JPH03156941A - Mounting of semiconductor chip - Google Patents

Mounting of semiconductor chip

Info

Publication number
JPH03156941A
JPH03156941A JP1296795A JP29679589A JPH03156941A JP H03156941 A JPH03156941 A JP H03156941A JP 1296795 A JP1296795 A JP 1296795A JP 29679589 A JP29679589 A JP 29679589A JP H03156941 A JPH03156941 A JP H03156941A
Authority
JP
Japan
Prior art keywords
semiconductor chip
panel
electrodes
electrode
protrusions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1296795A
Other languages
Japanese (ja)
Inventor
Toshio Sakata
坂田 敏夫
Yoshiaki Maruyama
嘉昭 丸山
Satoru Imai
了 今井
Toshiaki Suketa
助田 俊明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1296795A priority Critical patent/JPH03156941A/en
Publication of JPH03156941A publication Critical patent/JPH03156941A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/11Manufacturing methods
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73201Location after the connecting process on the same surface
    • H01L2224/73203Bump and layer connectors
    • H01L2224/73204Bump and layer connectors the bump connector being embedded into the layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8319Arrangement of the layer connectors prior to mounting
    • H01L2224/83192Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on another item or body to be connected to the semiconductor or solid-state body

Abstract

PURPOSE:To directly mount a semiconductor chip on a liquid-crystal panel by a method wherein a heated semiconductor chip is pressed to a panel and a tip part of a protrusion which has been passed by softeneing a thermoplastic film is brought into contact with an electrode on the panel. CONSTITUTION:A thermoplastic film 5 is applied in advance to an electrode formation face of a panel 1; protrusions 32 composed of a metal are formed on electrodes 31 on a semiconductor chip 3 to be mounted. During a mounting operation, the heated semiconductor chip 3 is pressed to the panel 1; tip parts of the protrusions 32 which have been passed by softening the thermoplastic film 5 are brought into contact with electrodes 11 on the panel 1. Thereby, a short circuit between the electrodes is not caused, and the semiconductor chip in which an interval between the electrodes is small can be mounted directly on a liquid-crystal panel.

Description

【発明の詳細な説明】 〔概 要〕 液晶表示装置における液晶パネルと駆動回路の接続方法
に関し、 半導体チップを直接液晶パネルに実装可能な実装方法の
提供を目的とし、 パネルの電極形成面に予め熱可塑性フィルムを被着する
と共に、実装される半導体チップ上の電極に金属からな
る突起を形成し、実装に際してパネルに加熱された半導
体チップを押し付け、熱可塑性フィルムを軟化させて貫
通した突起の先端を、パネル上の電極に接触させるよう
に構成する。
[Detailed Description of the Invention] [Summary] Regarding a method for connecting a liquid crystal panel and a drive circuit in a liquid crystal display device, the present invention aims to provide a mounting method that allows semiconductor chips to be directly mounted on a liquid crystal panel. At the same time as a thermoplastic film is applied, metal protrusions are formed on the electrodes on the semiconductor chip to be mounted, and during mounting, the heated semiconductor chip is pressed against the panel, softening the thermoplastic film and penetrating the tips of the protrusions. is configured to contact an electrode on the panel.

〔産業上の利用分野〕[Industrial application field]

本発明は液晶表示装置における液晶パネルと駆動回路の
接続方法、特に半導体チップを直接液晶パネルに実装可
能な実装方法に関する。
The present invention relates to a method for connecting a liquid crystal panel and a drive circuit in a liquid crystal display device, and particularly to a mounting method that allows semiconductor chips to be directly mounted on a liquid crystal panel.

近年、各種電子機器におけるデイスプレィ装置として液
晶表示装置が採り入れられ、それに伴って液晶表示装置
の小型化や低価格化が要求されている。しかし駆動回路
を印刷配線板に実装し液晶パネルと接続する方法では、
現在要求されている液晶表示装置の小型化や低価格化を
実現することができない。そこで液晶パネル上に駆動回
路を直接高密度実装する方法が検討されている。
2. Description of the Related Art In recent years, liquid crystal display devices have been adopted as display devices in various electronic devices, and accordingly, there has been a demand for smaller size and lower cost of liquid crystal display devices. However, with the method of mounting the drive circuit on a printed wiring board and connecting it to the liquid crystal panel,
It is not possible to achieve the currently required miniaturization and cost reduction of liquid crystal display devices. Therefore, methods of directly mounting drive circuits on the liquid crystal panel in high density are being considered.

〔従来の技術] 第2図は従来の半導体チップの実装方法を示す側断面図
である。
[Prior Art] FIG. 2 is a side sectional view showing a conventional semiconductor chip mounting method.

第2図(a)に示す如〈従来の実装方法における液晶パ
ネル1は表面に複数の電極11を有し、液晶パネル1の
表面には異方性導電フィルム2が被着されている。異方
性導電フィルム2は絶縁性基体21と基体21中に分散
された導電性粒子22からなり、定常状態では導電性粒
子22が互いに離れていて異方性導電フィルム2は絶縁
性を有する。
As shown in FIG. 2(a), a liquid crystal panel 1 according to the conventional mounting method has a plurality of electrodes 11 on its surface, and an anisotropic conductive film 2 is adhered to the surface of the liquid crystal panel 1. The anisotropic conductive film 2 is composed of an insulating substrate 21 and conductive particles 22 dispersed in the substrate 21. In a steady state, the conductive particles 22 are separated from each other and the anisotropic conductive film 2 has insulating properties.

一方、半導体チップ3にはめっき等の手段で電極31が
形成されており、第2図(b)に示す如く半導体チップ
3を加熱ヘッド4に吸着し、半導体チップ3を加熱しな
”がら前記液晶パネル1に押し付けることによって、第
2図(C)に示す如く電極11と電極31によって挟ま
れた導電性粒子22は互いに接触し、電極11と電極3
1は異方性導電フィルム2を介して電気的に接続される
On the other hand, an electrode 31 is formed on the semiconductor chip 3 by means such as plating, and as shown in FIG. By pressing against the liquid crystal panel 1, the conductive particles 22 sandwiched between the electrode 11 and the electrode 31 come into contact with each other as shown in FIG. 2(C), and the electrode 11 and the electrode 3
1 are electrically connected via an anisotropic conductive film 2.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

従来の半導体チップの実装方法は隣接する電極間が広け
れば、電極間に導電性粒子同士が接触しない部分が生じ
絶縁性を保つことができる。しかし電極間が狭くなると
導電性粒子同士が接触しない部分が無くなり、電極間隔
の小さい半導体チップの場合は電極間が短絡するという
問題があった。
In conventional semiconductor chip mounting methods, if the distance between adjacent electrodes is wide, there will be a portion between the electrodes where conductive particles do not come in contact with each other, and insulation can be maintained. However, when the gap between the electrodes becomes narrow, there is no part where the conductive particles do not come into contact with each other, and in the case of a semiconductor chip with a small gap between the electrodes, there is a problem that short circuits occur between the electrodes.

本発明の目的は半導体チップを直接液晶パネルに実装可
能な実装方法を提供することにある。
An object of the present invention is to provide a mounting method that allows semiconductor chips to be directly mounted on a liquid crystal panel.

〔課題を解決するための手段〕[Means to solve the problem]

第1図は本発明になる半導体チップの実装方法を示す側
断面図である。なお企図を通し同じ対象物は同一記号で
表している。
FIG. 1 is a side cross-sectional view showing a semiconductor chip mounting method according to the present invention. The same objects are represented by the same symbols throughout the plan.

上記課題はパネル1の電極形成面に予め熱可塑性フィル
ム5を被着すると共に、実装される半導体チップ3上の
電極31に金属からなる突起32を形成し、実装に際し
てパネル1に加熱された半導体チップ3を押し付け、熱
可塑性フィルム5を軟化させて貫通した突起32の先端
を、パネル1上の電極11に接触させる本発明になる半
導体チップの実装方法によって達成される。
The above problem is solved by applying a thermoplastic film 5 in advance to the electrode forming surface of the panel 1, and forming protrusions 32 made of metal on the electrodes 31 on the semiconductor chip 3 to be mounted. This is achieved by the semiconductor chip mounting method according to the present invention, which presses the chip 3 and softens the thermoplastic film 5 so that the tips of the protrusions 32 penetrating it come into contact with the electrodes 11 on the panel 1.

〔作 用〕[For production]

第1図においてパネルの電極形成面に予め熱可塑性フィ
ルムを被着すると共に、実装される半導体チップ上の電
極に金属からなる突起を形成し、実装に際してパネルに
加熱された半導体チップを押し付け、熱可塑性フィルム
を軟化させて貫通した突起の先端をパネル上の電極に接
触させることによって、電極間の短絡が無くなり電極間
隔の小さい半導体チップを直接液晶パネルに実装できる
In Fig. 1, a thermoplastic film is applied in advance to the electrode formation surface of the panel, metal protrusions are formed on the electrodes on the semiconductor chip to be mounted, and the heated semiconductor chip is pressed against the panel during mounting. By softening the plastic film and bringing the tips of the penetrating protrusions into contact with the electrodes on the panel, short circuits between the electrodes are eliminated and semiconductor chips with small electrode spacing can be directly mounted on the liquid crystal panel.

〔実施例〕〔Example〕

以下添付図により本発明の実施例について詳細に説明す
る。第3図は本発明の一実施例を示す図、第4図は本発
明の変形例を示す図である。
Embodiments of the present invention will be described in detail below with reference to the accompanying drawings. FIG. 3 is a diagram showing an embodiment of the present invention, and FIG. 4 is a diagram showing a modification of the present invention.

第1図(a)に示す如く本発明の実装方法における液晶
パネル1は表面に複数の電極11を有し、液晶パネル1
の表面には予め熱可塑性フィルム5が被着されている。
As shown in FIG. 1(a), the liquid crystal panel 1 in the mounting method of the present invention has a plurality of electrodes 11 on the surface.
A thermoplastic film 5 is previously applied to the surface of the .

一方、半導体チップ3には第1図[有])に示す如く電
極31が形成されており、それぞれの電極31には金属
からなる突起32が形成されている。なお電極31に突
起32を形成する手段としてワイヤーを電極31にボン
ディングし、その後長さが一様になるようにワイヤーを
切断する等の方法が有効である。
On the other hand, electrodes 31 are formed on the semiconductor chip 3 as shown in FIG. 1, and each electrode 31 is formed with a protrusion 32 made of metal. Note that an effective method for forming the protrusion 32 on the electrode 31 is to bond a wire to the electrode 31 and then cut the wire so that the length is uniform.

ちなみに本発明の一実施例における突起32の形成は第
3図(a)に示す如く、通常のワイヤーボンディングに
おける第1ボンデイングと同様に、直径25μmのAu
線33を電極31にボンディングした後Au線を切断す
る。図中34は^U線33をボンディングするためのキ
ャピラリである。この方法で平均厚さc=27.4μm
の電極31上に形成された突起32の平均高さhは、第
3図(ハ)に示す如く半導体チップ3の面から81.2
μ面になる。
Incidentally, as shown in FIG. 3(a), the formation of the protrusion 32 in one embodiment of the present invention is performed using an Au wire with a diameter of 25 μm, similar to the first bonding in ordinary wire bonding.
After bonding the wire 33 to the electrode 31, the Au wire is cut. In the figure, 34 is a capillary for bonding the ^U wire 33. With this method, the average thickness c = 27.4 μm
The average height h of the projections 32 formed on the electrode 31 is 81.2 mm from the surface of the semiconductor chip 3, as shown in FIG.
It becomes a μ surface.

実装に際して第1図(b)に示す如く半導体チップ3を
加熱ヘッド4に吸着し、150℃程度に加熱された半導
体チップ3を20kg/cIIlの圧力で20秒、前記
液晶パネル1に押し付けることによって第1図(C)に
示す如く、加熱された電極31および突起32が熱可塑
性フィルム5を軟化させ、熱可塑性フィルム5を貫通し
た突起32の先端は液晶パネル1の電極11に接触し熱
圧着される。
During mounting, the semiconductor chip 3 is attracted to the heating head 4 as shown in FIG. As shown in FIG. 1(C), the heated electrodes 31 and protrusions 32 soften the thermoplastic film 5, and the tips of the protrusions 32 that penetrate the thermoplastic film 5 contact the electrodes 11 of the liquid crystal panel 1 and are bonded by thermocompression. be done.

なお電極31にボンディングされたAu線を切断し形成
された突起32は、切断時の誤差や電極31の厚さの誤
差によって高さに10μ蒙程度のばらつきが生じるが、
ワイヤーで形成された突起32には可撓性があるためば
らつきが吸収され、実装時にはその先端が液晶パネル1
の電極11に一様に接触する。
Note that the protrusion 32 formed by cutting the Au wire bonded to the electrode 31 has a height variation of about 10 μm due to errors in cutting and errors in the thickness of the electrode 31.
The protrusions 32 formed of wire are flexible, so variations are absorbed, and when mounted, the tips of the protrusions 32 touch the liquid crystal panel 1.
uniformly contacts the electrodes 11 of.

また電極に突起を形成する手段として電極にめっきを施
す方法がある。例えば第4図(a)に示す如く電極下地
に^Uめっきを施すことによって周縁部が盛り上がり、
平均高さh=17.1μmの突起32をを具えた平均厚
さc=13.3μmの電極31が形成される。なおこの
場合の突起32は0.2μm程度まで高さのばらつきを
小さくすることが可能である。
Further, as a means of forming protrusions on the electrode, there is a method of plating the electrode. For example, as shown in Figure 4(a), by applying ^U plating to the electrode base, the peripheral edge is raised,
An electrode 31 having an average thickness c=13.3 μm with protrusions 32 having an average height h=17.1 μm is formed. Note that in this case, the height variation of the protrusions 32 can be reduced to about 0.2 μm.

150°C程度に加熱された半導体チップ3を20kg
/CIl+の圧力で20秒、前記液晶パネル1に押し付
けることによって第4図(b)に示す如く、加熱された
電極31および突起32が熱可塑性フィルム5を軟化さ
せ、熱可塑性フィルム5を貫通した突起32の先端は液
晶パネル1の電極11に接触し熱圧着される。
20kg of semiconductor chips 3 heated to about 150°C
/CIl+ for 20 seconds against the liquid crystal panel 1, the heated electrodes 31 and protrusions 32 softened the thermoplastic film 5 and penetrated the thermoplastic film 5, as shown in FIG. 4(b). The tips of the protrusions 32 come into contact with the electrodes 11 of the liquid crystal panel 1 and are bonded by thermocompression.

このようにパネルの電極形成面に予め熱可塑性フィルム
を被着すると共に、実装される半導体チップ上の電極に
金属からなる突起を形成し、実装に際してパネルに加熱
された半導体チップを押し付け、熱可塑性フィルムを軟
化させて貫通した突起の先端をパネル上の電極に接触さ
せることによって、電極間の短絡が無くなり電極間隔の
小さい半導体チップを直接液晶パネルに実装できる。
In this way, a thermoplastic film is applied in advance to the electrode formation surface of the panel, metal protrusions are formed on the electrodes on the semiconductor chip to be mounted, and the heated semiconductor chip is pressed against the panel during mounting. By softening the film and bringing the tips of the penetrating protrusions into contact with the electrodes on the panel, short circuits between the electrodes are eliminated and semiconductor chips with small electrode spacing can be directly mounted on the liquid crystal panel.

〔発明の効果〕〔Effect of the invention〕

上述の如く本発明によれば半導体チップを直接液晶パネ
ルに実装可能な実装方法を提供することができる。
As described above, according to the present invention, it is possible to provide a mounting method that allows semiconductor chips to be directly mounted on a liquid crystal panel.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明になる半導体チップの実装方法を示す側
断面図、 第2図は従来の半導体チップの実装方法を示す側断面図
、 第3図は本発明の一実施例を示す図、 第4図は本発明の変形例を示す図、 である。図において 1はパネル、    3は半導体チップ、4は加熱ヘッ
ド、  5は熱可塑性フィルム、11は電極、    
31は電極、 32は突起、    33はAu線、 34はキャピラリ、 をそれぞれ表す。 Q資 240
FIG. 1 is a side sectional view showing a semiconductor chip mounting method according to the present invention, FIG. 2 is a side sectional view showing a conventional semiconductor chip mounting method, and FIG. 3 is a diagram showing an embodiment of the present invention. FIG. 4 is a diagram showing a modification of the present invention. In the figure, 1 is a panel, 3 is a semiconductor chip, 4 is a heating head, 5 is a thermoplastic film, 11 is an electrode,
31 is an electrode, 32 is a protrusion, 33 is an Au wire, and 34 is a capillary. Q capital 240

Claims (1)

【特許請求の範囲】[Claims] パネル(1)の電極形成面に予め熱可塑性フィルム(5
)を被着すると共に、実装される半導体チップ(3)上
の電極(31)に金属からなる突起(32)を形成し、
実装に際して該パネル(1)に加熱された該半導体チッ
プ(3)を押し付け、該熱可塑性フィルム(5)を軟化
させて貫通した該突起(32)の先端を、該パネル(1
)上の電極(11)に接触させることを特徴とした半導
体チップの実装方法。
A thermoplastic film (5
), and at the same time forming protrusions (32) made of metal on the electrodes (31) on the semiconductor chip (3) to be mounted,
During mounting, the heated semiconductor chip (3) is pressed against the panel (1), and the tips of the protrusions (32) that have softened and penetrated the thermoplastic film (5) are attached to the panel (1).
) A method for mounting a semiconductor chip, characterized in that the semiconductor chip is brought into contact with an electrode (11) on a semiconductor chip.
JP1296795A 1989-11-15 1989-11-15 Mounting of semiconductor chip Pending JPH03156941A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1296795A JPH03156941A (en) 1989-11-15 1989-11-15 Mounting of semiconductor chip

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1296795A JPH03156941A (en) 1989-11-15 1989-11-15 Mounting of semiconductor chip

Publications (1)

Publication Number Publication Date
JPH03156941A true JPH03156941A (en) 1991-07-04

Family

ID=17838234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1296795A Pending JPH03156941A (en) 1989-11-15 1989-11-15 Mounting of semiconductor chip

Country Status (1)

Country Link
JP (1) JPH03156941A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009088351A (en) * 2007-10-01 2009-04-23 Denso Corp Production method for electronic circuit device, and electronic circuit device
KR101697331B1 (en) * 2015-08-24 2017-01-20 주식회사 태광 a check valve

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009088351A (en) * 2007-10-01 2009-04-23 Denso Corp Production method for electronic circuit device, and electronic circuit device
US8300419B2 (en) 2007-10-01 2012-10-30 Denso Corporation Electronic circuit device and method of making the same
KR101697331B1 (en) * 2015-08-24 2017-01-20 주식회사 태광 a check valve

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