JPH03124632U - - Google Patents
Info
- Publication number
- JPH03124632U JPH03124632U JP3240690U JP3240690U JPH03124632U JP H03124632 U JPH03124632 U JP H03124632U JP 3240690 U JP3240690 U JP 3240690U JP 3240690 U JP3240690 U JP 3240690U JP H03124632 U JPH03124632 U JP H03124632U
- Authority
- JP
- Japan
- Prior art keywords
- fork
- loading device
- heat treatment
- treatment furnace
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 claims 4
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
第１図は、この考案の一実施例によるウエハ装
填装置のフオークを示す断面図、第２図乃至第４
図は、従来のウエハ装填装置の動作を説明するた
めの断面図、第５図は、フオーク挿入時の炉内温
度変化を示すグラフである。
１４…フオーク、１４ａ…ホルダ保持部、１６
…ウエハホルダ、１８…半導体ウエハ、２０ａ〜
２０ｆ…ヒータユニツト、２２…加熱制御装置、
Ａ…熱処理炉、Ｂ…ウエハ装填装置。
FIG. 1 is a sectional view showing a fork of a wafer loading device according to an embodiment of the invention, and FIGS.
The figure is a cross-sectional view for explaining the operation of a conventional wafer loading device, and FIG. 5 is a graph showing the temperature change in the furnace when a fork is inserted. 14...Fork, 14a...Holder holding part, 16
...Wafer holder, 18...Semiconductor wafer, 20a~
20f... Heater unit, 22... Heating control device,
A...Heat treatment furnace, B...Wafer loading device.
Claims (1)
エハホルダで保持した状態にて挿入し配置するた
めに炉内外に移動自在なフオークをそなえたウエ
ハ装填装置において、 前記フオークを加熱する加熱手段を該フオーク
に設けたことを特徴とするウエハ装填装置。[Claims for Utility Model Registration] A wafer loading device equipped with a fork that is movable in and out of a horizontal heat treatment furnace for inserting and arranging a plurality of wafers to be processed while being held by wafer holders into a horizontal heat treatment furnace, comprising: A wafer loading device characterized in that the fork is provided with a heating means for heating the fork.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3240690U JPH03124632U (en) | 1990-03-28 | 1990-03-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3240690U JPH03124632U (en) | 1990-03-28 | 1990-03-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03124632U true JPH03124632U (en) | 1991-12-17 |
Family
ID=31535381
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3240690U Pending JPH03124632U (en) | 1990-03-28 | 1990-03-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03124632U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008264127A (en) * | 2007-04-18 | 2008-11-06 | Sri Sports Ltd | Golf ball marker with green fork |
| KR200447154Y1 (en) * | 2008-01-09 | 2009-12-29 | (주)훼밀리골프 | A golf ball mark wristle attaching ball mark easely |
-
1990
- 1990-03-28 JP JP3240690U patent/JPH03124632U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008264127A (en) * | 2007-04-18 | 2008-11-06 | Sri Sports Ltd | Golf ball marker with green fork |
| KR200447154Y1 (en) * | 2008-01-09 | 2009-12-29 | (주)훼밀리골프 | A golf ball mark wristle attaching ball mark easely |
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