JPH03123017A - 露光装置 - Google Patents

露光装置

Info

Publication number
JPH03123017A
JPH03123017A JP2214273A JP21427390A JPH03123017A JP H03123017 A JPH03123017 A JP H03123017A JP 2214273 A JP2214273 A JP 2214273A JP 21427390 A JP21427390 A JP 21427390A JP H03123017 A JPH03123017 A JP H03123017A
Authority
JP
Japan
Prior art keywords
wafer
mask
pattern
mark
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2214273A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0546089B2 (enrdf_load_stackoverflow
Inventor
Shigeo Moriyama
森山　茂夫
Yoshio Kawamura
河村　喜雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2214273A priority Critical patent/JPH03123017A/ja
Publication of JPH03123017A publication Critical patent/JPH03123017A/ja
Publication of JPH0546089B2 publication Critical patent/JPH0546089B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2214273A 1990-08-15 1990-08-15 露光装置 Granted JPH03123017A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2214273A JPH03123017A (ja) 1990-08-15 1990-08-15 露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2214273A JPH03123017A (ja) 1990-08-15 1990-08-15 露光装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP62012367A Division JPS62181430A (ja) 1987-01-23 1987-01-23 露光装置の校正方法

Publications (2)

Publication Number Publication Date
JPH03123017A true JPH03123017A (ja) 1991-05-24
JPH0546089B2 JPH0546089B2 (enrdf_load_stackoverflow) 1993-07-13

Family

ID=16653004

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2214273A Granted JPH03123017A (ja) 1990-08-15 1990-08-15 露光装置

Country Status (1)

Country Link
JP (1) JPH03123017A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0546089B2 (enrdf_load_stackoverflow) 1993-07-13

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