JPH03122814A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPH03122814A JPH03122814A JP26239889A JP26239889A JPH03122814A JP H03122814 A JPH03122814 A JP H03122814A JP 26239889 A JP26239889 A JP 26239889A JP 26239889 A JP26239889 A JP 26239889A JP H03122814 A JPH03122814 A JP H03122814A
- Authority
- JP
- Japan
- Prior art keywords
- film
- iron
- thin film
- recording medium
- carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 32
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 48
- 239000010408 film Substances 0.000 claims abstract description 46
- 229910052742 iron Inorganic materials 0.000 claims abstract description 24
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 23
- 239000010409 thin film Substances 0.000 claims abstract description 23
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 15
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 13
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 13
- 238000004544 sputter deposition Methods 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 4
- 230000001681 protective effect Effects 0.000 abstract description 4
- 229910052760 oxygen Inorganic materials 0.000 abstract description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 2
- 238000007254 oxidation reaction Methods 0.000 abstract description 2
- 239000001301 oxygen Substances 0.000 abstract description 2
- 238000007740 vapor deposition Methods 0.000 abstract description 2
- 238000010438 heat treatment Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 7
- 150000001875 compounds Chemical class 0.000 description 5
- 230000001050 lubricating effect Effects 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- KTWOOEGAPBSYNW-UHFFFAOYSA-N ferrocene Chemical compound [Fe+2].C=1C=C[CH-]C=1.C=1C=C[CH-]C=1 KTWOOEGAPBSYNW-UHFFFAOYSA-N 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 229910000531 Co alloy Inorganic materials 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910020630 Co Ni Inorganic materials 0.000 description 1
- 229910002440 Co–Ni Inorganic materials 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- ZFSQRSOTOXERMJ-UHFFFAOYSA-N ethanol;iron Chemical compound [Fe].CCO.CCO.CCO ZFSQRSOTOXERMJ-UHFFFAOYSA-N 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 229940087654 iron carbonyl Drugs 0.000 description 1
- LZKLAOYSENRNKR-LNTINUHCSA-N iron;(z)-4-oxoniumylidenepent-2-en-2-olate Chemical compound [Fe].C\C(O)=C\C(C)=O.C\C(O)=C\C(C)=O.C\C(O)=C\C(C)=O LZKLAOYSENRNKR-LNTINUHCSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、音響、映像、および情報・通信の分野で、テ
ープ、フロッピーディスク、ハードディスク等として広
く実用に供せられている磁気記録媒体に関するものであ
る。[Detailed Description of the Invention] Industrial Application Field The present invention relates to a magnetic recording medium that is widely used in the fields of audio, video, and information/communication as tapes, floppy disks, hard disks, etc. be.
従来の技術
近年、磁気記録媒体の分野では、記録密度の増大、信号
の高品質化、耐久性の向上等が技術的課題となっている
。その結果、従来から広く用いられている７−Ｆｅ、Ｏ
，に加えて、Ｃｏ−Ｎｉ等の合金薄膜が登場してきた。2. Description of the Related Art In recent years, in the field of magnetic recording media, increasing recording density, improving signal quality, improving durability, etc. have become technical issues. As a result, 7-Fe, O
, alloy thin films such as Co--Ni have appeared.
Ｃｏ合金は大きな飽和磁束密度を示し、Ｃｒ膜を下地膜
とする事により、比較的大きな保磁力が得られるという
利点があり、高密度磁気記録媒体として実用化が考えら
れている。Co alloy exhibits a large saturation magnetic flux density, and has the advantage that a relatively large coercive force can be obtained by using a Cr film as a base film, and its practical use as a high-density magnetic recording medium is being considered.
以下図面を参照しながら、従来の磁気記録媒体の一例に
ついて説明する。第２図は一般的な従来例の磁気記録媒
体の断面の模式図である。アルミ基板１の上に硬質層と
して、Ｎ１−Ｐ等の下地メツキＮ２を設け、その上に高
保磁力発生用のクロム層６、その上に、磁性層であるＣ
ｏ−Ｎｉ成膜をスパッタ法等で成膜し、その上に、保護
膜４、続いて、潤滑膜５を設ける。（例えば、日本応用
磁気学会誌１０巻１９８６年−ｔ、ｐｐ、ｓ〜１１、佐
藤）。An example of a conventional magnetic recording medium will be described below with reference to the drawings. FIG. 2 is a schematic cross-sectional view of a general conventional magnetic recording medium. A base plating N2 such as N1-P is provided as a hard layer on the aluminum substrate 1, a chromium layer 6 for generating high coercive force is placed on top of that, and a magnetic layer of C is placed on top of that.
An o-Ni film is formed by sputtering or the like, and a protective film 4 and then a lubricating film 5 are provided thereon. (For example, Journal of the Japan Society of Applied Magnetics, Vol. 10, 1986-t, pp, s~11, Sato).
発明が解決しようとする課題
しかしながら上記のようなＣｏ合金膜では、金属そのも
のであるため、従来からの１−Ｆｅ、Ｏ。Problems to be Solved by the Invention However, since the above-mentioned Co alloy film is made of metal itself, conventional 1-Fe, O.
という酸化物材料に比べて、耐候性、安定性、および膜
の硬度の点で問題点を有していた。Compared to the oxide materials, they had problems in terms of weather resistance, stability, and film hardness.
本発明は上記問題点に鑑み、鉄、炭素および窒素を主成
分とする磁性薄膜の表面上に酸化膜を備えたことを特徴
とする記録媒体を提供するものである。In view of the above problems, the present invention provides a recording medium characterized in that an oxide film is provided on the surface of a magnetic thin film whose main components are iron, carbon, and nitrogen.
課題を解決するための手段
上記課題を解決するために本発明の磁気記録媒体では、
鉄、炭素および窒素を主成分とする磁性薄膜の表面上に
酸化膜を備えている。炭素と窒素の効果により、安定で
、耐久性のある鉄系化合物を実現し、さらにその上に安
定性が高（、保護膜、または自己潤滑膜として機能する
酸化物薄膜を備える。炭窒化鉄化合物薄膜の作成はＣＶ
Ｄ法やスパッタ法により可能である。ＣＶＤ法の場合、
真空容器中に、原料ガスとして、鉄と炭素を含むガスを
供給し、他に、窒素の供給源として、窒素ガスやアンモ
ニアガスを供給し、反応生成させる。Means for Solving the Problems In order to solve the above problems, the magnetic recording medium of the present invention includes:
An oxide film is provided on the surface of a magnetic thin film whose main components are iron, carbon, and nitrogen. The effect of carbon and nitrogen creates a stable and durable iron-based compound, which is further coated with a thin oxide film that functions as a highly stable, protective film, or self-lubricating film. Iron carbonitride Creation of compound thin film is CV
This is possible using the D method or the sputtering method. In the case of CVD method,
A gas containing iron and carbon is supplied as a raw material gas into a vacuum container, and nitrogen gas or ammonia gas is also supplied as a nitrogen supply source to generate reaction.
鉄と炭素を含む原料ガスとしては、フェロセン（Ｆ ｅ
（ＣｓＨｓ）ｚｌ 、鉄カルボニル（Ｆ ｅ （Ｃ０
）ｓｌトリエトキシ鉄（Ｆ ｅ （ＯＣ２Ｎ５）３ ）
、鉄アセチルアセトナート（Ｆ ｅ （ｏｚ ｃｓ
Ｎ７）６１などを使用できる。Ferrocene (Fe
(CsHs)zl, iron carbonyl (F e (C0
) sl triethoxyiron (F e (OC2N5)3 )
, iron acetylacetonate (F e (oz cs
N7)61 etc. can be used.
酸化物薄膜は、炭素化鉄化合物薄膜の上に、酸化膜をス
パッタや蒸着により成膜するか、炭窒化鉄化合物薄膜を
酸素を含む雰囲気中で熱処理して熱酸化膜を成膜させれ
ばよい。An oxide thin film can be formed by forming an oxide film on an iron carbonide compound thin film by sputtering or vapor deposition, or by forming a thermal oxide film by heat-treating an iron carbonitride compound thin film in an atmosphere containing oxygen. good.
作用
本発明は上記した構成によって、鉄、炭素および窒素を
主成分とする磁性薄膜の表面上に酸化膜を備えたことを
特徴とする磁気記録媒体を実現する。この結果、従来の
構成では得られなかった優れた特徴を有する磁気記録媒
体を得ることができる。その特徴とは、耐久性が優れ、
経時変化が少ない等である。Operation The present invention realizes a magnetic recording medium characterized by having an oxide film on the surface of a magnetic thin film whose main components are iron, carbon, and nitrogen. As a result, it is possible to obtain a magnetic recording medium that has excellent characteristics that could not be obtained with conventional configurations. Its characteristics are excellent durability,
There is little change over time.
実施例
以下本発明の一実施例の磁気記録媒体について、図面を
参照しながら説明する。第１図は本発明の一実施例の磁
気記録媒体の断面の模式図である。EXAMPLE A magnetic recording medium according to an example of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic cross-sectional view of a magnetic recording medium according to an embodiment of the present invention.
１はアルミ基板、２はＮ１−Ｐメツキ膜、３は磁性層で
ある炭窒化鉄膜。８は熱酸化膜、５は潤滑膜であるカー
ボン膜である。以下に、炭窒化鉄膜の製法について詳述
する。本実施例では、ＥＣＲプラズマＣＶＤ法を用いた
。真空容器中に、Ｎ２、およびＮＨ，ガスを導入しＥＣ
Ｒプラズマを励起状態にする。そこへ、ガス状のフェロ
センヲ導入し分解させる。フェロセンは、常温で個体で
あるから、約６０゛Ｃに温め、Ｎ２ガスをキャリアガス
として真空容器中へ輸送した。Ｎ２ガスは３ｓｅｃｍ、
ＮＨ＊ガスは５ｓｅｃｍ、Ｈｚガスは３０ｓｃｃｍ導入
した。膜中に含まれるＦｅ、Ｃ，Ｎ、及び０の組成比を
オージェ分析で求めた結果、Ｆｅの組成比は、約４５〜
５５原子％であり、Ｃは２０〜３５原子％、Ｎは１０〜
２０原子％である。成膜した炭窒化鉄化合物薄膜を真空
容器中から取り出し、大気中で２５０°Ｃで２時間熱処
理して酸化膜を形成した。1 is an aluminum substrate, 2 is an N1-P plating film, and 3 is an iron carbonitride film which is a magnetic layer. 8 is a thermal oxide film, and 5 is a carbon film which is a lubricating film. The method for manufacturing the iron carbonitride film will be described in detail below. In this example, ECR plasma CVD method was used. Introducing N2 and NH gas into the vacuum container and performing EC
Bring the R plasma into an excited state. Then, gaseous ferrocene is introduced and decomposed. Since ferrocene is a solid at room temperature, it was heated to about 60°C and transported into a vacuum container using N2 gas as a carrier gas. N2 gas is 3sec,
NH* gas was introduced at 5 sec, and Hz gas was introduced at 30 sccm. As a result of determining the composition ratio of Fe, C, N, and 0 contained in the film by Auger analysis, the composition ratio of Fe is approximately 45 to
55 at%, C is 20-35 at%, N is 10-35 at%
It is 20 atom%. The formed iron carbonitride compound thin film was taken out of the vacuum container and heat-treated in the atmosphere at 250°C for 2 hours to form an oxide film.
さらに、その上に潤滑膜であるカーボン膜をスパッタ法
により成膜した。Furthermore, a carbon film as a lubricating film was formed thereon by sputtering.
以下余白
第１表
第１表に酸化膜がある場合と無い場合での磁気記録媒体
の耐候性とコンタクトスタートストップ（ＣＳＳ）テス
トによる耐久性試験結果を示す。Table 1 below shows the weather resistance of magnetic recording media with and without oxide film and the durability test results by contact start stop (CSS) test.
いずれの評価項目においても、酸化膜を備えたほうが優
れた結果を示した。In all evaluation items, the one with the oxide film showed better results.
以上の実施例に述べたように、本発明では、鉄、炭素お
よび窒素を主成分とする磁性薄膜の表面上に酸化膜を備
えたことを特徴とする記録媒体を実現する。その結果、
鉄系磁性薄膜の耐久性や耐候性の改善が容易に可能とな
る。As described in the above embodiments, the present invention realizes a recording medium characterized by having an oxide film on the surface of a magnetic thin film whose main components are iron, carbon, and nitrogen. the result,
It becomes possible to easily improve the durability and weather resistance of iron-based magnetic thin films.
発明の効果
以上のように本発明では、鉄、炭素および窒素を主成分
とする磁性薄膜の表面上に酸化膜を備えたことを特徴と
する記録媒体を実現する。その結果、鉄系磁性薄膜の耐
久性や耐候性の改善を可能にするという結果を有してい
る。さらに、熱酸化によれば容易に酸化膜を形成でき、
製法の簡素化という効果も有している。Effects of the Invention As described above, the present invention realizes a recording medium characterized in that an oxide film is provided on the surface of a magnetic thin film whose main components are iron, carbon, and nitrogen. As a result, the durability and weather resistance of iron-based magnetic thin films can be improved. Furthermore, thermal oxidation can easily form an oxide film;
It also has the effect of simplifying the manufacturing method.
第１図は本発明の一実施例の磁気記録媒体の断面の模式
図、第２図は一般的な従来例の磁気記録媒体の断面の模
式図である。
１・・・・・・アルミ基板、２・・・・・・Ｎ１−Ｐ膜
、３・・・・・・炭窒化鉄膜、４・・・・・・保護膜、
５・・・・・・潤滑膜、６・・・・・・Ｃｒ下地膜、７
・・・・・・Ｃｏ−Ｎｉ合金膜、８・・・・・・酸化膜
。FIG. 1 is a schematic cross-sectional view of a magnetic recording medium according to an embodiment of the present invention, and FIG. 2 is a schematic cross-sectional view of a general conventional magnetic recording medium. 1... Aluminum substrate, 2... N1-P film, 3... Iron carbonitride film, 4... Protective film,
5... Lubricating film, 6... Cr base film, 7
...Co-Ni alloy film, 8... Oxide film.
Claims (2)
面上に酸化膜を備えたことを特徴とする磁気記録媒体。(1) A magnetic recording medium characterized by comprising an oxide film on the surface of a magnetic thin film whose main components are iron, carbon, and nitrogen.
する請求項（１）記載の磁気記録媒体。(2) The magnetic recording medium according to claim (1), wherein the oxide film is a thermally oxidized film of a magnetic thin film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26239889A JPH03122814A (en) | 1989-10-06 | 1989-10-06 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26239889A JPH03122814A (en) | 1989-10-06 | 1989-10-06 | Magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03122814A true JPH03122814A (en) | 1991-05-24 |
Family
ID=17375218
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26239889A Pending JPH03122814A (en) | 1989-10-06 | 1989-10-06 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03122814A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0644556A (en) * | 1992-03-25 | 1994-02-18 | Nec Corp | Magnetic storage medium |
| WO2003035923A1 (en) * | 2001-10-25 | 2003-05-01 | Haute Ecole Neuchateloise | Method for making coloured parts |
-
1989
- 1989-10-06 JP JP26239889A patent/JPH03122814A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0644556A (en) * | 1992-03-25 | 1994-02-18 | Nec Corp | Magnetic storage medium |
| WO2003035923A1 (en) * | 2001-10-25 | 2003-05-01 | Haute Ecole Neuchateloise | Method for making coloured parts |
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