JPH0312374Y2 - - Google Patents
Info
- Publication number
- JPH0312374Y2 JPH0312374Y2 JP18558686U JP18558686U JPH0312374Y2 JP H0312374 Y2 JPH0312374 Y2 JP H0312374Y2 JP 18558686 U JP18558686 U JP 18558686U JP 18558686 U JP18558686 U JP 18558686U JP H0312374 Y2 JPH0312374 Y2 JP H0312374Y2
- Authority
- JP
- Japan
- Prior art keywords
- roll brush
- roll
- moving mechanism
- brushes
- box
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004140 cleaning Methods 0.000 description 35
- 239000007788 liquid Substances 0.000 description 15
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 239000004215 Carbon black (E152) Substances 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18558686U JPH0312374Y2 (enExample) | 1986-12-03 | 1986-12-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18558686U JPH0312374Y2 (enExample) | 1986-12-03 | 1986-12-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6390487U JPS6390487U (enExample) | 1988-06-11 |
| JPH0312374Y2 true JPH0312374Y2 (enExample) | 1991-03-25 |
Family
ID=31134355
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18558686U Expired JPH0312374Y2 (enExample) | 1986-12-03 | 1986-12-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0312374Y2 (enExample) |
-
1986
- 1986-12-03 JP JP18558686U patent/JPH0312374Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6390487U (enExample) | 1988-06-11 |
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