JPH04332912A - Manufacture of fixed magnetic disk - Google Patents

Abstract

PURPOSE:To provide the manufacturing method of a fixed magnetic disk whose reliability is excellent and which can comply with a high-density magnetic recording operation. CONSTITUTION:A fixed magnetic disk having a structure where an amorphous oxide thin film 8 is formed on a disk substrate 7 by means of X-rays and, in addition, an iron oxide thin film 9 by a spinel-type structure containing cobalt having a pillar-shaped structure is formed on it is manufactured in the following manner: the vapor of a beta-diketone metal complex and ozone or N2O as a reaction gas or the mixed gas of steam with oxygen are decomposed and reacted in a plasma.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a fixed magnetic disk that is highly reliable and compatible with high-density magnetic recording.

0002

2. Description of the Related Art In the recent highly information-oriented society, the amount of information to be stored continues to increase year by year, and there is also an increasing demand for larger capacity and higher density storage devices.

Under these circumstances, recording media used in fixed magnetic disks used as computer peripherals are made by coating a conventional aluminum disk substrate with gamma iron oxide-based acicular magnetic powder. The coating type has changed to a Co-Ni/Cr alloy thin film type using plating or sputtering methods, and higher density has been achieved.

0004

[Problem to be solved by the invention] However, Co-Ni/
Since the Cr thin film is an alloy, there are problems with durability, etc., so the structure of the magnetic disk is (lubricating layer/protective layer/
It has a five-layer structure (Co--Ni magnetic layer/Cr layer/Ni--P plating layer/aluminum substrate), and has the drawback that the manufacturing process is complicated.

FIG. 6 shows a cross section of a thin film type fixed magnetic disk made of a Co--Ni/Cr alloy, which is a conventional fixed magnetic disk. In the figure, 1 is an aluminum substrate, 2 is a Ni-P plating layer, 3 is a Cr layer, and 4 is a Co-N
i is a magnetic layer, 5 is a protective layer, and 6 is a lubricating layer.

[0006] Furthermore, the fixed magnetic disk is made of Co-Ni.
Since the magnetic layer 4 is a longitudinal recording medium, if the recording wavelength is shortened to further increase the recording density, recording becomes difficult due to the influence of the demagnetizing field.

[0007] Therefore, as a magnetic recording medium that enables perpendicular recording, which is a recording method that improves the above-mentioned drawbacks, a C
Research on o-Cr thin film media has been actively conducted. However, as in the case of the Co-Ni/Cr alloy thin film type recording medium shown in Figure 6, since the Co-Cr medium is also an alloy, there is a reliability problem, so an amorphous layer is formed on the surface of the Co-Cr thin film. There is a problem in that a protective layer 5 of carbon film or Co oxide must be provided.

On the other hand, in a fixed magnetic disk drive, reducing the flying height of the magnetic head relative to the magnetic disk as much as possible reduces output loss (spacing loss) due to spacing between the magnetic head and the magnetic disk. In order to reduce the noise, it leads to an improvement in recording density.Recently, in order to enable high recording density, 0.
It is required to run with a flying height of about 0.05 to 0.1 μm.

However, the above conventional Co-Ni/C
Both R-alloy thin film recording media and Co-Cr thin film recording media have problems with durability, so a protective film 5 (several tens of nanometers) must be formed on the thin film surface to ensure reliability. Therefore, the problem remains that the spacing loss inevitably increases.

Furthermore, in the case of a fixed magnetic disk, since the magnetic disk is rotated at high speed (3600 revolutions/minute), it is very important for the magnetic layer to have high hardness in order to ensure reliability. However, alloys such as Co--Cr thin films inevitably have problems in terms of hardness.

The present invention solves the above problems and provides a method for manufacturing a fixed magnetic disk having perpendicular magnetic recording components that is highly reliable and compatible with high-density magnetic recording. be.

0012

[Means for Solving the Problems] In order to achieve the above object, the present invention forms an oxide thin film that is X-ray amorphous on a disk substrate, and further provides a method for forming an oxide thin film on the disk substrate surface. A fixed magnetic disk having a structure in which an iron oxide magnetic thin film with a spinel-type crystal structure containing cobalt having a columnar structure in the vertical direction is formed, manufactured by a manufacturing method that utilizes plasma activation and CVD reaction. It is.

[0013]

[Function] Therefore, according to the present invention, since ozone, N20, and water vapor used as reaction gases generate active radicals in plasma, the fixing device has excellent reliability such as durability and hardness, and is capable of high-density magnetic recording. Magnetic disks can be manufactured relatively easily and at low temperatures.

[0014]

DESCRIPTION OF THE PREFERRED EMBODIMENTS A method of manufacturing a fixed magnetic disk by plasma CVD according to an embodiment of the present invention will be described below with reference to the drawings.

(Example 1) (FIG. 1) shows the structure of a fixed magnetic disk manufactured by the manufacturing method of the present invention. In the figure, 7 is a disk substrate, 8 is a CoZnFe oxide layer, and 9 is a Co ferrite layer. The membrane 10 is a lubricating layer.

(FIG. 2) shows a schematic diagram of a plasma CVD apparatus in an embodiment of the present invention.

In FIG. 2, 11 is a reaction chamber;
12 is an electrode, 13 is an exhaust system for keeping the inside of the reaction chamber at low pressure, 14 is a base substrate (glass disk substrate),
15 is a high frequency power supply (13.56MHz), 16, 17,
18 is a vaporizer containing the raw material; 19, 20, and 21 are valves for controlling whether or not carrier gas is introduced into the vaporizer; and 22, 23, and 24 are valves for controlling the introduction of the raw material gas and carrier gas into the reaction chamber. 25 is a carrier gas cylinder (nitrogen), 26 is an oxygen cylinder, 27 is an ozonizer, 28 is a N2O cylinder, 29 is a vaporizer containing water, and 30 is a substrate rotation mechanism. This is a substrate heating heater.

The starting materials include iron acetylacetonate [
Fe(C5H7O2)3], zinc acetylacetonate [Zn(C5H7O2)2.H2O], and cobalt acetylacetonate [Co(C5H7O2)3] were used.

Dehydrated zinc acetylacetonate (in air at 100°C for 2 hours) was placed in the vaporizer 16, cobalt acetylacetonate was placed in the vaporizer 17, and iron acetylacetonate was placed in the vaporizer 18. ℃, 130℃, and 120℃ and keep it there. Valves 19 and 22 were opened to generate vapors of acetylacetonate of zinc, cobalt, and iron together with nitrogen carrier (flow rate 10 SCCM in vaporizers 16, 17, and 18, respectively) and reactant gases from ozonizer 27. Ozone (flow rate 6SC
CM) is depressurized by the exhaust system 13 in the reaction chamber 1.
1 to generate plasma (power 1.5W/cm2
), a reaction was carried out under reduced pressure (0.11 Torr) for 2 minutes, and a CoZnFe oxide film was formed on a glass disk substrate (120 rotations/min) heated to 350°C.
9 and 22 closed.

[0020] Subsequently, a reaction was carried out under the same film-forming conditions for 9 minutes under reduced pressure (0.08 Torr) to produce a two-layer film of Co ferrite/CoZnFe oxide. Then, the glass disk substrate on which the two-layer film was formed was taken out from the vacuum chamber, and the same two-layer film was formed on the back side using the same method.
A ZnFe oxide disk was fabricated.

Next, after heat-treating this disk in air at 300°C for 3 hours, the fixed magnetic disk (A type) is coated by submerging it in a bath containing a fluorocarbon organic lubricant. Created.

The manufactured fixed magnetic disk (type A) of the present invention was manufactured using a MIG head having a gap length (GL) of 0.25 μm and a track width (Tw) of 10 μm.
The head current value of A was selected to evaluate the electromagnetic conversion characteristics. A fixed magnetic disk (type A) was rotated at a speed of 3600 revolutions/min, and evaluation was performed on a circumferential track 20.0 mm from the center of the disk. Note that fixed magnetic disks (
The relative speed between A type) and the magnetic head is 7.5 m/sec.
c, and the flying height of the magnetic head is 0.15μ.
It was m.

Next, for comparison, Hc=1000Oe
So, when Ms=800emu/cc, the magnetic layer thickness is 80nm.
A conventional Co-N film was formed with a carbon film of 60 nm thick as a protective layer thereon, and a lubricant film layer similar to that of the present invention was provided.
A fixed magnetic disk (B type) of i/Cr alloy thin film (aluminum substrate with magnetization oriented in the in-plane direction) and Co ferrite were prepared using oxygen as a reactive gas under the same conditions as the present invention (substrate temperature 350°C). /NiO disks (fixed magnetic disks (C type)) were prepared, and their electromagnetic conversion characteristics were evaluated under the same conditions as the fixed magnetic disks (A type) of the present invention.

The obtained fixed magnetic disk (A type) produced by the manufacturing method of the present invention, the Co-Ni/Cr alloy thin film fixed magnetic disk (B type), and the fixed magnetic disk (C Figure 3 shows the relationship between recording density and playback output for the following types.

In FIG. 3, the horizontal axis represents the recording density (recording wavelength), and the vertical axis represents the reproduction output. In addition, (a) is a fixed magnetic disk (A type) manufactured by the manufacturing method of the present invention, (b)
) shows the characteristics of a Co-Ni/Cr alloy thin film fixed magnetic disk (type B) for comparison, and (c) shows the characteristics of a fixed magnetic disk (type C) for comparison.

From FIG. 3, it can be seen that the fixed magnetic disk (A type) manufactured by the manufacturing method of the present invention has higher recording density in the short wavelength range than the Co-Ni/Cr alloy thin film fixed magnetic disk (B type). It can be seen that the playback output shows a high value. Furthermore, it exhibited higher reproduction output in the front wavelength range than a fixed magnetic disk (C type).

When the reproduced waveform of the recording signal of the fixed magnetic disk of the present invention was observed with an oscilloscope, it showed a dipulse waveform, which is characterized by containing a perpendicular magnetic recording component.

After the measurement of the electromagnetic conversion characteristics, the lubricating film layer was removed using an organic solvent, and the fixed magnetic disk (type A) and fixed magnetic disk (type C) were analyzed by X-ray diffraction. As a result, crystallinity and (100)
The fixed magnetic disk (type A) was better in all orientations.

For comparison, a sample was prepared in which only a CoZnFe oxide film was formed on a glass disk substrate under the above-mentioned film-forming conditions in this film-forming method, and after heat treatment in air at 300° C. for 3 hours, Analysis of the crystal structure by line diffraction revealed that it was amorphous in terms of X-rays.

A fixed magnetic disk (type A) was broken and the surface and fracture surface of the disk were observed using a high-resolution scanning electron microscope. As a result, the two-layer film of this disc has a columnar structure, with a film thickness of approximately 300 nm and a column diameter of 4.
It was found to be 5 to 60 nm.

Next, the magnetic properties of the fixed magnetic disk (A type) and the fixed magnetic disk (C type) were measured using a vibrating sample magnetometer (VSM). As a result, the coercive force in the perpendicular direction to the disk substrate of the fixed magnetic disk (type A) is Hc = 1200 Oe, the coercive force in the in-plane direction is Hc = 780 Oe, and Ms is 236 em.
It was u/cc. Furthermore, the vertical coercive force of the fixed magnetic disk (C type) is Hc = 1200 Oe, the in-plane coercive force is Hc = 920 Oe, and Ms is 206 em.
It was u/cc.

The reason why the fixed magnetic disk of the present invention (Type A) exhibits a higher reproduction output value than the Co-Ni/Cr alloy thin film fixed magnetic disk (Type B) at the high recording density side in the short wavelength range is due to the vertical This is because it has a magnetic recording component. Also, the reason why the playback output is higher than that of the fixed magnetic disk (C type) is that ozone is used as the reaction gas, which makes it more crystalline (100%) than when oxygen is used.
) It is thought that the most important reason is that the orientation becomes better and the Ms improves.

Similar results were obtained when an oxide thin film containing magnesium, calcium, titanium, vanadium, manganese, nickel, copper, strontium, niobium, cadmium, etc. was used as the X-ray amorphous oxide thin film. was gotten.

(Embodiment 2) Hereinafter, a method for manufacturing a fixed magnetic disk by plasma CVD method according to an embodiment of the present invention will be described with reference to (FIG. 2).

Dehydrated zinc acetylacetonate (in air at 100°C for 2 hours) was placed in the vaporizer 16, cobalt acetylacetonate was placed in the vaporizer 17, and iron acetylacetonate was placed in the vaporizer 18. ℃, 130℃, and 120℃ and keep it there. The valves 19 and 22 are opened, and the vapors of acetylacetonate of zinc, cobalt, and iron are supplied together with nitrogen carrier (flow rate: 10 SCCM to vaporizers 16, 17, and 18, respectively), and N2O (flow rate: 7 SCCM) as a reaction gas. It is introduced into the reaction chamber 11 which is depressurized by the exhaust system 13, and plasma is generated (
Electric power 1.5W/cm2), and under reduced pressure (0.11W/cm2) for 2 minutes.
Torr), a CoZnFe oxide film was formed on a glass disk substrate heated to 350° C. (120 revolutions/min), and valves 19 and 22 were closed.

Subsequently, a reaction was carried out under the same film forming conditions for 9 minutes under reduced pressure (0.08 Torr) to produce a two-layer film of Co ferrite/CoZnFe oxide. Then, the glass disk substrate on which the two-layer film was formed was taken out from the vacuum chamber, and the same two-layer film was formed on the back side using the same method.
A ZnFe oxide disk was fabricated.

Next, after heat-treating this disk in air at 300°C for 3 hours, the fixed magnetic disk (D type) is coated by submerging it in a liquid bath containing a fluorine-based organic lubricant. Created.

The produced fixed magnetic disk (D type) of the present invention was manufactured using an MIG head with a gap length (GL) of 0.25 μm and a track width (Tw) of 10 μm.
The head current value of A was selected to evaluate the electromagnetic conversion characteristics. A fixed magnetic disk (D type) was rotated at a speed of 3600 revolutions/minute, and evaluation was performed on a circumferential track 20.0 mm from the center of the disk. Note that fixed magnetic disks (
D type) and the magnetic head relative speed is 7.5 m/sec.
c, and the flying height of the magnetic head is 0.15μ.
It was m.

The obtained fixed magnetic disk (D type) produced by the manufacturing method of the present invention, the Co-Ni/Cr alloy thin film fixed magnetic disk (B type), and the fixed magnetic disk produced using only oxygen as the reaction gas (C Figure 4 shows the relationship between recording density and playback output for the following types.

In FIG. 4, the horizontal axis represents the recording density (recording wavelength), and the vertical axis represents the reproduction output. In addition, (d) is a fixed magnetic disk (D type) manufactured by the manufacturing method of the present invention, (b)
) shows the characteristics of a Co-Ni/Cr alloy thin film fixed magnetic disk (type B) for comparison, and (c) shows the characteristics of a fixed magnetic disk (type C) for comparison.

From FIG. 4, it can be seen that the fixed magnetic disk (D type) manufactured by the manufacturing method of the present invention has higher recording density in the short wavelength range than the Co-Ni/Cr alloy thin film fixed magnetic disk (B type). It can be seen that the playback output shows a high value. Furthermore, it exhibited higher reproduction output in the front wavelength range than the fixed magnetic disk (C type).

When the reproduced waveform of the recorded signal of the fixed magnetic disk of the present invention was observed with an oscilloscope, it showed a dipulse waveform, which is characterized by containing a perpendicular magnetic recording component.

After the measurement of the electromagnetic conversion characteristics, the lubricating film layer was removed using an organic solvent, and the fixed magnetic disk (D type) and fixed magnetic disk (C type) were analyzed by X-ray diffraction. As a result, crystallinity and (100)
The fixed magnetic disk (D type) was better in all orientations.

For comparison, a sample was prepared in which only a CoZnFe oxide film was formed on a glass disk substrate under the above-mentioned film-forming conditions in this film-forming method, and after heat treatment in air at 300° C. for 3 hours, Analysis of the crystal structure by line diffraction revealed that it was amorphous in terms of X-rays.

A fixed magnetic disk (D type) was broken and the disk surface and fractured surface were observed using a high-resolution scanning electron microscope. As a result, the two-layer film of this disc has a columnar structure, with a film thickness of approximately 300 nm and a column diameter of 4.
It was found to be 5 to 60 nm.

Next, the magnetic properties of the fixed magnetic disk (type A) were measured using a vibrating sample magnetometer (VSM). As a result, the vertical coercive force of the fixed magnetic disk (D type) is Hc = 1180 Oe, the in-plane coercive force is Hc = 775 Oe, and Ms is 240 emu/
It was cc. Fixed magnetic disk of the present invention (D type)
The reason why the reproduction output shows a higher value than the Co-Ni/Cr alloy thin film fixed magnetic disk (B type) at the high recording density side in the shorter wavelength range is that it has a perpendicular magnetic recording component. In addition, the reason why the reproduction output is higher than that of fixed magnetic disks (C type) is because N2O is used as the reaction gas, which increases crystallinity and (10
0) It is thought that the most important reason is that the orientation becomes better and the Ms improves.

Similar results were obtained when an oxide thin film containing magnesium, calcium, titanium, vanadium, manganese, nickel, copper, strontium, niobium, cadmium, etc. was used as the X-ray amorphous oxide thin film. was gotten.

(Embodiment 3) Hereinafter, a method for manufacturing a fixed magnetic disk by the plasma CVD method according to an embodiment of the present invention will be described with reference to (FIG. 2).

Dehydrated zinc acetylacetonate (in air at 100°C for 2 hours) was placed in the vaporizer 16, cobalt acetylacetonate was placed in the vaporizer 17, and iron acetylacetonate was placed in the vaporizer 18. ℃, 130℃, and 120℃ and keep it there. The valves 19 and 22 are opened, and the vapors of acetylacetonate of zinc, cobalt, and iron are released together with nitrogen carrier (flow rate: 10 SCCM to vaporizers 16, 17, and 18, respectively), oxygen (flow rate: 3 SCCM), and reactant gases. Water vapor (partial pressure 0.00
9 Torr) was introduced into the reaction chamber 11, which was depressurized by the exhaust system 13, and plasma was generated (power: 1.5 W/
cm2), reacted under reduced pressure (0.13 Torr) for 2 minutes, and heated to 350°C on a glass disk substrate (1
A CoZnFe oxide film was formed on the 20 rotations/min), and valves 19 and 22 were closed.

Subsequently, a reaction was carried out under the same film forming conditions for 9 minutes under reduced pressure (0.09 Torr) to produce a two-layer film of Co ferrite/CoZnFe oxide. Then, the glass disk substrate on which the two-layer film was formed was taken out from the vacuum chamber, and the same two-layer film was formed on the back side using the same method.
A ZnFe oxide disk was fabricated.

Next, after heat-treating this disk in air at 300°C for 3 hours, the fixed magnetic disk (E type) is coated by submerging it in a bath containing a fluorocarbon organic lubricant. Created.

The manufactured fixed magnetic disk (E type) of the present invention was manufactured using an MIG head with a gap length (GL) of 0.25 μm and a track width (Tw) of 10 μm.
The head current value of A was selected to evaluate the electromagnetic conversion characteristics. A fixed magnetic disk (E type) was rotated at a speed of 3600 revolutions/minute, and evaluation was performed on a circumferential track 20.0 mm from the center of the disk. Note that fixed magnetic disks (
D type) and the magnetic head relative speed is 7.5 m/sec.
c, and the flying height of the magnetic head is 0.15μ.
It was m.

The obtained fixed magnetic disk (E type) produced by the manufacturing method of the present invention, the Co-Ni/Cr alloy thin film fixed magnetic disk (B type), and the fixed magnetic disk produced using only oxygen as the reaction gas (C Figure 6 shows the relationship between recording density and playback output for the following types.

In FIG. 6, the horizontal axis represents the recording density (recording wavelength), and the vertical axis represents the reproduction output. In addition, (e) is a fixed magnetic disk (E type) manufactured by the manufacturing method of the present invention, (b)
) shows the characteristics of a Co-Ni/Cr alloy thin film fixed magnetic disk (type B) for comparison, and (c) shows the characteristics of a fixed magnetic disk (type C) for comparison.

From (FIG. 4), the fixed magnetic disk (E type) manufactured by the manufacturing method of the present invention has higher recording density in the short wavelength range than the Co-Ni/Cr alloy thin film fixed magnetic disk (B type). It can be seen that the playback output shows a high value. Furthermore, it exhibited higher reproduction output in the front wavelength range than a fixed magnetic disk (C type).

When the reproduced waveform of the recorded signal of the fixed magnetic disk of the present invention was observed with an oscilloscope, it showed a dipulse waveform, which is characterized by containing a perpendicular magnetic recording component.

After the measurement of electromagnetic conversion characteristics was completed, the lubricating film layer was removed using an organic solvent, and the fixed magnetic disk (E type) and fixed magnetic disk (C type) were analyzed by X-ray diffraction. As a result, crystallinity and (100)
The fixed magnetic disk (E type) was better in all orientations.

For comparison, a sample was prepared in which only a CoZnFe oxide film was formed on a glass disk substrate under the above-mentioned film-forming conditions in this film-forming method, and after heat treatment in air at 300° C. for 3 hours, Analysis of the crystal structure by line diffraction revealed that it was amorphous in terms of X-rays.

A fixed magnetic disk (E type) was broken and the disk surface and fractured surface were observed using a high-resolution scanning electron microscope. As a result, the two-layer film of this disc has a columnar structure, with a film thickness of approximately 300 nm and a column diameter of 4.
It was found to be 5 to 60 nm.

Next, the magnetic properties of the fixed magnetic disk (E type) were measured using a vibrating sample magnetometer (VSM). As a result, the vertical coercive force of the fixed magnetic disk (A type) is Hc = 1200 Oe, and the in-plane direction is H
c=785 Oe, and Ms was 234 emu/cc. The fixed magnetic disk (E type) of the present invention is Co-
The reason why the reproduction output shows a higher value on the high recording density side in the shorter wavelength range than the Ni/Cr alloy thin film fixed magnetic disk (B type) is that it has a perpendicular magnetic recording component. Also, the reason why the playback output is higher than that of the fixed magnetic disk (C type) is that the use of oxygen and water vapor as reaction gases results in more crystallinity and (1)
00) It is thought that the most important reason is that the orientation becomes better and the Ms improves.

Similar results were obtained when an oxide thin film containing magnesium, calcium, titanium, vanadium, manganese, nickel, copper, strontium, niobium, cadmium, etc. was used as the X-ray amorphous oxide thin film. was gotten.

[0062]

As described above, the present invention forms an X-ray amorphous oxide thin film as an underlayer on a disk substrate, and further forms a spinel-type magnetic layer containing Co having a columnar structure as a magnetic layer. A method for manufacturing a constant magnetic disk with a structure that enables high reliability and high recording density by forming an iron oxide magnetic thin film uses ozone or N2 as a reactive gas.
Since a plasma CVD method using O or water vapor is used, a two-layer film can be manufactured easily, at a relatively low temperature, and continuously by simply controlling the supply of raw materials.

[Brief explanation of the drawing]

FIG. 1 is an enlarged view of the main parts of a fixed magnetic disk manufactured by the manufacturing method of the present invention.

FIG. 2 is a schematic diagram of a plasma CVD apparatus used to carry out the manufacturing method of the present invention.

FIG. 3 is a characteristic diagram comparing and showing the relationship between the recording wavelength and reproduction output of the fixed magnetic disk of the present invention.

FIG. 4 is a characteristic diagram comparing and showing the relationship between the recording wavelength and reproduction output of the fixed magnetic disk of the present invention.

FIG. 5 is a characteristic diagram comparing and showing the relationship between the recording wavelength and reproduction output of the fixed magnetic disk of the present invention.

FIG. 6 is an enlarged view of main parts of fixed magnetic disks of a conventional example and an example.

[Explanation of symbols]

1 Aluminum substrate 2 Ni-P plating layer 3 Cr layer 4 Co-Ni magnetic layer 5 Protective layer 6 Lubricating layer 7 Disk substrate 8 CoZnFe amorphous oxide film 9 Co ferrite film 10 Lubricating layer 11 Reaction chamber 12 Electrode 13 Exhaust system 14 Glass disk substrate 15 High frequency power supply 16 Vaporizer 17 Vaporizer 18 Vaporizer 19 Carrier gas supply valve 20 Carrier gas supply valve 21 Carrier gas supply valve 22 Raw material gas supply valve 23 Raw material gas supply valve 24 Raw material gas supply valve 25 Nitrogen cylinder 26 Oxygen Cylinder 27 Ozonizer 28 N2O cylinder 29 Vaporizer 30 Substrate heating heater

Claims (4)

[Claims] [Claim 1] An organometallic compound containing magnesium,
Organometallic compounds containing calcium, organometallic compounds containing titanium, organometallic compounds containing vanadium, organometallic compounds containing manganese, organometallic compounds containing iron, organometallic compounds containing cobalt, organometallic compounds containing nickel, organometallic compounds containing copper, The vapor and ozone of at least one organometallic compound of organometallic compounds containing zinc, organometallic compounds containing strontium, organometallic compounds containing niobium, organometallic compounds containing cadmium, and organometallic compounds containing barium. A mixed gas of A method for manufacturing a fixed magnetic disk, which comprises decomposing and reacting a mixed gas of steam and ozone using plasma, and chemically depositing an iron oxide magnetic thin film having a spinel crystal structure containing cobalt on the oxide thin film. . [Claim 2] An organometallic compound containing magnesium,
Organometallic compounds containing calcium, organometallic compounds containing titanium, organometallic compounds containing vanadium, organometallic compounds containing manganese, organometallic compounds containing iron, organometallic compounds containing cobalt, organometallic compounds containing nickel, organometallic compounds containing copper, The vapor of at least one organometallic compound selected from the following: an organometallic compound containing zinc, an organometallic compound containing strontium, an organometallic compound containing niobium, an organometallic compound containing cadmium, an organometallic compound containing barium, and N2O. A mixed gas of A method for manufacturing a fixed magnetic disk, characterized in that a mixed gas of steam and N2O is decomposed and reacted using plasma, and an iron oxide magnetic thin film containing cobalt and having a spinel crystal structure is chemically deposited on the oxide thin film. . [Claim 3] An organometallic compound containing magnesium,
Organometallic compounds containing calcium, organometallic compounds containing titanium, organometallic compounds containing vanadium, organometallic compounds containing manganese, organometallic compounds containing iron, organometallic compounds containing cobalt, organometallic compounds containing nickel, organometallic compounds containing copper, Steam and water vapor of at least one of the following: organometallic compounds containing zinc, organometallic compounds containing strontium, organometallic compounds containing niobium, organometallic compounds containing cadmium, organometallic compounds containing barium. and oxygen mixed gas,
Decompose and react using plasma, and deposit X on the disk substrate.
A linear amorphous oxide thin film is chemically vapor deposited, and a mixed gas of an organometallic compound containing iron, an organometallic compound containing cobalt, water vapor, and oxygen is decomposed and reacted using plasma. A method for manufacturing a fixed magnetic disk, characterized in that an iron oxide magnetic thin film containing cobalt and having a spinel crystal structure is chemically deposited on the oxide thin film. [Claim 4] An organometallic compound containing magnesium,
and organometallic compounds containing calcium, and organometallic compounds containing titanium, and organometallic compounds containing vanadium, and organometallic compounds containing manganese, and organometallic compounds containing iron, and organometallic compounds containing cobalt, and nickel. An organometallic compound containing copper, an organometallic compound containing zinc, an organometallic compound containing strontium, an organometallic compound containing niobium, and an organometallic compound containing cadmium are β-diketone metal complexes. The method of manufacturing a fixed magnetic disk according to claim 1, 2 or 3.