JPH0312685B2 - - Google Patents

Info

Publication number
JPH0312685B2
JPH0312685B2 JP8388984A JP8388984A JPH0312685B2 JP H0312685 B2 JPH0312685 B2 JP H0312685B2 JP 8388984 A JP8388984 A JP 8388984A JP 8388984 A JP8388984 A JP 8388984A JP H0312685 B2 JPH0312685 B2 JP H0312685B2
Authority
JP
Japan
Prior art keywords
slit
defect
detection
line
defect inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8388984A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60228909A (ja
Inventor
Yoshitada Sekine
Fumiki Yokota
Wataru Kubota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissan Motor Co Ltd
Original Assignee
Nissan Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Motor Co Ltd filed Critical Nissan Motor Co Ltd
Priority to JP8388984A priority Critical patent/JPS60228909A/ja
Priority to GB08510579A priority patent/GB2159271B/en
Priority to DE19853515194 priority patent/DE3515194A1/de
Priority to US06/727,874 priority patent/US4715709A/en
Publication of JPS60228909A publication Critical patent/JPS60228909A/ja
Publication of JPH0312685B2 publication Critical patent/JPH0312685B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9515—Objects of complex shape, e.g. examined with use of a surface follower device

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP8388984A 1984-04-27 1984-04-27 表面欠陥検査装置におけるセンサ配置構造 Granted JPS60228909A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP8388984A JPS60228909A (ja) 1984-04-27 1984-04-27 表面欠陥検査装置におけるセンサ配置構造
GB08510579A GB2159271B (en) 1984-04-27 1985-04-25 Surface flaw detecting method and apparatus
DE19853515194 DE3515194A1 (de) 1984-04-27 1985-04-26 Verfahren und vorrichtung zur ermittlung von oberflaechenfehlern
US06/727,874 US4715709A (en) 1984-04-27 1985-04-26 Surface flaw detecting method and apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8388984A JPS60228909A (ja) 1984-04-27 1984-04-27 表面欠陥検査装置におけるセンサ配置構造

Publications (2)

Publication Number Publication Date
JPS60228909A JPS60228909A (ja) 1985-11-14
JPH0312685B2 true JPH0312685B2 (OSRAM) 1991-02-20

Family

ID=13815210

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8388984A Granted JPS60228909A (ja) 1984-04-27 1984-04-27 表面欠陥検査装置におけるセンサ配置構造

Country Status (1)

Country Link
JP (1) JPS60228909A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008008689A (ja) * 2006-06-27 2008-01-17 National Institute Of Advanced Industrial & Technology 表面検査装置および表面検査方法

Also Published As

Publication number Publication date
JPS60228909A (ja) 1985-11-14

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