780577A (en) * 1980-11-06 1982-05-20 Mitsubishi Electric Corp Testing method of semiconductor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5990698A (en) * 1996-02-09 1999-11-23 Nec Corporation Test method and apparatus for semiconductor element

Also Published As

Publication number Publication date
JPH05668B2 (enrdf_load_stackoverflow) 1993-01-06

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