JPH03157534A - Vibro-isolating device for fine vibration - Google Patents

Abstract

PURPOSE:To obtain a vibro-isolating device excellent in full-directional vibro- isolating performance for the fine vibration with a low manufacture cost and almost no necessity for maintenance by connecting in lamination, a vibro- isolating rubber structure for displaying a vibro-isolating function in a vertical direction to a laminated rubber structure for displaying a vibro-isolating function in a horizontal direction. CONSTITUTION:A fine vibration vibro-isolating device is constituted by connecting upper and lower part vibro-isolating parts 10, 20 with the upper part vibro-isolating part 10 constituted of a vibro-isolating rubber structure and the lower part vibro-isolating part 20 constituted of a laminated rubber structure. The vibro-isolating rubber structure 10 is constituted by fixing an upper side metal fixture 12 to the internal contour part of a block-shaped rubber 11 and a lower side metal fixture 13 to the external contour part. The block- shaped rubber 11 is composed of shear type vibro-isolating rubber so as to support a load by shear stress and also the display a large vibro-isolating function in reaction to fine vibration in a vertical direction. The laminated rubber structure body 20 has an integrated structure with a rubber layer 21 and a reinforcing layer 22 alternately laminated.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a vibration isolator suitable for supporting the load of precision equipment in a micro-vibration-isolated state. The present invention relates to a vibration isolator for micro-vibration that can exhibit an excellent vibration-isolating function even against vibrations.

Here, the micro-vibration means a micro-vibration with an amplitude on the order of microns (10-'m), which hardly disturbs the human body.

[Conventional technology]

For precision equipment such as optical equipment, laser equipment, electron tube equipment, and electron microscopes, fine vibrations in the vertical direction also affect their performance, but fine vibrations in the horizontal direction have an even greater effect on equipment performance. It is.

Therefore, with regard to vibration isolation of the precision equipment, it is desirable to be able to isolate minute vibrations in all directions.

Conventionally, metal springs, anti-vibration rubber, air springs, or a combination of these have been used as vibration isolators for precision equipment, and microvibration can be reduced by reusing such vibration isolators as they are. It is being

[Technical problem to be solved by the invention] Metal springs do not have a horizontal vibration isolation function, so locking occurs when horizontal vibrations are applied, and precision devices such as exposure equipment that are sensitive to horizontal vibrations The anti-vibration function is insufficient for the equipment.

In the case of anti-vibration rubber, a certain level of performance can be obtained regarding the horizontal vibration-isolating function, but the vibration-isolating performance itself is low because the spring stiffness is not low at all.

In addition, regarding the vertical spring rigidity of the anti-vibration rubber, there are problems such as rubber settling, so it is difficult to make the rubber softer, and sufficient anti-vibration performance cannot be obtained in the case of large vibration amplitudes. .

As a way to make the spring stiffness in the vertical direction extremely soft,
Air springs are used, but in this case,
This requires a large amount of man-hours and costs in terms of maintenance such as air leakage countermeasures and level adjustment.

Another problem with this air spring is that it hardly provides vibration isolation performance against horizontal vibrations.

However, in the past, air springs were most often used as vibration isolators for micro-vibration for precision instruments.

As described above, conventional vibration isolators for preventing minute vibrations are not equipped with an omnidirectional vibration isolation function.

In addition, in most cases, conventional vibration isolators for normal vibration vibrations are used as is for micro vibrations.

The present invention has been made in view of the above-mentioned conventional technical problems, and has excellent omnidirectional vibration isolation performance for micro vibrations, low manufacturing cost, and almost no maintenance required, and provides micro vibration isolation for precision equipment. It is an object of the present invention to provide a vibration isolating device suitable for vibration prevention.

[Means for solving problems]

The vibration isolator for micro-vibration of the present invention includes a vibration-isolating rubber structure that supports a load through block-shaped rubber and exhibits a large vibration-isolating function in the vertical direction against micro vibrations, and a rubber layer and a reinforcing layer. By stacking and combining the laminated rubber structure, which has an integrated structure of alternately laminated layers and exhibits a large vibration isolation function against slight vibrations in the horizontal direction, the structure suppresses minute vibrations in all directions. It has a structure that exhibits a large vibration isolation function against vibrations, and has excellent vibration isolation performance in all directions.Moreover, the manufacturing cost is low and almost no maintenance is required, making it suitable for vibration isolation of precision equipment. The present invention provides a shaking device.

In addition to the above structure, the invention according to claim 2 further provides a finer structure by making at least one of the vibration isolating rubber structure and the laminated rubber structure a hollow body, and filling the hollow part with a low spring and high damping material. An object of the present invention is to provide a vibration isolator for minute vibrations that can enhance the vibration reduction effect.

(Function) The vibration isolator for micro-vibration with the above configuration uses a vibration-isolating rubber structure with low spring stiffness in the vertical direction to ensure micro-vibration isolation performance in the vertical direction and large deformation in the horizontal direction. By using a laminated rubber structure with high vibration damping properties, we can ensure vibration isolation performance against slight vibrations in the horizontal direction. By enclosing a damping material, it exhibits a high micro-vibration damping function.

〔Example〕

Hereinafter, the present invention will be specifically described with reference to the drawings.

FIG. 1 is a longitudinal sectional view of an embodiment of the vibration isolator for microvibration according to the present invention.

In FIG. 1, the vibration isolator for micro-vibration is constructed by combining an upper vibration isolator 10 and a lower vibration isolator 20, and in the illustrated example, the upper vibration isolator 10 is composed of a vibration isolator rubber structure. The lower sticking part 20 is made of a laminated rubber structure.

The anti-vibration rubber structure 10 is made by integrally fixing the upper metal fitting 12 to the inner diameter part of the block-shaped rubber 11 by baking or the like,
The lower metal fitting 13 is fixed to the outer diameter portion of the block-shaped rubber 11 by baking or the like.

The block-shaped rubber 11 is made of shear type vibration isolating rubber, and is configured to support a load by its shear stress and to exhibit a large vibration damping function against slight vibrations in the vertical direction.

The laminated rubber structure 20 is made by alternately laminating rubber layers 21 made of a rubber-like elastic material (elastomer material) and reinforcing layers (reinforcing plates) 22 made of metal or hard plastic, and integrating them with vulcanization adhesive or the like. It has a structured structure.

At the upper end of the upper metal fitting 12 of the anti-vibration rubber structure 10, there is an upper flange 1 to which a load such as precision equipment to be anti-vibration is attached.
4 is formed, and a lower surface flange 15 is formed on the lower end surface of the lower metal fitting 13.

An upper flange 24 is fixed to the upper end of the laminated rubber structure 20, and a lower flange 25 fixed to the foundation or floor is fixed to the lower end of the laminated rubber structure.

The vibration-proof rubber structure 10 and the laminated rubber structure 20 are connected by fastening the lower flange 15 of the former and the upper flange 24 of the latter with bolts, nuts, or the like.

Further, a hollow portion 16 forming a sealed chamber is provided inside the vibration-proof rubber structure, and a low spring and high damping material 17 is sealed within the hollow portion 16.

The low spring and high damping material 17 can also be sealed in a hollow part formed inside the laminated rubber structure 20, as shown in FIG.

As the low-spring, high-damping material 17, for example, a vibration damping buffer foam which has a low spring by foaming rubber having a large damping characteristic and has non-repulsion and shock-absorbing performance is used.

In addition, as a high damping material to be sealed in the hollow part of the laminated rubber,
Viscoplastic rubber, which has no spring properties and only has high damping performance, is mainly used. In this case, the spring does not necessarily have to be low.

According to the vibration isolator for micro-vibration described above with reference to FIG. The laminated portion consisting of the layer 21 and the reinforcing layer 22 is a part that mainly provides a vibration isolation effect against fine vibrations in the horizontal direction, and therefore reduces omnidirectional components of the fine vibrations transmitted from the lower flange 25 to the upper flange 14. In other words, it is possible to provide a vibration isolating device having an omnidirectional vibration isolating function against micro vibrations.

As mentioned above, the term "micro vibration" as used herein means a micro vibration that has an amplitude on the order of microns (10'm) and is so small that it hardly disturbs the human body.

Furthermore, since the vibration isolating rubber structure 10 or the laminated rubber structure 20 has a hollow structure and the low spring high damping material 17 is sealed in the sealed hollow part 16, the low spring high damping material 17 By changing the amount of filler, the degree of vibration damping in the vertical or horizontal direction can be adjusted.
Optimum anti-vibration effect can be obtained.

In addition, as a practical structure, by attaching a cover 18 that covers the side surface of the vibration isolator to the top flange 12 of the upper vibration isolator (in this example, the vibration isolator rubber structure) 10, dust and foreign matter can be removed. It can function as a stopper to prevent intrusion and to prevent damage due to buckling when horizontal displacement becomes excessive such as during an earthquake.

In addition, in the embodiment shown in FIG.
, and the laminated rubber structure 20 is placed at the bottom, but this can also be turned upside down and configured such that the laminated rubber structure 20 is placed at the top and the vibration-proof rubber structure IO is placed at the bottom. can.

FIG. 2 is a block diagram showing a test device for measuring the vibration isolating effect against micro vibrations of the vibration isolator for micro vibrations according to the present invention, and FIG. 3 and FIG. The results of measuring the vibration isolation effect of the vibration isolator shown in Figure 1 against minute vibrations are shown, and Figure 3 shows the vibration transmissibility in the vertical direction, and
The figure is a graph showing vibration transmissibility in the horizontal direction.

In FIG. 2, a pedestal 33 is installed on a floor surface (foundation) 31 via a vibration isolator 32 for precision equipment having the structure shown in FIG. A load 34 such as equipment is supported.

Although three or more vibration isolators 32 that support the pedestal 33 are generally used, the number and arrangement of the vibration isolators 32 can be determined as appropriate.

A micro-vibration output sensor 35 is attached to the load 34, and a micro-vibration human power sensor 36 is attached to the floor 31.

The detection signals of the output sensor 35 for micro-vibration and the human power sensor 36 for micro-vibration are transmitted to amplifiers 37 and 38, respectively.
After being amplified, the signal is transmitted to a frequency analyzer 39, where the data is analyzed.

This data analysis was conducted for both vertical and horizontal microvibrations, and the graph in Figure 3 shows the microvibration damping effect based on the vertical vibration transmissibility based on the acid data analysis. The graph in FIG. 4 shows the micro-vibration damping effect based on the horizontal vibration transmissibility based on analysis.

In FIGS. 3 and 4, the smaller the value of the vibration transmissibility, the better the micro-vibration damping effect, and the solid line indicates the structure of the present invention in which the low spring high damping material 17 is removed from the vibration isolator shown in FIG. The dashed line indicates the case of the apparatus according to the present invention having the low spring and high damping material 17 having the structure shown in FIG. A conventional example (comparative example) using .

From these graphs, it can be seen that the vibration isolator for micro-vibration of the present invention exhibits an excellent micro-vibration vibration-isolating effect against micro-vibration in all directions, vertically and horizontally, compared to conventional devices. .

It can also be seen that when carrying out the present invention, if a damping material 17 is incorporated as shown in FIG. 1, the vibration isolation effect against slight vibrations in all vertical and horizontal directions can be further enhanced.

FIG. 5 is a longitudinal cross-sectional view showing a second embodiment of the vibration isolator for micro-vibration according to the present invention, and (A) shows a difference between the upper metal fitting of the vibration-isolating rubber structure 10 and the first embodiment shown in FIG. 12 and the lower metal fitting 13, in particular, the lower metal fitting I3 is made into an open bottom type, and the internal low spring high damping material 17 is omitted.

The anti-vibration rubber 11 of this embodiment is also constructed of a shear type anti-vibration rubber that supports the vertical load with shear stress, almost the same as the anti-vibration rubber 11 shown in FIG.

Further, the laminated rubber structure 20 forming the lower vibration isolating part is the first
It has substantially the same structure as the case shown in the figure.

Therefore, even in the embodiment of FIG. 5(A), the second
Regarding the vibration isolation of the load 34 of the precision instrument shown in the figure, substantially the same operation and effect as those explained in FIGS. 1 to 4 can be achieved.

5B, the vibration-proof rubber structure 10 and the laminated rubber structure 20 of the above (A) are turned upside down, and the bottom plate 19 is fixed to the open bottom part of the lower metal fitting 13, and the floor surface 31 is (Figure 2) has a structure that is easy to install.

The configuration shown in FIG. 5(B) can also provide the same functions and effects as in the case of (A).

FIG. 6 is a vertical sectional view showing a third embodiment of the vibration isolator for microvibration according to the present invention, and this embodiment is different from the second embodiment shown in FIG. Hollow part 1
In FIG. 6A, the upper surface flange 24 of the laminated rubber structure 20 is sealed with a low spring and high damping material 17.
The damping material 17 is sealed in the hollow part sealed by the bottom plate 19 (FIG. 5(B)). A high attenuation material 17 is enclosed in the sealed hollow part 16.

According to the embodiment shown in FIG. 6, compared to the embodiment shown in FIG. 5, it was possible to increase the damping capacity and improve the vibration damping effect due to the inclusion of the low-spring, high-damping material 17.

These second embodiment (FIG. 5) and third embodiment (FIG. 6) also have the same effect as the first embodiment shown in FIG. We were able to demonstrate excellent micro-vibration damping effects against micro-vibration in all directions, including vertical and horizontal directions.

FIG. 7 is a vertical cross-sectional view showing a fourth embodiment of the vibration isolator for micro-vibration according to the present invention, and this embodiment is different from the first embodiment shown in FIG. The anti-vibration rubber structure 10 has a structure in which a portion corresponding to the lower metal fitting 13 is omitted, and the vibration-proof rubber structure 10 is formed of a solid block-shaped rubber 11 and an upper surface flange 14 and a lower surface flange 15 joined to the upper and lower end surfaces thereof. The laminated rubber structure 20 and other parts have substantially the same structure as in FIG.

FIGS. 7A and 7B show the vibration-proof rubber structure 10 and the laminated rubber structure 20 upside down, respectively.

According to this embodiment as well, it is possible to ensure an excellent vertical vibration damping effect due to the rubber 11 of the vibration isolating rubber structure 10. Therefore, regarding the vibration damping of the load 34 of precision equipment etc. shown in FIG. Similar to the first embodiment shown in FIG. 1, it was possible to exhibit an excellent vibration damping effect against slight vibrations in all directions including the vertical direction and the horizontal direction.

FIG. 8 is a longitudinal cross-sectional view showing a fifth embodiment of the vibration isolator for micro-vibration according to the present invention, and this embodiment is a modification of the vibration isolating rubber structure 10 from the first embodiment shown in FIG. The shape and structure of the rubber 11 and the upper and lower metal fittings 12 and 13 have been changed to effectively utilize both the shearing and compression of the rubber 11 to ensure a vibration-proofing effect against fine vibrations in the vertical direction. be.

Note that one of the laminated rubber structures 20 has substantially the same structure as that in FIG. 1.

Therefore, the embodiment shown in FIG. 8 can also provide substantially the same functions and effects as those explained in FIGS. 1 to 4 with regard to vibration isolation of the load 34 of the precision equipment, etc. shown in FIG. , it was able to exhibit excellent vibration-proofing effects against micro-vibration in all directions, including vertical and horizontal directions.

In the embodiment shown in FIG. 8 as well, the vertical relationship between the anti-vibration rubber structure IO and the laminated rubber structure 20 can be selected as appropriate.
In either case, it was possible to similarly exhibit the micro-vibration damping effect in all directions.

[Effects of the Invention] As is clear from the above description, the vibration isolator for micro vibrations of the present invention supports the load through the block-shaped rubber, and has a large vibration damping function in the vertical direction against micro vibrations. and a laminated rubber structure that has a structure in which rubber layers and reinforcing layers are alternately laminated and integrated, and that exhibits a large vibration-proofing function against slight vibrations in the horizontal direction. , by stacking and bonding one above the other, it is configured to exhibit a large vibration isolation function against micro vibrations in all directions, so it has excellent vibration isolation performance in all directions, and has low manufacturing cost and almost no vibration damping. Provided is a vibration isolator for micro-vibration that does not require maintenance and is suitable for isolating micro-vibration of precision equipment.

According to the invention of claim 2, in addition to the above configuration, at least one of the vibration isolating rubber structure and the laminated rubber structure is a hollow body, and a low spring and high damping material is sealed in the hollow part. Furthermore, a vibration isolator for micro-vibration can be obtained which can enhance the micro-vibration reduction effect by increasing the vibration damping ability.

[Brief explanation of the drawing]

FIG. 1 is a longitudinal cross-sectional view of an embodiment of the vibration isolator for micro-vibration according to the present invention, and FIG. 2 is a schematic configuration of a test device for measuring the vibration-isolating effect of the vibration-isolating device for micro-vibration according to the invention. FIG. 3 is a graph showing the test results of the anti-vibration effect against vertical micro-vibration of the micro-vibration isolator according to the present invention in comparison with a conventional example, and FIG. A graph showing the test results of the vibration isolating effect of the vibration device against horizontal micro-vibration in comparison with a conventional example, and (A) and (B) in FIG. (A) and (B) of FIG. 6 are vertical cross-sectional views of the third embodiment of the vibration isolator for micro-vibration according to the present invention, and (A) and (B) of FIG. FIG. 8 is a longitudinal sectional view of a fifth embodiment of the vibration isolator for micro vibrations according to the present invention, and FIG. 9 is a longitudinal sectional view of the fourth embodiment of the vibration isolator for micro vibrations according to the present invention. FIG. 2 is a vertical cross-sectional view showing a structure in which a vibration isolator for use in a motor vehicle is modified and a low spring and high damping material is enclosed inside a laminated rubber structure. 10・---- Vibration-proof rubber structure, 11・----
-Rubber (elastomer), 17--Low spring high damping material, 20--Laminated rubber structure, 21--Rubber layer, 22--Reinforcement layer, 32-- ----Vibration isolator for micro-vibration, 34...-Load (object to be supported with vibration isolation, such as precision equipment).

Claims (2)

[Claims] (1) A vibration-isolating rubber structure that supports loads through block-shaped rubber and exhibits a large vibration-proofing function in the vertical direction against micro-vibrations, is integrated with rubber layers and reinforcing layers that are laminated alternately. By stacking and combining the laminated rubber structure with a laminated rubber structure that has a high vibration isolation function against slight vibrations in the horizontal direction, it has a large vibration isolation function against slight vibrations in all directions. A vibration isolator for micro-vibration that is characterized by the following characteristics: (2) The vibration isolating device according to claim 1, wherein at least one of the vibration isolating rubber structure and the laminated rubber structure is a hollow body, and a low spring and high damping material is sealed in the hollow part.