JPH03155116A - シンクロトロン放射光露光装置及びその露光方法 - Google Patents

シンクロトロン放射光露光装置及びその露光方法

Info

Publication number
JPH03155116A
JPH03155116A JP1294015A JP29401589A JPH03155116A JP H03155116 A JPH03155116 A JP H03155116A JP 1294015 A JP1294015 A JP 1294015A JP 29401589 A JP29401589 A JP 29401589A JP H03155116 A JPH03155116 A JP H03155116A
Authority
JP
Japan
Prior art keywords
synchrotron radiation
thin film
radiation light
exposure
transmitting thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1294015A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0570296B2 (OSRAM
Inventor
Koichi Hara
光一 原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SORUTETSUKU KK
Original Assignee
SORUTETSUKU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SORUTETSUKU KK filed Critical SORUTETSUKU KK
Priority to JP1294015A priority Critical patent/JPH03155116A/ja
Publication of JPH03155116A publication Critical patent/JPH03155116A/ja
Publication of JPH0570296B2 publication Critical patent/JPH0570296B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus

Landscapes

  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP1294015A 1989-11-14 1989-11-14 シンクロトロン放射光露光装置及びその露光方法 Granted JPH03155116A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1294015A JPH03155116A (ja) 1989-11-14 1989-11-14 シンクロトロン放射光露光装置及びその露光方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1294015A JPH03155116A (ja) 1989-11-14 1989-11-14 シンクロトロン放射光露光装置及びその露光方法

Publications (2)

Publication Number Publication Date
JPH03155116A true JPH03155116A (ja) 1991-07-03
JPH0570296B2 JPH0570296B2 (OSRAM) 1993-10-04

Family

ID=17802150

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1294015A Granted JPH03155116A (ja) 1989-11-14 1989-11-14 シンクロトロン放射光露光装置及びその露光方法

Country Status (1)

Country Link
JP (1) JPH03155116A (OSRAM)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH065200U (ja) * 1991-12-12 1994-01-21 石川島播磨重工業株式会社 シンクロトロンにおけるｓｏｒ光出射用窓装置
US6289076B1 (en) 1997-05-06 2001-09-11 Sumitomo Heavy Industries, Ltd. Transmission system for synchrotron radiation light
JP2010061812A (ja) * 2008-09-01 2010-03-18 Hiroshima Prefecture 電子透過膜及びその製造方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH065200U (ja) * 1991-12-12 1994-01-21 石川島播磨重工業株式会社 シンクロトロンにおけるｓｏｒ光出射用窓装置
US6289076B1 (en) 1997-05-06 2001-09-11 Sumitomo Heavy Industries, Ltd. Transmission system for synchrotron radiation light
US6289077B1 (en) 1997-05-06 2001-09-11 Sumitomo Heavy Industries, Ltd. Transmission system for synchrotron radiation light
US6295334B1 (en) 1997-05-06 2001-09-25 Sumitomo Heavy Industries, Ltd. Transmission system for synchrotron radiation light
JP2010061812A (ja) * 2008-09-01 2010-03-18 Hiroshima Prefecture 電子透過膜及びその製造方法

Also Published As

Publication number Publication date
JPH0570296B2 (OSRAM) 1993-10-04

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Legal Events

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