JPH0314311Y2 - - Google Patents

Info

Publication number
JPH0314311Y2
JPH0314311Y2 JP4752385U JP4752385U JPH0314311Y2 JP H0314311 Y2 JPH0314311 Y2 JP H0314311Y2 JP 4752385 U JP4752385 U JP 4752385U JP 4752385 U JP4752385 U JP 4752385U JP H0314311 Y2 JPH0314311 Y2 JP H0314311Y2
Authority
JP
Japan
Prior art keywords
piston rod
chuck body
sealing plate
chuck
suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4752385U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61163183U (US06262066-20010717-C00315.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4752385U priority Critical patent/JPH0314311Y2/ja
Publication of JPS61163183U publication Critical patent/JPS61163183U/ja
Application granted granted Critical
Publication of JPH0314311Y2 publication Critical patent/JPH0314311Y2/ja
Expired legal-status Critical Current

Links

JP4752385U 1985-03-29 1985-03-29 Expired JPH0314311Y2 (US06262066-20010717-C00315.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4752385U JPH0314311Y2 (US06262066-20010717-C00315.png) 1985-03-29 1985-03-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4752385U JPH0314311Y2 (US06262066-20010717-C00315.png) 1985-03-29 1985-03-29

Publications (2)

Publication Number Publication Date
JPS61163183U JPS61163183U (US06262066-20010717-C00315.png) 1986-10-09
JPH0314311Y2 true JPH0314311Y2 (US06262066-20010717-C00315.png) 1991-03-29

Family

ID=30562928

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4752385U Expired JPH0314311Y2 (US06262066-20010717-C00315.png) 1985-03-29 1985-03-29

Country Status (1)

Country Link
JP (1) JPH0314311Y2 (US06262066-20010717-C00315.png)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE59711671D1 (de) 1996-06-26 2004-07-01 Osram Opto Semiconductors Gmbh Lichtabstrahlendes halbleiterbauelement mit lumineszenzkonversionselement

Also Published As

Publication number Publication date
JPS61163183U (US06262066-20010717-C00315.png) 1986-10-09

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