JPH03128472U - - Google Patents
Info
- Publication number
- JPH03128472U JPH03128472U JP3457290U JP3457290U JPH03128472U JP H03128472 U JPH03128472 U JP H03128472U JP 3457290 U JP3457290 U JP 3457290U JP 3457290 U JP3457290 U JP 3457290U JP H03128472 U JPH03128472 U JP H03128472U
- Authority
- JP
- Japan
- Prior art keywords
- coated
- cylindrical member
- plate
- spin
- diameter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 4
- 210000003746 feather Anatomy 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Description
第１図は本考案になる回転塗布装置の低〜中速
回転時の説明図、第２図はその要部の説明図、第
３図は高速回転時の説明図、第４図はその要部の
説明図、第５図は従来例の説明図である。
１……スピンヘツド、１１……回転軸、１２…
…周端部、２……被塗布板、３……筒状部材、３
１……小羽、３２……回動軸、４……スピンカツ
プ、４１……排気口、５……レジスト。
Fig. 1 is an explanatory diagram of the rotary coating device according to the present invention when it rotates at low to medium speeds, Fig. 2 is an explanatory diagram of its main parts, Fig. 3 is an explanatory diagram when it rotates at high speeds, and Fig. 4 is its main parts. FIG. 5 is an explanatory diagram of a conventional example. 1... Spin head, 11... Rotating shaft, 12...
...Peripheral end portion, 2...Plate to be coated, 3...Cylindrical member, 3
1... small feather, 32... rotating shaft, 4... spin cup, 41... exhaust port, 5... resist.
Claims (1)
胴部を傾斜可能に形成して前記スピンヘツドの周
端部を囲繞した筒状部材と、これらを収納するス
ピンカツプとから要部が構成され、該スピンカツ
プは前記スピンヘツドに装着される被塗布板の上
面より下方の側壁部に排気口を有し、前記筒状部
材は上部径を下部径より相対的に縮小して略４５
度に胴部を傾斜したとき、上端が前記被塗布板の
上面より高く形成され、上部径をさらに縮小して
前記上端を前記被塗布板の周端部に向けたとき、
下端が前記排気口に向くべく配設されたことを特
徴とする回転塗布装置。 a spin head rotatably pivoted horizontally;
The main parts are composed of a cylindrical member whose body is tiltable and surrounds the circumferential end of the spin head, and a spin cup that accommodates these members, and the spin cup covers the upper surface of the plate to be coated that is attached to the spin head. The cylindrical member has an exhaust port in a lower side wall portion, and the upper diameter of the cylindrical member is relatively reduced than the lower diameter to approximately 45 mm.
When the body is tilted, the upper end is formed higher than the upper surface of the plate to be coated, and when the upper diameter is further reduced and the upper end is directed toward the peripheral edge of the plate to be coated,
A rotary coating device characterized in that the lower end is arranged to face the exhaust port.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3457290U JPH03128472U (en) | 1990-03-31 | 1990-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3457290U JPH03128472U (en) | 1990-03-31 | 1990-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03128472U true JPH03128472U (en) | 1991-12-25 |
Family
ID=31539163
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3457290U Pending JPH03128472U (en) | 1990-03-31 | 1990-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03128472U (en) |
-
1990
- 1990-03-31 JP JP3457290U patent/JPH03128472U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH03128472U (en) | ||
| JPH0445350U (en) | ||
| JPH0217553U (en) | ||
| JPH02145990U (en) | ||
| JPS63197389U (en) | ||
| JPH0365500U (en) | ||
| JPH01155524U (en) | ||
| JPH01179737U (en) | ||
| JPH01167233U (en) | ||
| JPH0185524U (en) | ||
| JPS5853727U (en) | Powder micro-feeding device | |
| JPH01151408U (en) | ||
| JPS61153949U (en) | ||
| JPS6368014U (en) | ||
| JPH0450124U (en) | ||
| JPH01151159U (en) | ||
| JPH03106629U (en) | ||
| JPH0177151U (en) | ||
| JPS59173551U (en) | Automatic polishing device | |
| JPH0449256U (en) | ||
| JPH01139125U (en) | ||
| JPS5825938U (en) | Air supply port device | |
| JPS641787U (en) | ||
| JPH0337606U (en) | ||
| JPH0397926U (en) |